Gencoa Optix Optix A new instrument for robust gas analysis in vacuum November 2017 1
GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · •...
Transcript of GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · •...
![Page 1: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/1.jpg)
![Page 2: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/2.jpg)
Other activities include on-site process implementation, training and tuning
GENCOA products cover 3 sputtering related areas
Magnetron Sputter Cathodes
planar & rotatable
Reactive gas controller & endpoint detector
Linear ion sources
![Page 3: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/3.jpg)
GENCOA Key Company Facts
• GENCOA is a private limited company (Ltd)
• Founded 1995 by Dr Dermot Monaghan
• Located in Liverpool, UK
• Employs 34 people 6 design (Pro E 3D CAD) 4 process development & simulation 14 assembly & test 4 sales & tech support (2 Asia based) 3 administration & accounts 3 hardware & software (Speedflo) • > 3000 magnetrons in the field
• > 500 speedflo systems in the field 95% market share
![Page 4: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/4.jpg)
Sales agents / distributors located around the world and 95% of output is exported from the UK Main markets are USA, EU, Japan, Taiwan, Korea & China Local Gencoa based staff for technical support in USA, EU & Asia
GENCOA worldwide company presence
![Page 5: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/5.jpg)
Reactive gas process controllers
![Page 6: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/6.jpg)
Reactive gas process controllers
Speedflo used in glass, solar, display & OLED sectors & makes today’s & tomorrow’s products possible
![Page 7: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/7.jpg)
Cost of ownership of reactive feedback elements
• Line speed increase x 3-5
• Return on Speedflo (reactive controller) investment < 30 days
Si and SiOx rates at 23 kW (dual rotatable)
0
30
60
90
120
0 20 40 60 80 100
Setpoint (O2 emission 777nm)
Co
ati
ng
ra
te (
nm
. m
/min
)
![Page 8: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/8.jpg)
Reactive Sputtering Monitoring
Reactive gas input
Exhaust
Substrate
Target Control
Part. Press.
Transp.,σ,n Voltage, Freq. Plasma emmission
![Page 9: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/9.jpg)
Process Inputs / Outputs
Inputs
• PEM - Plasma emission monitor
• Metal line / multiple lines
• Gas line • Argon line • Plasma spectrum
• Target voltage
• lambda sensor gas partial pressure
Outputs (Actuator)
• Reactive Gas Flow
• Target Voltage
• Target Power Output
• Gas partial pressure (Ar / throttle valve)
![Page 10: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/10.jpg)
Pro / Cons of Inputs
Inputs
• PEM - Plasma emission monitor
• Metal line / multiple lines
• Gas line • Argon line • Plasma spectrum
• Target voltage
• lambda sensor gas partial pressure
• PEM high speed, most universal / powerful & can be multi-zone but requires fibre-optics
• Target voltage is high speed and low cost but “single zone” and in the past for certain material / gas combinations
• Gas partial pressure - multi-gas expensive, but single gas lower cost, requires sensor in chamber
![Page 11: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/11.jpg)
The ideal controller handles all
Inputs
• PEM • Metal line / multiple
lines • Gas line • Argon line • Plasma spectrum
• Target voltage • Gas partial pressure
Outputs (Actuator)
• Reactive Gas Flow
• Target Voltage
• Target Power Output
• Gas partial pressure (Ar / throttle valve)
• Why is Mulit-function important?
• Some processes are hard to control and drifts / fluctuations occur
![Page 12: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/12.jpg)
Speedflo multi-channel controller
![Page 13: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/13.jpg)
Reactive deposition
A ready made solution
• Large area reactive sputtering 30 years old • Mature processing products available • Reactive sputtering in the high rate metal mode is highly unstable process so appropriate process control the critical factor • Gencoa have implemented reactive process control over many different production plants with > 3m glass sizes • More than 500 Speedflo systems controlling reactive production plants around the world • Gencoa can set-up the process control on-site or connect remotely to the Speedflo box
![Page 14: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/14.jpg)
Digital software drive process controller
The data processing in the Speedflo box (not PC) for high speed robust operation
Typical closed loop feedback times of 5-20 msec – from signal receipt to gas delivery in the target area.
