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Transcript of Lecture 1: MEMS Motivation - Mechanical Engineeringgandhi/me645/05L1_coursecontents_mtvn.pdf ·...
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Lecture 1: MEMS Motivation
Prasanna S. GandhiAssistant Professor,Department of Mechanical Engineering,Indian Institute of Technology, Bombay,
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Today’s Class
What are MEMS? ImportanceSense of scaleDay-to-day use airbag/dj printersSensors of various kindsIndustrial and research products
Contents of the courseFabrication: VLSI-based, nonconventional laserDesign and analysisCharacterization
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What are MEMS?
MEMS refer to miniature mechatronicsystems bulk fabricated using VLSI technologyTechniques and processes to design and create miniature systemsMiniature embedded systems
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Motivation
Why study MEMS??MEMS benefits
Micro size sensors and actuators: Integration with electronics on single chip (system or lab on chip)Decreased cost of production: bulk processingMany new features and products previously unthought can be possible.Combination of MEMS with other branches: Example optical MEMS, Bio-MEMS futuristic devices
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MEMS in SensorsAccelerometers and Gyroscopes
-In day to day use: Automobile accelerometers (air bag)
Copyright 1995- 2003 Analog Devices, Inc.
ADXL202 dual axis accelerometer
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MEMS in SensorsAutonomous airplane
On-boardMicro-controller
GPS
Control surface actuators
Heading sensor
Other sensors
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81,000 grating lines36-mm grating discDiffraction of lightInterference to produce detection signal
MEMS in SensorsEncoders
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MEMS in AcuatorsDeskjet printer
In day to day use: - Deskjet printer Two possible ways
-Inkjet-Bubble jet
Nozzle on printer cartridge
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MEMS in AcuatorsOptical switch
Micro-Optical Components at Bell Labs
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MEMS in AcuatorsActuated mirrors
Micro-optical elements: (reflective)
–Micro-mirrors for fiber-to-fiber switching
Bell Lab single-color Mirror Bell Lab cross-color Mirrors
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MEMS in Acuators
Fiber, Lenses and Mirrors 4 x 4 Optical Switch
Actuated mirrors
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MEMS in AcuatorsActuated mirrorsDLP Technology
Array of micromirrors on chipApplications: projection TV etc.
http://www.dlp.com/dlp_technology/dlp_technology_overview.asp
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MEMS in ActuatorMicromotor
Application: cooling of ICsA micro-motor
First one was made by
Mehergany at MIT
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MEMS System
Millibots (CMU) Millibot fleet
Gyrover: Single wheeled robot uses gyroscope for stabilization
Millibot
www-bsac.eecs.berkeley.edu
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MEMS System
240o viewing angleImages at rate of 2 per secondUnit on belt to receive images2-6 hr journey through intesting0.4 X 1 in sizeFDA approved
Capsule camera
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MEMS System
Application: cooling of ICs
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Micro-actuators
Comb Drive
www.sensorsmag.com
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Micro-actuators
Comb Drive
www.sensorsmag.com
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Micro-actuators
Comb Drive
www.sensorsmag.com
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Micro-mirrors
Comb Drive
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Micro-actuators
Comb drive operating gears
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Bio-MEMS Sensor
Cantilever basedConcept: cantilever structure with antigenEffects:
Change in massDeflection due to repulsive forces
Detection of bacteria by OpticalCapacitiveOther techniques like resonance freq.
