E C E D SOLID-STATE ELECTRONICS LABORATORY · 3 INTRODUCTION Dear friends and partners of our...

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ELECTRICAL AND COMPUTER ENGINEERING DEPARTMENT SOLID-STATE ELECTRONICS LABORATORY

HEAD: PROF. DR.-ING. HABIL. G. GERLACH

2012 ANNUAL REPORT

1. General 2. Staff 3. Teaching and Advanced Training 4. Research Topics 5. Theses and Certificates 6. Publications 7. Guest Lectures 8. Awards 9. Board Memberships

10. Conferences 2012 11. Conferences 2013 12. VDE Working Group Microelectronics 13. Journal of Sensors and Sensor Systems

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Solid-State Electronics Laboratory: Head: Prof. Dr.-Ing. habil. Gerald Gerlach Secretary: Mrs. Heike Collasch Postal address: Technische Universität Dresden Electrical and Computer Engineering Department Solid-State Electronics Laboratory 01062 Dresden Address for visitors: Helmholtzstrasse 18 (at junction with Mommsenstrasse) Barkhausenbau Room I/80 Phone: +49-351-463 32077 Fax: +49-351-463 32320 E-mail: [email protected] Internet: http://ife.et.tu-dresden.de

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INTRODUCTION Dear friends and partners of our Solid-State Electronics Lab, It is a great pleasure for us to report on our work and our activities in the past year. To start with the most important conclusion: The year 2012 was ageina very successful one with many important events and results: • The most important occurence for our Technische Universität Dresden was that

the University was awarded the title of an “University of Excellence”. TU Dresden now belongs to a group of altogether 11 Universities of Excellence in Germany. The financial funds connected to this will enable TU Dresden to implement its future concept, to develop its structures and to improve the conditions for research and teaching. Even if the IFE will not directly benefit from this funding financially, we will profit by the changes on a long-term basis. We already see that the “excellence label” is strengthening our attraction for students.

• A few weeks ago the Granting Committee for Research Training Groups of the German Research Society (DFG) decided to fund the establishement of a new Research Training Group “Hydrogel-based Microsystems” at TU Dresden. It will start its operation on October 1, 2013, and will provide the seven applicants (from IFE Dr. Günther and me) to continue our research work on the usage of hydrogels for sensor and actuator applications on a long-term basis (4.5 years in the first funding period).

• After 3 years of intensive work the Springer-Publishing House has published now the monograph “Bio and Nano Packaging for Electron Devices”. It is the first book worldwide which covers comprehensively the opportunities of nano- and biotechniques for the packaging of electron devices. Authors of the book are 11 professors and 27 doctoral students and postdocs of our Research Training Group “Nano and Bio Techniques for Electron Device Packaging”.

Many other results and events would be worth to become reported on. Unfortunately, for space reasons, I only can refer to the more comprehensive descriptions within this broschure. Looking back at the last year we have to mention that we have gotten support from many sides. We thank the many people from other institutions and from the TU Dresden’s administration as well as from the uncounted friends and colleagues of other universities, research institutions, companies and funding agencies. We cordially appreciate their valuable support!

Prof. Dr.-Ing. habil. Gerald Gerlach

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1. GENERAL The Solid-State Electronics Laboratory (Institut für Festkörperelektronik - IFE) is one of 12 laboratories of the Electrical and Computer Engineering Department at Technische Universität Dresden. Together with the Semiconductor Technology and Microsystems Lab and several chairs of the Circuits and Systems and the Packaging Labs, the Solid-State Electronics Laboratory is responsible for the microelectronics specialization in the Electrical Engineering program. Research and teaching field of the Institute for Solid-State Electronics are dedicated to the interaction of physics, electronics and (microelectronics) technology in: • materials research, technology, and solid-state sensor operational principles, • application of sensors for special measurement problems, • design of sensors and sensor systems including the simulation of components as

well as of complex systems, • development of thin films and multilayer stacks for sensor applications, • application of ultrasound for non-destructive evaluation.

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CHAIR FOR SOLID-STATE ELECTRONICSPROF. DR.-ING. HABIL. G. GERLACH

CHAIR FOR PLASMA TECHNOLOGYAND DEPOSITION PROCESSES

N.N.

THERMALSENSORS

PIEZORESISTIVESENSORS

ULTRASONICSENSORS

MODELING ANDSIMULATION

FUNCTIONAL NANOPARTICELSNANOCOMPOSITE LAYERS

HIGH-PRECISIONLAYER SYSTEMS

MaterialsTechnologySensor designMetrology

MaterialsTechnologySensor designMetrology

TechnologySensor designProcessengineeringMetrology

Components andsystem modelsModeling of soundfields

Materials designDeposition technologyProcess development

Ultra-precise NanolayersHigh-precision layer systems

Applications

• Radiation pyrometry• Thermal imaging• Gas analysis• Presence detectors• Material recognition

Applications

Measurement of:• Humidity, pressure• Gas concentration• pH-value• Solvent concentration

