Leak Testing Instruments - Ideal Vac · Leak Testing Instruments Helium Leak Detectors 180.01.02...
Transcript of Leak Testing Instruments - Ideal Vac · Leak Testing Instruments Helium Leak Detectors 180.01.02...
Leak TestingInstrumentsHelium Leak Detectors
180.01.02Excerpt from the Oerlikon Leybold Vacuum Full Line CatalogProduct Section C17Edition 2010
C17
Contents
General
Applications and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.03
Leak Detection - Leak Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.04
Leak Detection Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.05
Operating Principles of the Helium Leak Detectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.07
Products
Helium Leak Detectors
PHOENIXL 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.10
PHOENIXL 300 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.12
PHOENIXL 300 Modul . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.14
CART 300 for PHOENIXL 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.17
Special Versions
PHOENIXL 340, Mobile Helium Leak Detector as Seated Workplace . . . . . . . . . . . . . . . . . . . . . . . . . C17.18
PHOENIXL 320 Fab, Mobile Helium Leak Detector for Increased Cleanness Requirements . . . . . . . . . C17.19
Product-Related Accessories
Calibrated Leaks for Vacuum and Sniffer Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.20
Screw-in Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.22
Accessories for the PHOENIXL 300, PHOENIXL 300 Dry and PHOENIXL 300 Modul . . . . . . . . . . . . . . . C17.24
Radio Transmitter RT 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.25
Helium Sample Probes (Sniffers). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.26
Miscellaneous
Connection Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.28
Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C17.28
02 Oerlikon Leybold Vacuum Full Line Catalog
C1703Oerlikon Leybold Vacuum Full Line Catalog
Semiconductor production ■ ■ ■
Vacuum coating ■ ■
Research and development ■ ■ ■ ■
Chemistry/pharmaceutical ■ ■ ■ ■
Metallurgy/furnaces ■ ■
Lamps and tube manufacture ■ ■
Automotive industry ■ ■
Laser engineering ■ ■
Particle accelerators ■ ■
Analytical engineering ■ ■ ■ ■
Systems with cryopumps ■ ■ ■ ■
Cooling and air conditioning ■ ■
Electrical engineering ■ ■ ■ ■
Mechanical engineering ■ ■
Power plants ■ ■
Systems engineering ■ ■
UHV applications ■ ■ ■ ■
Radio transmitter RT 100 C17.25 ■ ■ ■ ■
Calibrated leaks C17.20 ■ ■ ■ ■
Screw-in calibrated leaks C17.22 ■ ■ ■ ■
Transportation means C17.24 ■ ■ ■ ■
Partial flow system C17.24 ■ ■ ■
PC software LeakWare C17.24 ■ ■ ■ ■
Helium sniffers C17.26 ■ ■ ■ ■
Exhaust filter sets standard standard
Interfaces standard standard standard standard
Gas ballast facilities standard
Trigger relay boards standard standard standard standard
Accessories
Test
Inst
rum
ents
/
Leak
Det
ecto
rs
PHOENIXL 3
00
PHOENIXL 3
00 D
ry
PHOENIXL 3
00 M
odul
(oil-fr
ee)
Page
Applications and Accessories
ApplicationsPHOENIXL
300
Mod
ul
(oil-s
ealed
)
General
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Leak Detection – Leak Testing
Vac
uum
met
hod
Ove
rpre
ssur
e m
etho
d
Helium leak detector PhoeniXL 300 with helium sniffer
103................100 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10 10-11 10-12 mbar Æ l Æ s-1
Pressure rise
Helium leak detector PhoeniXL 300 with partial flow pump set
Helium leak detector PhoeniXL 300 Modul
Helium leak detector PhoeniXL 300 Dry
Bubble test
Pressure drop test
Whether a component or a system isleak-tight depends on the application itis to be used in and the leak rate thatis acceptable. Absolutely leak-tightcomponents and systems do not exist.A component is considered technicallyleak-tight if its leak rate remains belowa value defined for this particular com-ponent. In order to provide a quantita-tive measure, the term “leak rate” withthe symbol “qL” was introduced. In vacuum technology mbar x l x s-1 isused as the unit for leak rates.
A leak rate of 1 mbar x l x s-1 exists ina closed vessel having a volume of 1 liter when the pressure increases by1 mbar within one second, or in caseof an overpressure it decreases by 1 mbar within one second.
The wide range of leak rates fromseveral 100 mbar x l x s-1 to below 10-11 mbar x l x s-1 as they occur inpractice necessitates the use of diffe-rent leak detection principles andhence leak detectors (see figure).
Besides the determination of the totalleak tightness, it is usually important tolocate the leak, quickly and precisely,in order to seal it. Instruments for localleak detection are called leak detec-tors. The leak detectors presented in
this product section can be used forthe localization of leaks, and in additionsome are suitable for determining thetotal leak rate of test objects.
Leak rate
Pa x m3 x s-1
1 mbar x l x s-1 (He)
1 atm x cm3 x s-1 *) = cm3 (STP) x s-1
1 Torr x l x s-1*)
1 kg x h-1 air
1 g/a C2H2F4 (R 134a)
1 10 9.87
0.1 1 0.99
0.101 1.01 1
0.133 1.33 1.33
23.4 234 234
6.41 x 10-7 7.58 x 10-6 6.3 x 10-6
Pa x m3 x s-1
atm x cm3 x s-1 *)
mbar x l x s-1 *)
atm x cm3 x s-1 *)
cm3 x s-1 *)
Overview of the leak rate detection ranges
Leak rate
Pa x m3 x s-1
1 mbar x l x s-1 (He)
1 atm x cm3 x s-1 *) = cm3 (STP) x s-1
1 Torr x l x s-1*)
1 kg x h-1 air
1 g/a C2H2F4 (R 134a)
*) According to international system of units only Pa x m3 x s-1 is permissible
7.5 4.28 x 10-2 2.28 x 106
0.75 4.3 x 10-3 2.28 x 105
0.76 4.3 x 10-3 2.3 x 105
1 5.7 x 10-3 3.0 x 105
175 1 –
4.8 x 10-6 – 1
Torr x l s-1 1) Air C2H2F4 (R 134a)atm x cm3 x s-1 *) kg x h-1 g/a
V x VpΔt
qL = (mbar x l x s-1)
C1705Oerlikon Leybold Vacuum Full Line Catalog
There are two main groups of leakdetection methods; for both there arespecial instruments available:
Vacuum Methods
The equipment to be tested is eva-cuated. The pressure ratio betweeninside and outside is 0:1.
Overpressure Methods
The equipment to be tested is pres-surized with a search gas or a searchgas mixture.
The pressure ratio between inside andoutside is over 1:1.
Between the two methods there existmany variations depending on the par-ticular application.
General Notes
1. The lowest leak rates can only bemeasured by employing the vacuummethod, whereby the following applies:The lower the leak rate, the higher therequirements are concerning cleannessand ultimate vacuum.
2. If possible the test objects shouldbe tested under the same conditionsthat will be used in their final applicati-on, i.e. parts for vacuum operationshould be tested according to thevacuum method and parts for over-pressure operation should be testedusing the overpressure method.
Leak Testing Based onVacuum Methods
(Vacuum inside the test object)
Pressure Rise Method
With this method it is only possible todetermine the total leak rate. The testobject is evacuated with a vacuumpump or a vacuum pump system. Avalve is used to isolate the test objectfrom the vacuum pump. The pressurewill then rise as a function of time.Curve (a) shows the theoretical pres-sure rise if there is only a leak. Curve(b) shows the pressure rise due to out-gassing from the surfaces of the testobject. This pressure rise tends to tailoff in the direction of a saturation level.If in such a case the time allowed formonitoring the pressure rise is tooshort, a leak will be indicated which inreality does not exist. If one waits longenough for the pressure to rise, i.e.after the bend of curve (b) the outgas-sing process can then be disregarded,so that the leak rate can be determi-ned from the known volume of the testobject and the measured pressure riseover a fixed rise time (see equation onpage 4). Curve (c) shows the pressurerise as it occurs in practice, where out-gassing and leak rate add. The detec-table leak rate depends on the volumeof the test object, the obtained ultimatepressure and the outgassing from thetest object. In connection with verylarge test objects this method is timeconsuming if extremely low leak ratesare to be determined in the fine andrough vacuum range.
