IEEE Photonics Soc. distinguished lecture 1 Tetsuya MIZUMOTO Dept. of Electrical and Electronic Eng....
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Transcript of IEEE Photonics Soc. distinguished lecture 1 Tetsuya MIZUMOTO Dept. of Electrical and Electronic Eng....
IEEE Photonics Soc. distinguished lecture1
Tetsuya MIZUMOTO
Dept. of Electrical and Electronic Eng.
Tokyo Institute of Technology
Optical Isolator:Application to Photonic Integrated Circuits
IEEE Photonics Soc. distinguished lecture 2
Bulk optical isolatormagneto-optic (Faraday) effectoperation principle
Waveguide optical isolatorTE-TM mode conversion isolatornonreciprocal loss (active) isolatornonreciprocal phase shift isolatorintegration (direct bonding)
Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 3
Photon injection photon-generated carrier disturbs carrier distribution (amplitude-noise) carrier-induced index change (phase-noise)
What happens?
Isolator
IEEE Photonics Soc. distinguished lecture 4
Magneto-optic material
Requirement
- large magneto-optic (MO) effect --> 1-st order MO effect (Faraday rotation)
- low optical absorption
- temperature insensitive
Rare earth iron garnet (R3Fe5O12)
Y3Fe5O12 (YIG)
--> (Y3-xBix)Fe5O12, (Y3-xCex)Fe5O12
enhancement of Faraday rotation
IEEE Photonics Soc. distinguished lecture 5
M. Gomi, et al., J. Appl. Phys., 70(11), 7065-7067 (1991).
Characteristics of Y3-xCexFe5O12 (Ce:YIG)
Spectra of Faraday coefficient Spectra of optical absorption
IEEE Photonics Soc. distinguished lecture 6
Bulk isolator, in either beam interface or fiber interface, uses rotation of polarization.
Bulk isolator
Basic configuration
Polarizer
Polarizer
45degFaraday rotator
H
Polarizer
Polarizer
45degFaraday rotator
H
Polarizer
Polarizer
45degFaraday rotator
Reciprocal rotator
H
Input and output : same polarization
Namiki
IEEE Photonics Soc. distinguished lecture 7
Bulk isolator
Input fiber
Output fiber
Lens
Birefringent crystal
Birefringent crystal
/2 plate45deg Faraday rotator
H
Fiber in-line isolator --> Walk-off
T.Matsumoto (NTT), Trans. IECE, J62-C, 505-512 (1979).
birefringent plates polarization independent operation
FDKIsolation>35dB, IL<0.6dB
KyoceraIsolation>30dB, IL<2.5dB
IEEE Photonics Soc. distinguished lecture 8
Translate Faraday isolator into waveguide one.
TE-TM mode conversion type
Polarizer
Polarizer
45degFaraday rotator
Reciprocal rotator
H
TE-TM mode conversion Isolation:12.5 dB, l=1150 nm Length: 6.8 mm
K. Ando, T. Okoshi and N. Koshizuka (present AIST), Appl. Phys. Lett., 53(1), 4 (1988).
Faradaypart
Cotton-Mouton part
Modeselector
Magnetoopticwaveguide
M
qm
IEEE Photonics Soc. distinguished lecture 9
TE-TM mode conversion
Faraday rotation in a birefringent medium
Phase matched: d=bTE-bTM=0 )( Fq
zE
zE
zE
zE
FTE
TM
FTE
TE
sin)0(
)(
cos)0(
)(
Phase mismatched: 0
z
E
zE
zjzE
zE
F
F
F
TE
TM
F
F
FTE
TE
22
22
22
22
22
sin)0(
)(
sincos)0(
)(
Birefringence-free (phase matching)is essential to isolator operation.
rotates in a linearly polarized state
IEEE Photonics Soc. distinguished lecture 10
Waveguide isolators
type mechanism
mode conversion
filed shift
guided TE / guided TM(Faraday & Cotton-Mouton)
transversely radiated TE / guided TM(with TM nonreciprocal phase shift)
guided TE / radiated TM(semi-leaky)
nonreciprocal phase shift(interferometer)
nonreciprocal loss(active)
p-electrode
n-electrode
n+ InP sub.