![Page 15: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/15.jpg)
Multiple sensors control and trim gas over large areas
±1.5% uniformity already commonplace on 1-3m glass
• Choice of sensor types available
Lambda Sensors
![Page 16: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/16.jpg)
![Page 17: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/17.jpg)
Gencoa have a range of optical components
P.E.M requires the light signal from the plasma to be transmitted
![Page 18: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/18.jpg)
Measures excess gas in the process
Penning Gauge based P.E.M. sensor used for batch processes with plasma fluctuations
![Page 19: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/19.jpg)
Upto 4 different wavelengths can be combined
Speedflo spectrometer based sensor displays the full plasma spectrum information
![Page 20: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/20.jpg)
Additional sensor control box included
Gencoa Lambda sensors measure the O2 concentration in the vacuum chamber
![Page 21: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/21.jpg)
Speedflo different sensor responses to a gas ramp - hysteresis
![Page 22: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/22.jpg)
0
1
2
3
4
5
4950 5050 5150 5250 5350 5450 5550 5650 5750 5850 5950
Sensor 1 (PENNING)
Actuator 1 (METER)
Setpoint 1
Sensor 2 (LAMBDA)
Actuator 2 (MFC)
Setpoint 2
The MKS 1179A is a suitable valve
The gas flow valves need to have a fast enough response to match the process needs
msec
![Page 23: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/23.jpg)
Gencoa will advise on with PEM sensor locations and gas delivery method
& the sizes of the MFC’s required for the process
![Page 24: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/24.jpg)
All components need to be integrated correctly
to ensure optimum operation
![Page 25: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/25.jpg)
Reactive AZO Sputtering
Hysteresis but can be controlled with feedback
ZnAl dual rotatable + O2 - TRIPLE RAMP CONDITIONING
0
10
20
30
40
50
60
70
80
90
100
0 50 100 150 200 250Time, s
Sign
als,
% SetPoint (%)Sensor (%)Actuator (%)
![Page 26: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/26.jpg)
Process control window for Speedflo related to response for SiOx
in typical AR layer stack for flat screen television
![Page 27: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/27.jpg)
![Page 28: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/28.jpg)
Example of controlled reactive dual rotatable ITO deposition runs
InSn + O2 Speedflo control during production tests
0
1
2
3
4
5
6
7
0 200 400 600 800 1000 1200 1400
time, s
Sig
nals
Sensor (V)Actuator (V)SetPoint (V)
85% Transmission13Ω Sheet resistance
![Page 29: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/29.jpg)
Reactive dual rotatable AZO deposition process window
ZnAl + O2 reactive control dual rotatable
0
10
20
30
40
50
60
70
80
90
100
0 100 200 300 400 500Time, s
MFC
feed
back
, scc
m
0
20
40
60
80
100
O2 P
EM a
nd ta
rget
V
Sens
ors
(%)
Gas Feedback (SCCM)O2 PEM value %O2 PEM setpoint %Target V %
Process control using plasma monitoring
![Page 30: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/30.jpg)
TCO film property tuning using ‘Speedflo’ reactive sputtering
controller with a dual rotatable magnetron
InSn+O2 using Speedflo control for reactive production of ITO
0
20
40
60
80
100
120
140
160
38 40 42 44 46 48 50 52O2 Set-point (%)
Shee
t res
ista
nce
(ohm
s)
0
10
20
30
40
50
60
70
80
90
Tran
smis
sion
(%)
Sheet resistanceTransmission
Development Optimised
![Page 31: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/31.jpg)
ZnAl + O2 reactive control dual rot rotatable
