Laser scanning profilograph-profilometr

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Transcript of Laser scanning profilograph-profilometr


The Scientific Technical Project:

3D Laser Scanning Differential- Phase Microscope-ProfilometerLSDPMPKiev - 2015

The Project Authors: Zhitnitskiy A.L. and Stelmakh A.U. Laboratory Nanotribotechnology3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

2Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP) is an advanced product in nanometry field, that has the following main competitive advantages:

The high sensitivity of the profile height: up to 0.1 nm (estimated theoretical sensitivity can reach 0.005 nanometers)

The high performance: high speed linear scanning LSDPMP through acousto-optic deflectors XY-splitters - about 100,000 points/sec. To get the frame size of 512x512 pixels in sight 1x1 mm takes about 8 seconds.

A large field of view with high resolution in the scanning plane: a part of LSDFMP will be included precision automated mechanical object table that provides frame by frame scanning large surface areas. At this is implemented in LSDFMP crosslinking datasets each frame using the pledged data redundancy in the frame. Thus, LSDPMP allow maximum attainable resolution of optical methods in the field of view (about 0.3 mm) to explore objects whose transverse dimensions are limited to a range of mechanical positioning of the stage in the scanning plane. It is supposed to implement the scanning field of view 25x25 mm and obtaining an object image with a resolution up to 10,000x10,000 points. For comparison, the device NewView700s provides the measurement field 10x10 mm by the matrix 1000x1000 points, whereby resolution plane is not more than 10 mkm.

The images receiving: in the LSDPMP obtaining images of the object is performed by raster scanning using an acousto-optic high-speed XY deflector. The number of points in one frame can reach 512x512. In combination with a mechanical precision automated sample stage that providing the frame scanning the object surface, the number of the image points can be arbitrarily set depending on the number of points in a frame and the number of scanning frames.

The high vibration resistance: LSDPMP practically does not require additional measures for vibration protection as well as the principle of differential-phase measurements involves scanning the object simultaneously by two laser beams that are distributed in the optical system in almost the same way (the angular divergence of the scanning laser beams is only 10-5 rad.), and thus, any change in optical path length occurring during the vibrations affect the phase of each of the scanning beams equally and thus cancel out of registration with the difference signal detector. At the same time, for the closest analogue NewView700s is required the protection system against vibration in the range of 1 to 120 Hz using the massive section air cushion.

The work in different modes: receiving images an object in both amplitude and differential-phase measurements. It is also possible to get a photo-response and photo-luminescent images with proper equipment. The device is capable to operate both in the "reflection" mode and in "transmission mode.The purpose and application of the 3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)The use of the Laser Scanning Microscope Profilometer LSDPMP in metrology and standardization significantly raise the level of metrology and certification centers. This will be possible due to the fact that the device is capable of performing the functions LSDPMP a number of different instruments. Moreover, its main advantage is the high sensitivity of the profile (from a fraction of an angstrom to 10 nanometers) with almost complete vibration resistant. Furthermore, LSDPMP provides high speed scanning of the laser beams along the line (X or Y) or the square (X and Y). Software will allow to present the measurements results in the two- and three-dimensional form, save acquired images in a user-friendly format, with the possibility of further processing at any time, for example, obtain surface roughness, geometric dimensions of the surface defects, etc.As demonstrated by testing laboratory model of the device LSDPMP in the microelectronics industry may be used to determine the quality of produced chips (their structure, surface roughness, thickness of the various layers, paths, etc.). The instrument for its ability to work in a photo-response mode allows to determine non-contact the current distribution in the chips and solar cells, thus determining their quality.In biology and medicine laboratory prototype has already been tested LSDPMP in ophthalmology, as well as in the analysis of blood cells, especially high efficiency of LDFSMPP established in studies of low-contrast various medical and biological products.

