EE147 247A Optical MEMS 2016 s - EECS at UC Berkeleypister/147fa16/... · 2016. 11. 9. · Wu-2...
Transcript of EE147 247A Optical MEMS 2016 s - EECS at UC Berkeleypister/147fa16/... · 2016. 11. 9. · Wu-2...
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EE 147 / 247A Guest Lecture:Optical MEMS
Ming C. Wu
University of California, Berkeley
Electrical Engineering & Computer Sciences Dept.& Berkeley Sensor and Actuator Center (BSAC)
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Optical MEMS
• MEMS are well-suited for interaction with light– Structural dimensions ~ wavelength– Small displacement has large effect (e.g., ON-OFF switching)
• Interferometric devices : Dd ~ 0.25 l• Scanning devices : Dq ~ a few degrees
– Photon has no mass• Does not need large-force actuators
– MEMS enables large-scale systems• E.g., 1000x1000 display or optical switches
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Texas Instruments Digital Micromirror Devices (DMD)
~ 1 million DMD’s on a chiphttp://www.dlp.com/dlp/resources/dmmd.asp
“25 Microchips That Shook the World” IEEE Spectrum, May 2009
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Grating Light Valve (GLV)
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Qualcomm MEMS’ Interferometric Modulator (iMOD)
http://www.qualcomm.com/qmt/
• Reflection display based on MEMS interferometric modulator (iMOD)• Similar to Fabry-Perot etalon, Fast response (10s microseconds)• Manufactured in FPD fab lines
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Pixtronix Digital MEMS Shutter(PerfectLight)
http://www.pixtronix.com/technology/index.asp
• Same backlight unit as LCD• MEMS on glass substrate with TFT circuits
• Leverage on LCD manufacturing• Time multiplexed 3-color LED• Low temperature process
Digital Micro Shutter (DMS)
• 105% NTSC color gamut, • 24 bit color depth, • 170° viewing angle • Backlight efficiency = 60%• High contrast (1000:1)
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LIDAR
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Optical Phased Array using Digital Micromirrors
L x W x H =16 cm x 9 cm x 8 cm
In collaboration with Texas Instruments
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3D Imaging: Kinect
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Glass
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Google Cardboard
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Basic Optics for Virtual Reality Display
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Optofluidics
• Tutorials on Microfluidics
• Tunable lens (zoom lens)
• Display– Electrowetting, E-ink
• Optical manipulation– Optical tweezers– Optoelectronic tweezers– Near field trapping (plasmonic tweezers, slot waveguide)
• Zero mode waveguide for single molecule analysis– Next Gen sequencing
• Optofluidic microscope
• Bubble switch
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E-Ink Electronic Paper Display (EPD)
www.eink.com
Portable Reader
(600x800, 167 ppi)
Flexible Wall Clock
Amazon Kindle
Citizen
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Electrofluidic Display
HeikenfeldJ, ZhouK, KreitE, RajB, YangS, SunB, MilarcikA, ClappL, and SchwartzR, "Electrofluidic displays using Young-Laplace transposition of brilliant pigment dispersions," Nat Photon, vol. 3, pp. 292-296, 2009.
Pigment Droplet
Self-Assembly of Pigment Liquid
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Zero Mode Waveguide for Single Molecule Analysis
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Optoelectronic Tweezers
P.Y. Chiou, A.T. Ohta, M.C. Wu, Nature, 2005
Optical Conveyor Belt
• Programmable: Trapping and manipulation using a digital projector
• 10,000x lower power than conventional optical tweezers
• Massively parallel: 30,000 individually controlled traps
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Digital Micromirrors
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19DLP Pico Development Kit Info, May 27, 2009
DLP® Chip – Micromirrors
DLP slides courtesy ofDr. Larry Hornbeck (TI)
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History of DMD
http://www.dlp.com/technology/dlp-history/default.aspx
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Digital Micromirror Device (DMD)Texas Instruments
Top View of DMD
L. Hornbeck, Electronic Imaging, 1997
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Grey Scale of DMD Projector:Pulsewidth Modulation Technique
L. Hornbeck, Electronic Imaging, 1997
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Projection Display UsingDigital Micromirror Display (DMD)
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References
• L. J. Hornbeck, “Combining Digital Optical MEMS, CMOS and Algorithms for Unique Display Solutions,” in Electron Devices Meeting, 2007. IEDM 2007. IEEE International, 2007, pp. 17–24.
• D. Dudley, W. M. Duncan, and J. Slaughter, “Emerging digital micromirror device (DMD) applications,” 2003, vol. 4985, pp. 14–25.
• P. F. van Kessel, L. J. Hornbeck, R. E. Meier, and M. R. Douglass, “A MEMS-based projection display,” Proceedings of the IEEE, vol. 86, no. 8, pp. 1687–1704, 1998.
• L. J. Hornbeck, “Digital Light Processing for high-brightness high-resolution applications,” 1997, vol. 3013, pp. 27–40.
• L. J. Hornbeck, “Multi-level deformable mirror device,” 508385728-Jan-1992.
• L. J. Hornbeck, “Deformable-Mirror Spatial Light Modulators,” 1990, vol. 1150, pp. 86–103.
• http://www.dlp.com/