Electrochemical reactions of organic compounds in … › ~sasaki › sasaki › dl ›...

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Electrochemical reactions of organic compounds in sub- and supercritical fluids Mitsuru SASAKI 1 , Takanari Oshikawa 1 , Wahyudiono 1 , Tsuyoshi Kiyan 1 , Hidenori Akiyama 2 , and Motonobu Goto 2 1 Graduate School of Science and Technology, Kumamoto University, Japan 2 Bioelectrics Research Center, Kumamoto University, Japan Green Electrochemistry, Environmental Chemistry, PACIFICHEM 2010, Honolulu, HI, US

Transcript of Electrochemical reactions of organic compounds in … › ~sasaki › sasaki › dl ›...

Page 1: Electrochemical reactions of organic compounds in … › ~sasaki › sasaki › dl › pulsed_power...2011/02/02  · Reaction time (h) リン転化率 (%) 0 2 4 6 8 10 1 2 3 No reaction

Electrochemical reactions of

organic compounds

in sub- and supercritical fluids

Mitsuru SASAKI1, Takanari Oshikawa1, Wahyudiono1,

Tsuyoshi Kiyan1, Hidenori Akiyama2, and Motonobu Goto2

1Graduate School of Science and Technology,

Kumamoto University, Japan

2Bioelectrics Research Center, Kumamoto University, Japan

Green Electrochemistry, Environmental Chemistry, PACIFICHEM 2010, Honolulu, HI, US

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Acknowledgment

We would like to thank the Kumamoto University

Global Center of Excellence (COE) Program “Global

Initiative Center for Pulsed Power Engineering” and

Ministry of Environment in Japan (K1904, K2049 and

K2180) for their financial support.

2

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Nano-pulsed arc discharge

Under high-pressures

- No plasma generation due

to lack of energy

Impressed voltage at small space (Micro-plasma)

Impressed voltage within short time (This work)

-Electrons cannot be

accelerated because of their

collision with molecules

Ele

ctro

n t

emp

eratu

re /

eV

Electron density / cm-3

Grow(10 eV)

Corona(6 eV)

Micro-plasma

jet(3 eV)

DC-Arc(1 eV)

Nano-pulsed

Arc discharge

(> 1 eV)

Pulsed Power Technology Enable to provide extremely high energy within nano-

seconds

Electron temperature and density of plasmas(1)

(1) T. Nozaki J.Plasma Fusion Res., 85 3 (2009) 129-130

e-

Flo

w o

f e

lectr

on

s

nsec.

voltage

Electrons are accelerated

under strong electric fields

Solutions:

- Reduce numbers of molecules

- Higher energy of each electron

電子が電場により加速されている

→高い電子温度(活性化エネルギー)を示す

ナノ秒スケールの立ち上がり/下がり

→媒質に及ぼす熱的影響は尐ない(非熱的)

The atmosphere with high electron

density and high activation energy

3

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SC-CO2

Barrier discharge(1)

SC-CO2

Barrier discharge(2)

SC-CO2

Microplasma(3)

SC-Argon

Microplasma(4)

Nano-sized particles have been synthesized

with supercritical carbon dioxide and argon, etc.

・ Higher electron density than gas phase discharge

・ Improve crystallinity on the crystal growth step

・Lower plasma temperature than liquid plasma SCF-discharge plasma

Discharge in supercritical argon

(1) T. Tomai et al., Thin Solid Films, 506-507 (2006) 409-413.

(2) T. Ito et al, J. Mater. Chem., 14 (2004) 1513-1515.

(3) T. Tomai et al., J. of Supercritical Fluids, 41 (2007) 404-411.

(4) H. Kikuchi et al., Thin Solid Films, 516 (2008) 6677-6682.

Material synthesis with SCF-Discharge plasma

Recent problems

- Unknown reaction mechanism on the reactions in supercritical fluids with plasma

- A few researches have been reported

4

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Purpose of this work

SCFs

Aromatic compounds

(Phenol, Aniline, etc.)

