The Scientific Technical Project:

3D Laser Scanning Differential-

Phase Microscope-Profilometer

LSDPMP

Kiev - 2015

The Project Authors: Zhitnitskiy A.L. and

Stelmakh A.U.

Laboratory Nanotribotechnology

3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

Образец №1

Образец №2

Образец №3

Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP) is an advanced product in nanometry field,

that has the following main competitive advantages:

1. The high sensitivity of the profile height: up to 0.1 nm (estimated theoretical sensitivity can reach 0.005 nanometers)

2. The high performance: high speed linear scanning LSDPMP through acousto-optic deflectors XY-splitters

- about 100,000 points/sec. To get the frame size of 512x512 pixels in sight 1x1 mm takes about 8 seconds.

3. A large field of view with high resolution in the scanning plane: a part of LSDFMP will be included precision automated

mechanical object table that provides frame by frame scanning large surface areas. At this is implemented in LSDFMP crosslinking

datasets each frame using the pledged data redundancy in the frame. Thus, LSDPMP allow maximum attainable resolution of optical

methods in the field of view (about 0.3 mm) to explore objects whose transverse dimensions are limited to a range of mechanical

positioning of the stage in the scanning plane. It is supposed to implement the scanning field of view 25x25 mm and obtaining an

object image with a resolution up to 10,000x10,000 points. For comparison, the device NewView700s provides the measurement

field 10x10 mm by the matrix 1000x1000 points, whereby resolution plane is not more than 10 mkm.

4. The images receiving: in the LSDPMP obtaining images of the object is performed by raster scanning using an acousto-optic high-

speed XY deflector. The number of points in one frame can reach 512x512. In combination with a mechanical precision automated

sample stage that providing the frame scanning the object surface, the number of the image points can be arbitrarily set depending

on the number of points in a frame and the number of scanning frames.

5. The high vibration resistance: LSDPMP practically does not require additional measures for vibration protection as well as the

principle of differential-phase measurements involves scanning the object simultaneously by two laser beams that are distributed in

the optical system in almost the same way (the angular divergence of the scanning laser beams is only 10-5 rad.), and thus, any

change in optical path length occurring during the vibrations affect the phase of each of the scanning beams equally and thus cancel

out of registration with the difference signal detector. At the same time, for the closest analogue NewView700s is required the

protection system against vibration in the range of 1 to 120 Hz using the massive section air cushion.

6. The work in different modes: receiving images an object in both amplitude and differential-phase measurements. It is also possible

to get a photo-response and photo-luminescent images with proper equipment. The device is capable to operate both in the

"reflection" mode and in "transmission“ mode.

The purpose and application of

the 3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

The use of the Laser Scanning Microscope Profilometer LSDPMP in metrology and standardization significantly raise the level of metrology

and certification centers. This will be possible due to the fact that the device is capable of performing the functions LSDPMP a number of different

instruments. Moreover, its main advantage is the high sensitivity of the profile (from a fraction of an angstrom to 10 nanometers) with almost complete

vibration resistant. Furthermore, LSDPMP provides high speed scanning of the laser beams along the line (X or Y) or the square (X and Y). Software

will allow to present the measurements results in the two- and three-dimensional form, save acquired images in a user-friendly format, with the

possibility of further processing at any time, for example, obtain surface roughness, geometric dimensions of the surface defects, etc.

As demonstrated by testing laboratory model of the device LSDPMP in the microelectronics industry may be used to determine the quality of

produced chips (their structure, surface roughness, thickness of the various layers, paths, etc.). The instrument for its ability to work in a photo-response

mode allows to determine non-contact the current distribution in the chips and solar cells, thus determining their quality.

In biology and medicine laboratory prototype has already been tested LSDPMP in ophthalmology, as well as in the analysis of blood cells,

especially high efficiency of LDFSMPP established in studies of low-contrast various medical and biological products.

Thus the use of LSDPMP depending on configuration "transmission" and / or "reflection" is possible in almost all areas of mechanical

engineering, especially in the creation of highly tribosystems (automotive, engine, aircraft, machine, rocket engineering, in the bearing industry and other

sectors) metrology and standardization, microelectronics, jewelry industry, solid state physics, in the fields of information security in the field of

microbiology and medicine and other industries.

Application of the LSDPMP in configurations "transmission" or "reflection" in mechanical engineering is assumed in the central measuring and /

or industrial laboratories (CYL, CPL), and under workshop conditions in the areas of quality control of surface treatment of machine parts, including

bearings (LSDPMP allow measure the roughness of the ball diameter of 1 mm). The LSDPMP also gives an opportunity to optimize the technology of

surface treatment to improve the efficiency of tribo-nodes.

The LSDPMP will optimize the technology of surface treatment to improve the efficiency of tribo-nodes. This is due to the fact that, as was

found in the course of our research tribological, anti-wear and anti-friction of tribo-nodes characteristics largely depend on the spatial configuration of the

surface microgeometry parts of friction, which is formed during processing.