GaInAsP MQWs
Al2O3 Fe
TiO2
H
Ce:YIG
LiNbO3
θ c-axis
NOG
Faradaypart
Cotton-Mouton part
Modeselector
Magnetoopticwaveguide
M
θ m
IEEE Photonics Soc. distinguished lecture 11
T. Shintaku (NTT), Appl. Phys. Lett., 73(14), 1946 (1998).
Nonreciprocal radiation (TM phase shift)
Mode conversion: transversely leaky mode
Performance: - Isolation: 27 dB (l=1535 nm, L=4.1 mm) - wavelength sensitive (7 dB at l=1515 nm)
(TE)
(TM)
cx
cy
11by
11fy
11x
rx
Radiation modes
Propagation constant diagram
Film thickness
Pro
paga
tion
cons
tan
t
cx
cy
ay
ax
TM mode
TE mode
tatc
11x
11fy
11by
ta tc
w
IEEE Photonics Soc. distinguished lecture 12
Semi-leaky isolator: operation principle
LiNbO3 mode conversion reciprocalMagneto-optic mode conversion nonreciprocal (changes its sign for F/B)
Anisotropy of LiNbO3
Semi-leaky waveguide
unidirectional mode conversion
Ce:YIG
LiNbO3
c-axis
NOGTE mode
2.143
1.9382.200
H
TE mode
Ce:YIG
LiNbO3
c-axis
NOGTM mode
2.210
1.9382.200
H
TM mode
Forward -k(Ce:YIG)+k(LiNbO3)=0Backward k(Ce:YIG)+k(LiNbO3)≠0
guided
radiated Semi-leaky isolator is attractive;- relaxed fabrication tolerance - simple mono-section structure- easy control of magnetization
- but, uniform and tight LiNbO3 / garnet contact is needed.
direct bonding
S.Yamamoto, et al (Osaka U.), IEEE QE, 12, 764 (1976).
IEEE Photonics Soc. distinguished lecture 13
p-electrode
n-electrode
n+ InP sub.
GaInAsP MQWs
Al2O3 Fe
TiO2
H
H.Shimizu and Y.Nakano (U.Tokyo), JLT, 24, 38-43 (2006).
Nonreciprocal loss (active) isolator
Real neff
Imag
inar
y (L
oss)
kef
f
Backward
Forward
0
SOA gain
Active group:U.Tokyo, AIST, Ghent U.
Isolation: 14.7 dB/mmInsertion loss: 14.1 dB/mm (I=150 mA)
IEEE Photonics Soc. distinguished lecture 14
4 dB isolation at l=1543.8 nm
4 dB
15OC
Integration with active devices
nonreciprocal loss (active) excellent compatibility to active devices
p-electrode
n-electrode
n+ InP sub.
GaInAsP MQWs
Al2O3 Fe
TiO2
H
H. Shimizu and Y. Nakano (U.Tokyo), IEEE PTL, 19, 1973-1975 (2007).
active isolator0.7 mm
DFB LD0.3 mm
90mA150mA
compatible waveguide structure material & dimensions
IEEE Photonics Soc. distinguished lecture 15
p-electrode
n-electrode
n+ InP sub.
GaInAsP MQWs
Al2O3 Fe
TiO2
H
type Passive Active
Integration type dependent excellent
Noise none ASE
Power consumption
none current injection to SOA
Polarization dependence
yes, but can be overcome
yes
Comparison: passive and active isolators
IEEE Photonics Soc. distinguished lecture 16
Waveguide isolator: nonreciprocal phase shift
Interferometer type - Isolation: 19 dB (l=1540 nm, L=8.0 mm) J. Fujita, M. Levy and M. Osgood, Jr. (U.Columbia), Appl. Phys. Lett., 76(16), 2158 (2000).
- Isolation: 25 dB (l=1600 nm, L=4.0 mm) Y. Shoji and T. Mizumoto (Tokyo Tech), Optics Express, 15, 13446 (2007).