Applications

• Non-destructivetesting

• Medical diagnostics• Evaluation of materialparameters

Applications

• Pyroelectric sensors• MEMS• Ultrasonic sensors

Applications

• Nanosensoric layers• (Photo-)catalysis

Applications

• Large area- sensorics- actuating elements- photonic systems

TECHNOLOGY, DESIGN, CAD, PROCESS DEVELOPMENT TECHNOLOGY, DEPOSITION PROCESSES, PROCESS CONTROL

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2. STAFF Chair for Solid-State Electronics: Prof. Dr.-Ing. habil. Gerald Gerlach Professor and Chair Aryasomayajula, Aditya M. Sc. PhD student Bellmann, Christian Dipl.-Ing. Research assistant Budzier, Helmut Dr.-Ing. Senior researcher Collasch, Heike Secretary Eydam, Agnes Dipl.-Ing. Research assistant Günther, Margarita PD Dr.-Ing. Research assistant Gust, Norbert Dr.-Ing. Research assistant (until 09/12) Hecker, Dominic Dr.-Ing. PhD student (since 12/12) Henke, Markus Dipl.-Ing. Research assistant Herbst, Sabine Laboratory assistant Kleiner, Anja Dipl.-Ing. PhD student Knöfel, Bärbel Dr.-Ing. Research assistant Kostka, Siegfried Dipl.-Ing. Engineer Krause, Volker Dipl.-Ing. Engineer Kühnicke, Elfgard extraord. Prof. Dr.rer.nat. et Ing.habil. Lecturer Kümmritz, Sebastian Dipl.-Ing. Research assistant Lehmann, Ulrike Laboratory assistant Lenz, Michael Dipl.-Ing. Research assistant Norkus, Volkmar Dr.-Ing. Senior researcher Querner, Yvonne Dipl.-Ing. Research assistant (until 06/12) Schossig, Marco Dipl.-Ing. Research assistant Schröter, Anna Dipl.-Ing. Research assistant Schulz, Volker Dipl.-Ing. Research assistant Sorber, Jörg Dr.-Ing. Senior researcher Suchaneck, Gunnar Dr. rer. nat. Senior researcher Tempelhahn, Alexander Dipl.-Ing. Research assistant (since 07/12) Waegner, Martin Dipl.-Ing. PhD student Wolf, Mario Dipl.-Ing. Research assistant Chair of Plasma Technology for Deposition Processes: N.N. Barth, Stephan Dipl.-Ing. Research assistant Delan, Annekatrin Dipl.-Phys. Research assistant Drescher, Andy Dipl.-Ing. Research assistant Pötschick, Pierre Dipl.-Ing. Research assistant Schmittgens, Ralph Dr. Research assistant (until 03/12)

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Guest scientists: Alina Ponomareva Dipl.-Ing. 01.04.2011 - 30.11.2012 Nikita Permyakov Dipl.-Ing. 30.03.2012 - 29.04.2012 Fernando Trevisan Saez Parra MSc 01.04.2012 - 16.11.2012 Vladimir Levitckii MSc 03.05.2012 - 31.05.2012 Arina Startceva MSc 03.05.2012 - 31.05.2012 Kateřina Nováková Dipl.-Ing. 18.06.2012 - 23.06.2012 Maxim Anchkov Dipl.-Ing. 23.07.2012 - 20.08.2012 Jiri Erhart Prof. Dr. 26.11.2012 - 28.11.2012 Lesia Yurchenko Dipl.-Ing. 02.12.2012 - 07.12.2012

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3. TEACHING AND ADVANCED TRAINING Most of the study courses offered at TU Dresden in enginerring sciences are still diploma study courses. At the Department of Electrical and Computer Engineering, this concerns the graduate study courses Electrical Engineering, Information Systems Technology, Mechatronics, and Regenerative Energy Systems. Additionally, master courses are offered to facilitate advanced training of Bachelor graduates from other universities and foreign countries at TU Dresden. Four semesters of basic studies in Electrical Engineering, that are completed with the so-called “Vordiplom” (Preliminary Diploma), are followed by the main studies of Microelectronics. As a rule, a total of 10 semesters is necessary to obtain the German academic degree „Diplom-Ingenieur“ comparable to the master´s degree. The Chair for Solid-State Electronics is mainly focused on the teaching of design and fabrication technology of electronic components and devices based on solid-state effects. Regarding the basic studies of Electrical Engineering, the Solid-State Electronics Laboratory is involved in lectures related to physical basics of electronics and their use in devices (Sensorics), manufacture and application of electronic components and devices (Microtechnology, Infrared Measurement Technology). In the area of ultrasonic sensorics and measurement technology subject-specific lectures are offered to the students. The huge demand of economy for graduates in engineering sciences, especially in electrical engineering, motivates to provide a more intensive mentoring of “Fundamentals in Electrical Engineering” freshmans. In order to reduce the dropout without dimishing education requirements, exercise classes are carried out in small groups by experienced mentors taking care in rapid formation of an efficient learning style by our new students. Besides the complete mentoring of three lab works for all students of our department and complete mentoring of the Dynamic Networks class for the students for the course Information Systems Technology, two freshman exercise classes of all three study courses were supervised in summer term by IFE personnel. In consequence of increased matriculation in the winter term 2012/13, lectures held by Prof. Ronald Tetzlaff (Circuits and Systems Lab) are assisted by mentors of three freshman exercise classes.

