LIBWE Microfluidics
4
Crack-free direct-writing on glass using a low-power UV laser in the manufacture of a microfluidic chip Andrew Pieterick Paolo Ferrari
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Laser induced backside wet etching : a new fabrication technique for microfluidic devices.
Transcript of LIBWE Microfluidics
![Page 1: LIBWE Microfluidics](https://reader035.fdocuments.net/reader035/viewer/2022072002/563db9b4550346aa9a9f2581/html5/thumbnails/1.jpg)
Crack-free direct-writing on glass using a low-power UV laser in the manufacture of a microfluidic chip
Andrew PieterickPaolo Ferrari
![Page 2: LIBWE Microfluidics](https://reader035.fdocuments.net/reader035/viewer/2022072002/563db9b4550346aa9a9f2581/html5/thumbnails/2.jpg)
Fabrication
• Laser Induced Backside Wet Etching
• Components
• Materials
• Controls
![Page 3: LIBWE Microfluidics](https://reader035.fdocuments.net/reader035/viewer/2022072002/563db9b4550346aa9a9f2581/html5/thumbnails/3.jpg)
Features
• Pros:– Varied aspect-ratios– Variable cross-section– Rapid prototyping– Crack/debris free
• Cons:– Roughness– CNC instability
![Page 4: LIBWE Microfluidics](https://reader035.fdocuments.net/reader035/viewer/2022072002/563db9b4550346aa9a9f2581/html5/thumbnails/4.jpg)
Example Device
• Microreactor (A + B)
• Microconcentrator (A + B + C)
• Concentration mode (port E)
• Extraction mode (port D)