High Precision Positioning and Motion Control on Silicon … · 2018-06-11 · Silicon Valley...
Transcript of High Precision Positioning and Motion Control on Silicon … · 2018-06-11 · Silicon Valley...
High Precision Positioning and Motion Control
on Silicon Photonics Alignment Applications
Hevin Yu SURUGA SEIKI Taiwan Branch / Senior manager
Agenda
• Applications and Market Trends on Silicon Photonics
• Why Silicon Photonics
• Alignment Solutions
Company Profile
Corporate Name: SURUGA SEIKI CO., LTD. Headquarter: Shizuoka City, Japan Established: May, 1964 Global Sales Revenue:10 Billion JPY in FY16 Employees: Over 1,000 employees globally in FY16 Business Summary Development, Manufacture and Sale of • Electric, Electronic, Communication and Industrial Machinery and
Equipment • Optical Equipment • Parts for Industrial Machinery
Core Technology: High Performance Precise Positioning Technology
Global Network
■ ■ ■ Shizuoka Headquarter ■Tokyo Branch
■Silicon Valley
Vietnam Factory■
Shanghai Branch■ China Design Technical Center■
Shanghai Factory■
Shenzhen Branch■ ■ ■
■Korea
SURUGA Seiki
Headquarter
China Taiwan Shanghai Vietnam Korea San Jose
■Sales Branch ■Technical Center ■Production
Xi’an, Beijing Branch are under the construction.
Wuhan Branch ■
Taiwan Branch
SURUGA Product Lineup
Unitization
Combination technique
Controller
Application Development
Precision optics
Measurement technology System Integration
Compound Technology
Mechanical Parts・Components Complex Units・Solutions Fusion Equipment System
Precise Ball Screw Slide Guide Cross Roller Guide R Guide
• Main components are produced
100% in-house
• Hi Accuracy、Low Cost
Element Parts
Mechanism Technology
High Precision Positioning Motorized Stages
Linear system
Move to two directions(to the X and Y axis) type of stage.
Move vertically(to the Z axis) type of stage. Horizontal Z axis means table surface goes up and down.
Ro
tation
system
1-axis Goniometer stages
Tilt around a stage surface space Perfect for angle control. There are two types of worm gear and ball screw.
Biaxial combination. It is possible to control angle variously with 2 axes.
Move to one direction(to the X axis) type of stage. Motion guide has 3 types of linear ball guide, crossed roller guide and slide guide.
Rotary motion type There are type of 360°rotation and tiny angle rotation type
2-axis Goniometer stages Rotation stages
XY-axis stages Z-axis stages X-axis stages
Silicon Photonics Applications
Applications and Market trends on Silicon Photonics
Applications and Market trends on Silicon Photonics
Why Integrated Photonics
• Telecom applications
– WDM introduces need for highly integrated optical circuits
• Datacom applications
– Increasing need for bandwidth between chips
– Single channel solutions will no longer fulfill requirements
– Need for densely integrated electronics + optics
• Embedded sensors
– Imagine millimeter size spectrometer with source included
– Embed in tissue (glucose sensing, structural health monitoring…)
From: ICPlatform Course on Silicon Photonics, Xiamen 2017
Why Silicon
• Silicon is transparent for l>1.1um
• Silicon process technology is
– Mature
– Good for high volume manufacturing
• High refractive index contrast -> compact circuits
• Passive and active functionality
– Thermo-optic
– Carrier plasma dispersion
– Integration with other material: Ge, III-V,…
From: ICPlatform Course on Silicon Photonics, Xiamen 2017
New Solution, New Market
• Si photonics in existing markets
– If radical improvement in cost/power/space efficiency
• e.g. 10 transceivers on the same chip size, on-chip optical interconnects
– Or is new functionality
• e.g. enabler for >40Gbps line speed communication
• New solutions for novel markets
– Ubiquitous sensing smart city
– Implantable medical devices
From: ICPlatform Course on Silicon Photonics, Xiamen 2017
Silicon Photonics Platform
Graphics from GF, IBM, IME, GLOBALFUNDRIES
Fiber Coupling
Fiber coupling - Silicon
2. Edge coupled
1. Grating coupled
Challenge: Fiber coupling to
sub-micron waveguide
From: Packaging and Integration Technologies for Silicon Photonics, SEMICON 2013
Grating Coupling example
Grating Coupling example
Edge Coupling example
Edge Coupling example
Alignment Solution
Fiber Array Rotations
• Fiber array tilt angles influence maximize optical coupling.
• Vertical fiber alignment stage is designed to support 6 axes of
freedom with center rotations around the fiber array.
• This feature saves time by allowing small optimizations to be made
without moving the fiber away from the chip.
Z X
Y
Ty
Tz
Tx
q
Fiber Array
Stage Z X
Y
Fiber Array
Z X
Y
Stage
Motorized Vertical Type Fiber Alignment Stage
• Our vertical type fiber alignment stage
provides 6axes of motion.
• General spec
– Sub-mm XYZ positioning with 70, 100mm
or more XY and 30mm Z
– +/- 5。Tx, +/- 6。Tz, +/- 6。Ty
– Center of rotations around fiber array tip
• Chip stage
– Optional for rotation (360。),
– Gonio (tilt +/- 6, 8。),
– Linear XY (13~300mm),
– Linear Z (4~30mm)
• Our edge type fiber alignment stage also
provides multi axes of motion.
• General spec (ES-6701)
– <0.5um XYZ positioning with 50mm XZ
and 10mm Y
– +/- 6。Tx, +/- 8。Tz, +/- 8。Ty
– Center of rotations around fiber array tip
• Optional for manual or motorized
Motorized Edge Type Fiber Alignment Stage
Alignment Stage Module
System Configuration
• SURUGA combines
– Customized hardware stages (applications like vertical type fiber
alignment, edge type fiber alignment, and electrical probes)
– Intelligent software to automate silicon photonic device testing
• The diagram below is a schematic representation of how SURUGA
might integrate with your existing instruments.
Alignment software (IROHA)
Main Function
• JOG
(Stage drive with PC mouse operation)
• Automated Alignment Control
(XY, XYZ, and XYZθz Alignment)
• Contact Sensing
(Automatic control GAP each devices)
• Automated Face Alignment (Patent)
(Automatic control parallelism each devices)
• External Equipment Control
(GP-IB, Serial, IO)
• Profiling
(Beam Profile Measurement and Result
Display / Save)
• Input / Output Display / Save
(Optical Power, Analog Display)
• Driving Program
(Macro Sequences Free Writing Function)
Easy Operation, Easy Control
High Resolution Stages
Linear Scale Feedback
Precision Linear Guide and Ball Screw
X0576D Series
X0576D-X X0576D-XYZ
Stroke 30mm
Resolution (Linear
Scale) 4.88nm
Unidirectional
accuracy 3μm
Positioning
Repeatability ±10nm
Lost Motion 20nm
Pitching 20"
Yawing 15"
Rated Load 10kgf 5kgf(On Z axis)
Max Speed 20mm/sec
New positioning stage for photonics application.
XYZ 3 axis type available.
Thanks for your listening
Q & A