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In particular, the following courses were given during the 2012 summer term and the 2012/2013 winter term: Training course Lecturer

Lecture/ exercise/ laboratory work (hours per week)

User

Sensorics I Prof. Gerlach 2/1/0

(1) Optional course (3) Compulsory course (4) Compulsory course

Sensorics II Prof. Gerlach 1/1/1

(3) Optional course (4) Optional course

Sensorics - laboratory work Dr. Norkus, Dr. Günther, DI Kostka, DI Krause, Dr. Sorber, Dr. Suchaneck 0/0/2

(1, 3) Optional course

Microtechnology Prof. Gerlach, Exercise class: Dr. Sorber 2/1/0

(4) Compulsory course

Solid State Electronics Prof. Gerlach 2/1/0

(3) Optional course

Infrared Measurement Techniques

Prof. Gerlach, Dr. Budzier, Dr. Norkus 2/1/1

(3) Optional course

Infrared Measurement Techniques - Lab work

Dr. Budzier, DI Krause, Dr. Norkus 0/0/1

(3) Optional course

Main seminar Sensor Technology

Prof. Gerlach 0/2/0

(3) Optional course

Biochemical Sensors PD Dr. Günther 2/0/0

(3) Optional course

Lab work supervision of Computer Engineering II course

Dr. Budzier, Dr. Suchaneck, 0/0/2


Lab work supervision of Circuitry course 1

DI Kostka, Dr. Norkus, Dr. Schossig, Dr. Sorber 0/0/2

(1, 2, 5, 6) Compulsory course

Lab work supervision of Circuitry course 2

Dr. Budzier, DI Henke, DI Kostka, DI Krause, Dr. Norkus, Dr. Querner, Dr. Sorber, Dr. Suchaneck 0/0/2


Tutors of Basics of Electrical Engineering I course exercises

DI Henke, Dr. Sorber, Dr. Suchaneck (0/2/0) in winter term 2012/13


Tutors of Basics of Electrical Engineering II course exercises

Dr. Budzier, DI Henke, DI Krause, DI Lenz, DI Schulz, Dr. Sorber, Dr. Suchaneck (0/2/0) in summer term 2012


Tutors of Dynamic Networks course exercises for (2)

Prof. Gerlach, Dr. Budzier 0/2/0


Main seminar Nondesructive Testing

Prof. Kühnicke 2/0/0

(1, 3, 4) Optional course

Utrasound Sensors and Measurement Techniques

Prof. Kühnicke 2/0/0


Ultrasound 1 Prof. Kühnicke 2/1/0


Ultrasound 2 Prof. Kühnicke 2/0/0


(1) General study course, Electrical Engineering program; (2) Graduate study course, Information Systems Technology program; (3) Graduate study course, Microelectronics branch; (4) Graduate study course, Precision Engineering and Microtechnology branch; (5) Post-graduate study course, Environmental Management program; (6) Graduate study course, Industrial Engineering program; (7) Graduate study course, Mechatronics program

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3.2. Advanced Training Course on Infrared Measurement Techniques Place: Hotel Elbflorenz, World Trade Center Dresden Date: November 28, 2012 Scientific Chairman: Prof. Dr. Gerald Gerlach, TU Dresden Lecturers: Dr.-Ing. Helmut Budzier, TU Dresden Dr.-Ing. Matthias Krauß, InfraTec GmbH Target Group: Employees in research, development, manufactoring, and in knowlegde-based customer consulting, including also practitioners developing or using IR technologies or planning to apply this innovative technology, decision-makers and customer consultants intending to get an overview on the capabilities and the limits of IR technology. Required qualification: Basic knowlegde of physics and electrical engineering acquired by academic studies in sciences and engineering technician qualification including perennial professional experience in measurement technology and sensorics. Topics: Introduction and goal • Infrared measurement techniques: History and future • Advantages of IR radiation Radiometric Fundamentals • Radiation measurement and radiation laws • IR properties of solids: Emission, absorption, transmission and reflection • Fundamental law of photometry Sensors • Specific parameters • Thermal sensors

- Thermopiles - Pyroelectric sensors - Bolometers - Thermal IR imagers

• Photonic sensors - Photoconductors - Photodiodes - Quantum-well sensors - Photonic imagers - Cooling

• Comparison of thermal and photonic sensors

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Applications • Thermal imagers • Pyrometers Next date: www.ama-weiterbildung.de

