Final Presentation - Graduation Project Ebid
Transcript of Final Presentation - Graduation Project Ebid
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Electron Beam Induced Depositioninvestigating a new tool for Spintronics
Graduation presentation
Michael Beljaars
Hans Mulders, FEI Company
Reinoud Lavrijsen, TU/e
Henk Swagten, TU/e
Physics of Nanostructures (FNA)
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Spintronics
Electron• charge• spin
e-
spin + electronics =
Spintronics!
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Electron Beam Induced Deposition
substrate
needle
electron beam
precursor
vacuum environment
EBIDEBIDEBIDmultiple passes
element of interest
contamination
precursor fluxdeposition
direct structuring deposition of arbitrary material resolution down to 10 nm
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Possibilities of EBID
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EBID deposited iron magnets
substrate
• What equipment is used ?• Which precursors are investigated?
Deposition yieldComposition
Magnetic properties
Shape analysis
• How fast can we make a deposition?• How much iron is in the magnet?• How strong is the magnet?
• How well defined is the shape of the deposition?
FEI dual beamInvestigated iron precursors
iron
NZ
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FEI dual beam
view inside chamberoutside view
electron beam
sample holder
needle
vacuum chamber
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Investigated iron precursors
Tri-iron-dodeca-carbonyl Di-iron-nona-carbonyl
Fe3(CO)12 Fe2(CO)9
low gas flux high gas flux
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Deposition yield
substrate
deposition
beam
VY
I t
deposition volume V
high gas flux
low gas flux
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Composition
iron
carbon
oxygen
high gas flux
low gas flux
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Magnetic properties
AFMheight image
MFMmagnetic image
NZ
5 µm
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Shape analysis
substrate
deposition
3D AFM image
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Surface processes
substrate
needle
adsorption
desorption
diffusion
vacuum environment
high N
low N
surface occupation N
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EBID and surface occupation
substrate
deposition
electron beamdepositiondeposition
adsorption desorption
diffusion diffusion
N
N
heig
ht
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Simulation
• Adsorption• Desorption
• Diffusion
• Deposition
adsE
diffE
adsorptiondesorption
distance to surface
pote
ntia
l
adsEdiffE
distance along surface
pote
ntia
l
diffusion
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Experiment and simulation
heig
ht (
a.u.
)
length (a.u.)
width (a.u.)
experiment simulation
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Waiting time experiment
substrate
deposition
5
10
15
20
25
30
35
0 ms15 ms40 ms
0 1 2 3 4 50
heig
ht (
nm)
width (μm)1 1.2 1.4 1.6
0
5
10
15
20
25
30
35
width (μm)
high surface occupation
low surface occupation
diffusion
spiralingdeposition
inner to outer
Pass time 45 ms
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Conclusions
• Depositions of two iron precursors characterized• Yield low yield for Fe3(CO)12, average yield for Fe2(CO)9
• Composition very high iron content (up to 60 atomic %)
• Magnetic properties indications for ferromagnetic behavior
• Deposition shapes understood• Model developed• Experimental results qualitatively explained by model
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Outlook
• Model enhancement• determine energy barriers involved in surface processes• quantitative description of deposition process
• Deposition properties• further enhance composition• extensive magnetic characterization• investigate electrical conductance
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Electron Beam Induced Deposition
substrate
needle
electron beam
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Magnetic properties
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FEI dual beam
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Investigated iron precursors
Tri-iron-dodeca-carbonyl Di-iron-nona-carbonyl
Fe3(CO)12 Fe2(CO)9
methanol
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Deposition - Diffusion regimes
N
N
heig
hthe
ight
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Giant Magneto Resistance
spin + electronics = Spintronics!
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Electron – Solid interactions
substrate
electron beam
secondary electrons
Increasing beam energy
0 1 2 3 4 50 . 0
0 . 5
1 . 0
1 . 5
2 . 0
2 . 5
SE y
ield
(SE
/ P
E)
elect ron beam energy (keV )
area of maximum SE yield
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Electron Beam Induced Deposition
substrate
needle
electron beam
precursor
adsorption
desorption
precursor flux
diffusion
vacuum environment
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Electron – Solid interactions
substrate
electron beam
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Electron – Solid interactions
substrate
electron beam
secondary electrons
Increasing beam energy
0 1 2 3 4 50.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
SE
yie
ld (
SE
/ P
E)
P E energy (keV )
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Outline
• Introduction to Spintronics• Electron Beam Induced Deposition• Investigated iron precursors• Characterization of depositions• Deposition geometry
• Conceptual model• Experiment
• Conclusions• Outlook
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Deposition yield
substrate
deposition
beam
VY
I t
Beam current (nA)
Yie
ld (
μm
3 nC
-1)
deposition volume V
high gas flux
low gas flux
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EBID deposited magnets
substrateEBIDEBIDEBIDmultiple passes
• What equipment is used ?• Which precursors are investigated?
Deposition yieldComposition
Magnetic properties
Shape analysis
• How fast can we make a deposition?• How much iron is in the magnet?• How strong is the magnet?
• How well defined is the shape of the deposition?
FEI dual beamInvestigated Iron precursors