This issue has received little attention, mainly due to lack of a tool to quickly and accurately determine the parameters of the surface (under the

parameters should be understood not only the standard roughness parameters of the profile, but also the shape and direction of the scratches roughness,

their spatial orientation relative to the direction of operation, the frequency amplitude, frequency etc.). Studies have shown that the optimization

processing technology with a view of the above, but not used in the production of surface parameters, makes it possible to improve the efficiency of

tribosystems (anti-wear and anti-friction properties) several times. Study the effect of spatial micro-geometry of surfaces of turbine blades for aircraft

engines and generators hydro and / or gas-dynamic losses have shown that the proper organization of the configuration of their working surfaces

roughness height also increases the efficiency of the turbine by 2-6%, which is very important in the case of the interaction of the gas (liquid) - metal. It

is obvious that the proper organization of the spatial configuration of the roughness of skin of the aircraft (especially high-speed) will also lead to an

improvement in their aerodynamic characteristics. This will lead to a decrease in resistance in the boundary layers of environment; increase in airspeed

while reducing fuel consumption; improve the stability of the flight; reduce the load on the power components of the wing and tail (stabilizers of aircraft,

ailerons, flaps, spoilers), etc.

The purpose and application of

the 3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

32 64 96 128 160 192 224 256 0

0.00

0.90

1.80

2.70

3.60

-0.90

-1.80

-2.70

-3.60

Ra = 0.5

Средняя линия

Development of a new amplitude-frequency spatial

characteristics of friction surfaces

,)sin(2

)cos(2

1

),(1)(

1lim),(

2

00

0 0

2

002

2

Nk

Nn

nkFN

N

k

N

n

CN

l

32 64 96 128 160 192 224 256 0

0.00

0.90

1.80

2.70

3.60

-0.90

-1.80

-2.70

-3.60

Ra = 0.5

Средняя линия

,)sin(2

)cos(2

),(1)(

1lim),(

00

0 0

2

002

2

Nk

NnRound

nkFN

N

k

N

n

CN

s

The dispersion distribution σl in the directions for

different values of the base surface lengthThe variance distribution σs for individual spectral

components of the spatial spectra

х, мкм

f (x), мкм

мкм

Two-dimensional distribution of the dispersion surface areas of

individual spectral components of the spatial spectrum

а)

мкм

, см –1

, мкм

б)

The distribution of the variance

in the direction of the azimuth 0.

LSDPMP in the Metrology and Standardization

• Linear-angular measurement :

- 2D images;

- profile;

- 3D image

- The range of 0.01 mm,

- 40x lens

• Standard roughness (Ra = 54 nm).

2D and 3D images of the

reconstructed surface relief

Metrology and Standardization

Differential-phase image

Metrology and Standardization

• Standard spherical indentations on the surface of a flat plate (754 nm)

Differential-phase image

Profile and 3D reconstructed

image of the surface relief

The surface of the turboshaft engine blades

The friction surface of artificial human joints

Investigation of the Blood cells and plasma by the LSDPMP

The studies by the LDFSMP have shown that human blood erythrocytes has diameter 7-8mkm.Therefore the minimum clearance for non-contact non-traumatic for cells blood pumpmust be at least 15 mkm

Sale and Delivery the LSDPMP–2015

The method of differential-phase profilometry and laser scanning differential-

phase microscope reserved and protected by patents of Ukraine and priority

application PCT

Roadmap of the project LSDPMP-2015

Calculation of

the LSDPMP

optical scheme

in modern

software

package

Development

the electronic

control unit

LSDPMP

Design units, parts and optical

elements of the LSDPMP

optical-mechanical moduleA

ss

e

m

bl

in

g,

a

dj

us

t

m

en

t

be

nc

h

de

b

u

gg

in

g

Development the schematic

diagrams, design the

phototemplates

Development

the Software

LSDPMP

Assembling

and testing

optical-

mechanical

module of

the

LSDPMP

Development the device

drivers and user interface.

Development the algorithms

for post-processing of the

measured data and 3-D

representation of the

information about the object

Design the two-axis acousto-

optic deflector-splitter system

scanning optical-mechanical

module of the LSDPMP

Manufacturing the

parts, assembly the

two-coordinate acousto-

optic deflector-splitter

system scan

Manufacture the parts and

optical components,

equipment standard

products optical-

mechanical module of the

LSDPMP

Manufacturing the parts

of the boards, grade

standard products and

assembling the electronic

control unit LSDPMP.

Testing and debugging

bench the electronic unit

LSDPMP

I-st and II-nd stage

The development and design the LSDPMPIII-rd stage: Manufacture, assembly,

installation and debugging the LSDPMP

Assemb

ling the

electro

nic

module

LSDP

MP

Testing and debugging of the

LSDPMP software module

IV-th stage :

the LSDPMP in

NANOINDUSTRY

Bearing industry

Т-06. Methods and tools for research

and certification of nanomaterials

and nanodevices

A package of agreements

with specific

(acceptances) customers

oftrhe LSDPMP

Metrology and Standardization

Precision machinery hydraulic,

pneumatic, fuel equipment

Micro and Nanoelectronics

Nanomedicine and microbiology

Nanotribology

Development the programs

firmware for boards controllers

LSDPMP

Hydro and Aeromechanics of

nano-surface, nanomechanics

Thanks for your kind attention

Invite for the cooperation