EE 143: Microfabrication Technology CTN 4/15/10 Lecture...
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EE 143 : Microfabrication Technology Lecture 23n : Advanced Isolation CTN 4/15/10 Copyright @ 2010 Regents of the University of California at Berkeley 1 EE 143 93 CTN Isolation Technologies
Transcript of EE 143: Microfabrication Technology CTN 4/15/10 Lecture...
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 1
EE 143 93CTNIsolation Technologies
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 2
EE 143 94CTNIssues With LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 3
EE 143 95CTNSemi-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 4
EE 143 96CTNSemi-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 5
EE 143 97CTNFully-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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Copyright @ 2010 Regents of the University of California at Berkeley 6
EE 143 98CTNFully-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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Copyright @ 2010 Regents of the University of California at Berkeley 7
EE 143 99CTNFully-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 8
EE 143 100CTNFully-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 9
EE 143 101CTNFully-Recessed LOCOS
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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Copyright @ 2010 Regents of the University of California at Berkeley 10
EE 143 102CTNTrench Isolation
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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EE 143 103CTNTrench Isolation
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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EE 143 104CTNTrench Isolation
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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EE 143 105CTNTrench Isolation
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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EE 143 106CTNTrench Isolation
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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EE 143 107CTNSEG Isolation
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
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Copyright @ 2010 Regents of the University of California at Berkeley 16
EE 143 108CTNSilicon-On-Insulator (SOI)