Local Leak Detection
The test object is evacuated by avacuum pump (auxiliary pump) until thepressure is low enough for the leakdetector to operate. When using a helium leak detector, its own pumpsystem will take care of further eva-cuation. Suspicious spots on the testobject will then be sprayed with a finejet of search gas. Search gas enteringthrough leaks into the test object ispumped out by the vacuum pump andit is converted by the leak detector intoan electrical signal which is then dis-played. This permits rapid detectionand determination of the size of eventhe smallest leaks.
Integral Method
Determination of the total leak rate of atest object. The testing arrangement isthe same as for local leak detection,but in this case the test object is notsprayed with search gas on selectedareas, but it is surrounded by a hoodor a chamber which is filled with thesearch gas. Thus the entire outer sur-face of the test object comes into con-tact with the search gas. If the searchgas enters the test object, the totalleak rate is indicated independently ofthe number of existing leaks. With he-lium leak detectors it is possible to de-termine the helium content of the air.This is utilized in the detection of grossleaks.
Leak Detection Methods
Local leak detection – Evacuated test object (left) and Integral method – Evacuated test object (right)Pressure rise in a vacuum chamber after switchingoff the pump; double log. plot
1
2
3
4
5
LD
HELIUM
2
3
4
LD
HELIUM
1
5
a) Pressure rise due to leakageb) Pressure rise due to outgassing
from the chamber wallsc) Both effects combined
1 Test object 3 Search gas cylinder 5 Hood 7 Sniffer probe2 Leak detector 4 Vacuum pump 6 Spray gun for search gas
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Leak Testing Based onOverpressure Methods
(Overpressure within the test object)
Pressure Drop Method
The test object is filled with a gas (forexample air or nitrogen) until the testingpressure is reached. Precision vacuumgauges are used to detect a possiblepressure drop during the testing period.This method is simple to implement, itis suitable for the determination ofgross leaks and can be improved uponby using differential pressure gauges.By applying soap solutions or similar,leaks can be located.
Local Leak Detection with LeakDetectors – Sniffing
The test object is filled with the searchgas or the search gas/air mixture towhich the leak detector is sensitive.The leak detector is equipped with asniffer probe, whereby there is a lowpressure at the probe tip. If the sniffertip passes suspicious points on thetest object the search gas coming outof the leak is sucked in and transferredto the detection system of the leakdetector. After conversion into elec-trical signals these are displayed opti-cally and acoustically by the leak de-tector.
Integral Method – Hood Test
To determine the total leak rate of atest object subjected to a search gasoverpressure, the test object is sur-rounded by a hood of a known volu-me. The search gas which escapesthrough the leaks collects in the hood.
After a fixed accumulation period asniffer probe is used to measure theconcentration of the search gas whichhas collected in the hood.
Before this the leak detector should becalibrated by a reference measurementusing a known search gas concentration.
The leak rate can then be determinedby the equation for qL where V is thevolume of the hood, Vp is the partialpressure difference of the search gas(concentration change) and t is theaccumulation period.
Uncertainties in the determination ofthe volume, leaks in the hood and awrong accumulation period make pre-cise leak rate measurements based onthis method very questionable.
Integral Method – Vacuum HoodTest
This test is a variation of the hood testdescribed above, which has consider-able advantages. A vacuum chamberwhich is evacuated by an auxiliarypump and which is connected to aleak detector is used as the hood. Thesearch gas escaping through the leaksis converted by the detection systemof the leak detector into electrical sig-nals which are immediately displayed.After calibration of the leak detectorwith a calibrated leak it is possible toquantitatively determine the total leakrate.
This method permits the detection ofvery small leaks and is especiallysuited for automatic industrial leakdetection.
Integral Method – Bombing-Test
This method is used for testing herme-tically sealed components such astransistors, IC-packages or dry reedrelays. It is basically a variation of thevacuum hood test. Here the test ob-jects are placed in a vessel which ispressurized with the search gas - pre-ferably helium. At a fairly high searchgas pressure and after a period of upto several hours it is tried to enrich thesearch gas inside leaky test objects.This is the actual so called “bombing”process.
After this, the test objects are trans-ferred to a vacuum chamber and theirtotal leak rate is determined in thesame way as in the vacuum hood test.During evacuation of the vacuumchamber down to the required testingpressure, those test objects whichhave a gross leak already lost theiraccumulated search gas. These partsare not detected as leaking during theactual leak test. Therefore the test withthe vacuum chamber is often prece-ded by a “bubble test”.
This method permits the detection ofthe lowest leak rates and is used main-ly in automatic industrial leak testingespecially when it is not possible to fillthe parts with gas in any other way.
Leak detection – Search gas overpressure in the test object
2
3
LD
HELIUM
1
7
Integral method (search gas accumulation)Search gas overpressure in the test object
2
3
LD
HELIUM
1
7
5
Integral methode – Search gas overpressure in the test object
2
3
4
LD
HELIUM
1
5
Key to the Figures1 Test object 3 Search gas cylinder 5 Hood 7 Sniffer probe2 Leak detector 4 Vacuum pump 6 Spray gun for search gas
C1707Oerlikon Leybold Vacuum Full Line Catalog
Operating Principles of the Helium Leak DetectorsOperating Principle
A helium leak detector permits thelocalization of leaks and the quantita-tive determination of the leak rate, i.e.the gas flow through the leak. Such aleak detector is therefore a helium flowmeter.
In practice the leak detector performsthis task by firstly evacuating the partwhich is to be tested, so that gas fromthe outside may enter through an exi-sting leak due to the pressure differen-ce present. If only helium is brought infront of the leak (for example by usinga spray gun) this helium flows throughthe leak and is pumped out by the leakdetector. The helium partial pressurepresent in the leak detector is measu-red by a sector mass spectrometerand is displayed as a leak rate. This isusually given in terms of volume flow ofthe helium (pV-flow).
Important Specifications
The two most important features of aleak detector are its measurementrange (detection limits) and its re-sponse time.
The measurement range is limited bythe lowest and the highest detectableleak rate. The lowest detectable leakrate is defined by the sum of drift andnoise in the most sensitive measure-ment range. Usually the sum of noiseamplitude and zero drift per minute ismade to be equivalent to the lowestdetectable leak rate. With leak detec-tors the amount of drift is so low, thatthe noise amplitude alone determinesthe detection limit.
The highest detectable leak rate de-pends strongly on the method employ-ed. Especially the counterflow methodand partial flow operation (see descrip-tion below) permit the measurement ofvery high leak rates even with a sensi-tive helium leak detector. In additionthe multistage switchable high impe-dance input amplifiers of the leak de-tectors also permit the measurementof high leak rates.
In practical applications, especially in thelocalization of leaks the response time isof great significance. This is the time ittakes from spraying the test object with
helium until a measured value is display-ed by the leak detector. The responsetime of the electronic signal conditioningcircuitry is an important factor in theoverall response time. In the case of leakdetectors the response time of the elec-tronic circuitry is well below 1 s.
The volume flow rate for helium at thepoint of the test object is of decisivesignificance to leak detection on com-ponents which are pumped downsolely by the leak detector. This volumeflow rate provided by the leak detectortakes care of the helium enteringthrough a leak and it ensures quickdetection by the leak detector. On theother hand the volume of the testobject delays the arrival of the heliumsignal. The response time can be cal-culated on the basis of the followingsimple equation:
Response time for helium tA = 3
(for 95% of the final value)
with V = Volume of the test objectSHe = Volume flow rate for he-
lium at the point of the test object (or at the inlet of the leak detector, if it alone pumpsdown the test object).
