Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating...

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Jean-Marie MACKOWSKI LIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z U n iv er s i té L yon I SMA SMA

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Transcript of Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating...

Page 1: Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z Substrate Corrective Coating LIGO-G030115-00-Z.

Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

MEXICAN HATMEXICAN HAT

Substrate Corrective CoatingLIGO-G030115-00-Z

Substrate Corrective CoatingLIGO-G030115-00-Z

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Page 2: Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z Substrate Corrective Coating LIGO-G030115-00-Z.

Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

VIRGO COATERVIRGO COATER

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Page 3: Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z Substrate Corrective Coating LIGO-G030115-00-Z.

Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

SputteredAtoms

Masque

X

YRobot

Atomespulvérisés

Cible SiO2

InterféromètreContrôle du front d’onde

SiO2 Target

Sputtered

Atomes

Mask

Ion Source

Mirroror Substrat

Interferometer

Robot

Corrective TreatmentCorrective TreatmentUniv

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Page 4: Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z Substrate Corrective Coating LIGO-G030115-00-Z.

Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

MASK Optimization n-1

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Page 5: Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z Substrate Corrective Coating LIGO-G030115-00-Z.

Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

MASK Optimization n

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Page 6: Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting MEXICAN HAT Substrate Corrective Coating LIGO-G030115-00-Z Substrate Corrective Coating LIGO-G030115-00-Z.

Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

Mexican Hat 1st try

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Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

27

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nm

350 mm

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Top view of a Mexican hat

Studied areaof Mexican hat

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Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

Theoretical mexican hat

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Experimental mexican hat

Simulation of the corrective coating

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Jean-Marie MACKOWSKILIVINGSTON March 2003 LSC Meeting

before correction after correction

substrate mexican hat

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