- wavelength insensitive designed to cover both 1.31/1.55 mm in a single chip Y. Shoji and T. Mizumoto (Tokyo Tech.), Optics Express, 15, 639 (2007). - polarization independent not by polarization diversity scheme Y. Shoji and T. Mizumoto (Tokyo Tech.) et al, JLT, 25(10), 3108-3113 (2007).
IEEE Photonics Soc. distinguished lecture 17
-/2 - j/ 2 21 /
21 /
21 /
21 /
j/ 2
Output
Reflected
Input
Forward (constructive interference)
Backward (destructive interference)
2-1 /
21 /
21 /
21 /
/2 phase bias
/2
Single polarization operation
→ No need for phase matching
→ Fabrication tolerant Simple in-plane magnetization
Interferometric isolator: operation principle
Interferometric isolator
IEEE Photonics Soc. distinguished lecture 18
Nonreciprocal phase shift = (b+-b-) (m-1)
Nonreciprocal phase shift
1st–order MO effect
2
222'2
2
'2
2'2
23
3
1
1
3
3
1
1
2
'2
3
3
1
1'2
)tan(
y
zy
yy
n
nn
nn
ppppq
ppq
qd
linear in b
y z
x
2
2
2
2
0
00
0
j
j
IEEE Photonics Soc. distinguished lecture 19
Nonreciprocal phase shift = (b+-b-) (m-1)
Nonreciprocal phase shift
0 0.2 0.4 0.6 0.8 10
1.0
2.0
Thickness of Ce:YIG guiding layer [mm]
NP
S/(p
/2)
[mm
-1] l=1550nmTM0 mode d (CeY)3Fe5O12
SGGG (n=1.94)
SiO2 (n=1.45)
cutoff
IEEE Photonics Soc. distinguished lecture 20
1.45 1.5 1.55 1.6 1.65
0
0.1
0.2
0.3
0.4
0.5
Wavelength (mm)
For
war
d lo
ss (
dB)
Interferometric isolator: calculated performance
1.45 1.5 1.55 1.6 1.65
0
10
20
30
40
50
Wavelength (mm)
Bac
kwar
d lo
ss (
dB)
IEEE Photonics Soc. distinguished lecture 21
Cancellation of wavelength dependences in backward propagationY.Shoji and T.Mizumoto (Tokyo Tech.), Appl. Opt., 45, 7144 (2006).
l dependences : MO effect waveguide dispersion
Interferometric isolator: wideband operation
wideband design
Ph
ase
shift
qR
ll0
qN(backward)
qN (forward)
q (backward)p
/2p
- /2p
3 /2p
2p q (forward)
0
Conventional design
Ph
ase
shift
qR
ll0
qN(backward)
qN (forward)
q (backward)p
/2p
- /2p
q (forward)0
IEEE Photonics Soc. distinguished lecture 22
Larger isolation in wider wavelength range
1500 1550 1600 1650
30
20
10
0
Wavelength (nm)
atte
nuat
ion
(dB
)
forward backward
1500 1550 1600 1650
30
20
10
0
Wavelength (nm)
atte
nuat
ion
(dB
) forward backward
Conventional designWideband design
Wideband design: experimental results
Y. Shoji and T. Mizumoto (Tokyo Tech.), Optics Express, 15, 13446 (2007).
• measured with a reference of straight waveguide (5 d B loss)
IEEE Photonics Soc. distinguished lecture 23
930m
493m
26m 300m
665m
2.0m
3.0m
L/2
665m
Wideband design covers fully 1310 nm / 1550 nm bands and more.
Isolation > 40 dB :
@ 1260-1650 nm
1.3 1.4 1.5 1.6
50
40
30
20
10
0
Wavelength [mm]
atte
nua
tion
[dB
]