V
SHe
C17 08 Oerlikon Leybold Vacuum Full Line Catalog
Main Flow Method
The classic operating principle of he-lium leak detectors is based on themain flow method. Here the entire heli-um flow passes through the highvacuum system of the leak detector,where the mass spectrometer measu-res the partial pressure of the helium.In this, the use of a liquid nitrogen coldtrap is essential to remove water vaporor other condensible gases in thevacuum system which impair the ope-ration. Moreover, the use of a cold trappermits the low operating pressures forthe mass spectrometer to be reached(below 10-4 mbar) despite the directlyconnected (and possibly contaminated)test object.
The advantages of the main flowmethod are:
– Highest sensitivity, i.e. low detectionlimit
– Short response time due to a highvolume flow rate at the inlet.
The main flow method is thus especial-ly suitable for stationary leak detectionon components. Leak detection onsystems having their own pump setsand at higher pressures requires theuse of an external throttling valve, i.e. apartial flow with subsequently reduced sensitivity is utilized.
Counterflow Method
With this method the test object is notconnected to the high vacuum. Insteadit is connected to the forevacuum (be-tween turbomolecular pump and back-ing pump), so that the entire gas flow(especially water vapor) does not con-tribute to the pressure increase in themass spectrometer. Thus a cold trap isno longer required!
The helium which now enters the fore-vacuum can still be detected, as it isable to flow against the pumping direc-tion of the turbomolecular pump intothe mass spectrometer. This is due tothe high particle velocity of the helium.The sensitivity of this counterflow ar-rangement is equal to that of the mainflow principle, provided the right com-bination of volume flow rate of thebacking pump and helium compres-sion of the turbomolecular pump isused.
The advantages of the counterflowmethod are:
– No liquid nitrogen is required
– High permissible inlet pressures (i.e.pressure within the test object)
This makes the counterflow methodespecially suitable for mobile leakdetection on systems. For leak detec-tion on larger components where ashort response time is essential (i.e.high volume flow rate) an additionalturbomolecular pump stage is requiredat the inlet of the leak detector.
Main flow method Counterflow method Partial flow method
Partial Flow Method
In order to expand the measurementrange in the direction of higher leakrates and for operation at higher inletpressures, helium leak detectors incor-porate a partial flow or a gross leaksystem. This consists basically of athrottle and a rotary vane pump. Atpressures above the normal inlet pres-sure (main flow: above 10-2 mbar,counterflow: above 10-1 mbar) or inthe case of high helium leak rates, theinlet valve is closed and the main flowis allowed to enter the partial flowpump, whereas only a small part enters the leak detector via the partialflow throttle. Thus the total pressureand the helium pressure are droppedto values suitable for operation of theleak detector.
To obtain correct leak rate readings inthe partial flow mode, the partial flowratio, i.e. the ratio between the actuallymeasured gas flow and the total gasflow must be known and stable.
In all leak detectors this is achieved bya partial flow throttle made of ruby witha precisely machined hole. This ensu-res that the quantitatively determinedleak rates are always correct withoutcalibration, even for gross leaks.
C1709Oerlikon Leybold Vacuum Full Line Catalog
Calibration of Helium LeakDetectors with CalibratedLeaks
In the process of leak detection oneexpects that a test object which doesnot have a leak produces a zero read-ing on the leak detector. In this anymalfunctions are excluded. Thus cali-brated leaks, i.e. artificial leaks whichproduce a known helium leak rate areessential for reliable results.
To obtain a quantitatively correct leakrate reading the sensitivity of the leakdetector must also be adjusted. Thisrequires the use of a calibrated leak.
Oerlikon Leybold Vacuum offers cali-brated helium leaks of various designscovering the range between 10-9 to10-4 mbar x l x s-1 as part of the stan-dard range of products. All leak ratesare traceable to the standards of the
German Calibration Service controlledby the PTB (Federal Institution ofPhysics and Technology). If requestedeach helium calibrated leak can be supplied with a calibration certificateissued by the German CalibrationService. The calibration itself is perfor-med by the German Calibration Ser-vice for Vacuum which is run byOerlikon Leybold Vacuum on behalf ofthe PTB.
C17 10 Oerlikon Leybold Vacuum Full Line Catalog
Advantages to the User
- Lowest detectable leak rate
- Short He recovering time condition
- Quick start-up
- Extremely fast response time
- Oil-free gas admission system
- One of the smallest helium leakdetectors in the world
- High sensitivity
- Fast leak rate readout also at lowleak rates
Typical Applications
Leak tests in connection with
- Quality assurance
- Automotive industry
- Analytical instruments
- Systems manufacture
- Power station engineering
- Research and development
- Semiconductor industry
- High vacuum and ultra-high vacuumengineering
- Ideal tool for industrial series pro-duction testing – in the cooling andair conditioning industries, for exam-ple
In connection with the sniffer lineswhich are available as accessories thePHOENIXL 300 may also be used as asniffer leak detector.
In connection with a partial flow pumpset the PHOENIXL 300 may also beused for the detection of leaks on largevessels.
Helium Leak Detector PHOENIXL 300
The PHOENIXL 300 is a portable multi-purpose helium leak detector andequally well suited to both service andseries production testing.
Its rugged design and its ease of usemake the PHOENIXL 300 one of themost user-friendly leak detector in itsclass.
PHOENIXL 300
Products
Ordering Information
C1711Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
Smallest detectable helium leak rate
(Vacuum mode) mbar x l x s-1
Smallest detectable helium leak rate
(Sniffer mode) mbar x l x s-1
Max. detectable helium leak rate
(Vacuum mode) mbar x l x s-1
Measurement ranges
Max. inlet pressure mbar (Torr)
Pumping speed during the
evacuation process
50 Hz m3 x h-1 (cfm)
60 Hz m3 x h-1 (cfm)
Pumping speed for helium at the inlet l/s
Time constant of the leak signal
(blanked off, 63 % of final value) s
Leak rate measurement range
mbar x l x s-1
Units of measurement (selectable)
Time until ready for operation min
Mass spectrometer
Ion source
Detectable masses amu
Test port DN
Dimensions (W x H x D) mm
Weight kg (lbs)
Available languages
� 5 x 10-12
< 1 x 10-7
> 0.1
12 decades
15 (11.25)
2.5 (1.5)
3.0 (1.8)
> 2.5
< 1
1 x 10-12 to 1 x 10-1
mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y
< 2
180° magnetic sector field
2 yttrium/iridium long-life cathodes
2, 3 and 4
1 x 25 KF
495 x 440 x 315
40.0 (88.2)
English, German, Chinese, Japanese (Katakana),
Russian, French, Italian, Spanish, and Polish
PHOENIXL 300
EURO version
230 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7
US version
115 V, 60 Hz, mbar readout,
with integrated calibrated leak TL 7
Japan version
110 V, 50/60 Hz, mbar readout,
with integrated calibrated leak TL 7
PC software LeakWare
For further accessories see Section
“Accessories for PHOENIXL 300,
PHOENIXL 300 Dry und PHOENIXL 300 Modul”
Part No. 250 000
Part No. 251 000
Part No. 251 100
Part No. 140 90
PHOENIXL 300
PHOENIXL 300
C17 12 Oerlikon Leybold Vacuum Full Line Catalog
Portable and Dry Helium Leak Detector PHOENIXL 300 Dry
Advantages to the User
- Oil-free “dry” pump system
- Small footprint
- Quick start-up
- Extremely fast response
The PHOENIXL 300 Dry is a compactportable helium leak detector capableof meeting the highest cleannessrequirements.
Based on the well-proven technologyof the PHOENIXL 300, equipped withan oil-free pump system, the PHOENIXL 300 Dry meets the highestrequirements concerning cleannesswhile at the same time being small insize.