Development of a new method for useful carbon-based materials with pulsed discharge in sub- and supercritical fluids

New carbon-based materials

1. Nano-pulsed discharge reaction of

organic compounds in supercritical Ar

2. Nano-pulsed discharge reaction of

organic compounds in subcritical H2O

New reaction pathway

Nano-pulsed

discharge

5

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Solution Out

Gas Out

Ar

T1

T2

T4

T3

Material : SUS316

Max temp : 360 oC

Max press : 30 MPa

Volume : 900 mL

PG

Ar ボンベ 水溶液

ポンプ

パルス電源 高電圧プローブ

デジタルオシロスコープ

C.T.

Plate electrode: (Electro emission)

Stainless steel

(Fe, Cr, Ni, …)

Surface area: 3 cm2

Needle-type electrode:

Tungsten (W)

2.8 cm

2.0 cm

View cell

SCFs nano-pulsed discharge reactor

Batch-type reactor

Gap;1 - 10 mm

Repetition frequency: 4 ~ 250 pps

Plasma generation circuit

Oscilloscope 6

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Me

Me

O

n

Phenyleneoxide polymers

Me

Me

OHn -2H+, -2e-

Polymerization with Cu cat.

Electric oxidation polymer.

Oxidation polymer. with transfer

metal complex

:

Hard to control molecular weight distribution

Hard to separate products

Small-scale synthesis

Engieering plastics

PC

C O

H

H n

PA

Common plastics

CH3

CH3

O C

O

O

n

Super

Engineering Plastics O C

O

O

n

PEEK

S

n

PPS

- High functionality

- Use in many fields

Polyphenylene ether 2,5-dimethoxy phenol

Target on the sub-H2O treatment

Problems

Conventional methods

7

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Target on the sc-Ar treatment

8

Carbon-based functional materials

1st step To prepare carbon-rich materials with pulsed discharge

in sc-Ar

To control the chemical structure of materials prepared

Diamond

sp2 sp3

Graphene

Amorphous

Carbon material

2nd step To functionalize the materials with pulsed discharge

in sub-H2O, sub-NH3 aq. soln. or other solvents.

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0

100

200

300

400

500

600

700

0 1000 2000 3000 4000 5000 6000

Po

wer

(M

W)

Discharge (times)

1

0

2

4

6

8

10

12

14

0

10

20

30

40

50

60

70

0 1000 2000 3000 4000 5000 6000

Cu

rren

t (k

A)

Vo

lta

ge

(kV

)

Discherge (times)

Voltage

Current

1

65

50

35

20

5

-10

-25

Volt

age (

kV

)

0 10 20 30 40 50 60 70

Time(nsec.)

9

7

5

3

1

-1

-30 10 20 30 40 50 60 70

Cu

rren

t (k

A)

Time(nsec.)

Voltage waveform

Current waveform

Pulsed discharge characterization in sub-H2O

Voltage-Current profile

Power profile

電圧印加開始

放電形成

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0.0

10.0

20.0

30.0

40.0

50.0

0 2000 4000 6000 8000 10000

アニリン転化率

(%)

Discharge times (time)

303K 5MPa

373K 5MPa

0

5

10

15

20

25

0 1000 2000 3000 4000

Discharges (pulse)

Ph

en

ol co

nve

rsio

n (

%)

原料転化率に与える温度効果 : 小 (ただし、30~250 oC, 0.1~25 MPa) 転化に要する畜電圧 : アニリン > フェノール

放電回数 500~5000回の領域 : 高温ほど転化が増大(最大30 %)

原料転化率と温度, 畜電圧および放電回数の関係

● 100 mmol/L, 250 oC, 25 MPa

▲ 100 mmol/L, 100 oC, 1 MPa

Anili

ne c

onvers

ion (

%)

Discharges (pulse)

◆ 100 mmol/L, 100 oC, 5 MPa

■ 100 mmol/L, 30 oC, 5 MPa

Aniline conversion (Volt. = 60-80 kV) Phenol conversion (Volt. = 50-60 kV)

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Comparison of reaction efficiency

At 100 oC and 5 (or 1) MPa, the conversions of aniline and phenol

increased compared with the other treatments.

