Energy and Utility Savings With Vacuum and Abatement...
Transcript of Energy and Utility Savings With Vacuum and Abatement...
Energy and Utility Savings With Vacuum and Abatement Systems
Jerome Boegner, Edwards Ltd.
Energy/Water efficient solutionsfor EUV and Epitaxial CVD processes
Evolution of ATLAS for high H2 processes
ATLAS
ATLAS - Combustion/wet abatement
• Burner/Washer system
• Unique “flameless” combustor– Reliability– Low NOx
• Proven PFC abatement performance
• World reference for the abatement of all Etch and CVD processes– Over 5,000 units in operation
Latest generation EPI and EUV processes – EHS challen ges
Edwards developed innovative & greener solutions to reduce
Footprint, Energy & Water consumption
Evolution of ATLAS for high H2 applications
Hydrogen (H2)
Hydrogen chloride (HCl)
Key abatement challengesKey abatement optimization
targets
EUVup to 400slm
per toolNone
1- Full combustion of H 2
2- Cooling of the burner exhaust3- Maintain tool Uptime
EPI4 PC
up to 500slm per tool
up to 120slm per tool
1- Full combustion of H 2
2- Cooling of the burner exhaust3- Scrubbing of HCl & avoid corrosion4- Maintain high Uptime
1- Minimize water & fuel gas consumption
2- Reduce footprint
Innovative solutions: ATLAS-Nova and ATLAS-Epi
Keep the StandardATLAS platform
No increasein footprint
Double H2 treatment capacity to 500slm
�Advanced inlet nozzle design�Modulated CDA/O2 injection�Up to 6 inlets
Double coolingCapacity &
Use anti-corrosion material
���� Increase water re-circulation rate���� PCW-fed heat exchanger
���� High efficiency spray tower& water spray nozzles
New ATLAS Solutions for High Hydrogen processes
Utility savings EUV
0
5,000
10,000
15,000
20,000
25,000
30,000
35,000
40,000
Natural gas (m3) Water (m3)
ATLAS "Evolution" Standard ATLAS
New ATLAS for EUV & EPI – Footprint, Energy & Water
69% reduction
26,000m3/yr
25% reduction
4,000m3/yr
Up to 19 Tons/yr of Carbon saved
Utility savings Epi CVD
0
10,000
20,000
30,000
40,000
50,000
60,000
Natural gas (m3) Water (m3)
ATLAS "Evolution" Standard ATLAS
76% reduction
40,000m3/yr
39% reduction
15,000m3/yr
50% reduction in Footprint
New ATLAS for EUV & EPI – Savings summary
Utility cost% m3/year % m3/year USD per year
EUV 69% 26,280 25% 4,205 $10,222
EPI 39% 14,717 76% 39,946 $14,372
Natural Gas Water
• Latest EPI and EUV process � severe abatement challenges– Hydrogen, exhaust cooling and corrosion
• The ATLAS abatement has evolved to deal efficiently with this type of process whilst achieving significant improvement in:– Sub-fab space utilization (50% footprint reduction)– Energy and water consumption– Operating cost
Integrated vacuum and abatement
Use of Green Modes to reduce Energy and Utility consumption
Field data - Cost savings during the Ramp-up phase
Idle Mode Communication to initiate Green Mode
EZenith in a 40kwpm Foundry Fab (USA)
Idle mode triggers a Green modein the sub-fab equipment
~ 400 process tools
81% idle mode capable
FabWorks Dry Pump Power Logging
Three Chamber Etch Tool - Abatement Fuel savings
A Summary Look at Four Examples
• Total expected annual savings is $5000 - $8,000 per tool– Verification will improve tracking– CVD tools with larger pumps and N2 will show larger savings– Continuous Improvement Plans will increase savings
• Savings expected to decrease as fab ramps
Utility General expectations
Etch 1 Etch 2 Etch 3 Etch 4
($/yr) ($/yr) ($/yr) ($/yr) ($/yr)
Pump Power $100-300 $280 $1293 $342 $64
On a per pump basis, Etch2 (with larger pumps) savings is higher. Etch 4 had low idle rates and uses highly efficient pumps. CVD pumps have N2 savings capabilities.
Atlas fuel $2000-$4000(total)
$3472 $5027
Higher idle time. Scrubber wastewater and process cooling water savings not counted.
Conclusion – Benefits of Green Mode
• During the ramp-up phase savings between $5,000 and $8,000 per tool can be expected
• Savings will decrease when the fab is used to its full capacity– Decrease in idle time
• As more Green Mode data is collected, further savings will be reported, accounting for:– Abatement water, drain and cooling water savings– Pump process cooling water savings– Use of larger pumps in CVD– Continuous Improvement - allowing further reduction in pump
speed during idle period
• Full details can be found in the article from the Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI:
– “Green Mode: Equipment Interface to Reduce Semicondu ctor Sub-Fab Utility Consumption” byAdrienne Pierce, Edwards Vacuum, Inc., Santa Clara, CA USA