Typical Applications
Leak tests with stringent requirementsconcerning cleanness, for example
- Semiconductor industry
- after repairs or maintenance work
- Production of semiconductor components
- Pharmaceutical/medicine
- Laser
PHOENIXL 300 Dry
C1713Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
Smallest detectable helium leak rate (Vacuum mode) mbar x l x s-1
Smallest detectable helium leak rate (Sniffer mode) mbar x l x s-1
Max. detectable helium leak rate (Vacuum mode) mbar x l x s-1
Measurement ranges
Max. permissible inlet pressure mbar (Torr)
Pumping speed during the evacuation process
50 Hz m3 x h-1 (cfm)60 Hz m3 x h-1 (cfm)
Pumping speed for helium at the inlet l/s
Time constant of the leak signal(blanked off, 63 % of final value) s
Leak rate measurement rangembar x l x s-1
Units of measurement (selectable)
Time until ready for operation min
Mass spectrometer
Ion source
Detectable masses amu
Test port DN
Dimensions (W x H x D) mm
Weight kg (lbs)
Available languages
� 3 x 10-11
< 1 x 10-7
> 0.1
12 decades
15 (11.25)
1.6 (0.94)1.9 (1.12)
> 2.5
< 1
1 x 10-11 to 1 x 10-1
mbar x l x s-1, atm x cc x sec-1, Pa x m3 x s-1, ppm, Torr x l x s-1, g/a, oz/y
< 2
180° magnetic sector field
2 yttrium/iridium long-life cathodes
2, 3 and 4
1 x 25 KF
495 x 456 x 314
35.5 (78.4)
English, German, Chinese, Japanese (Katakana),Russian, French, Italian, Spanish and Polish
PHOENIXL 300 Dry
Ordering Information
PHOENIXL 300 DryEURO version
230 V, 50/60 Hz, mbar readout,with integrated calibrated leak TL 7
US version115 V, 60 Hz, mbar readout, with integrated calibrated leak TL 7
Japan version110 V, 50/60 Hz, mbar readout, with integrated calibrated leak TL 7
PC software LeakWare
For further accessories see Section“Accessories for PHOENIXL 300, PHOENIXL 300 Dry und PHOENIXL 300 Modul”
Part No. 250 001
Part No. 251 001
Part No. 251 101
Part No. 140 90
PHOENIXL 300 Dry
C17 14 Oerlikon Leybold Vacuum Full Line Catalog
Mobile and Flexible Helium Leak DetectorPHOENIXL 300 Modul
The PHOENIXL 300 Modul combinesthe excellent characteristics of thePHOENIXL 300 with those of thepump system which has been addedto the basic leak detector module.
This results in two basic groups:
- Dry, mobile leak detectors withselectable pumping speed
- Oil-sealed, mobile leak detectorsoffering a high pumping speed at anoptimum price-to-performance ratio.
PHOENIXL 300 Modul with Oil-Sealed Backing Pump
This combination represents a powerfulleak detector, the pumping speed ofwhich is adapted to the particularapplication in each case.
Advantages to the User
- Cost-effective leak detector
- Pumping speed optimized for theparticular application
- Fast response
- Quick recovery
- High sensitivity
- Fast leak rate readout also at lowleak rates
Typical Applications
All applications involving short cyclesand/or larger volumes and which requi-re a mobile system, for example:
- Automotive industry
- Cooling and air conditioning
- Manufacturers of furnaces/machines/systems
- Packaging
The PHOENIXL 300 Modul representsthe basic unit of an entire family of leakdetectors. It is based on the PHOENIXL 300, is does not include anintegrated backing pump and may beeasily adapted by adding an externalbacking pump to suit a wide range ofapplications.
PHOENIXL 300 Modul with Dry-Compressing Scroll Pump
This combination represents a dryhigh-performance leak detector.
Advantages to the User
- Very high pumping speed which isalso acceptable for testing semi-conductor production chamberswithout having to use their ownpump systems
- Fast response
- Quick recovery (after helium contamination)
- Absolutely dry
- High sensitivity
Typical Applications
All applications which demand a cleanprocess, lfor example:
- Semiconductor industry (chip manu-facturers)
- Semiconductor industry (tool manu-facturers and subcontractors)
- High purity gas industry
- Research and development
- UHV applications
PHOENIXL 300 Modul
C1715Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
Smallest detectable helium leak rate
(Vacuum mode) mbar x l x s-1
Smallest detectable helium leak rate
(Sniffer mode) mbar x l x s-1
Max. detectable helium leak rate
(Vacuum mode) mbar x l x s-1
Max. permissible inlet pressure mbar (Torr)
with partial flow system mbar (Torr)
Pumping speed during the evacuation
process with the pump (50 Hz)
SOGEVAC SV 16 BI m3 x h-1 (cfm)
SOGEVAC SV 28 BI m3 x h-1 (cfm)
SOGEVAC SV 40 BI m3 x h-1 (cfm)
TRIVAC D 16 B m3 x h-1 (cfm)
TRIVAC D 25 B m3 x h-1 (cfm)
SCROLLVAC SC 15 D m3 x h-1 (cfm)
SCROLLVAC SC 30 DL m3 x h-1 (cfm)
Pumping speed for helium
at the inlet flange l/s
Time constant of the leak signal
(blanked off, 63 % of final value) s
Leak rate measurement range
mbar x l x s-1
Units of measurement (selectable)
Time until ready for operation min
Mass spectrometer
Ion source
Detectable masses amu
Test port DN
Dimensions (W x H x D) mm
Weight (without pump) kg (lbs)
Available languages
1) with SCROLLVAC SC 30 DL2) with SCROLLVAC SC 15 D
� 5 x 10-11 � 5 x 10-12 � 8 x 10-12 1) / � 5 x 10-11 2)
< 1 x 10-7 < 1 x 10-7 < 1 x 10-7
1 x 10-1 1 x 10-1 1 x 10-1
15 (11.25) 15 (11.25) 15 (11.25)
1000 (750) 1000 (750) 1000 (750)
16 (9.4) – –
25 (14.7) – –
40 (23.6) – –
– 16 (9.4) –
– 26 (15.3) –
– – 13 (7.7)
– – 26 (15.3)
> 2.5 > 2.5 > 2.5
< 1 < 1 < 1
1 x 10-12 to 1 x 10-1 1 x 10-12 to 1 x 10-1 1 x 10-12 to 1 x 10-1
mbar x l x s-1, atm x cc x sec-1, mbar x l x s-1, atm x cc x sec-1, mbar x l x s-1, atm x cc x sec-1,
Pa x m3 x s-1, ppm, Pa x m3 x s-1, ppm, Pa x m3 x s-1, ppm,
Torr x l x s-1, g/a, oz/y Torr x l x s-1, g/a, oz/y Torr x l x s-1, g/a, oz/y
� 2 � 2 � 2
180° magnetic sector field 180° magnetic sector field 180° magnetic sector field
2 yttrium/ 2 yttrium/ 2 yttrium/
iridium long-life cathodes iridium long-life cathodes iridium long-life cathodes
2, 3 and 4 2, 3 and 4 2, 3 and 4
1 x 25 KF 1 x 25 KF 1 x 25 KF
495 x 440 x 315 495 x 440 x 315 495 x 440 x 315
30 (66.23) 30 (66.23) 30 (66.23)
English, German, Chinese, English, German, Chinese, English, German, Chinese,
Japanese (Katakana), Japanese (Katakana), Japanese (Katakana),
Russian, French, Russian, French, Russian, French,
Italian, Spanish and Polish Italian, Spanish and Polish Italian, Spanish and Polish
PHOENIXL 300 Modul
with 1-stage with 2-stage with Scroll PumpRotary Vane Pump Rotary Vane Pump
C17 16 Oerlikon Leybold Vacuum Full Line Catalog
The following Part Numbers containonly the individual components neededfor assembly by the customer.