1.55 mm Forward
1.31-1.55 mm Forward1.55 mm Backward
1.31-1.55 mm Backward
Ultra-wideband design
Y. Shoji and T. Mizumoto (Tokyo Tech.), Optics Express, 15, 639 (2007).
IEEE Photonics Soc. distinguished lecture 24
Photonic integrated circuit: device and material
- photonic integrated circuit waveguide alignment lithography process materials to be grown (deposited) on a common platform
LD, SOAIII-V semiconductor
modulator, SWLiNbO3,
III-V semiconductor
l-MUX/DeMUXSilica
IsolatorMagneto-optic material
IEEE Photonics Soc. distinguished lecture 25
Common semiconductor guiding layer (selective growth & mask process)
Our approach: integration of isolator and LD
Direct bonding
H. Yokoi and T.Mizumoto (Tokyo Tech.), Electron. Lett., 33, 1787 (1997).
LD integrated with isolator
compatible waveguide structure material & dimensions
Single polarization operation
IEEE Photonics Soc. distinguished lecture 26
III-V waveguide isolator
IEEE Photonics Soc. distinguished lecture 27
Nonreciprocal phase shift = (b+-b-) (m-1)
Nonreciprocal phase shift
1
221'
1
3'11
3
3
3'
1
1
2
2
'113
3'
1
1
2)tan(
pppq
ppq
qd
linear in b
y z
x
1st–order MO effect
1
1
1
1
0
00
0
j
j
0 0.2 0.4 0.6 0.8 10
0.1
0.2
0.3
0.4
0.5
GaInAsP thickness (m)
Non
reci
proc
al p
hase
shi
ft (m
m-1
)Q1.42 (n=3.45)
Q1.25 (n=3.36)
=1.55mTM0mode
qF=-4500deg/cm
IEEE Photonics Soc. distinguished lecture 28
Bonding garnet on III-V
III-V MO garnet
crystal structure zinc blende garnet
lattice constant (A) 5.869 (InP) 12.54
thermal expansion (K-1) 4.56 X 10-6 (InP) 9.20 X 10-6
refractive index 3.2 – 3.5 2.2
n(garnet) < n(III-V) Evanescent field is to be used in MO garnet.
direct bonding with no gap in-between
garnet
InP
GaInAsP
Challenging: epitaxial growth of III-V on garnet done by Dr. M. Razeghi (Thomson), JAP, 59, 2261 (1986) and Dr. J. Haisma (Philips), J. Cryst. Growth, 83, 466 (1987)
IEEE Photonics Soc. distinguished lecture 29
Surface activated bonding
Surface activation in vacuum chamber
IEEE Photonics Soc. distinguished lecture 30
Direct bonding: garnet on GaInAsP/InP waveguide
Bonding strength Fracture in an InP substrate at a tensile > 0.5 MPa
Ce:YIG / GaInAsP
T.Mizumoto, et al, ECS Meeting, 1258 (2006).
Ce:YIG
GaInAsP
Low temperature heat treatment
IEEE Photonics Soc. distinguished lecture 31
Si-waveguide isolator
L=364mm
MMI
R=2.5mm
IEEE Photonics Soc. distinguished lecture 32
Nonreciprocal phase shift (NPS):Db = b+ - b-
External magnetic field
SiO2
Ce:YIG
Si Ce:YIG
SiSiO2
xy
z
Ex External magnetic field
TM mode
Lp/2 (Min) ~300mm @0.2-mm-thick
CeY2Fe5O12 (Ce:YIG) : QF = -4500 deg/cm
H.Yokoi, et al (Tokyo Tech.)., Applied Optics, 42, 6605-6612 (2003)
0 0.2 0.4 0.6 0.8 110-1
100
101
Thickness of guiding layer (m)
Non
reci
proc
al p
hase
shi
ft (m
m-1
)
Ce:YIG on SOI
Ce:YIG on GaInAsP (n=3.45)
=1.55m, TM0mode
Nonreciprocal phase shift in SOI WG
IEEE Photonics Soc. distinguished lecture 33
Si-waveguide optical isolator
4.0mmSOI
Ce:YIG
Rib waveguide for reducing propagation loss (trial fabrication)
Bonding condition Anneal: 250 oC Press: 5 MPa, 1 hour
H.Yokoi, et al (Tokyo Tech.)., Applied Optics, 42, 6605-6612 (2003)
300Si
SiO2
Si 2mm10nm
Ce:YIG
300nm
Si rib waveguide
Ce:YIG
SGGG
IEEE Photonics Soc. distinguished lecture 34
3-pole magnet --> anti-parallel magnetic field (S-N-S or N-S-N)
2X2 optical SW --> reverses propagation direction (CWCCW)
ASE source
N
S
S
Spectrum Analyzer
PMF PMF
TM mode
IR cameraTV
monitor
Polarizer
lens
Optical switch
CW
CCW
Sample
Measurement setup
IEEE Photonics Soc. distinguished lecture 35
First demonstration of Si waveguide isolator !