100

35

0.1

4,000

0.5

100

250

5.0

0

1.0

100

100

5.0

4,000

0.5

C0 (mmol/L)

Temp. (oC)

Pres. (MPa)

Discharge (pulse)

Reaction time (h)

アニリン転化率

(%

)

0

2

4

6

8

10

1 2 3

No

reaction 0.4 %

7.4 %

100

260

10

0

1.0

100

28

0.1

10,000

1.0

100

100

1.0

4,000

0.5

0

5

10

15

20

Plasma Sub-critical water Sub-critical water

with Plasma

フェノール転化率

(%

)

13 %

4 % 4 %

11

Anili

ne c

onv.

(%

)

Phenol conv.

(%

)

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協力:熊本県産業技術センター

M.P.C.

B.P.F.N.

It was confirmed that electrical discharge occurred locally

in case of B. P. F. N. compared with the case with M. P. C.

Plate electrode after sub-critical water discharge

Electrical discharge radius: 1701.81 μm Maximum depth: 95.03 μm

Electrical discharge radius: 927.63 μm Maximum depth: 59.74 μm

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5.00 10.00 15.00 20.00 25.00 30.00 35.00 40.00 45.00 50.000

20000

40000

60000

80000

100000

120000

140000

160000

180000

200000

Time

Abundance

OH

O

OH

O

5.00 10.00 15.00 20.00 25.00 30.00 35.00 40.00 45.00 50.00 55.000

100000200000300000400000500000600000700000800000900000

10000001100000120000013000001400000150000016000001700000

Time

Abundance

OHO O

OH

O

5.00 10.00 15.00 20.00 25.00 30.00 35.00 40.00 45.00 50.00 55.000

5000

10000

15000

20000

25000

30000

35000

40000

45000

50000

55000

60000

65000

Time

Abundance

: 94

: 186.21

: 277.15

: 368.83

: 460.46

: 552.89

: 644.15

Mw (g/mol)

3500回

4000回

5000回

5000回(MALDI-TOF/MS)

Oligomers (1-7 mers) was produced at 250 oC

in sub-critical water

Production of phenolic oligomers

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0

50

100

150

200

250

0 50000 100000 150000

Po

wer

(M

W)

Discharge (times)

50,000 100,000 150,0001

0

1

2

3

4

5

6

7

8

0

5

10

15

20

25

30

35

40

1 50001 100001 150001

Cu

rren

t (k

A)

Vo

lta

ge

(kV

)

Discharge (times)

Voltage

Current

50,000 100,000 150,000

40

30

20

10

0

-10

-20

Vo

ltag

e (k

V)

0 10 20 30 40 50 60 70

Time(nsec.)

9

7

5

3

1

-1

-3

Curr

ent (k

A)

0 10 20 30 40 50 60 70

Time(nsec.)

電圧印加開始

放電形成

超臨界アルゴン中パルス放電特性 電圧波形 電圧・電流の変化

電流波形 電力量の変化

14

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Products after discharge treatment in sc-Ar

phenol

hydroquinone

Unidentified compounds

Solvent derived

compounds

OH

OH

OH

MeOH soluble fraction

15

Addition reaction of OH group on phenol molecule occurred

without any additives in supercritical argon

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Conclusion-1

In sub-critical water: Conversion of phenol reached about 30 % with this technique.

With increasing irradiation time, oligomers with higher degree

of polymerizations were produced via polymerization

OH

O .2

O+

OH

O

OHO .3

O O

In supercritical argon: OH addition to phenol to form dihidroxybenzene took place in

supercritical argon, especially at longer irradiation time. No

oligomers production was confirmed.