Ordering Information
PHOENIXL 300 Modul
without backing pump
115 - 230 V / 50/60 Hz
Accessories
PC-Software LeakWare
Recommended backing pumps
SOGEVAC SV 16 BI
SOGEVAC SV 28 BI
SOGEVAC SV 40 BI
TRIVAC D 16 B
TRIVAC D 25 B
SCROLLVAC SC 15 D
SCROLLVAC SC 30 DL
For further accessories see Section
“Accessories for PHOENIXL 300,
PHOENIXL 300 Dry and PHOENIXL 300 Modul”
Part No. 250 002 Part No. 250 002
Part No. 140 90 Part No. 140 90
EURO version US version230 V, 50 Hz 115 V, 60 Hz
Part No. 960 286 upon request
Part No. 960 277 upon request
upon request upon request
Part No. 113 25 upon request
Part No. 113 35 upon request
Part No. 133 001 Part No. 133 101
Part No. 133 050 Part No. 133 051
PHOENIXL 300 Modul
C1717Oerlikon Leybold Vacuum Full Line Catalog
CART 300
CART 300 for PHOENIXL 300
Technical Data
Dimensions (W x H x D) mm
Weight kg (lbs)without leak detector and pump, approx.(here as an example with leak detector and scroll pump SCROLLVAC SC 30 DL)
Available languages
525 x 1095 x 1024
50.0 (110.38)
English, German, Chinese, Japanese (Katakana),Russian, French, Italian, Spanish and Polish
CART 300
300 67153
153
1095999
647
191
729
537
40
125200
76
19
525
334
311
Dimensional drawing for CART 300 (here as an example with leak detector and scroll pump SCROLLVAC SC 30 DL)
Ordering Information
CART 300
without E-Box
with E-Box 230 V, EURO version
Part No. 252 005 Part No. 252 005
Part No. 252 006 –
CART 300
EURO version US version
C17 18 Oerlikon Leybold Vacuum Full Line Catalog
PHOENIXL 340Mobile Helium Leak Detectoras Seated Workplace
Advantages to the User- Mobile, convenient seated work-
place
- Simple to operate, identical with thePHOENIXL 300
- Compact size, since only standardcomponents like the PHOENIXL 300 Modul or TRIVAC D 25 B havebeen integrated
- High detection sensitivity for helium,thus very small leaks can be detec-ted
- Rapid entry in to the ready mode
- High pumping speed due to sepa-rate backing pump
The PHOENIXL 340 is a mobile leaktesting station. It was developed prefe-rably for testing of small series produc-tion parts in the vacuum or the sniffermode. Based on its small footprint andbeing equipped with 4 wheels it will fitthrough any standard doorway.
The integrated standard componentscomprise PHOENIXL 300 Modul withtwo-stage, oil-sealed rotary vane pumpTRIVAVC D 25 B as well as a powersupply and controller unit.PHOENIXL 340
Technical Data
Lowest detectable helium leak rate (vacuum operation) mbar x l x s-1
Maximum detectable helium leak rate (vacuum operation) mbar x l x s-1
Connecting flange for units under test DN
Pumping speed during the evacuation process
with TRIVAC D 25 B m3 x h-1
with SCROLLVAC SC 30 DL (60 Hz) m3 x h-1
Pumping speed for helium at the inlet flange l/s
Time constant of the leak rate signal (blanked off, 63% of the final value) s
Time until entering the ready mode min
Dimensions (W x H x D) mm
Height of the bench top mm
Available languages
� 5 x 10-12
> 0.1
40 KF
approx. 25approx. 25
> 2.5
< 1
< 2
780 x 1000 x 1000
750
English, German, Chinese, Japanese (Katakana),Russian, French, Italian, Spanish and Polish
PHOENIXL 340
The PHOENIXL 340 is operatedthrough the PHOENIXL 300 operatorpanel, which for this purpose has beenintegrated in the front panel of the unit.Operation and technical parameters ofthe PHOENIXL 340 can be directlyderived from the PHOENIXL 300.Optionally, the PHOENIXL 340 may beequipped with an exhaust filter AF16-25 for the TRIVAC, with a drycompressing backing pump SCROLLVAC SC 30 DL or also with aremote control.
Ordering Information
PHOENIXL 340 upon request
PHOENIXL 340
Typical ApplicationsQuality assurance on
- one off and small series productionproducts
- equipment for research and deve-lopment
C1719Oerlikon Leybold Vacuum Full Line Catalog
PHOENIXL 320 FabMobile Helium Leak Detector for Increased Cleanness Requirements
Advantages to the User- Pleasantly designed mobile leak
detector
- Compact dimensions
- High pumping speed due to sepa-rate backing pump
- Low particle emissions due to en-capsulated backing pump
- Rapid entry in to the ready mode
- High detection sensitivity for helium,thus very small leaks can be detec-ted
- Exclusively standard componentshave been integrated: convenientaccess, simple maintenance
Typical Applications
Quality assurance on the following:
- Equipment operated in areas withincreased cleanness requirements
- Equipment for research and deve-lopment
- One off products
The PHOENIXL 320 Fab is a mobilehelium leak detector, chiefly designedto be operated in rooms subject to in-creased cleanness requirements.
A PHOENIXL 300 Modul serves as thehelium leak detection unit, the backingpump is a dry compressing SCROLLVAC SC 30 DL. Both princi-pal components of the PHOENIXL 320 Fab have been accommodated ina visually pleasing and space savingchassis. In order to significantly sup-press the emission of particles, thebacking pump has been fitted withinan encapsulated housing and is sup-plied with fresh air from the bottom(fan). The side panels of this housingcan be easily removed.
The PHOENIXL 320 Fab is equippedwith useful accessories like gas cylin-der holder, hooks for the sniffer hosesand mains cord as well as a separateswitch for the backing pump.
PHOENIXL 320 Fab
Technical Data
Lowest detectable helium leak rate (vacuum operation) mbar x l x s-1
Lowest detectable helium leak rate(sniffer operation) mbar x l x· s-1
Connecting flange for units under test DN
Maximum detectable helium leak rate (vacuum operation) mbar x l x s-1
Pumping speed during the evacuation process
with SCROLLVAC SC 30 DL m3 x h-1
Pumping speed for helium in the vacuum mode l/s
Time constant of the leak rate signal (blanked off, 63% of the final value) s
Time until entering the ready mode min
Dimensions (W x H x D) mm
Available languages
� 5 x 10-12
< 1 x 10-7
25 KF
> 0.1
approx. 25
> 2.5
< 1
< 2
450 x 1200 x 1150
English, German, Chinese, Japanese (Katakana),Russian, French, Italian, Spanish and Polish
PHOENIXL 320 Fab
Ordering Information
PHOENIXL 320 Fab upon request
PHOENIXL 320 Fab
PHOENIXL 320 Fab,with side cover removed
C17 20 Oerlikon Leybold Vacuum Full Line Catalog
Calibrated Leaks for Vacuum and Sniffer Applications
Calibrated Leaks for Vacuum Applications
TL 4 and TL 6Calibrated leaks without gas reservoir(capillary type of leak) for sensitivity andsignal response time determinationsduring vacuum leak detection and fordetermination of sniffer sensitivity foroverpressure leak detection. Nominalleak rate ranges 10-4 mbar x l x s-1 forTL 4 and 10-6 mbar x l x s-1 for TL 6.Suitable for helium. A purging valve withhose nozzle permits a rapid exchangeof the gas in the dead volume.
TL 4-6Helium calibrated leak (capillary leak)for gross leaks, adjustable in the rangebetween 10-4 to 10-6 mbar x l x s-1,with exchangeable helium reservoir,pressure gauge and two manually ope-rated valves. For calibration of leak ratereadings and the alignment of heliummass spectrometers in the vacuumpressure range and for determining thesensitivity of sniffers in the overpres-sure range.