Thus the use of LSDPMP depending on configuration "transmission" and / or "reflection" is possible in almost all areas of mechanical engineering, especially in the creation of highly tribosystems (automotive, engine, aircraft, machine, rocket engineering, in the bearing industry and other sectors) metrology and standardization, microelectronics, jewelry industry, solid state physics, in the fields of information security in the field of microbiology and medicine and other industries.Application of the LSDPMP in configurations "transmission" or "reflection" in mechanical engineering is assumed in the central measuring and / or industrial laboratories (CYL, CPL), and under workshop conditions in the areas of quality control of surface treatment of machine parts, including bearings (LSDPMP allow measure the roughness of the ball diameter of 1 mm). The LSDPMP also gives an opportunity to optimize the technology of surface treatment to improve the efficiency of tribo-nodes. The LSDPMP will optimize the technology of surface treatment to improve the efficiency of tribo-nodes. This is due to the fact that, as was found in the course of our research tribological, anti-wear and anti-friction of tribo-nodes characteristics largely depend on the spatial configuration of the surface microgeometry parts of friction, which is formed during processing. This issue has received little attention, mainly due to lack of a tool to quickly and accurately determine the parameters of the surface (under the parameters should be understood not only the standard roughness parameters of the profile, but also the shape and direction of the scratches roughness, their spatial orientation relative to the direction of operation, the frequency amplitude, frequency etc.). Studies have shown that the optimization processing technology with a view of the above, but not used in the production of surface parameters, makes it possible to improve the efficiency of tribosystems (anti-wear and anti-friction properties) several times. Study the effect of spatial micro-geometry of surfaces of turbine blades for aircraft engines and generators hydro and / or gas-dynamic losses have shown that the proper organization of the configuration of their working surfaces roughness height also increases the efficiency of the turbine by 2-6%, which is very important in the case of the interaction of the gas (liquid) - metal. It is obvious that the proper organization of the spatial configuration of the roughness of skin of the aircraft (especially high-speed) will also lead to an improvement in their aerodynamic characteristics. This will lead to a decrease in resistance in the boundary layers of environment; increase in airspeed while reducing fuel consumption; improve the stability of the flight; reduce the load on the power components of the wing and tail (stabilizers of aircraft, ailerons, flaps, spoilers), etc.The purpose and application of the 3D Laser Scanning Differential-Phase Microscope-Profilometer (LSDPMP)

Development of a new amplitude-frequency spatial characteristics of friction surfaces

The dispersion distribution l in the directions for different values of the base surface lengthThe variance distribution s for individual spectral components of the spatial spectra

Two-dimensional distribution of the dispersion surface areas of individual spectral components of the spatial spectrum

The distribution of the variance in the direction of the azimuth 0. LSDPMP in the Metrology and StandardizationLinear-angular measurement :2D images;profile;3D image

The range of 0.01 mm,40x lens

7Standard roughness (Ra = 54 nm).

2D and 3D images of the reconstructed surface relief

Metrology and Standardization Differential-phase image8Metrology and StandardizationStandard spherical indentations on the surface of a flat plate (754 nm) Differential-phase imageProfile and 3D reconstructed image of the surface relief

9The surface of the turboshaft engine blades

The friction surface of artificial human joints

Investigation of the Blood cells and plasma by the LSDPMP

The studies by the LDFSMP have shown that human blood erythrocytes has diameter 7-8mkm. Therefore the minimum clearance for non-contact non-traumatic for cells blood pump must be at least 15 mkm

Sale and Delivery the LSDPMP2015

The method of differential-phase profilometry and laser scanning differential-phase microscope reserved and protected by patents of Ukraine and priority application PCTRoadmap of the project LSDPMP-2015Calculation of the LSDPMP optical scheme in modern software packageDevelopment the electronic control unit LSDPMPDesign units, parts and optical elements of the LSDPMP optical-mechanical moduleAssembling, adjustment bench debugging Development the schematic diagrams, design the phototemplatesDevelopment the Software LSDPMPAssembling and testing optical-mechanical module of the LSDPMPDevelopment the device drivers and user interface. Development the algorithms for post-processing of the measured data