~ 7 mers

OH OH

OH

16

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Phenol reaction in sub-critical water with pulsed plasma

部分酸化過程(2)

[C6H5O.]に依存する

完全酸化過程(1)

酸素ラジカル生成がカギとなる

(1) H. Sekiguchi and M. Ando, Kagaku kougaku Ronbunshu, 30 (2004) 183.

(2) D. O. Cooney, Z. Xi, J. AIChE, 40 (1994) 361-364.

解離エネルギー

(eV

) (1) 6.4 eV

(2) 5.2 eV

(3) 3.8 eV

(1)

(2)

(3)

H O

H .H .OH +

O O .O .O +

O

H O.

.H +

回収サンプル中に二酸化炭素、有機酸、ジヒドロキシベンゼン類は含まれていなかった。

HO2. H2O2

O2O2-H+

H2O

OH-

C6H5OH C6H5O.

e H. H2

H2

C6H5OH.C6H5O-

H+ C6H5OHAr*

Ar

H2O

H3O+

C6H5O.

H2O

OH* + OH.

C5H4 C5H4O.

O. O.

CH2=CH-C≡CH

C2H2H2O

CO2

HCOOH

C6H5O-C6H5OH (C6H5O-)nH

nC6H5O.

1.0 eV DC-Arc plasma

It can be considered that a

partial oxidation route of

phenol occurs with priority

probably due to difficulty in

generating O radicals.

→ Discharge energy was

mainly consumed for

dissociation of water.

17

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EDX analysis

Carbon rich thin layer was produced

Coating agent

Surface of the electrode after sc-Ar discharge

18

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10,000 pulses 50,000 pulses

100,000 pulses 150,000 pulses

Effect of irradiation time on the product

81510151215141516151815

Wave number (cm-1)In

ten

sity

(a.u

.)

150,000 times

100,000 times

50,000 times

10,000 times

Two peaks were appeared

in all the products

Raman spectroscopy

19

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800900100011001200130014001500160017001800

Inte

nsi

ty

Raman shift / cm-1

1599.78 cm-1

1374.08 cm-1

G band peak

(sp2 bond)

D band peak

(sp3 bond)

Raman spectroscopy of the samples

Artificial diamond

sp2 sp3

Typical raman spectrum

1580 cm-1

sp2結合に帰属されるGバンドピーク

1340 cm-1

sp3結合に帰属されるDバンドピーク

Amorphous structure

20

Graphene (or graphite

Page 21: Electrochemical reactions of organic compounds in … › ~sasaki › sasaki › dl › pulsed_power...2011/02/02  · Reaction time (h) リン転化率 (%) 0 2 4 6 8 10 1 2 3 No reaction

Nano-pulsed electric discharge in supercritical argon Carbon-based material with the following properties was synthesized. 1. Intermediate chemical structure between graphite and diamond 2. Main elements are C and O. 3. Multi-layers of graphene exist.

Conclusion-2

4 pps 250 pps

繰り返し周波数効果 系内温度効果

40 oC 50 oC

系内圧力効果

5 MPa 10 MPa

反応器容量効果

450 ml 900 ml

21

Effect of frequency Effect of frequency Effect of Temperature Effect of volume Effect of Pressure

Nano-pulsed electric discharge in subcritical water 1. Phenolic oligomers (DP = 1 - 7) were obtained. 2. Phenol was probably activated by OH radicals which generated from H2O degradation and polymerized.