The interference reverses as the propagation direction is reversed.
First demonstration of Si-waveguide isolator
Y. Shoji, T. Mizumoto (Tokyo Tech), et al. APL, 92, 071117 (2008).
The interference reverses as the magnetic field directions are reversed.
1530 1540 1550 1560 1570-70
-60
-50
-40
Wavelength (nm)
Tra
nsm
ittan
ce (
dB)
w/o H field
CCW
CW
Mag: N-S-NMag: N-S-N
1530 1540 1550 1560 1570-70
-60
-50
-40
Wavelength (nm)
Tra
nsm
ittan
ce (
dB)
Isolation: 21dB
CW
CCW
Mag: S-N-SMag: S-N-S
N-S-N
S-N-S
IEEE Photonics Soc. distinguished lecture 36
(a) Coupling loss between fiber and waveguide x2 : 37 dB(b) Propagation loss : 4 dB Si waveguide (2.5 dB / 4 mm) + Absorption of Ce:YIG (0.2 dB) + reflection at bonding boundary (0.65 dB x2) (c) Excess loss of MZI : 4 dB
Insertion loss of the isolator ((b)+(c)) : 8 dB
Si-waveguide isolator: insertion loss
MZI
Single WG
Ce:YIG upper clad
2.0 mm4.0 mm1530 1540 1550 1560 1570
-70
-60
-50
-40
wavelength (nm)
tra
nsm
ittan
ce (
dB) (a)
(b)(c)
21dB Isolation
IEEE Photonics Soc. distinguished lecture 37
Non-magneto-optic approach
“Indirect photonic transition”
Zongfu Yu and Shanhui Fan (Stanford), Nature Photonics, 3, 91-94 (2009).
Backward: Mode-1 (w1, -k1) is coupled to mode-2 (w2, -k2).
(-k1 - q = -k2 , w2-w1=W : phase-matched) --> transition
mode-2 (w2, -k2) filtered out
Forward: Mode-1 (w1, k1) is uncoupled to mode-2 (w2, k2).
(k1 - q > k2 , phase-mismatched) --> no transition
-3 -2 -1 0 1 2 30
0.2
0.4
0.6
0.8
1
kz (2p/q)
w(2
pc/
a) W
w1
w2
k1
k2
-k1
-k2
IEEE Photonics Soc. distinguished lecture 38
Non-magneto-optic approach
Traveling wave (dynamic) modulation
Z. Yu and S. Fan (Stanford), Nature Photonics, 3, 91-94 (2009).
Backward: effective coupling e(z,t)=d cos( W t - (-q)z) -k1 - q = - k2
w2-w1=W
Example (l=1550 nm): /d e=5x10-4, f=20 GHz w=0.27 mm, L=2.19 mm
0-th 1-st
z
t0t0+t
Mod
ulat
ion
-
0
0 2/q
IEEE Photonics Soc. distinguished lecture 39
Summary
Optical isolators for photonic integrated circuits
★ Mode conversion isolator requirement of phase matching limited fabrication tolerances
★ Interferometric isolator single polarization operation no need for phase matching ultra-broad band operation (1.31/1.55 mm in a single chip)
integration with active devices Ce:YIG/ III-V, Ce:YIG/ Si low-temperature direct bonding
first demonstration of Si waveguide isolator 21 dB isolation
★ Non-magneto-optic approach attractive (less restricted by material), but still challenging
IEEE Photonics Soc. distinguished lecture 40
IEEE Photonics Soc. distinguished lecture 41
IEEE Photonics Soc. distinguished lecture 42
Semi-leaky isolator: performance
Measured isolation : 20.2 dB / 1.5 mm=13.5 dB/mm
20.2 dB
W=3 mm
1.5 mm
4.5 mm
Externalmagnetic field(Electromagnetic Coil)
PowermeterPMF
Tunable laserl=1550 nm
PM
F
Polarizer
constant coupling loss (-15 dB/facet)
T.Mizumoto et al, IEICE Trans, J89-C, 423 (2006).T.Mizumoto et al, OFC2007, OThU4 (2007).
