Energy and Utility Savings With Vacuum and Abatement...

14
Energy and Utility Savings With Vacuum and Abatement Systems Jerome Boegner, Edwards Ltd.

Transcript of Energy and Utility Savings With Vacuum and Abatement...

Page 1: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Energy and Utility Savings With Vacuum and Abatement Systems

Jerome Boegner, Edwards Ltd.

Page 2: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Energy/Water efficient solutionsfor EUV and Epitaxial CVD processes

Evolution of ATLAS for high H2 processes

ATLAS

Page 3: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

ATLAS - Combustion/wet abatement

• Burner/Washer system

• Unique “flameless” combustor– Reliability– Low NOx

• Proven PFC abatement performance

• World reference for the abatement of all Etch and CVD processes– Over 5,000 units in operation

Page 4: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Latest generation EPI and EUV processes – EHS challen ges

Edwards developed innovative & greener solutions to reduce

Footprint, Energy & Water consumption

Evolution of ATLAS for high H2 applications

Hydrogen (H2)

Hydrogen chloride (HCl)

Key abatement challengesKey abatement optimization

targets

EUVup to 400slm

per toolNone

1- Full combustion of H 2

2- Cooling of the burner exhaust3- Maintain tool Uptime

EPI4 PC

up to 500slm per tool

up to 120slm per tool

1- Full combustion of H 2

2- Cooling of the burner exhaust3- Scrubbing of HCl & avoid corrosion4- Maintain high Uptime

1- Minimize water & fuel gas consumption

2- Reduce footprint

Page 5: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Innovative solutions: ATLAS-Nova and ATLAS-Epi

Keep the StandardATLAS platform

No increasein footprint

Double H2 treatment capacity to 500slm

�Advanced inlet nozzle design�Modulated CDA/O2 injection�Up to 6 inlets

Double coolingCapacity &

Use anti-corrosion material

���� Increase water re-circulation rate���� PCW-fed heat exchanger

���� High efficiency spray tower& water spray nozzles

New ATLAS Solutions for High Hydrogen processes

Page 6: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Utility savings EUV

0

5,000

10,000

15,000

20,000

25,000

30,000

35,000

40,000

Natural gas (m3) Water (m3)

ATLAS "Evolution" Standard ATLAS

New ATLAS for EUV & EPI – Footprint, Energy & Water

69% reduction

26,000m3/yr

25% reduction

4,000m3/yr

Up to 19 Tons/yr of Carbon saved

Utility savings Epi CVD

0

10,000

20,000

30,000

40,000

50,000

60,000

Natural gas (m3) Water (m3)

ATLAS "Evolution" Standard ATLAS

76% reduction

40,000m3/yr

39% reduction

15,000m3/yr

50% reduction in Footprint

Page 7: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

New ATLAS for EUV & EPI – Savings summary

Utility cost% m3/year % m3/year USD per year

EUV 69% 26,280 25% 4,205 $10,222

EPI 39% 14,717 76% 39,946 $14,372

Natural Gas Water

• Latest EPI and EUV process � severe abatement challenges– Hydrogen, exhaust cooling and corrosion

• The ATLAS abatement has evolved to deal efficiently with this type of process whilst achieving significant improvement in:– Sub-fab space utilization (50% footprint reduction)– Energy and water consumption– Operating cost

Page 8: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Integrated vacuum and abatement

Use of Green Modes to reduce Energy and Utility consumption

Field data - Cost savings during the Ramp-up phase

Page 9: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Idle Mode Communication to initiate Green Mode

Page 10: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

EZenith in a 40kwpm Foundry Fab (USA)

Idle mode triggers a Green modein the sub-fab equipment

~ 400 process tools

81% idle mode capable

Page 11: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

FabWorks Dry Pump Power Logging

Page 12: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Three Chamber Etch Tool - Abatement Fuel savings

Page 13: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

A Summary Look at Four Examples

• Total expected annual savings is $5000 - $8,000 per tool– Verification will improve tracking– CVD tools with larger pumps and N2 will show larger savings– Continuous Improvement Plans will increase savings

• Savings expected to decrease as fab ramps

Utility General expectations

Etch 1 Etch 2 Etch 3 Etch 4

($/yr) ($/yr) ($/yr) ($/yr) ($/yr)

Pump Power $100-300 $280 $1293 $342 $64

On a per pump basis, Etch2 (with larger pumps) savings is higher. Etch 4 had low idle rates and uses highly efficient pumps. CVD pumps have N2 savings capabilities.

Atlas fuel $2000-$4000(total)

$3472 $5027

Higher idle time. Scrubber wastewater and process cooling water savings not counted.

Page 14: Energy and Utility Savings With Vacuum and Abatement ...semicontaiwan.org/en/sites/semicontaiwan.org/files/docs/edwards_jb_1_0.pdf · Conclusion – Benefits of Green Mode • During

Conclusion – Benefits of Green Mode

• During the ramp-up phase savings between $5,000 and $8,000 per tool can be expected

• Savings will decrease when the fab is used to its full capacity– Decrease in idle time

• As more Green Mode data is collected, further savings will be reported, accounting for:– Abatement water, drain and cooling water savings– Pump process cooling water savings– Use of larger pumps in CVD– Continuous Improvement - allowing further reduction in pump

speed during idle period

• Full details can be found in the article from the Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI:

– “Green Mode: Equipment Interface to Reduce Semicondu ctor Sub-Fab Utility Consumption” byAdrienne Pierce, Edwards Vacuum, Inc., Santa Clara, CA USA