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Silicon microrobotHigh load capacityHeatuatorPrinciple of operationArrayingSteering concept
Walking Micro-Robots
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More MEMS devices
Other micro-sensors:Pressure sensorVibrating gyroscopeBio-MEMS sensors: DNA chips, “lab on chip”
Micro actuatorsComb actuators, micro-motorsThermal actuatorsPiezo-actuators
Micro-gears, micro-enginesMicro-fluidic systems: drug delivery: smart pillGrating light valve (GLV display)Digital optical switches
And many moreYet to come…
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Course Contents
Introduction to MEMS: Motivation, history and current statusMEMS: Fabrication
Conventional MEMS fabrication using VLSI technologyNonconventional fabrication
Course outline
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Materials for MEMS
Other materialsPolycrystalline silicon (polysilicon)Silicon dioxide (SiO2)Silicon nitride (Si3N4)Aluminum (thin film)Gold (thin film)Many more including polymers now a days
Doping of silicon
Course outline
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Conventional (VLSI) Fabrication processes
Lithography: patterningChemical etching
IsotropicAnisotropic
Plasma etching: RIEOxidationSputteringChemical vapor deposition (CVD)ElectroplatingSurface micromachiningLIGA
Materialremoval
Materialdeposition
Course outline
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NonconventionalMicrofabrication
Laser micromachining and welding, processing of metals and nonmetals with laserElectro Discharge and Electro Chemical micromachining (EDM and ECM)Microstereolithography: scanning process, dynamic mask process Electronic packaging
Course outline
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MEMS: Design and Analysis
Basic concepts of design of MEMS devices and processes.Design for fabrication, other design considerations MEM systems theoretic analysisAnalysis of MEMS devices: FEM and Multiphysicsanalysis in continuum domain, Modeling and simulationStatistical methodsMolecular dynamics
Course outline
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MEMS: Characterization
Technologies for MEMS characterization: Scanning Probe Microscopy (SPM)
Atomic Force Microscopy (AFM)Scanning Tunneling microscopy (STM) Magnetic Force Microscopy (MFM)
Scanning Electron Microscope (SEM)Laser Doppler VibrometerElectronic Speckle Interference Pattern technology (ESPI)
Course outline
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Text & References
Nadim Maluf, “An Introduction to Microelectromechanical Systems Engineering,” Artech House, Boston, 2000.Stephen D. Senturia, “Microsystems Design,” Kluwer Academic Publishers, New York, November 2000S. M. Sze, “VLSI Technology,” McGraw-Hill International Editions, Singapore, 1988.M.Elwenspoek and H. Jansen, “Silicon Micromachining,” Cambridge University Press, Cambridge, UK, 1998.Norio Taniguchi, editor “Nanotechnology,” Oxford University Press, Oxford, UK, 2003. Joseph McGeough, editor “Micromachining of Engineering Materials,”Marcel Dekker, Inc., New York, 2002.Marc Madou, “Fundamentals of Microfabrication: The science of miniaturization,” CRC Press, LLC, 2002.
Course outline
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Demonstration of Practical Samples
Deskjet printer cartridgeAccelerometer chipsMicrocantileversCD ROM technology
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MEMS JournalsApplied Physics LettersInternational Frequency Sensor Association (IFSA) NewsletterJournal of Applied PhysicsJournal of Lightwave TechnologyJournal of MEMSJournal of Microlithography, Microfabrication and MicrosystemsJournal of Micromechanics and MicroengineeringJournal of Selected topics in Quantum ElectronicsMicroTAS (Micro Total Analysis Systems) JournalSensors and Actuators A (Physical)Sensors and Actuators B (Chemical)
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MEMS LaboratoriesMicroelectronics Gruop, IIT BombaySuman Mashruwala Micoengineering Lab, IIT BombayBerkeley Sensor & Actuator Center (BSAC)Center for Applied Microtechnology (CAM)Center for MEMS and Microsystems Technologies @ Georgia TechCenter for MicroElectronic Sensors and MEMS @ University of
Cincinnati Center for NanoTechnology @ University of Wisconsin, MadisonCenter for Wireless Integrated Microsystems @ University of Michigan Laboratory for Physical Sciences @ University of MarylandMEMS Laboratory @ CMUMicrosystems Technology Laboratories @ MITMicrofabrication Lab @ UC BerkeleyMicromachining Lab @ CaltechMicro Structures and Sensors Lab @ StanfordTransducers Lab @ Stanford
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MEMS IndustriesAclara BiosciencesAnalog Devices, Inc.Caliper TechnologyCepheidCoventor, Inc.Cronos Integrated Microsystems, Inc. Draper LaboratoriesIMECIntegrated Sensing Systems Inc.(ISSYS)Intellisense (Corning)Northrop Grumman CorporationOrchid BioSciences, Inc.Redwood MicrosystemsSurface Technology Systems, Ltd. (STS)TRW NovaSensor OnlineZyvex
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Materials for MEMS
SiliconStronger than steelLight as AluminumCan be coated with varieties of materials
Available in form of wafers 2”, 4”, 8”, 12” diaOther materials
<100>
<010>
<001>
<111>
Silicon crystal orientation