IEEE Photonics Soc. distinguished lecture 43
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 44
z
r
r
j
j
00
0
0
0
Faraday effect
jEE jiE )(0 r rk0
jEE jiE )(0 r rk0
Faraday rotator
Hx
y
z
Dielectric tensor
Circular polarization
CW:
CCW:
IEEE Photonics Soc. distinguished lecture 45
Faraday effect
ztzEEx 2cos
2cos0
ztzEEy 2cos
2sin0
Linearly polarized wave --> two circular polarized components
CW circular polarized CCW circular polarized
Faraday rotator
H
2
coscos22
coscos2
00 ztztE
zttztE
jiji
zk
z
rr
F
)(2
2
0
IEEE Photonics Soc. distinguished lecture 46
Faraday rotator
Hx
y
z
Faraday rotator
HBackward
Faraday rotator
HForward
Faraday effect
Hx
y
z
Reversal of H-field
FrrF
k )(
20
H
xy
z
Reversal of propagation direction
IEEE Photonics Soc. distinguished lecture 47
Waveguide Faraday rotator
E. Pross, et al. (Philips) , APL, 52(9), 682 (1988).
N. Sugimoto, et al. (NTT) , APL, 63(9), 2744 (1993).
IEEE Photonics Soc. distinguished lecture 48
Isolator
Isolator - two-port device - includes loss mechanism
#1 #2
01
00S
10
00*tSS non-unitary matrix --> lossy
IEEE Photonics Soc. distinguished lecture 49
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 50
Circulator
Circulator - many-port device - lossless device
#1 #2
#3
010
001
100
S
100
010
001*tSS unitary matrix --> lossless
IEEE Photonics Soc. distinguished lecture 51
Optical circulator
H.Iwamura, et al, Electron. Lett., 15, 830-831 (1979).
- uses rotation of polarization- polarization independent operation
IEEE Photonics Soc. distinguished lecture 52
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 53
TE-TM mode conversion
TE-TM mode conversion
Faradaypart
Cotton-Mouton part
Modeselector
Magnetoopticwaveguide
M
θ m
Faraday rotation
sin)0(
)(
sincos)0(
)(
q
κj
E
zE
qj
E
zE
*
TE
TM
TE
TE
zzqz
jn
kj
F
F
2
TMTE222
0
TMTE
2
2
2
qF : Faraday rotation, G : field confinement factor
Phase mismatch
IEEE Photonics Soc. distinguished lecture 54
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 55
Nonreciprocal phase shift
Nonreciprocal phase shift
y z
x
00
000
00
j
j
MO perturbation
dSHn
dSHxn
dS
dSHxn
dS
dSEx
dS
dS
y
y
z
y
z
x
z
2
2
2
4
**
2
4
0
**
2
0
**
*
0
12
2
2
HEHE
HEHE
HEHE
EE
IEEE Photonics Soc. distinguished lecture 56
Interferometric isolator: polarization-independent
(1-η )TM0° (1-η )TM0°
(1-η )TM0°
(1-η )TM180°
(1-η )TE0°
(1-η )TE0°
(1-η )TE0°
(1-η )TE0°(1-η )TE0°(1-η )TE0°
(1-η )TM-180° (1-η )TM0°(1-η )TM-180°
(1-η )TM0°
MC1
N
MC2
MC1
N
MC2
MC1
N
MC2
MC1
N
MC2
180
180
180
180
TM0°
η TE0°η TE0°
TM0° η TE0°
2TM
TM0°
2TE
TE0°
TE0°
η TM0° η TM0°
TE0° η TM0°
2TE
η TM0°
TE0°TE180°
η TM -180°
η TM180°
2TM
TM0°TM180°
η TE0°η TE0°
η TM -180°
TM0°η TE0°
η TE0°
η TE180°
η TM180°
2η TM
2η TE
TE0°
TE180°
(b)
(a)
(c)
(d)
(1-η )TE180°
(1-η )TE 180°
N: nonreciprocal phase shifter provides NPS only for TM mode MC: mode converters provide TE-TM mode conversion
