EP-DT-TFG Laura · 2020-05-04 · EP-DT-TFG Premelt T. Schneider DT seminar 11/03/2020 4 Gold 1...
Transcript of EP-DT-TFG Laura · 2020-05-04 · EP-DT-TFG Premelt T. Schneider DT seminar 11/03/2020 4 Gold 1...
EP-DT-TFG Laura
1T. Schneider DT seminar 11/03/2020
EP-DT-TFG Manual Mode
2T. Schneider DT seminar 11/03/2020
Manual Mode
• Getting to know the machine• The controls• The software• How to start up• How to close down• E-gun
• What is the power of the e-beam?
• Getting to know the materials
EP-DT-TFG Manual Mode
3T. Schneider DT seminar 11/03/2020
Manual Mode
• Preparation of material• Aluminium• Chrome• Copper• Gold• Quartz• Titanium
• Premelting• Filling up crucibles
little by little• Uniform, melted
material w/o gas enclosures
EP-DT-TFG Premelt
4T. Schneider DT seminar 11/03/2020
Gold1 – After first meltdown 2 – Refill material
3 – Second meltdown, not successful
4 – Third meltdown, successful
• Boiling point: 2800 ᵒC• Density: 19.32 g/cm3
• Thermal conductivity: 319 W/m*K• %-power: 25%• Graphite crucible• Small e-beam pattern
EP-DT-TFG Premelt
5T. Schneider DT seminar 11/03/2020
Copper1 – Before meltdown 2 – After first meltdown
3 – After second meltdown 4 – After third meltdown
• Boiling point: 2575 ᵒC• Density: 8.92 g/cm3
• Thermal conductivity: 413 W/m*K
• %-power: 22%• Molybdenum crucible• Small e-beam pattern
EP-DT-TFG Premelt
6T. Schneider DT seminar 11/03/2020
Aluminium 1 – Before meltdown
2 - After meltdown
• Boiling point: 2470 ᵒC• Density: 2.7 g/cm3
• Thermal conductivity: 237 W/m*K• %-power: 45%• Wettens easily• Fabmate crucible• Small e-beam pattern
EP-DT-TFG Premelt
7T. Schneider DT seminar 11/03/2020
Titanium1 – After initial meltdown 2 – Refill material
3 – After first meltdown after refill
4 – After second meltdown after refill
• Boiling point: 3290 ᵒC• Density: 4.51 g/cm3
• Thermal conductivity: 24,5 W/m*K• %-power: 60%• Molybdenum crucible• Small e-beam pattern
EP-DT-TFG Premelt
8T. Schneider DT seminar 11/03/2020
Chrome1 – First fill up of crucible 2 – After first coating
3 – Material grounded and refilled
• Boiling point: 2670 ᵒC• Density: 7.15 g/cm3
• Thermal conductivity: 111 W/m*K• %-power: 8%• Sublimation – no liquid phase• Copper crucible• Big e-beam pattern
EP-DT-TFG Initial tests
9T. Schneider DT seminar 11/03/2020
First Coatings and Initial tests• Inficon thickness monitor• Thickness tests
• Weight tests (EP-DT-EF-TFG)• FIB/SEM tests (EN-MME)• Interferometer (EN-MME-MM)• Veeco Dektak Mechanical
profiler (TE-VSC-SCC)• Bruker Dektak Mechanical
profiler (EPFL - CMI facility)FIB/SEM (EN/MME)
Bruker Dektak (EPFL – CMI) Interferometer (TE-VSC-SCC)
EP-DT-TFG Initial tests
10T. Schneider DT seminar 11/03/2020
First Coatings and Initial tests• Adhesion tests
• Cross hatch scratch test• Tape test• Pull-off test (TE-VSC)
EP-DT-TFG Automatic Mode
11T. Schneider DT seminar 11/03/2020
Automatic Mode
• Combine data from manual coatings• Analyze data to find parameters• Test parameters
• Create test recipes• Conduct test coatings• Transmission tests of samples• Analyze results and tune recipe• Repeat until we reach best recipe
View of e-gun during coating
EP-DT-TFG Automatic Mode
12T. Schneider DT seminar 11/03/2020
Automatic Mode• Safer• More user-friendly• High precision, even for very
thin coatings <2nm• High repeatability• New process
• Stable• Much thinner• Improved uniformity
EP-DT-TFG Study of Cr
13T. Schneider DT seminar 11/03/2020
Study of Cr coating for RD51-PICOSEC
• Study for RD51-PICOSEC
• Aim:
• As transparent as possible
• A level of resistance in the MOhms
• More transmission = more data
• Previous results – 50% transparency
• New results – improve on old results
EP-DT-TFG Study of Cr
14T. Schneider DT seminar 11/03/2020
EP-DT-TFG Study of Cr
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EP-DT-TFG Study of Cr
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EP-DT-TFG Conclusion
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Conclusion
• Tests in manual mode• Automatic mode
• Study of Cr
• New process• Controlled environment• Highly stable and
repeatable processes• Better precision• Thinner layers
• Future projects
EP-DT-TFG Laura – x subject
18T. Schneider DT seminar 11/03/2020
Questions?