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4. RESEARCH TOPICS 4.1. Main research topics A general scheme of the laboratory including the main research topics is shown on page 5 Infrared detectors and infrared measurement technology • Sensor simulation and design • Fabrication of pyroelectric thin films • Sensor technology and material characterization • Measurement technology for IR single- and multi-element detectors • Sensor applications in radiation pyrometry, thermal imaging, gas analysis and

textile chemistry • Infrared emitters and measurement technology • Radiation-absorbing layers Piezoresistive sensors: • Sensor simulation and sensor design • Fabrication and characterization of pH-value-, solvent- and glucose-sensitive

hydrogel films • Measurement technology • Application to measurement of humidity, pH-value, solvent and glucose

concentration as well as for protein detection • Powerless sensor switches (BIZEPS – Bistable Zero-Power Sensors) Sensoric Polymers: • Polymer composites comprising electrically conducting particles for temperature

sensors and strain gauges • Hydrogels with pH-, temperature-, ion- and concentration-dependent swelling

behavior • Imprint and replica plating Ultrasound Technology: • Simulation of sound fields with complex geometry • Transducer optimization • Development of ultrasound measurement techniques using information from the

sound field (non-scanning curvature measurement, simultaneous measurements of velocity and distance, enhancement of resolution)

• Array technology

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Modeling and simulation: • Component and system models • Network modeling, finite element and finite network modeling • Coupled simulation • Application to sensorics Large-area deposition of nanocomposites with defined properties • Fabrication of nanoparticles by means of gas phase condensation in modified

vacuum equipment • Investigation of hollow cathode technology (gas flow sputtering) for fabrication of

nanoparticles by means of gas phase condensation • Embedding of nanoparticles into thin films by combination of gas phase

condensation with other deposition techniques: RF-PECVD (13.56 and 60 MHz), reactive magnetron sputtering

• Nanoparticle materials consisting of metals, alloys and their reactive compounds in matrix materials of inorganic compounds (oxides, nitrides) or functional polymer coatings

• Applications: Optical absorbers, antibacterial coatings of filtration membranes, electrically conducting percolation networks of nanoparticles for sensoric coatings

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The chair is involved in the following major projects of the German Research Foundation (Deutsche Forschungsgemeinschaft - DFG): - Excellence cluster cfAED (Center for Advancing Electronics Dresden,

Spokesman: Prof. Dr. G. Fettweis), Chemical Information Processing Path - Collaborative Research Center/Transregio TRR 39: “High-Volume Production-

Compatible Production Technologies for Light Metal- and Fiber Composite-based Components with Integrated Piezo Sensors and Actuators“ (PT-PIESA), Project C8: “Polarization Determination of Integrated Piezoceramics as Part of Process Control and Non-destructive Device Evaluation” (in cooperation with Fraunhofer IKTS, Dr. A. Schönecker, until 06/2014).

- Research Training Group (Graduiertenkolleg) 1401 „Nano- and Biotechniques for

Electronic Device Packaging“ (Spokesman: Prof. Dr. G. Gerlach, since 10/2006) - Research Training Group (Graduiertenkolleg) 1865 „Hydrogel-based Microsys-

tems“ (Spokesman: Prof. Dr. G. Gerlach, since 10/2013)

- Priority Programme SPP 1599: „Caloric Effects in Ferroic Materials: New Con-cepts for Cooling“, Projekt “Electrocaloric Multilayer and Radial Cooling Device Concepts” (since 10/2012).

The chair is also member of the Saxonian Cluster of Excellence ECEMP (European Centre of Emerging Materials and Processes, Spokesman Prof. Dr. W. Hufenbach).

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4.2. Research projects In the following, only a short summary of objectives and results of our Lab´s research projects is presented. For theses and related references, a more comprehensive description is given in Chapters 5 and 6: Research Training Group 1401/2 “Nano- and Biotechniques for Electronic Device Packaging” Spokesman: Prof. Dr.-Ing. habil. G. Gerlach PhD Students at IFE: Dipl.-Ing. Martin Waegner, M.Sc. Aditya Aryasomayajula Dipl.-Ing. Domenic Hecker (since 12/2012) Associated PhD students: Dipl.-Ing. Anna Schröter Dipl.-Ing. Anja Kleiner Funded by: DFG Funding period: 10/2006 – 09/2015 Topics at IFE: - DC-electrodes for contacting biological cells

(M.Sc. Aditya Aryasomayajula) - Properties and application of ferroelectric

nanoparticles (Dipl.-Ing. Martin Waegner) - Electrospray deposition of nonvolatile

nanoparticles and cells (Dipl.-Ing. Hecker) Objectives: Packaging is the part of technology which merges functional components to systems and ensures the operation of these systems for all environmental conditions allowed. It comprises the geometric arrangement of the components within the system, energy supply, signal distribution, heat dissipation, and the implementation of protective functions. Because of that, packaging simply enables, that physical, chemical and biological devices are becoming real technical systems. Both the steadily growing integration densities of microelectronic devices and the ongoing development of micro/nanosystem technology and biotechnology increase the demands for packaging regarding miniaturization, integration of additional non-electric signals and flow of matter, and implementation of selective protection measures. The Research Training Group will contribute to this process by developing and investigating new and innovative packaging solutions which apply methods from nano- and biotechnology. The work is focused on materials and technologies yet not used for packaging. This approach enables new packaging solutions which are totally different from that ones used up to now. Related references: [DISS1], [DA3], [1-3], [20], [56-57]

