Grating Coupler Fabrication
10
Grating Coupler Fabrication PMMA Si SiO 2 e - CF 4 acetone
description
Grating Coupler Fabrication. acetone. CF 4. e -. PMMA. Si. SiO 2. Photonic Crystal Fabrication. CF 4. dilute aqua regia. SF 6. e -. PMMA. Mo. Si. SiO 2. Integrated Device. Grating Coupler Geometry. For λ = 1.55 µm, n e = 2.83, and θ = 45°, Λ = 730 nm . - PowerPoint PPT Presentation
Transcript of Grating Coupler Fabrication
![Page 1: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/1.jpg)
Grating Coupler Fabrication
PMMA
Si
SiO2
e-
CF4acetone
![Page 2: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/2.jpg)
Photonic Crystal Fabrication
Si
SiO2
Mo PMMA
e-
CF4SF6dilute aqua regia
![Page 3: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/3.jpg)
Integrated Device
![Page 4: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/4.jpg)
Grating Coupler Geometry
Si
SiO2
θ
Λ
θenλΛsin
For λ = 1.55 µm, ne = 2.83, and θ = 45°, Λ = 730 nm.
![Page 5: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/5.jpg)
Grating Coupler Characterization
![Page 6: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/6.jpg)
PC Waveguide SEM
![Page 7: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/7.jpg)
Integrated Device SEM
730 nm730 nm
360 nm360 nm426 nm426 nm
![Page 8: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/8.jpg)
AFM of ~10 nm Grating
![Page 9: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/9.jpg)
Coupling Efficiency of ~10 nm Grating
![Page 10: Grating Coupler Fabrication](https://reader033.fdocuments.net/reader033/viewer/2022050809/56815dc3550346895dcbedfd/html5/thumbnails/10.jpg)
Coupling Efficiency of ~20 nm Grating