TL 4Calibrated helium leak (capillary leak)with reservoir which may be refilledand with a leak rate in the range of 10-5 mbar x l x s-1. Special calibratedleak for use in a vacuum.
TL 7Helium calibrated leak (capillary leak)with helium reservoir and electro-magnetically operated valve. Leak raterange 10-7 mbar x l x s-1. The electro-magnetically operated valve providedpermits the opening and closing of thecalibrated leak to be controlled by theleak detector’s software.
TL 8 and TL 9Helium calibrated leak calibrated for aleak rate in the range of 10-8 mbar x l x s-1 (helium leak rate) for TL 8 and10-9 mbar x l x s-1 for TL 9, with gasreservoir and diaphragm shutoff valve.For alignment of a helium mass spec-trometer, for calibration of the leak ratedisplay of helium leak detectors and forresponse time measurements inconnection with larger volumes.
NoteAll calibrated leaks with the exceptionof the TL 5 are not suited for use in avacuum.
Advantages to the User
- Factory certificate (included) in accordance with DIN 55 350-18-4.2.2
- Highly accurate
- Very low temperature dependence
- Determination of the nominal leakrate by comparison with a cali-brated leak having a PTB 1) certifi-cate
- DKD 2) certificate (optional) trace-able to PTB
- Custom models for special appli-cations
The nominal leak rate applies only ifthe calibrated leak has been con-nected to a vacuum system at a pres-sure of less than 1 mbar.
1) Federal Institution of Physics and Technology2) German Calibration Service
Calibrated leaks are required for the alignment of mass spectrometers, forthe calibration of leak rates and for de-termining the response time of vacuumsystems.
Test leaks
Product-Related Accessories
Calibrated LeakOrdering Information
C1721Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
TL 4, without helium gas reservoir
TL 6, without helium gas reservoir
TL 4-6, with helium gas reservoir
TL 4, with helium gas reservoir
TL 7, with helium gas reservoir
TL 8, with helium gas reservoir
TL 9, with helium gas reservoir
S-TL 4, with helium gas reservoir
S-TL 5, with helium gas reservoir
S-TL 6, with helium gas reservoir
10-4 mbar x l x s-1 Vacuum and sniffer DN 16 KF
10-6 mbar x l x s-1 Vacuum and sniffer DN 16 KF
10-4 to 10-6 mbar x l x s-1 Vacuum and sniffer DN 16 KF
10-4 mbar x l x s-1 Vacuum Discharging opening
10-7 mbar x l x s-1 Vacuum (for installation Nozzle
within the PHOENIXL 300)
10-8 mbar x l x s-1 Vacuum DN 10 KF
10-9 mbar x l x s-1 Vacuum DN 10 KF
10-4 mbar x l x s-1 Sniffer Nozzle
10-5 mbar x l x s-1 Sniffer Nozzle
10-6 mbar x l x s-1 Sniffer Nozzle
Leak Rate Range
Leak DetectionMethod
Connection Flange
TL 4, without helium gas reservoir 1)
TL 6, without helium gas reservoir 1)
TL 4-6, with helium gas reservoir 1)
TL 5, with helium gas reservoir 1)
TL 7, with helium gas reservoir 1)
for installation within the PHOENIXL 300
TL 8, with helium gas reservoir 1)
TL 9, with helium gas reservoir 1
S-TL 4, with helium gas reservoir 1)
S-TL 5, with helium gas reservoir 1)
S-TL 6, with helium gas reservoir 1)
Set of calibrated leaks for power plants
1000, 100, 10 mbar x l x s-1
Rubber bladder with hose clamp
Helium can; 1 l, 12 bar (for TL 4-6)
DKD calibriation for TL 7/8
1) with factory certificate
Part No. 155 65
Part No. 155 66
Part No. 155 80
Part No. 122 67
Part No. 140 23
Part No. 165 57
Part No. 144 08
Part No. 122 37
Part No. 122 38
Part No. 122 39
Part No. 115 16
Part No. 890 11
Part No. 252 001
Part No. 154 15
Calibrated Leaks for SnifferApplications
These calibrated leaks have been setto a fixed value within the typical leakrate range (see Ordering Information).The exchangeable calibration gasreservoir is monitored through thebuilt-in manometer.
Helium calibrated leaksS-TL 4 to S-TL 6 with leak rates from10-4 to 10-6 mbar x l x s-1.
Set of Calibrated Leaks forPower Plants
These three calibrated leaks of 1000,100 and 10 mbar x l x s-1 allow leaktests under partial flow conditionsunder the ambient conditions of powerplants.
C17 22 Oerlikon Leybold Vacuum Full Line Catalog
Screw-in Calibrated Leaks
Calibrated Leak with Screw-in Sleeve
Is used as a so-called master leak tocheck the entire helium leak testingsystem.
Generally two leaktight test samplesare equipped with these calibratedleaks. These will ensure proper separa-tion between “passed and rejected”parts.
They are fitted to the customer’s testsamples either by a welded joint or thescrew-in sleeve is glued in place.
Calibrated Leak with Pin Type Casing
Serves as a calibrated leak for the en-tire helium leak testing system withoutbeing influenced by the presence of atest sample.
Here a dummy is placed in the testchamber. The connection to the testchamber is directly by a DN 10 KF fitting. The test gas connection is eitherby a VCO fitting or a hose nozzle forflexible connections.
Connections on the side of the customer’s system are
- 16 KF running to the vacuum chamber
- Hose nozzle, 10 mm in diameter orVCO fitting, 10 mm in diameter
Calibrated Leak with Cylindrical Casing
Is used to check the sensitivity of asniffing facility.
Before and after the actual test, theoperator checks the sensitivity of histest facility within the scope of a plausi-bility check.
The connection on the side of thecustomer’s system is provided via aVCO fitting for a diameter of 10 mm.
Depending on the type of applicationthese calibrated leaks are either instal-led in the test sample as a master leakor used as a continually available facili-ty in the test chamber itself.
Calibrated leak with screw-in sleeve
The manufacturers of helium leak test-ing systems are in need of calibratedleaks of various sizes with individuallyadjusted leak rates for the purpose ofsetting up and calibrating their systems.
Oerlikon Leybold Vacuum is now offe-ring a new family of calibrated leakswhich are capable of meeting the re-quirements concerning type and requi-red leak rate.
Calibrated leak with pin type casing Calibrated leak with cylindrical casing
Typical Applications
- As a master calibrated leak built-indirectly into the test sample
- Directly installed to the test chamber
- Use as a calibrated leak for sniffer applications
Advantages to the User
- Various types adapted to differentcustomer requirements
- Simple to operate
- Easy to install
- Ideal installation dimensions
- As a rule, all calibrated leaks aresupplied with a certificate (factorycertificate) indicating the leak ratewhich has been set up
C1723Oerlikon Leybold Vacuum Full Line Catalog
Calibrated leak with screw-in sleeve Calibrated leak with pin type casing and hose nozzle
Calibrated leak with pin type casing and VCO fitting Calibrated leak with cylindrical casing and VCO fitting
1,0E-08
1,0E-07
1,0E-06
1,0E-05
1,0E-04
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1 2 3 4 5 6 7 8 9 10
Specified leak rate
mbarl/s
Leak
rat
e qL
Specified pressure
Test pressure PV
bar
pmax = 7 bar
Leak rate as a function of applied forevacuum with reference to 0 bar (> 7 bar upon request)
Ordering Information 1)
Calibrated leak
with screw-in sleeve
with pin type casing and VCO fitting
with pin type casing and hose nozzle
with cylindrical casing and VCO fitting
1) When ordering please always state leak rate, test pressure and helium concentration
Part No. 143 00
Part No. 143 04
Part No. 143 08
Part No. 143 12
Calibrated Leak
C17
Accessories
24 Oerlikon Leybold Vacuum Full Line Catalog
Accessories forPHOENIXL 300, PHOENIXL 300 Dry andPHOENIXL 300 Modul
Remote Control Unit
For the PHOENIXL 300, PHOENIXL 300 Dry and PHOENIXL300 Modul including connection line 4 m and fixing bracket for fixation tothe housing of the PHOENIXL 300.