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Research Training Group 1865/1 “Hydrogel-based Microsystems” Spokesman: Prof. Dr.-Ing. habil. G. Gerlach Project leaders: Prof. Dr. rer. nat. habil. Karl-Friedrich Arndt,

Professor for Physical Chemistry/ Physical Chemistry of Polymers, Mathematics and Natural Sciences Department

PD Dr.-Ing. habil. Margarita Günther, Solid-State Electronics Laboratory, Electrical and Computer Engineering Department Prof. Dr. rer. nat. habil. Stefan Odenbach, Professor for Magnetofluid Dynamics, Mechanical Science and Engineering Department Prof. Dr.-Ing. Andreas Richter, Heisenberg-Professor for Polymer Microsystems, Electrical and Computer Engineering Department Prof. Dr. rer. nat. habil. Brigitte Voit, Professor for Organic Chemistry of Polymers, TU Dresden (TUD) and Leibniz-Institute for Polymer Research Dresden e.V. (IPF) Prof. Dr.-Ing. Thomas Wallmersperger, Professor for Mechanics of multifunctional Strukturs, Institute for Solid-State Mechanics, Mechanical Science and Engineering Department

Funded by: DFG Funding period: 01.10.2013 – 31.03.2018 Projects at IFE: A3: Porous hydrogels for sensor applications. By using porous hydrogels, a

response time reduction of the hydrogel swelling/deswelling should be achieved. For this purpose, porous hydrogels with a fine-branched structure and with a narrow pore size distribution will be prepared. The hydrogels with different pore sizes will be studiedwith regard to the sensor kinetics.

B1: Biochemical sensor. Development of a hydrogel-based biochemical sensor with

a biocompatible and hermetic encapsulation for in-line process monitoring and detection of specific analyte molecules. The hydrogel with high detection sensitivity will be integrated in this sensor.

B2: Implantable miniaturized microsystem for biomedical diagnostics. Implementa-

tion of a robust miniaturized sensor system with a long-term-stable sensitivity for simultaneous monitoring of several metabolic parameters in medical diagno-sis.

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B3: Zero-power sensor switch. In zero-power sensor switches, which are interesting for buttery-less energy systems, hydrogels will be used as a material for the switching element. Important properties like switching hysteresis and the kinetics of the hydrogel will be studied.

Priority programme SPP 1259 „Smart Hydrogels“ Project: Simulation and experimental investigation of the coupled chemo-

electro-mechanical, visco-hyperelastic behavior of hydrogels for actuator and sensor applications

Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Prof. Dr.-Ing. habil. Thomas Wallmersperger

(TU Dresden, IFKM) Prof. Dr.-Ing. habil. Bernd-Helmut Kröplin (University of Stuttgart),

Co-workers at IFE: PD Dr.-Ing. Margarita Günther, Dipl.-Ing. Volker Schulz Collaboration: TU Dresden, Institute for Solid-State Mechanics,

University of Stuttgart, Institute for Statics and Dynamics of Aerospace Structures

Funded by: DFG (German Research Foundation) Funding period: 11/2006 – 12/2012 Objectives/results: - Improvement of manufacturing technology and operational mode of hydrogel films

with regard to accuracy and stability of MEMS actuators and sensors based on hydrogels.

- Simulation and experimental investigation of the swelling behavior of electrically activated polyelectrolytic hydrogels in dependence on their elastic and electric properties, applied electric field, temperature, parameters of the swelling process (pH-value, ionic strength), and the diffusion behavior of ions in hydrogels.

- Investigation of swelling kinetics and ion flux mechanisms in hydrogels by means of a chemical-electrical-mechanical model extended by the inclusion of chemical reaction rates and temperature action. The model is calibrated by experimentally derived parameters.

- Examination of simulation results by means of sensor prototypes. - Optimization of actuator configurations by simulation and experimental

investigations. - Improvement of long-term stability and reproducibility of sensor and actuator

properties of hydrogels. Related references: [SA2], [SA3], [6], [26], [64]

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DFG Priority Program SPP 1599: Caloric effects in ferroic materials: New concepts for cooling Project: Electrocaloric multilayer and radial cooling device concepts Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach,

Dr. rer. nat. Gunnar Suchaneck Co-workers at IFE: Dipl.-Ing. Anja Kleiner Collaboration: TU Darmstadt, Institute of Materials Science; Uni-

versity of Duisburg-Essen, Institute for Materials Science; Fraunhofer-Institute for Ceramic Techno-logies and Systems (IKTS), Dresden; TU Braunschweig, Institute for Machine Tools and Pro-duction Technology

Funded by: DFG Funding period: 11/2012 – 10/2015 Objectives/results: - Development of a technology for the fabrication of multilayer electrocaloric ele-

ments comprising Ni electrodes by means of reactive sputtering of high-resistive electrocaloric (Ba,Ca)(Zr,Ti)O3 thin films.

- Evaluation of the expected electrocaloric properties by determining of the tempera-ture coefficient of the dielectric constant above the Curie temperature.

