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Nb3Sn Films by Multilayer Sputtering

A.A. Rossi^*, S. M. Deambrosis*, S. Stark*, V. Rampazzo*, V. Rupp^*, R. G. Sharma *. F. Stivanello* and V. Palmieri^*

^ Padua University, Material Science Dept., Italy• INFN – Legnaro National Labs ., Italy • IUAC, New Delhi, India

Nb/Sn sputterin

sputtering deposition Interdiffusion

No Interdiffusion

SC/Insulator deposition-> Increase of Hc

Nb3Sn

H

MULTILAYERS FOR SRF

Our Aim

Possible Future Application

Interdiffusion

Sample deposition by PLANAR MAGNETRON

6 GHz CAVITY mini-lab

• TUMBLING• BCP• EP• SPUTTERING• CRYOGENICS

Cavity deposition by CYLINDRICAL MAGNETRON

6 GHz cavity RF TEST

• BALANCED PLANAR MAGNETRON• 2 INCHES TARGET

Nb Sn

Sample deposition by PLANAR MAGNETRON

Sn MAGNETRON

SAMPLEOLDER

Nb MAGNETRON

STEP MOTOR

14 cm

Sample deposition by PLANAR MAGNETRON

Sample deposition by PLANAR MAGNETRON

MULTILAYER – ANALISI XRD

Only Nb3Sn peaks

Sample deposition by PLANAR MAGNETRON

Sample deposition by PLANAR MAGNETRON

Max RRR = 3,58

Sample deposition by PLANAR MAGNETRON

Sample deposition by PLANAR MAGNETRON

6 GHz CAVITY minilab

• TUMBLING• BCP• EP• SPUTTERING• CRYOGENICS

Cavity deposition by CYLINDRICAL MAGNETRON

6 GHz cavity RF TEST

------------<<<0>>>-------------

• No electron beam welding, neither for flanges

• Obtained by spinning from Nb scraps

• Short fabrication time

• Fast and low cost BCP and EP treatments (~ 3lt acids)

• Inexpensive Cryogenics, fast cooling and warming up

• Quick RF Measurements (traditional rf system)

6 GHz CAVITY MINILAB

Cavity Geometry

20 mm

36 mm

Seamlessflanges

[mm] Flange Area = 7 cm2

Cavity fabrication

• By Spinning from scraps of spun 1.5 GHz

1.5 GHz Cavity

6 GHz Cavity

40 cm

Low research budget Large amount of cavities

6 GHz

Mini Mechanical Tumbling

SiC ZrO2 Al2O3 + SiO2

Turbula mixer

Willy Bachofen

http://www.wab.ch/

Mini EP

A Mini – BCP / EP Lab

6 GHz CAVITY MINI-furnace

6 GHz CAVITY MINI-Camera

Ready for the RF measurement

6 GHz CAVITY: MINI-Kapton gasket

Cryogenic infrastructure:

Pick Up

Coupler (mobile)

Double Pumping line

Bottom Part

Pick-up Antenna

Coupler Antenna

Pick-up-PipeCoupler - Pipe

Pick-up Flange

Bellow

Coupler Flange

The Bottom Part

Cryogenic infrastructure: Triple Stand

μ-metal Screen

cavity

Quick RF MeasurementsThe insert has been conceived to even enter into a 450 lt Helium dewar

INSERT

DEWAR

RF measuring system

Sample deposition by PLANAR MAGNETRON

6 GHz CAVITY mini-lab

• TUMBLING• BCP• EP• SPUTTERING• CRYOGENICS

Cavity deposition by CYLINDRICAL MAGNETRON

6 GHz cavity RF TEST

Idea: 1

Sn Nb

Idea: 2

Nb

Sn

Idea: 3

Sn coil

Nb

Idea: 4

z

Rotating Cavity

Sn

Nb

Sn

Nb

Idea: 5

z

Rotating Cavity

Sn

Nb

Idea: Post. Cyl. 1Idea: 6

Sn

Nb

Idea: Post. Cyl. 2

Magnets

Idea: 7

Magnets

Nb

Sn

Nb

Sn

Nb

Idea: 8

Choosen magnetron sputtering configuration

POST-MAGNETRON

Nb/Sn Target

Nb Target (wings)

Sn TargetWater

OUT

Water

IN

Electrical Insulator

Grounded Screen

Electrical

feedthrough

CathodeCooling

MULTILAYER – THE TARGET

Sn/Nb cathode area ratiodecided on the basis ofsputtering yields

NbNb

SnSn

MULTILAYER – CAVITY MOTION

Manipulator

Worm

Screw

Cavity Holder

Linear

Feedthrough

MOTOR STEP

MANIPOLATORE

MULTILAYER – CAVITY MOTION

MULTILAYER – UHV CYLINDRICAL SYSTEM

Linear Feedthrough110 cm

Coil23 cm

CylindricalMagnetron45 cm

Linear Feedthrough

Coil

Window

Water Cooling

Cavity

Nb / Sn Cathode

MULTILAYER – UHV CYLINDRICAL SYSTEM

To The Pump

ANNEALING SYSTEM

MULTILAYER – FIRST RF TEST RESULTS

1

MULTILAYER DEPOSITION IN 6GHz CAVITY

Possibility to perform a low cost and dense statistics

Actual measurement rate 30 cavities / month

Possible rate with 3 Cryostats 100 cavities / month

Thank You

For this and much more material, visit the

free download area on:

http://www.surfacetreatments.it/

http://www.slideshare.net/PalmieriProfEnzo