Excimer Laser Repair Corporation™

Corporate Profile

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MISSION STATEMENT:

ELRC’s mission is to reduce the cost of ownership for users of Cymer lasers through reduced parts costs, training and

maintenance tools to enable the customer control performance and operation of customer’s excimer lasers.

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Dedicated saving operating costs for their photolithography lasers.

Repair, refurbish, service, and supply maintenance tooling for Cymer lasers series 5000, 6000, and 7000 series.

Training and tools to enable customer to take greater control of all aspects of their excimer lasers.

ELRC Customer Focus

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Founded: March 2005

Location: San Diego, California

Target market: Cymer excimer lasers

Ownership: Private Funding

Employees: 10 full time and 6 part time

Properties: >6,000 square feet of space

ELRC History

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ELRC Key Employee Profile

Employee Role Experience Ken Rebitz CEO, Founder 32 yrs. (Cymer, National, ST, AMAT, Litel) Roger Nielson VP, Sales and Marketing, Founder 25 yrs. (Cymer, Spectranetics, Coherent) Dr. Jesse Buck CTO, Founder 25 yrs. (Cymer, Molectron, Microradian, Intralase) Curt Mixon Engineering and Operations, Founder 31 yrs. (Cymer, Mostek, JMAR, General Atomics) Dave Schreck Facilities Manager 20 yrs. (Cymer, US Navy, Northrup Grumman) Miguel Sanchez Field Service Engineering Supervisor 10 yrs. ( Cymer, Samsung, ELRC) Ty Krebs Final Test Supervisor 5 yrs. (Coherent, ELRC) Arsenio Austria Manufacturing Supervisor 10 Years (Cymer, ELRC)

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Photolithography Excimer Laser Full system support

System refurbishment with OEM equivalent warranties

Parts and service for the following Models;

◦ ELS-5000 ◦ ELS-6000 ◦ NL-7000*

*Non-Consumables available now, consumables late 2011.

Products and Services Offered

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Refurbish entire lasers with warranties.

On-site training with maintenance tools◦ 95% or more of laser maintenance can be done

by customer personnel. Save on expensive service contracts Increase uptime—no waiting for service people.

Consignments◦ Current consignments in Austin, Portland, Seoul,

Singapore and in Europe.◦ Can be set up at customer location or local

office.

Additional Products and Services Offered

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Your business strategy◦ Buy parts as needed◦ Equivalent to OEM “by-the-pulse”.◦ Other ideas, we are flexible.

Train customers◦ ELRC facility◦ Customer fab◦ Laser Operations, level 1 and Higher

Products and Services

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ELRC developed maintenance tools to diagnose electrical, mechanical and optical performance

◦ Software: Works with other tools to automate the power and pressure calibration of the laser.

◦ (PPMD) Portable Pressure Measurement Device: Calibrates gas pressure transducers.

◦ (PMCT) Power Measurement Calibration Tool: Calibrates internal energy monitor.

◦ (CBAT) Coarse Beam Alignment Tool: Visual beam alignment check.

◦ (QBIT) Quantitative Beam Imaging Tool: Digital image of the beam profile and alignment—optimize laser energy output.

◦ (PTTT) Pulse Timing Tool: Ensures accurate timing between trigger and laser pulse.

Products and services--Tools

ELRC software interface

Software calculates offsets and configurable settings then automatically updates laser with new values.

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Calibrates internal pressure transducers

Software calculates and updates the offsets and configurables. Accurate gas refills Precise gas injections to optimize voltage,

bandwidth, and energy sigma. No manual data entry-fewer mistakes.

Portable Pressure Measurement Device (PPMD)

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Calibrates the internal energy monitor. Software automatically updates laser system with the

calibration data. Meter easily fits on laser at beam dump location.

Power Meter Calibration Tool

Installed on laserCustom Power meter withinsertable mirror attached

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Visual image of the beam Ensure the line narrowing module, chamber, and wavelength

stabilization module are aligned. Fits on laser at beam dump location

Installs in seconds.

Coarse Beam Alignment Tool

In use

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Digital image of beam profile.

Image stored for comparison to prior images◦ Track performance over module life.

Quantitative beam energy distribution◦ Align for maximum energy out.

Quanititative Beam Imaging Tool

June ’11 ELRC Confidential

Software Screen view Unit installed in Laser

QBIT Tool

July ‘10 ELRC Confidential

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◦ Four labs with 7 lasers installed. 3-5000s, 1 development, 2 test 3-6000s, 1 development, 2 test 1-7000 used for both development and test

◦ 500 square feet of clean assembly◦ clean and tear down area◦ Warehouse with large parts storage

Facilities in San Diego

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5000 series◦ >120 discharge chambers◦ >60 optical modules, WSM and LNM

6000 series◦ >50 Discharge Chambers◦ > 25 Optical modules◦ Other parts required to support the systems available.

Other parts including vacuum pumps, High Voltage Power supplies, commutator, F2 traps, boards, water modules etc.

Current install base

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Customer Installations

USA Installations:Austin, Dallas, Colorado Springs,Los Angles, Portland, San Jose, Virginia

Asia Installations:S. Korea, China, Japan, Singapore, Taiwan, Malaysia

European Installations:Germany, Israel

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Direct Sales in the US◦ Expert service engineers in Austin and Escondido.◦ Phone support from factory and service engineers.◦ Parts depots in Austin, Portland and Escondido.

Representatives in overseas locations◦ OEM trained service engineers.◦ Inventory stocked in Europe, Seoul, Singapore,

Sales and Support

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Distribution and represtation

USA Direct Sales Asia representation in:

S. Korea, China, Japan, Singapore, Taiwan, Malaysia

Europe is covered both direct and with

representation

Consignment Stock:USA , S. Korea, China, Japan, Singapore, Taiwan

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ELRC provides a low cost solution for laser operations

Provide ALL parts necessary for your 5000, 6000

generation Cymer lasers

Provide the parts, services, tools and training to be your

complete source for Cymer laser support.

Conclusion