- Investigation of the electrical breakdown behaviour and degradation in large elec-tric fields.

- Pyroelectric calorimetry of the enthalphy time dependence during electrical bia- sing.

- Fabrication and evaluation of the performance of electrocaloric cooling device de-monstrators.

Collaborative Research Center/Transregio 39 Production technologies for light metal- and fiber-reinforced composite-based components with integrated piezoceramic sensors and actuators (PT-PIESA) Project Part C8: Polarization determination of integrated piezoceramics as part of process control and non-destructive device evaluation Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach, Dr. Andreas Schönecker (IKTS) Co-workers at IFE: Dr. rer. nat. Gunnar Suchaneck Dipl.-Ing. Volker Krause Dipl.-Ing. Agnes Eydam Collaboration: Fraunhofer-Institute for Ceramic Technologies and

Systems (IKTS) Dresden Funded by: DFG (German Research Foundation) Funding period: 07/2010 – 06/2014

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Objectives/results: - Design and assembly of a new LIMM (Laser intensity modulation method)

measurement set-up to characterize integrated piezoceramic modules. - Determination of thermal and thermo-mechanical material properties (thermal

conductivity, specific heat, thermal expansion coefficient). - Reconstruction of the polarization profile taking into account noisy signals and

uncertainties of material properties. Related references: [18], [19], [23], [24], [53], [55], [73] DFG-Project: Low-temperature plasma deposition of perovskite

thin films on base metal and polymer films Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dr. rer. nat. Gunnar Suchaneck, Dipl.-Ing. Anja Kleiner, Ulrike Lehmann Collaboration: Institute of Physics, Academy of Sciences of the

Czech Republic, Prague Funded by: DFG (German Research Foundation) Funding period: 01/2008 – 09/2012 Objectives/results: - Development of a sputter process for the fabrication of perovskite oxides,

especially PZT, on base metal bottom electrodes. - Investigation of microstructure and composition of the manufactured perovskite

thin films. - Evaluation of electronic, sensoric and actuator properties of the manufactured

perovskite thin films. - Application of PZT on base metal-coated polymer films in flexible electronics,

sensor and actuator devices. Related references: [9], [33], [34], [54], [72], [73] DFG-Project: Shutterless thermal IR sensor arrays with small

measurement uncertainty Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Coworkers at IFE: Dr.-Ing. Helmut Budzier Dipl.-Ing. Alexander Tempelhahn Dipl.-Ing. Volker Krause Funded by: DFG Funding period: 07/2012 – 06/2015 Beschreibung/Ergebnisse: - Sensor models of thermal IR systems with constant radiation sensitivity. - Radiometric measurement uncertainty. - Self-calibration in shutterless mode. - Experimental evaluation of results.

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DFG-Project: Measurement of curvature radii of acoustic inter-faces by means of ultrasound

Principal investigator: apl. Prof. Dr.-Ing. Elfgard Kühnicke Co-workers at IFE: Dipl.-Ing. Michael Lenz, Dr.-Ing. Jörg Sorber Funded by: DFG (German Research Foundation) Funding period: 11/2008 – 05/2012 Objectives/results: - Curvature measurement based on locally resolved analysis of the reflected

ultrasound signal. - Developement of structured transducers for annular-shaped ultrasound arrays and

segmented annular arrays. - Two approaches for curvature measurement based on: • the phase difference between the reflected sound waves on the inner and the

outer array elements and • the compensation of the reflector curvature by focusing the emitted sound

wave. Related references: [11], [39], [41] DFG-Project: Determination of size and shape of flaws smaller

than the sound field size in focus Principal investigator: apl. Prof. Dr. rer. nat. et Ing. habil. Elfgard Kühnicke Co-workers at IFE: Dipl.-Ing. Norbert Gust Dr.-Ing. Jörg Sorber Dipl-Ing Mario Wolf Dipl.-Ing. Sebastian Kümmritz Funded by: DFG (German Research Foundation) Funding period: 10/2009 – 9/2012 Objectives/results: - Development of a method for determining size and shape of flaws smaller than the

sound field in focus which can be used for characterization of flaws in the micrometer range inside electronic components with ultrasonic microscopy.

- The idea for gaining additional information is the evaluation of the back-scattered sound field by determining directionality and signal shape in dependence on the transducer location. The transducer is moved in horizontal and/or vertical direction.

- Developement of different approaches for the differentiation between flat and curved reflectors as well as for size determination of spherical inclusions: • Differentiation between flat and curved reflectors by analysing the directional

pattern by means of transducer segments during vertical intromission of sound to the reflector.

• Size determination of spherical inclusions using the direct echo and the echo caused by a cirumferential wave.

• Size determination of hemispherical structures (brazing splodges, bondings on conductor plates) analysing the magnitude with regard to the distance (by using segmented annular arrays, this approach is independent of attanuation effects in the used material).

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• Size determination of hemispherical structures by analysing the directional pattern of scan images.