Search Gas Spray Gun
The search gas spray gun with PVChose (5 m long) is used for well aimedspraying of search gas at places wherea leak is suspected.
Remote control unit Search gas spray gun
Partial Flow System only for PHOENIXL 300 and PHOENIXL 300 Modul
with following advantages:
- Faster response
- Entry into the measure mode already at an inlet pressure of 1000 mbar.
- Faster venting of large test objects
Equipment:Valve block (with inlet valve, ventingvalve, bypass or purging valve) plusright-angle bellows valve DN 25 KFmade of stainless steel, solenoiddrives, suited for remote control by thePHOENIXL 300.
The partial flow systems are availablewithout pumps.
Replacement Ion Source
Complete replacement component,including two built-in yttrium coated iridium cathodes
8 m Extension Line
The use of extension lines permitsoperation of the PHOENIXL 300 up to28 m away from the test objects. A maximum of three extension lines (of8 m each) may be connected in series.
Partial flow system without pump Replacement ion source
Extension line
PC Software LeakWare
The Windows PC software is used fordata acquisition, documentation of themeasurements and to control the ope-ration of the leak detector.
Hardware > 486 DX and 8 MB RamSoftware Windows 95, 98, NT, 2000.
PC software LeakWare
Transport Case 300
For impact protected transportation ofthe PHOENIXL 300; complete withstrong carrying handles and plasticcastors. Separate case for accessories.
Transport case 300
C1725Oerlikon Leybold Vacuum Full Line Catalog
The figure shows the connected radio transmitterRT 100 with receiver and transmitter (leak detec-tor and remote control unit are sold separately)
Wireless data transfer and control ofthe helium leak detector over largerdistances.
Applications
- Power stations
- Particle accelerators
- Space simulation chambers
- Vacuum furnaces
- Glass coating systems
- Plant construction
Advantages to the User
- Wireless data transfer over distan-ces up to 150 m (all functions andleak rate displays on the remotecontrol unit)
- No “spaghetti cable”
- Operator can move freely
- Up to 10 leak detectors can becontrolled in the vicinity using theRadio Transmitter RT 100 due todiffering channel assignments
- Rechargeable battery allows for 8 hours of operation
- Can be operated by a single opera-tor
- Backwards compatible to L200+,L200, UL200
Radio Transmitter RT 100
Ordering Information
Remote control unit
including fixing brackets
Transport case 300
Dimensions, including castors and handles
approx. 600 x 790 x 380 mm (W x H x D)
Partial flow system 1)
for PHOENIXL 300 and
PHOENIXL 300 Modul
115 - 230 V / 50/60 Hz, without pump
AF 16-25 exhaust filter,
for partial flow system
Replacement ion source
PC software LeakWare
8 m long extension line
Search gas spray gun
Radio transmitter RT 100
Replacement rechargeable battery
for Radio Transmitter
Software for Radio Transmitter
Operator Extension
1) 5 centering rings, 5 clamping rings and 1 vacuum hose 1 m with DN 25 KF are included
Part No. 252 002
Part No. 252 004
Part No. 140 20
Part No. 189 11
Part No. 165 04
Part No. 140 90
Part No. 140 22
Part No. 165 55
Part No. 252 009
Part No. 252 010
Part No. 252 011
Accessories
C17 26 Oerlikon Leybold Vacuum Full Line Catalog
Helium Sample Probes (Sniffers)
Advantages to the User
Helium Sniffer Line SL 300 forPHOENIXL 300
- Sniffer line connects directly at thetest connection
- Status LEDs red and green
- ZERO pushbutton
- Easy filter removeable
- Very fast response
- Extremely low detection limit< 1 x 10-7 mbar x l x s-1
- Rigid sniffer tip 120 mm
- Very rugged industrial design
Helium Sniffers QUICK-TEST QT 100 for PHOENIXL 300
- Sniffer leak detection for greaterdistances between test object andleak detector
- Diaphragm pump for sucking thesearch gas
- Smallest detectable leak rate 1 x 10-6 mbar x l x s-1
- Short response and decay times
- High sniffer velocity
- Switching power supply, can be runoff mains voltages from 100 to 230 V AC
Typical Applications
- Storage and transportation vesselsfor gases and liquids
- Gas supply systems
- Gas compressors
- Components for the cooling and airconditioning industries
- Heat pumps and components forthermal energy recovery units
- Chemical production plants
- Supply and phone lines laid in theground
- Power station condensers andturbines
- Window and door seals of carbodies, refrigerators and alike
- Revision checks on leak testingsystems
- Measurement of helium concen-trations ranging from ppm to %
- All hollow objects exposed to over-pressures
Helium sniffers in connection with theleak detectors are used for leak testingtest samples in which a helium over-pressure is present. Besides accuratepinpointing of leaks it is also possibleto determine the leak rate of the esca-ping helium.
Helium sniffer line SL 300 Helium sniffer QUICK-TEST QT 100 with sniffer
QT 100SL 300Ordering Information
C1727Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
Smallest detectable leak rate mbar x l x s-1
Supply voltage
Signal response time, approx.
at a length of
05 m s
20 m s
50 m s
Connection flange DN
Weight kg (lbs)
< 10-7 10-6
– 100-230 V, 50/60 Hz
< 1 1
– < 6
– 20
25 KF 25 KF
0.6 (1.3) 3.5 (7.7)
Helium sniffer line SL 300
4 m long, straight handle, with
red/green LED for go/no-go indication,
rigid sniffer tip 120 mm
Helium sniffer QUICK-TEST QT 100
Sniffer line for the QT 100
05 m
20 m
Part No. 252 003 –
– Part No. 155 94
– Part No. 140 08
– Part No. 140 09
SL 300 QT 100
C17 28 Oerlikon Leybold Vacuum Full Line Catalog
Leak Detectors Helium Sniffers Calibrated Leaks
PHOENIXL 300 – DN 25 KF
PHOENIXL 300 Dry – DN 25 KF
PHOENIXL 300 Modul – DN 25 KF
If components of the same nominal width are connected, only one centering ring and one clamping ring will be required.