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Generation of extremely large power for reduced power of chemical conversions

Nano-pulsed power technology

時間 (秒)

電力

(W)

0 100

100

10ns

1T

面積は同じ

パルス電源回路図

1 TW

直流電流

反応器

23

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O H O H PhBr +

HO OPh

R: K2CO3, C: CuCl, C: Bipyridine, S: DMF

0.45 h, 120 oC, 120 oC → rt

O H O H PhBr +

R: K2CO3, C: CuCl, C: d - Quinolinol, S: DMF

60 – 70 min, 140 oC HO OPh PhO OPh

+

O H O H PhBr +

HO OPh

C: C5H5N

Note: other products also detected ,

Reactants: 2 , Reagents: 1 , Catalysts: 2 , Solvents: 1 , Steps: 1 , Stages: 1

Note: green chem , optimization study , optimized on ratio of the starting

substances , amount of the catalyst , reaction time ,

Reactants : 2 , Reagents : 1 , Catalysts : 2 , Solvents : 1 , Step : 1 , Stages : 1

Note: Classification : O-Arylation ; # Conditions : NaOMe pyridine ; /N2 ; CuCl PhBr ;

Rf / N2 3 h , Reactants : 2 , Solvents: 1 , Steps : 1 , Stages : 1

82 %

Catalytic etherification process for preparing meta-phenoxyphenol from bromobenzene and resorcinol.

Mil'to, V. I.; Orlov, V. Yu. (OOO "Meta-FF", Russia). Russ. (2006), 4pp. CODEN: RUXXE7 RU 2287516

C1 20061120 Patent written in Russian. Application: RU 2005-119464 20050616. Priority: . CAN

145:488993 AN 2006:1216261 CAPLUS

Technology of m-phenoxy-phenol synthesis.

Mil'to, V. I.; Orlov, V. Yu.; Mironov, G. S. Yarosl. Gos. Univ. im. P. G. Demidova, Russia. Khimicheskaya

Tekhnologiya (Moscow, Russian Federation) (2004), (1), 24-26. Publisher: OOO Nauka i Tekhnologii,

CODEN: KTMRAG Journal written in Russian. CAN 141:379673 AN 2004:153231 CAPLUS

Solvent-assisted Ullmann ether synthesis. Reactions of dihydric phenols.

Williams, Albert Lloyd; Kinney, R. E.; Bridger, Robert F. Central Res. Div. Lab., Mobil Oil Corp., Princeton, NJ, USA.

Journal of Organic Chemistry (1967), 32(8), 2501-5. CODEN: JOCEAH ISSN: 0022-3263. Journal written in

English. CAN 67:63969 AN 1967:463969 CAPLUS

PhO OPh

+

24

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200 300 400 500 600 700 800

Ab

sorb

an

ce (a

.u.)

Wavelength (nm)

280 nm

280 nm付近にC=O結合のn → π*遷移に起因するショルダーピークを確認できた

UVスペクトル

C=O結合を有するアモルファス構造の炭素膜

25

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膜状物質のXRDパターン

グラファイトの(002)面、(100)面を確認

26

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パルス放電

MeOH

回収液

褐色物質

黒色粉

減圧乾燥

GC/MS

MALDI-TOF/MS* XRF

GC/MS

TOC

HPLC

*5000回放電時回収サンプルのみ

黒色粉のXRF分析結果

黒色粉は電極由来の物質である

Elements Content (%)

Fe 46.46

Cr 13.25

W 33.82

Ni 5.22

Mn 1.25

Filtration

回収液 褐色物質

(亜臨界水パルス放電)回収サンプル

黒色粉

27

90 oC for 2 h

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e-

e-

電極

e-

分子

荷電粒子

低密度雰囲気

衝突を繰り返し、電極間にプラズマが発生する

低電圧でも 放電が起こる

加速

e-

高密度雰囲気

電子のエネルギー不足が

起こりプラズマ形成が困難

十分加速されないうちに

周りの分子と衝突してしまう

e-

放電開始電圧

超臨界流体中において

プラズマを形成するには..

電子の持つエネルギーを高める必要がある

+ +

+

-

-

-

+

電極

28

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+ +

+ +

プラズマ

多くの活性種(ラジカル・電子など)から構成さ

れる電離した流体

プラズマ

液中プラズマ放電(コロナプラズマ→アークプラズマ)

投入電圧を変化させることで

様々な種類のプラズマを形成することができる

放電プラズマの種類 コロナ放電 アーク放電

熱発生量;尐量 安定性;低い

プラズマ

熱発生量;多量 安定性;高い

+ +

29

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M.P.C.電源

Vmax

S1L1

D

Ls

L2

C1 C3

I1 I2

C2

I1’

ST(1:n)

M.P.C. (Magnetic Pulse Compression)

半導体素子によるスイッチング

パルスの立ち上がりが早い

安定で長寿命

高繰り返しが可能

時間

電圧

時間

電圧

100 ms.