- Completion of a 16/10-channel ultrasonic measurement system. Related references: [7], [27], [28], [37], [38], [70] DFG-Project: Non-invasive, simultaneous determination of layer

thickness and sound velocity by means of ultrasound

Principal investigator: apl. Prof. Dr. rer. nat. et Ing. habil. Elfgard Kühnicke Co-workers at IFE: Dipl.-Ing. Sebastian Kümmritz Dipl.-Ing. Mario Wolf Dr.-Ing. Jörg Sorber Funded by: DFG (German Research Foundation) Funding period: 11/2011 – 10/2014 Objectives/results: - Development of a measurement system for simultaneous measurement of sound

velocity and thickness in layered media (e. g. in printed circuit boards). The method is based on exploiting the focus position to get a second independent measuring quantity beside time of flight. By that way, distances and the average sound velocity between ultrasonic transducer and reflector can be determined non-invasively. The variation of the focus position along the acoustic axis is carried out with annular arrays.

- First measurements using an annular arrays; array characterisation; investigation of the form of the reflected signal in dependence of the propagation media.

Related references: [12], [35], [36], [40], [58], [59], [74] Project: High-detective pyroelectric infrared sensors Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dr.-Ing. Volkmar Norkus Dipl.-Ing. Yvonne Querner Dipl.-Ing. Anja Schröter Ulrike Lehmann, Sabine Herbst Funded by: DFG (German Research Foundation) Funding period: 01/2009 – 12/2012 Objectives/results: - Modeling of 3-dimensionally structured pyroelectric sensor chips with regard to

thermal conditions in the radiation-sensitive element. - Fabrication of structured pyroelectric sensor elements. - Assembly of complete infrared sensors. - Experimental investigations to verify effects of thermal amplification and their

impact on sensor characteristics. Related references: [Diss 3], [SA 1], [71]

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DFG-Project: Second-generation hydrogel sensors Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dipl.-Ing. Volker Schulz PD Dr.-Ing. Margarita Günther Dr.-Ing. Jörg Sorber Collaboration: Leibniz Institute for Polymer Research Dresden e.V. Funded by: DFG (German Research Foundation) Funding period: 01/2009 – 12/2012 Objectives/results: - Extention of the theory of force-compensated measuring systems. - Design of sensors based on hydrogels with a graded volume phase transition. - Design and testing of a force-compensated hydrogel-based sensor. - Improvement of sensor response time using structured as well as macro-porous

hydrogel layers. Related references: [DA 5], [16], [17], [51] Cooperation project: Low-temperature sensorics for polar media (PolarSens) Project part: Gas-sensitive layer properties and fundamental

studies of the sensor layer Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dipl.-Phys. Annekatrin Delan Collaboration: UST Umweltsensortechnik GmbH, Geschwenda;

Siegert Thinfilm Technology GmbH, Hermsdorf; Fraunhofer Institute for Electron Beam and Plas-ma Technology (FEP), Dresden

Funded by: BMBF (Federal Ministry of Education and Research)

Funding period: 07/2011 - 12/2013 Objectives/results: - Development of the materials science and functional fundamentals for the

production of innovative sensors based on polar media with significantly improved low-temperature sensitivity and, thus, reduced power consumption.

- Applications: SMD low-power semiconductor gas sensors on ceramic substrates for selected VOCs and humidity as well as semiconductor sensors for measuring the concentration of polar molecules in non-aqueous media.

- Investigation of process technology fundamentals for the production of doped oxide and mixed oxide layers by pulse magnetron sputtering.

- Optimization of the deposited films and film characterization (sensoric and mechanical properties).

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EU-Project: Characterization of hierarchical oxide nanocompo-

sites by means of spectral analysis of AFM topo-graphic images in relation to the nanocomposite physical properties

Principal investigator: Dr.rer.nat. Gunnar Suchaneck Co-workers at IFE: Dipl.-Ing. Alina Ponomareva Funded by: EU (Erasmus Mundus External Cooperation

Window) Funding period: 04/2011 – 11/2012 Objectives/results: - Determination of fractal dimension by the cube counting method, by triangulation

and by the slope of the power spectral density. - Derivation of a model power spectral density describing hierarchical pore

structures comprising groups of pores with a narrow size distribution in each group.

- Evaluation of the relation between surface topography and the physical properties of thin films comprising a hierarchical pore structure.

Related references: [13], [14], [32], [44-48], [52], [72] Cooperation project: Dresden Innovation Center Energy Efficiency

(DIZEeff) Project Part: Film technology for materials development for high-

temperature energy technology Principal investigator: Ralph Schmittgens, D.Sc. (until 03/12) Prof. Dr.-Ing. habil. Gerald Gerlach (since 04/12) Collaboration: Fraunhofer Institute for Electron Beam and Plasma

Technology (FEP), Dresden, TU Dresden, Institute of Power Engineering (IET)

Funded by: SAB (Development Bank of Saxony) Funding period: 10/2009 - 02/2013 Objectives/results: - Goal: Improvement of the effectiveness of condensation heat exchangers. - Hydrophobic plasma coating for dropwise condensation. - Coating technology for plasma polymers and amorphous carbon. - Coating of commercial substrates for heat exchangers. - Investigation of the coating effectiveness for dropwise condensation. Related references: [25], [43], [32]

