ICTS: Sala Blanca Integrada de Micro y Nano Fabricación SBCNM … · 2013-07-29 · 4/14 ” •...
Transcript of ICTS: Sala Blanca Integrada de Micro y Nano Fabricación SBCNM … · 2013-07-29 · 4/14 ” •...
NATIONAL MICROELECTRONICS
CENTER (CNM)
D+T Microelectrónica, A.I.E.
MICROELECTRONICS INSTITUTE OF
BARCELONA (IMB)
MICROELECTRONICS INSTITUTE OF MADRID
(IMM)
MICROELECTRONICS INSTITUTE OF SEVILLA
(IMSE)
LARGE SCALE FACILITY
(Integrated Clean Room)
Analog and mixed IC design
Compoundsemiconductors
Silicon‐basedmicro and nano systems
SPANISH COUNCIL FOR SCIENTIFIC RESEARCH (CSIC)
MINISTERIO DE ECONOMIA Y COMPETITIVIDAD
CNM‐CSIC: National Microelectronics Center
Main Clean Room• 1,500 m2 Class 100‐10,000• CMOS integrated circuits• Microsystems technologies• Nanolithography and
nanofabrication
Back‐end Clean Room• 40 m2 Class 1000• Chip packaging• High Density FlipChip
ICTSICTS Integrated Micro and Nano FabricationClean Room
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• Spanish Large Scale Facility since 1994 / EU access program as LSF (2000-2003)
• Current Spanish access to large facilities program since 2005
• Free access to (limited complexity) projects at the facility, approved by external evaluation committee
• Open to EU + assoc., extended to Latin-American countries in 2010
Call Deadline Nº Projects
1 May 2006 18
2/3 Jan/Oct 2007 31/5
4 Mar 2008 51
5 Feb 2009 52
6 Feb 2010 55
7 Feb 2011 44
TOTAL 256
ICTS Access Program GICSERV
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Second element of crust of the Earth after oxygen
Silicon does not exist free
Normally in form of SiO2
Microelectronics Fundamentals: The material
device
Miniaturised and cost‐effective instruments
Component orsubsystem
wafer
portable benchtop
Microelectronics Fundamentals: The technology. From the chip… to an instrument
Micro and NanoIntegration
Importance of the Micro and Nano Technologies for Europe
• Recent adoption of the European Strategy on Micro and Nanotechnologies, within the Digital Agenda of the EC.
• The EC adopts the Key Eanbling Techologies (KET) concept
• The R&D Infrastructures are basic for Bridging the Valley of Death
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From ENIAC SRA:
Infotainment e-societyCommunicationEnergy & environment
Security & safetyHealth & wellness Transport & mobility
Micro and Nano Technologies:Enabling for Societal Challenges
6000 B $*
1400 B $
Semiconductors300 B $300 B $
Electronics
ServicesTelecom, Internet, Broadcast, AAL,…
Consumer, Medical, Energy, Transport, Security, Space,…
Cornestone of High Tech economy
Source: Future Horizon: IFS (2012 estimated*)
The Multiplier Effect of theMicro and Nanotechnologies
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• Portability: Small dimensions, Low weight
• Low cost: Planar technologies, Batch production
• Autonomy: Low power
• Ubiquity
• Reliability
• Smartness
Advantages of Miniaturisation
Scal
elim
itm
aste
red
byte
chno
logy
Tissues Cells Genes Proteins
Biocomplicity:APM
Stone
Wood
Iron
Silicon
Atoms
CNT Cells
DNANano size:
be closer to thebiological media toimprove specs
NanoTechnology: A crossroad
ICTS SBCNM Main Pillars & R&D Activity
R&D
TrainingTechnology Transfer
•Semiconductor Devices
•Power Devices
• Integrated Circuits and Systems
• Sensors, Actuators and MEMS
• Nanoscale Devices and Actuators
• Lab‐on a chip, Polymer devices
MICRO & NANO INTEGRATED SYSTEMS
IMB‐CNM Research Focus
Key EnablingtechnologiesKey Enablingtechnologies
BioBio
EnergyEnergy
Sensors and Circuits:
Direct methanol micro fuel cell (SU‐8 polymer)
Participation in the ATLAS detector at CERN
Accelerometerwith self‐test
system
On‐chip immunodiagnostic
methods for bacterial detection
Optomechanicalsensors
Sensor needles for organ monitoring for
transplantation
ARM – SoCbased platform
Integrated Circuits and Systems
• Low‐power RF circuits for wireless sensors• Remote‐powered and body‐implantable
systems• SoC & System electronics based on flexible
platforms
1.1V 300μWAnalog hearing‐aids
Implantable systems for neural
recording/stimulation
RF integrated circuit
Power modules integration and test
CMOS‐integrated nanomechanical mass sensor
CNT resonatorSi nanowires
Nanoscale devices
• Advanced nanofabrication methods• Novel nanometrology tools• Singular properties of nanostructures• Ultimate performance of nanoscale devices
RF source with amplitude
modulation at fmod=f (1st eigenmode)
Topography
Piezo
SFM control unit
Vibration amplitudeLock-in 2
Modulation signal at fmod(1st mode)
Lock-in 1Driving
signal at fres (2
nd
mode)
bimorph
CNT resonator
Large‐scale fabrication of CNT transistors
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: La importancia del Factor de escala
Cuando se reducen las dimensiones:
las relaciones L/S y S/V aumentan
las estructuras térmicas se calientan y se enfrían más rápido
las estructuras se calientan con menos energía
las estructuras padecen menos estreses térmicos
las estructuras tienen menos inercia mecánica
la difusión en un fluido es más rápida
la mezcla en los microcanales es más difícil
el efecto de tensión superficial crece
El consumo energético es distinto
…
• Qué pueden aportar las ICTS a la Industria ?:
• Investigación aplicada de calidad
• Realización de demostradores antes del paso a prototipado y de pre‐series
• Fabricación de pequeñas series en casos especiales
• Diseño interno y fabricación en Foundries externas, manteniendo la IP
• Facilidad de participación en grandes consorcios tecnológicos
• Formación en Alta Tecnología
• Alquiler de m2 de Sala limpia
• Asesoría para la instalación de Salas Blancas propias
Conclusiones:
Thanks for your attention!
Carles Cané IMB‐CNM Director carles.cane@imb‐cnm.csic.esEnric Cabruja IMB‐CNM Deputy Director enric.cabruja@imb‐cnm.csic.esLuis Fonseca IMB‐CNM Deputy Director luis.fonseca@imb‐cnm.csic.esTeresa González IMB‐CNM Administrative Manager teresa.gonzalez@imb‐cnm.csic.esMiguel Zabala ICTS Manager miguel.zabala@imb‐cnm.csic.es
+34 93 594 77 00