EUV characterization Christian LaubisChristian Laubis,...
Transcript of EUV characterization Christian LaubisChristian Laubis,...
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membrane samplepEUV characterization
Christian Laubis PTBChristian Laubis, PTB
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Outline
• PTB's synchrotron radiation laby
• Scatter from structures
• Scatter from random rough surfaces
• Measurement geometries• Measurement geometries
• SAXS
• Lifetime testing
• Wrap-up
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PTB - the National Metrology Institute
About PTB:
PTB the national metrology institutePTB – the national metrology institute providing scientific and technical services
What are PTB's capabilities?
PTB measures with the highest accuracyand reliability – metrology as the corecompetence
www ptb dewww.ptb.de
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Storage Rings in Berlin-Adlershof
BESSY II
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PTB @ BESSY I, II, MLS
1982 – 1999: BESSY I BESSY II:circumference 250 m
PTB:
circumference 250 m electron energy 1.7 GeV
since 1999: BESSY II 10 beamline branchesfrom 400 nm (3 eV)
to 0.02 nm (60 keV)
UV X‐ray
Metrology Light Source MLSi f 48
EUV
since 2008: MLS
8 beamlines
circumference 48 m electron energy 100 ‐ 630 MeV
8 beamlinesfrom 8 mm
to 4 nm (300 eV)
UVUV
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THz EUVUV
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Experimental stations at the MLS
Undulator1a IR radiation1b d fl t d di t b
EUVVUV
1b deflected direct beam1c Compton backscatter1d VUV/EUV monochrom.
bending magnet 2a calculable radiation2b UV/VUV monochrom.
(so rce calibration)
irradiation(source calibration)
3 EUV radiometry4 VUV radiometry5 THz beamline6 IR beamline7 diagnostics front end
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PTB‘s EUV Reflectometer
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Optics for EUV Sources
5 sr collector, 670 mm outer diameterdesigndesign
coatingmounted for measurements at PTBmounted for measurements at PTB
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EUV-Ellipso-ScatterometerDetector
azimuthal 110° 0.0002°l ° °polar 210° 0.0002°
flip 358° 0.01°
S lSampleX 100 mm 0.5 µmY 100 mm 0.5 µmZ 25 mm 0 5 µmZ 25 mm 0.5 µmrot.‐X 130° 0.0002°rot.‐Y 130° 0.0002°rot ‐Z 358° 0 0002°rot. Z 358 0.0002
sample size: 190 x 190 x 70 weight: up to 5 kgweight: up to 5 kg
no lubricants used(no organic contaminants)
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( g )
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Soft X-ray radiometry beamline at BESSY II
wavelength range 1 nm to 25 nm
EUV ellipso‐scatterometer
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EUV ellipso‐scatterometer
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at wavelength reflectometryat-wavelength reflectometry
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EUV reflectance
reflectance of reference membranes
=> clear thickness oscillations> clear thickness oscillations
=> minor differences between fields
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EUV transmittance
transmittance of reference membranes
=> rather SiN instead of Si3N4
transmittance broad spectral rangegrey curves: CXRO datasolid line: SiNdashed line: Si3N4CXRO data shifted by 0 36 nm to account for chemical shift
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CXRO data shifted by 0.36 nm to account for chemical shift
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at wavelength scatter measurementsat-wavelength scatter measurements
scatter in reflection geometry
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EUV Scatterometry
Scheme of scatterometry measurements
geometrical properties:• structure width• structure height
measurements
test pattern: • structure height• edge angles • edge profiles
p
semi‐dense bright linesCD 180 nm, duty cycle 1:3
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• …..
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EUV Scatterometry
Diffraction of semi‐dense 180 nm bright lines at 1:3 duty cycle.
fix angle of incidence, 6°3 wavelengths: 13.65, 13.92, 13.40 nm
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Comparison: Scatterometry vs. AFM
CDblue: scatterometry, red: AFMoffset scatterometry: ‐2.7(18) nm
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PSD from scatter measurements0.2 s200 s4000 s
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Membranes: EUV scatter in reflectance
scatter in reflectance
Scale is log10 of CCD‐counts /100 s
the reflected beam indicates severe distortions of the membrane for fields 2 and 4
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at wavelength scatter measurementsat-wavelength scatter measurements
scatter in transmission geometry
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EUV scatter in transmission geometry
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Membranes: EUV scatter in transmission
membrane broken
scatter in transmission
Scale isScale is log10 of CCD‐counts /100 s
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SAXSSAXS
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X-ray Beamline
energy range: 1.75 keV to 10 keV(0.7 nm to 0.1 nm)
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(0.7 nm to 0.1 nm)
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SAXS / GISAXS set-up at X-ray beamline
HZB SAXS set-up:HZB SAXS set-up:• length about 3 m• weight about 3 t
Sample – detector distance: 1.4 m to 4.3 m
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X-ray detector PILATUS
Pilatus 1M Vacuum version, 320 µm Si thickness981 x 1043 pixels, pixel size 172 x 172 µm², area 169 x 179 mm²981 x 1043 pixels, pixel size 172 x 172 µm , area 169 x 179 mm
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SAXS measurement geometry
Intense monochromaticradiation photon energy E
Sample 2D detectorradiation, photon energy E
4R di l i t ti S tt d i t it 4 hc
Radial integration Scattered intensity as function of momentum transfer
q = E sin
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SAXS: position sensitivity the X‐ray beam cross section is 0.5 x 0.5 mm²
data in center of membrane data 0.6 mm off center
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SAXS radial integral
scheme of the reciprocal grid:unit vectors indicated in red
length: pitcha 1
23
pitch adapted to measured peaks: 28.2 nm
i di d 7 i h
pitch2
indicated are 7 vectors seen in the scatter image ; ; ; ; ;;
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note that the unit vectors are not orthogonal here: length^2 = h^2 + k^2 + hk
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Lif ti t tiLifetime testing
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Irradiation beamline setup
The irradiation beamline is designed to captureand focus the available radiation from a bending magnet of BESSY II
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Irradiation beamline: Spectral distribution
blue dashes: spectrum after mirrorred line: with additional Si filter
i t l 0 9 W ( filt ) 2 5 J / lintegral power : 0.9 W (no filter) 2.5 nJ / pulse0.15 W (Si‐Filter) 0.4 nJ / pulse
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Irradiation testing
Chamber with gas supply system
distance "161"
and load lock
distance "334"
Power density for different
chamberpositions.chamberpositions.
Two scalingsfor best depiction of 'H ' d 'C ld'
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'Hot ' and 'Cold' spot.
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wrap-up
• PTB offers EUV scatterometry measurements in transmission
and reflection geometry on membrane samples and surfacesand reflection geometry on membrane samples and surfaces
• Structures as well as random rough surfaces can be investigatedg g
• SAXS measurements are available at PTB
• PTB operates an EUV lifetime testing facility
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Th k !Th k !Thank you !Thank you !
Physikalisch-Technische BundesanstaltyBraunschweig and BerlinAbbestraße 2-1210587 Berlin10587 BerlinChristian LaubisTelefon:+49 30 3481-7125E M il h i ti l bi @ tb dE-Mail: [email protected]