1.4 回

25回

反応器

B.P.F.N.

M.P.C. MPC2000S, Suematsu Electronics Co. Ltd., Japan

M.P.C.電源のプラズマ放電高繰り返しを利用し、フェノール反応の高効率化を目指す

B.P.F.N.電源に比べ数十倍以上の

プラズマ放電を流体中に印加できる

30

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GC/MS

HPLC

MALDI

-TOF/MS

XRF (X-Ray Fluorescence )

Column : HP-5 MS capillary column system

Detector (MS) : HP model 6890 series GC system

5973 mass selective detector

Temp. program : 5 K/min. (318 K to 543 K)

Carrier Gas : Helium (1.5 mL / min.)

Column : Inertsil ODS-3

Detector : UV – VIS (280 nm)

Flow rate : 1.0 mL/min

Mobile phase : CH3CN / H2O = 20 / 80

TOC – 5050A (Shimadzu Corporation)

Acceleration (V) : + 25 kV

Nitrogen laser : 337 nm

3 ns pulse width

Laser probe : Laser Probe Rm-3700 Universal Radiometer

Matrix : 2,5-Dihydroxybenzoic acid (DHB)

TOC

Equations

1001(%)

(AREA)SampleInitial

(AREA)erdRecovConversion

100)(

)((%)

ppmSampleInitial

ppmerdRecovratiosidualRe

分析条件 実験条件

試料:フェノール水溶液 (0.1 M) 温度:250 oC

圧力:25 MPa

放電: ~ 5,000 回

反応器内をArガスに置換する

反応器内に試料を加える

所定圧力・温度に上げる

プラズマ放電

反応液回収(褐色溶液)

MeOH, 90 oC, 2時間で洗浄

Current : 3 uA

Voltage : 50 kV

Detector : Si (Li) semiconductor detector

Analyze : SEA-2001 (Seiko Instruments Inc,)

洗浄液回収(褐色溶液)

実験操作

亜臨界水中プラズマ実験

洗浄過程 31

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実験条件

試料:フェノール (10 g) 温度:40 oC

圧力:5 MPa

放電: 10,000回 , 50,000回, 100,000回, 150,000回

反応器内に試料を加える

反応器内をArガスに置換する

所定圧力・温度に上げる

プラズマ放電開始

MeOH, 90 oC, 2時間で洗浄

反応器洗浄液回収

平板電極回収

反応器内サンプル設置の様子

GC/MS分析

SEM観察

EDX分析

ラマン分光

UV-vis測定

実験操作

Phenol

反応器内サンプル設置の模式図

洗浄過程

超臨界アルゴンプラズマ実験

平板電極 針電極

約7 cm

アルゴン(臨界点) Tc ; -120 oC, Pc ; 4.8 MPa

32

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a b

c d

SEM写真 炭素元素

酸素元素 鉄元素

SEM/EDX分析

33

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Purpose of our study

OH

O・

Ar

Ar*

急峻な過電圧を印加できるナノパルス技術を応用し、

超臨界アルゴン中で高活性種密度の高活性化エネルギー反応場を創成する。

フェノキシラジカルを多量に生成させ、フェノール性材料を合成する。

(耐熱・耐薬品性・導電性に優れた材料)

(2)Poly (2-alyl) phenylene oxide

film (SEM image)

(1) J. Marsh et al. J. Appl. Polym. Sci., 59 (1996) 897-903

フェノール性高分子のSEM画像

34

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0

100

200

300

400

500

600

700

0 1000 2000 3000 4000 5000 6000

Po

wer

(M

W)

Discharge (times)

1

0

2

4

6

8

10

12

14

0

10

20

30

40

50

60

70

0 1000 2000 3000 4000 5000 6000

Cu

rren

t (k

A)

Vo

lta

ge

(kV

)

Discherge (times)

Voltage

Current

1

65

50

35

20

5

-10

-25

Volt

age (

kV

)

0 10 20 30 40 50 60 70

Time(nsec.)

