Energy Saving and Waste Reduction Activities

in TEL™

Toshiya Matsuda, Sr. Advisor, TEL

Takahiro Horiguchi, TEL

EHS Promotion Center

Tokyo Electron Limited

New corporate brand logo

Tokyo Electron launched a new corporate brand logo as

of October 1, 2015.

Energy Saving and Waste Reduction Activities in TEL

1,TEL’s Policy

2,TEL’s Operation – Waste Reduction and Recycle

3.TEL’s Products

4. Conclusion

1,TEL’s Policy

2,TEL Operation

3,TEL’s Products

4, Conclusion

CO2 emission across the value chain

4%

(84%)

10%

86%

Environmental initiatives

Our mission, responsibility,

and also a considerable business opportunity

Enhance energy efficiency of TEL products Reduce CO2 emissions by reducing power consumption,

chemical usage, etc.

TEL plant & office initiatives for environment Reducing energy consumption in logistics and production

Provide manufacturing equipment for

energy saving devices OLED production equipment

SiC epitaxial equipment for power IC

1,TEL’s Policy

2,TEL Operation

3,TEL’s Products

4, Conclusion

TEL’s Operation – Waste Reduction and Recycle

Keywords are ;

>> Establishment of “Venous Industry” and Strong/Powerful

Leadership by Government.

>> Set Goal(97% Recycle) and Continuous

Commitment/Monitor by Top Management from Industrial

Side.

Sales/Field service

R&D/Manufacturing/Engineering

Japan operations(As of Apr 1, 2016)

Oshu

Sapporo

Nirasaki

Tokyo Electron (Head Office)

Taiwa

Osaka

Tokyo Electron MiyagiTokyo Electron Yamanashi

<Nirasaki(Fujii/Hosaka)>

Tokyo Electron Tohoku

Tokyo Electron Kyushu

<Kumamoto(Koshi/Ozu)>

Fuchu Technology Center

Akasaka

6,852

8,729

10,886

7,076 7,003 6,155

7,795 8,118

4,139 4,497 4,735 3,503

1,216

1,433

1,227

1,586 970

1,211

990 1,289

1,114 1,370 1,128

1,169

774

782

920

854

646 605

742 902

637 776 832

906

774

782

920

1,098

646 706

866 644

637 664 720

754

553

391

460

488

431 404

619 644

478

489 480

587

884

912

920

1,098

1,077 1,009

1,361 1,289

955

984 963

802

0

2,000

4,000

6,000

8,000

10,000

12,000

14,000

16,000

2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016

Liquid waste Metal/product waste Paper Plastics Wood waste/packaging materials Others

Total amount of Waste at TEL(Japan)Unit : Tons

3,657

3,938

3,268

847

431 469 414 366 288 276 245 331 215 172 94 122

0

1,000

2,000

3,000

4,000

2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016

Generation of incinerated and landfill waste（Japan）（Tons）

Total amount of incinerated and landfill waste

at TEL(Japan)Unit : Tons

Examples of Recycle at TohokuMaterials

Steel, Stainless, Aluminum, BottlesMaterials

Steel, Stainless, Aluminum

Papers：Copies, Paper cups Bath tissue

Papers：cardboard cardboard

Other ：Woods, coolite and plastic Solid fuel (refuse-derived fuel)

Other：kitchen waste・sludge Organic manure

Waste waterEffluent to river after treatment

Materials for steel after treatment sludge

Other：toner cartridge toner cartridge

Waste

water

High

Concentration

Low

Concentration

Effluent

disposal

Sludge

Cement Effluent

disposal

Sludge

Material of Stainless

Treatment

Treatment

Waste water which has share of waste 70% for recycle

Optimize the amount of usage and separate and search and contract

14

Promoting valuable resources from waste at Tohoku

Waste disposal: promote to increase valuable resources from waste

& Review disposal companies

(ton/month)

Amount of various cables to

M company in FY2014

Balance between M company

and Y companyEstimated cost

reduction amount

6320kg JPY179/kg JPY1,131,280

Plan

By reviewing disposal company, expect about new JPY 1 million cost

reduction from waste disposal.

Valuable resources and

review of disposal companies

Waste and Recycling rate (%)

Th

e a

mo

un

t o

f w

aste

Re

cyclin

g r

ate

Waste Reduction at Yamanashi

(458) (507) (498) (508) (525)(389) (474)

(664)

1,533

1,769

1,665

1,790

1,865

1,617

1,404

1,183

111

96

75

95 134

89

34

25

85

88

91

94

97

100

(1,000)

(500)

0

500

1,000

1,500

2,000

2,500

特管

一般・産廃

有価物

リサイクル率

Hazardous

Waste

Valuable

s

Keep 100 % recycle

Valuables resource of waste

(Change from “blue”to

“green”)

General/Indu

strial Waste

Recycle

rate

FY2008 FY2009 FY2010 FY2011 FY2012 FY2013 FY2014 FY2015

Recycle

rate

％

Am

ount o

f Em

issio

n

ｔ

●Be Valuables by waste separate （Reuse material ）

e.g. Separate Waste plastics

Problems

Gap of Selling price and Cost

・Selling Price＜Management Fee

・Change price（Especially down time）

Sample of crushed plastic pellet

1,TEL’s Policy

2,TEL Operation

3,TEL’s Products

4, Conclusion

TEL’s Products -Energy saving , emission reduction

Keywords are ;

>> energy-saving activities of the equipment in the TEL group

>>Future issues of energy reduction

Energy saving activities

1st STEP ( Previous)

Based on our common goals, we have undertaken

initiatives to engage with energy conservation

Energy & DIW

(Deionized water)

Reduction 10%

2nd STEP ( Now)

Energy saving activities

Tactras™ Vigus™ Plasma Etch System

Saving energy consumption of chiller, pump and heater

Elec.