0102030405060708090
100
0 1000 2000 3000
Time, s
MF
C feedback, sccm
0
20
40
60
80
100
O2 P
EM
and targ
et V
S
ensors
%
Gas Feedback (SCCM)O2 PEM value %O2 PEM setpoint %
Changed Ks to regain control
The controller requires ‘tuning’ to provide optimum control – reactive
AZO sputtering controller with a dual rotatable magnetron
![Page 32: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/32.jpg)
P.E.M based reactive sputtering controllers already work in large scale Low-E glass
SiOx AC dual 3 Master (A, B & C) and 1 slave (1G) control
-100
-80
-60
-40
-20
0
20
40
60
80
0 1000 2000 3000 4000 5000
Time, s
Se
nso
r sig
na
ls
0
5
10
15
20
25
30
35
40
45
50
Ac
tua
tor
sig
na
l %
Sensor B(%)Sensor target V(%)Actuator 2B(%)Actuator 1G(%)
Sensor B setpoint = 50%
target voltage variation
Master O2 flow (2B)
Slave O2 flow 1G=2 x (2B)
P.E.M control response to load-lock activity
![Page 33: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/33.jpg)
Rate enhancement for reactive sputtering controllers
P.E.M set-point verses dynamic deposition rate
Si and SiOx rates at 23 kW (dual rotatable)
0
30
60
90
120
0 20 40 60 80 100
Setpoint (O2 emission 777nm)
Co
ati
ng
ra
te (
nm
. m
/min
)
![Page 34: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/34.jpg)
Rate enhancement for reactive sputtering controllers
P.E.M set-point verses dynamic deposition rate
AlOx depasition rate. Dual rotatable magnetron.
0
20
40
60
80
100
1030507090110
Deposition rate (A.U.)
Targ
et v
olta
ge se
tpoi
nt, %
![Page 35: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/35.jpg)
NbOx-SiOx layer gain in thickness after climate tests
0
20
40
60
80
100
120
KT1_1 KT1_2 KT1_3 KT1_4 KT1_5 KT1_6 KT1_7Sample reference
Laye
r thi
ckne
ss, n
m
NbOx (SiOx at 45%)NbOx (SiOx at 60%)SiOx at 45%PEMSiOx at 60%PEM
+ 0.8 nm after climate test
+ 1.4 nm after climate test
Rate or layer properties determine the controller set-point
![Page 36: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/36.jpg)
On-site process training and support by Gencoa personnel
From UK office or local GENCOA employees
![Page 37: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/37.jpg)
Gencoa provide process controllers, remote access or on-site process tuning
Typical AR production line Speedflo installation
![Page 38: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/38.jpg)
Rotatable & planar sputtering modules with speedflo control available
![Page 39: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/39.jpg)
Complete process control modules including electronics
Rear cabinet will house all the control and components
![Page 40: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/40.jpg)
PEM sensors have argon bleed lines (not shown) to prevent coating of the optics
All parts have been positioned for optimum process operation
![Page 41: GENCOA - KCMCkcmc.biz/v2/download/GENCOA/Speedflo_presentation_gencoa.pdf · 2015. 8. 20. · • Gencoa can provide a range of process control solutions based upon the Speedflo system](https://reader035.fdocuments.net/reader035/viewer/2022070211/60fe5c0b2b658514f11c13c0/html5/thumbnails/41.jpg)
Conclusions
• Gencoa can provide a range of process control solutions based upon the Speedflo system for high rate oxide & nitride layers. • As an example with the DLIM magnets, Speedflo controller and Gencoa gas bars a rate of between 40nm.m/min and 60nm.m/min will be achieved for SiO2 from 1 dual magnetron pair running at around 15kW AC per m length of target. • The actual rate will be 40-55nm.m/min and will depend upon the coating properties required from the film. • Gencoa can offer on-site process implementation and optimization based upon many years of experience on a wide range of processes and machine platforms.