Y. Shoji and T. Mizumoto (Tokyo Tech.) et al, JLT, 25(10), 3108-3113 (2007).
IEEE Photonics Soc. distinguished lecture 57
Issues to be considered・ surface treatment → hydrophilic・ mismatch in thermal
expansion coefficient → low temperature
heat treatment
・ Si / Si・ Si/SiO2 / Si,・ III-V(GaAs,InP) / Si,・ III-V(GaAs, GaP, InP,
InAs) / III-V・ Ce:YIG / III-V・ Ce:YIG / SiO2
・ Ce:YIG / LiNbO3
Hydrophilic bonding
IEEE Photonics Soc. distinguished lecture 58
Surface treatment
(GdCa)3(GaMgZr)5O12(111)
Heat treatment in H2 atmosphere
H3PO4 (RT)
temperature 220ºC
Deionized water
Deionized water
InP (100)
GaInAsP (λ g=1.25m)
O2 plasma (30s)
E-beam lithography
O2 plasma (30s) or
GaInAsP
Sputter epitaxy(CeY)3Fe5O12
pressure 0.025 MPa
CH4/H2 RIE
Hydrophilic bonding: fabrication
IEEE Photonics Soc. distinguished lecture 59
Input
Output
External magnetic field
NS
NS
NSN
Input
Output
External magnetic field
SN
SN
SNS
Isolation 4.9 dB
Semiconductor waveguide isolator: demonstration
H. Yokoi, et al (Tokyo Tech.), Appl. Opt, 39, 6158 (2000).
IEEE Photonics Soc. distinguished lecture 60
Ideal MMI couplers
Y.Shoji, T.Mizumoto, et al., APL, 92, 071117 (2008)
1530 1540 1550 1560 1570
-50
-40
-30
-20
-10
0
Wavelength (nm)
Tra
nsm
issi
on lo
ss (
dB)
Lasym =0 mm
Lasym =111 mm
Forward
Backwardperfectly balanced
slightly unbalanced
Calculated characteristics
IEEE Photonics Soc. distinguished lecture 61
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 62
Mode conversion: semi-leaky
Semi-leaky type
Isolation: 20.2 dB (l=1550 nm, L=1.5 mm) - fabrication tolerant - wavelength insensitive
proposed by S. Yamamoto, et al (Osaka U.),IEEE QE, 12, 764 (1976).
T. Mizumoto et al.(Tokyo Tech), OFC 2007, OThU4 (2007).
Ce:YIG
LiNbO3
θ c-axis
NOGTE mode
2.143
1.9382.200
H
TE mode
Ce:YIG
LiNbO3
θ c-axis
NOGTM mode
2.210
1.9382.200
H
TM mode
guided
radiated
Mode conversion - TE-guided and TM-radiation modes - MO and LN mode conversions
IEEE Photonics Soc. distinguished lecture 63
Semi-leaky isolator: design
1.0 2.0
10
20
30
40
50
0
10
20
30
40
0Guiding layer thickness [ m]
Off
set
angl
e [
deg]
Isol
atio
n [
dB/m
m] = 1.55 m
Offset angle
Backward lossTo cancel mode conversion in forward direction offset angle of LiNbO3
Mode conversion in backward direction isolation
Ce:YIG
LiNbO3
θ c-axis
NOG
Isolation = 14.1 dB/mmfor 50dB isolation : L=3.5 mm
Ce:YIG qF=-4500 deg/cm
IEEE Photonics Soc. distinguished lecture 64
1 1.1 1.2 1.30
10
20
0
1.0
2.0
Guiding layer thickness [ m]
Bac
kwar
d lo
ss /
Isol
atio
n [d
B/m
m]
Foward loss
Backward loss
Isolation
=1.55m
Fow
ard
loss
[dB
/mm
]
Radiation modes
-diagram
/k0(TE)
LiNbO3
ne=2.143
LiNbO3
no=2.210
Ce:YIGn=2.200
/k0(TM)
Guided mode
1.45 1.5 1.55 1.6 1.650
10
20
0
1.0
2.0
Wavelength [m]
Bac
kwar
d lo
ss/I
sola
tion
[dB
/mm
]
Forward loss
Backward loss
Isolation
For
war