TELINDY PLUS™ Thermal Processing System

Ensuring the use of proper amount of nitrogen

N2

CLEAN TRACK™ LITHIUS Pro™ Z Coater/Developers

Reducing the amount of exhaust of rotating cup modules

and saving energy by temperature/humidity control

EXH

Triase⁺™ SPAi Plasma Oxidation/Nitridation System

Eliminating temperature control unit by using plant-sourced cooling

water directly

Elec.

Energy saving activities

EXPEDIUS™-i Auto Wet Station

Reducing pure water consumption in standby mode

Water

CELLESTA™-i Single Wafer Cleaning System

Ensuring the use of proper amount of nitrogen

N2

Precio nano™ Wafer Prober

Reducing the amount of dry air supply with dew point monitoring

Air

Certas WING™ Gas Chemical Etch System

Improving productivity with two-wafer processing

Elec.

Recycle and reuse

Chemical recycle (Solid)

Ruthenium (Ru) recovery and reuse

in single wafer deposition

Material

Maker

Tool

Recycling process of Ru can reduce 30% of CO2

consumption compared with newly refined.

Trap

Process

Collection

Refining

Water reclaim

Single wafer clean system CELLESTA™ -i

adds drain ports to reclaim DIW by FAB

CELLESTA™+ CELLESTA™-i

Discharge

Collection→Reclaim

Discharge

Exhaust reuse

Heat

Exchanger

Exhaust Reduction

by Closed Loop

Thermal ExhaustBatch Furnace

Reactor

Exhaust reduction by closed loop

Rapid Cooling Unit

Parts reuse

Refurbishment of the thermal processing

system heater

Insulator

Heater ElementWater Cooling Pipe

Heater

Approach to increasing environmental impact

Source: World Semiconductor Council

20082008

Issues of energy saving

We recognize the challenge of absolute energy saving

due to increased productivity and process complexity

Nanowire FET

(Future)

Future≤ 7 nm node193i litho - Multiple masks

EUV litho

Memory like gridded DR

FIN FET

201222 nm node193i litho - Multiple masks

Source : Intel

(22 nm node (2012))

Planar

200565 nm node

193 nm litho - Single mask

Source : Intel

(65 nm node (2005))

Challenging toward to next generation

Approaches to reduction of total environmental impact,

in addition to areas covered by SEMI S23.

300mm

Energy Conservation

• SEMI S23 Base

Supply:

• Electricity

• N2

• Water

• Air

• EXH

Next generation

Resource Conservation

Challenge to reduce and recycle/reclaim

• Sub Facility Unit

• Supply Utility

• Waste

• Chemical/Gas

• Green house gas (GHG) use/emission

• Effluent

• Spare Parts/Consumables

Sustainable value creation cycle

Big data

analysis

Process

control

ECO

control

Equipment

control

Tool suppliers strength in value creation

SEMI E167

Lot/Wafer Dispatch

Recipe

library

Resource-saving recipe

Monitor/Analyze actual usage

(May add Chemical Usage and Effluent)

Resource visualization

SEMI S23

Data mining

Electricity [kWh] Vacuum [L/min]

N2 [L/min] Exhaust [m3/min]

Dry Air [L/min] Water [L/min]

save cut

shift

Energy control

Parts/Unit management

Fab utility flow / approach points

Process

Tools

Process

Tools

Make-up

AirLighting

Air Circulation (Large part of CR energy)

Pump Abatement

Process

Tools

Process

Tools

Chiller

Large environment impact by heat dissipation/waste/exhaust

PCW UPWProcess

Gas

Chemical

SupplyAir N2

Cooling

Coil

Waste Water

Exhaust

Process Exhaust

Heat Dissipation

F-GHG

Electric

Power

Chilled

Water

FFU

1,TEL’s Policy

2,TEL Operation

3,TEL’s Products

4, Conclusion

Conclusion

TEL is continuously developing technology to reduce the consumption of

electricity, process gasses, chemicals and water, and has established the

target in 2014 ahead of schedule.

Recently, wafer processing steps are becoming more and more complex due

to device scaling and 3D structure. This increases energy consumption and

gas/chemical/water usage.

TEL already set the corporate goal to reduce 10% of energy and water usage

by 2018, compared to 2013 using new technologies such as Big data and eco

monitor and further reduction by collaboration with semiconductor production

fab for 3R.

We will contribute to a sustainable society through the development of eco-

conscious tools and the collaboration with semiconductor production fab, and

also at TEL Factories.

Final messageworldwide movement

■worldwide movement・COP21・SDGｓ・PRI(ESG) global financial ・investment

institution.

2050 ・Sustainable society(CO2≒0,effects on the environment ≒0)