Foils For VLSI Research Dan Hutcheson Video Interview with...
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August 30, 2007 1 VLSI Research Video Interview with Yan Borodovsky
Transcript of Foils For VLSI Research Dan Hutcheson Video Interview with...
August 30, 2007 1
VLSI Research
Video Interview with Yan Borodovsky
August 30, 2007 2
DIC Micrograph of “red laser pointer demo”Pixelated Phase Mask
August 30, 2007 3
A. 65nm node Pixelated Phase Mask Database example B. SEM image of the portion of 65nm node Pixelated Phase
Mask
A B
August 30, 2007 4
A. 65nm node Pixelated Phase Mask Database example B. Atomic Force Microscope Picture of the portion of
65nm node Pixelated Phase Mask
Atomic Force Microscope Picture of the maskBA
August 30, 2007 5
A. 65nm node Pixelated Phase Mask Database example B. Wafer Resist Pattern produced from 65nm node
Pixelated Phase Mask
A B