d lo
ss [
dB/m
m]
1500nm < l < 1600nm: Isolation >12.5dB/mm Forward loss < 0.09dB/mm
Semi-leaky isolator: calculated performance
IEEE Photonics Soc. distinguished lecture 65
Semi-leaky isolator: fabrication
x-cut LiNbO3
Ce:YIG waveguide&terraceGarnet No.CY0523
4.5mm
Bonding completed
Time : 3 minAnneal : none (RT)
Positioning : ~ 10 min
Hig
h va
cuum
Sample set
Pressure : 4.0 Pa (= 3.0x10-2 Torr)Gas flow : O2 2 sccm
Ar 20 sccmRF power : 250 WTime : 5 min
RF plasma : Ar + O2
Press : ~ 1MPa
Vacuum : 6.0x10-7 Pa Ce:YIG
LiNbO3
θ c-axis
NOG
IEEE Photonics Soc. distinguished lecture 66
Semi-leaky guiding characteristics
Semi-leaky guiding characteristic
partially guided
TE mode
Ce:YIG
LiNbO3
c-axis
NOG
radiated
TM mode
Ce:YIG
LiNbO3
c-axis
NOG
IEEE Photonics Soc. distinguished lecture 67
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 68
Waveguide optical circulator: TE-TM Mode conversion
- uses TE-TM mode conversion (rotation of polarization plane)
N. Sugimoto, et al. (NTT), IEEE PTL, 11, 355-357 (1999).
IEEE Photonics Soc. distinguished lecture 69
#4#3
#2#1
Waveguide optical circulator: operation principle
#4
#1
#4#2
IEEE Photonics Soc. distinguished lecture 70
Waveguide optical circulator: performance
#1#2
#3#4
out in #1 #2 #3 #4
#1 -- 17.1-19.5 3.2-3.3
#2 -- 3.1-3.2 17.2-18.7
#3 3.0-3.1 26.4-31.4
#4 27.0-31.8 3.0-3.1 --
N. Sugimoto, et al. (NTT), IEEE PTL, 11, 355-357 (1999).
Measured transmittance (dB)
IEEE Photonics Soc. distinguished lecture 71
Waveguide optical circulator: Interferometric circulator
Direction-A (in-phase interference)
Direction-B (out-of-phase interference)
T. Mizumoto, et al. (Tokyo Tech.), EL, 26, 199-200 (1990).
IEEE Photonics Soc. distinguished lecture 72
Part-1: Bulk nonreciprocal devicesmagneto-optic effect (Faraday rotation)operation principle of isolators and circulators
Part-2: Waveguide isolators operational principles, design and characterization
TE-TM mode conversion isolatorsNonreciprocal loss isolatorInterferometric isolatorSemi-leaky waveguide isolator
Part-3: Waveguide circulators
Part-4: Non-magneto-optic approach
Outline
IEEE Photonics Soc. distinguished lecture 73
Interferometric isolator - single polarization operation --> no need for phase matching - ultra-wide band operation (1.31 / 1.55 mm in a single chip)
- integration with active devices --> Ce:YIG/ III-V, Ce:YIG/ Si low-temperature direct bonding
- first demonstration of Si waveguide isolator --> 21 dB isolation
Semi-leaky waveguide isolator - highly fabrication tolerant - LN/Ce:YIG direct bonding - 20 dB / 1.5 mm
Summary 2
IEEE Photonics Soc. distinguished lecture 74
Waveguide circulator
Hybrid Faraday rotation type
MZ interferometer
Non-magneto-optic approach
dynamic modulation - indirect photonic transition of eigen modes dependent on propagation direction
Summary 3