9

7

5

3

1

-1

-30 10 20 30 40 50 60 70

Cu

rren

t (k

A)

Time(nsec.)

電圧波形

電流波形

亜臨界水中パルス放電特性 電圧・電流の変化

電力量の変化

電圧印加開始

放電形成

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回収電極写真(100,000回放電時) 放電痕レーザー顕微鏡写真(20倍)

放電痕:ナノパルス放電で形成されるクレーターのような陥没

褐色生成物

褐色生成物

超臨界Ar中パルス放電後の平板電極

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a

1 2 3

b

c c c

a

C

O

Cr

Fe

NiW

Cr

Fe

Ni WMn

b

W

Cr

Fe

Ni

WC

OCr

Fe

Ni

Mn

c

W

C

OCr

Fe

Ni

Cr

Fe

Ni

W

Mn

回収電極(亜臨界水プラズマ実験)

1 2 3

37

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a

1 2 3

b

回収電極(亜臨界水プラズマ実験)

81510151215141516151815

Inte

nsi

ty (

a.u

.)

Wavenumber (cm-1)

ラマンスペクトル 38

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a b

5.00 10.00 15.00 20.00 25.00 30.00 35.00 40.00 45.00 50.00 55.00 0

10000

20000

30000

40000

50000

60000

70000

80000

Time-->

Abundance

5.00 10.00 15.00 20.00 25.00 30.00 35.00 40.00 45.00 50.00 55.00 0

10000 20000 30000 40000 50000 60000 70000 80000 90000

100000 110000 120000 130000

Time

Abundance

電極上生成物(超臨界Arプラズマ実験)

生成物

超音波処理5分間

H2O 5 mL

超音波処理5分間

MeOH 5 mL

H2O洗浄液 メタノール洗浄液

H2O洗浄液(GC/MS分析) メタノール洗浄液(GC/MS分析)

39

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15 20 25 30 35 40 45

Inte

nsi

ty

2 θ / deg.

XRD分析結果

濃度が低く、基板として用いたシリコンのみが検出された

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50

60

70

80

90

100

0

10

20

30

40

50

0 1000 2000 3000 4000 5000

Res

idu

al

rati

o (

%)

Con

ver

sion

(%

)

Discharge (times)

Conversion

Residual ratio

フェノール転化率・残存率

HPLC分析ではフェノール以外のピークは確認できなかった

フェノールは水不溶性成分に転化した可能性が高い

回収物

1001(%)

(AREA)SampleInitial

(AREA)erdRecovConversion

100)(

)((%)

ppmSampleInitial

ppmerdRecovratiosidualRe

フェノール転化率算出式

残存率算出式

41

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アニリン転化率に与える初期濃度および放電回数の効果

0

5

10

15

0 2000 4000 6000 8000 10000

アニリン転化率

(%

)

放電照射回数 (回)

● 100 mmol/L, 100 oC, 5MPa

◆ 1 mmol/L, 100 oC, 5MPa

放電回数が増加するに連れて、アニリン転化率は増加した。

高濃度で処理した場合の方が高い転化率が得られることが確認できた。

42

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0.0

10.0

20.0

30.0

40.0

50.0

0 2000 4000 6000 8000 10000

アニリン転化率

(%)

Discharge times (time)

303K 5MPa

373K 5MPa

温度依存性はわずか。しかしながら, 放電回数の多い領域では高温ほど転化が増大(最大30 %)

アニリン転化率に与える温度の効果

30 oC, 5 MPa

100 oC, 5 MPa

43