SL 300 – DN 25 KF
QT – DN 25 KF
ST 100 – DN 25 KF
TL 4 – DN 16 KF
TL 6 – DN 16 KF
TL 4-6 – DN 16 KF
Connection Flanges
Connection Components
When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers andcomponents may be necessary:
Reduction Reducers Centering Rings
Stainless steel/FPM
Clamping Rings
AluminumDN 25 / 16 KF
DN 40 / 25 KF
DN 40 / 16 KF
Part No. 183 86, Aluminum or
Part No. 885 04, Stainless steel
Part No. 183 87, Aluminum or
Part No. 885 05, Stainless steel
Part No. 183 89, Aluminum or
Part No. 885 07, Stainless steel
DN 25 KF, Part No. 883 47
DN 16 KF, Part No. 883 46
DN 25 KF, Part No. 883 47
DN 40 KF, Part No. 883 48
DN 16 KF, Part No. 883 46
DN 40 KF, Part No. 883 48
DN 20 / 25 KF Part No. 183 42
DN 10 / 16 KF, Part No. 183 41
DN 20 / 25 KF, Part No. 183 42
DN 32 / 40 KF, Part No. 183 43
DN 10 / 16 KF, Part No. 183 41
DN 32 / 40 KF, Part No. 183 43
The following metal hoses are recommended to connect the leak detectors to systems:
Nominal Width Length Ordering Information
DN 16 KF
DN 16 KF
DN 25 KF
DN 25 KF
DN 40 KF
DN 40 KF
Further connecting components, like quick clamping rings and other components are described in Product Section C13 “Vacuum Fittings and Feedthroughs”
1.0 m
0.5 m
1.0 m
0.5 m
1.0 m
0.5 m
Part No. 868 01
Part No. 867 91
Part No. 868 03
Part No. 867 93
Part No. 868 05
Part No. 867 95
Miscellaneous
C1729Oerlikon Leybold Vacuum Full Line Catalog
Notes
OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 0Fax: +49-(0)221-347 [email protected]
P.R. ChinaOerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Beichen EconomicDevelopment Area (BEDA),No.8 Western Shuangchen RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]@[email protected]
Oerlikon Leybold Vacuum (Tianjin) Co. Ltd.Beichen EconomicDevelopment Area (BEDA),No.8 Western Shuangchen RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 [email protected]@[email protected]
Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Shanghai Branch:No.3376 Fu Te Dong San RoadWaigaoqiao Free Trade ZoneShanghai 200131ChinaSales and Service:Phone: +86-21-5064-4666Fax: [email protected]@[email protected]
Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Guangzhou Office and Service Center1st F, Main BuildingScience City Plaza,No.111 Science Revenue,Guangzhou Science City (GZSC) 510663, Guangzhou,ChinaSales:Phone: +86-20-223 23 980Fax:+86-20-223 23 [email protected]@[email protected]
Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadBeijing 100004ChinaSales:Phone: +86-10-6590-7622Fax: [email protected]@oerlikon.com
IndiaOerlikon Leybold Vacuum India Pvt Ltd.EL 22, J-BlockMIDC BhosariPune 411026IndiaSales and Service:Phone: +91-20-3061 6000Fax: +91-20-2712 [email protected]@oerlikon.com
SpainOerlikon Leybold Vacuum Spain, S.A.C/ Huelva 7E-08940 Cornellà de Llobregat(Barcelona)Sales:Phone: +34-93-666 43 11Fax: +34-93-666 43 [email protected]:Phone: +34-93-666 46 16Fax: +34-93-685 43 [email protected]
SwedenOerlikon Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service:Phone: +46-31-68 84 70Fax: +46-31-68 39 [email protected]@oerlikon.comVisiting/delivery address:Datavägen 57BSE-43632 Askim
SwitzerlandOerlikon Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales:Phone: +41-44-308 40 50Fax: +41-44-302 43 [email protected]: Phone: +41-44-308 40 62Fax: +41-44-308 40 [email protected]
USAOerlikon Leybold Vacuum USA Inc.5700 Mellon RoadUSA-Export, PA 15632Phone: +1-724-327-5700Fax: [email protected]:Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-333-1217Pacific, Mountain, Alaskan &Hawaiian time zonesPhone: +1-408-436-2828Fax: +1-408-436-2849Service:Phone: +1-724-327-5700Fax: +1-724-325-3577
Latin AmericaOerlikon Leybold Vacuum USA Inc.Brazilian OfficeAv. Dória 360 cj. 12 Campo Belo04635-070 São Paulo SP BRAZILSales:Phone: +55 11-3554 3117Fax: +55 11-3554 [email protected]
BelgiumOerlikon Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales:Phone: +32-2-711 00 83Fax: +32-2-720 83 [email protected]:Phone: +32-2-711 00 82Fax: +32-2-720 83 [email protected]
FranceOerlikon Leybold Vacuum France S.A.7, Avenue du QuébecZ.A. de Courtaboeuf 1 - B.P. 42F-91942 Courtaboeuf CedexSales and Service:Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected]@oerlikon.com
Oerlikon Leybold Vacuum France S.A.Valence Factory640, Rue A. BergèsB.P. 107 640F-26501 Bourg-lès-Valence CedexService:Phone: +33-4-75 82 33 00Fax: +33-4-75 82 92 [email protected]
Great BritainOerlikon Leybold Vacuum UK LTD.Silverglade Business ParkLeatherhead Road Unit 2KT9 2QL Chessington, Surrey(London)Sales:Phone: +44-13-7273 7300Fax: +44-13-7273 [email protected]:Phone: +44-20-8971 7030Fax: +44-20-8971 [email protected]
ItalyOerlikon Leybold Vacuum Italia S.r.l.Via Trasimeno 8I-20128 MilanoSales:Phone: +39-02-27 22 31Fax: +39-02-27 20 96 [email protected]:Phone: +39-02-27 22 31Fax: +39-02-27 22 32 [email protected]
NetherlandsOerlikon Leybold Vacuum Nederland B.V.Proostwetering 24NNL-3543 AE UtrechtSales and Service: Phone: +31-(30) 242 6330Fax: +31-(30) 242 [email protected]@oerlikon.com
Oerlikon Leybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1234Fax: +49-(0)221-347 [email protected]
Oerlikon Leybold Vacuum GmbHSales Area North/NortheastBranch Office BerlinIndustriestrasse 10bD-12099 BerlinPhone: +49-(0)30-435 609 0Fax: +49-(0)30-435 609 [email protected]
Oerlikon Leybold Vacuum GmbHSales Area South/SouthwestBranch Office MunichKarl-Hammerschmidt-Strasse 34D-85609 Aschheim-DornachPhone: +49-(0)89-357 33 9-10Fax: +49-(0)89-357 33 [email protected]@oerlikon.com
Oerlikon Leybold Vacuum GmbHSales Area West & BeneluxBranch Office CologneBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1270Fax: +49-(0)221-347 [email protected]
Oerlikon Leybold Vacuum GmbHService Competence CenterEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1439Fax: +49-(0)221-347 [email protected]
OerlikonLeybold Vacuum GmbHMobil Customer ServiceEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1765Fax: +49-(0)221-347 [email protected]
Oerlikon Leybold VacuumDresden GmbHService Competence CenterZur Wetterwarte 50, Haus 304D-01109 DresdenService:Phone: +49-(0)351-88 55 00Fax: +49-(0)351-88 55 [email protected]
JapanOerlikon Leybold VacuumJapan Co., Ltd.Headquarter23-3, Shin-Yokohama3-chomeTobu A.K. Bldg. 4th FloorKohoku-kuYokohama-shi 222-0033Sales:Phone: +81-45-471-3330Fax: [email protected]@oerlikon.com
Oerlikon Leybold VacuumJapan Co., Ltd.Osaka Sales Office3F, Shin-Osaka Terasaki No.3 Bldg.1-5-28 Nishi-MiyaharaYodogawa-ku, Osaka-shiOsaka 532-0004Phone: +81-6-6399-6271Fax: [email protected]@oerlikon.com
Oerlikon Leybold VacuumJapan Co., Ltd.Tsukuba Technical Service CenterKogyo Danchi21, Kasuminosato,Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298 89 2841Fax: +81-298 89 [email protected]@oerlikon.com
South KoreaOerlikon Leybold Vacuum Korea Ltd.3F. Jellzone 2 TowerJeongja-dong 159-4Bundang-gu Sungnam-siGyeonggi-doBundang 463-384, KoreaSales:Phone: +82-31 785 1367Fax: +82-31 785 [email protected]
Service:623-7, Upsung-DongCheonan-SiChungcheongnam-DoKorea 330-290Phone: +82-41 589 3035Fax: +82-41 588 [email protected]
SingaporeOerlikon Leybold VacuumSingapore Pte Ltd.1 Science Park RoadSingapore Science Park 2#02-12, Capricorn BuildingSingapore 117528Sales and Service:Phone: +65-6303 7000Fax: +65-6773 [email protected]@oerlikon.com
TaiwanOerlikon Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chunghsin Road., ChutungHsinchu County 310Taiwan, R.O.C.Sales and Service:Phone: +886-3-500 1688Fax: +886-3-583 [email protected]@oerlikon.com
Germany Europe Asia
Sales and Service
America
LV_1
0029
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08
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