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Cooperation project: Development of bionic infrared sensors II Principal investigator: Dr.-Ing. Volkmar Norkus Co-workers at IFE: Dipl.-Ing. Marco Schossig Dipl.-Ing. Volker Krause Ulrike Lehmann Sabine Herbst Collaboration: University Bonn/Institute of Zoology Funded by: University Bonn/Institute of Zoology Funding period: 01/2010 – 11/2012 Objectives/results: - Adaptation of the measuring set-up for the determination of characteristic

quantities of biological IR sensors. - Design and assembly of miniaturized Golay cells comprising silicon dies with

SiO2/Si3N4 membrans. - Metrological characterization of the Golay cell. Cooperation project: Miniaturized pyroelectric infrared detectors

with high signal-to-noise ratio Principal investigator: Dr.-Ing. Volkmar Norkus Co-worker IFE: Dr.-Ing. Marco Schossig Dipl.-Ing. Siegfried Kostka Dipl.-Ing. Volker Krause Ulrike Lehmann Collaboration: DIAS Infrared GmbH Funded by: AiF (German Federation of Industrial Research

Associations) Funding period: 1/2012 – 1/2015 Objectives/results: - Evaluation of detector demands. - Specification of sensor properties and sensor concepts. - Sensor simulation and sensor design. Related references: [71]

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Cooperation project: European Centre for Emerging Materials and Processes Dresden (ECEMP)

Project Part: E2: Auto-diagnostic and self-adjusting composites Principal investigator: Prof. Dr.-Ing. habil. Prof. E. h. Werner Hufenbach Project leader at IFE: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dipl.-Ing. Markus Henke Dr.-Ing. Jörg Sorber Collaboration: TU Dresden, Institute of Lightweight Engineering

and Polymer Technology (ILK), Institute of Semiconductors and Microsystems, Institute for Botany,

TU Bergakademie Freiberg, Institute for Mechanics and Fluid Dynamics

Funded by: SAB (Development Bank of Saxony) Funding period: 05/2009 – 04/2014 Objectives/results: - Development of integrable functional elements for self-diagnosis and self-regula-

tion. - Modeling, material and structure simulations to design system components. - Development of structures with variable compliance and their integration into

composite materials. - Study of electroactive polymers with regard to their suitability in actuators and

smart composite materials. - Design of a high-voltage test station for the investigation of electroactive polymer

actuators. - Fabrication of prototypes with controllable compliance. - Fabrication and test of prestrained electroactive polymer actuators with improved

actuating properties based on prestrain. Related references: [8], [29-31], [65-67], [77], [80] Cooperation project: Sensor Nanotechnology Principal investigator: Dr. rer. nat. Gunnar Suchaneck Collaboration: Saint Petersburg Electrotechnical University (LETI),

St. Petersburg (Russia) Funded by: DAAD (German Academic Exchange Service) Funding period: 09/2011 - 08/2012 Objectives/results: Development of technologies for the fabrication of sensoric nanostructures. The topics include: - Simulation of structure formation during sol-gel processing of thin films. - Fabrication of oxide nanostructures using local anodic oxidation with nanometer

resolution. - Fabrication of nanoscaled oxide islands by means of dip-pen-nanolithography,

evaluation of the fabricated structures by atomic force microscopy.

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- Characterization of oxide nanostructures using dielectric impedance spectroscopy.

Related references: [42] Cooperation project: Intrinsic and impurity defects in solid oxide

fuel cell electrolyte and oxide cathode materials

Principal investigator: Dr. rer. nat. Gunnar Suchaneck Collaboration: Institute for Problems of Materials Science, National

Academy of Science of the Ukraine, Kyiv (Ukraine), Kurt-Schwabe-Institute for Measurement and Sensor Technology e.V., Meinsberg

Funded by: International Bureau of the BMBF (Federal Ministry of Education and Research)

Funding period: 06/2011 - 05/2013 Objectives/results: - Theoretical analysis of intrinsic and impurity defects in perovskites and double

perovskites (formation kinetics, influence on charge transport, defect mobility). - Investigation of the phase content and the structure parameters of nanosized, ion-

conducting electrolytes and mixed ionically and electronically conducting cathode materials.

- Investigation of the influence of impurities on the ionic and electronic conductivity. - Characterization of ion transport and electrode overpotential by dielectric

spectroscopy. - Evaluation of the defect structure by ESR and NMR. - Evaluation of electrolyte, cathode and anode materials for solid oxide fuel cells

and ceramic oxygen sensors. Related references: [60] Cooperation project: Sensitive microswitch (SEMIS) Project part: Detection system Principal investigator: Dr.-Ing. Thomas Frank (CiS Erfurt Project leader at IFE: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dipl.-Ing. Christian Bellmann Collaboration: CiS Research Institute for Microsensor Systems

and Photovoltaics GmbH, Erfurt; TU Darmstadt, Laboratory of Microtechnology and Electromechani-cal Systems; microsensys GmbH, Erfurt; CONSENS GmbH, IL Metronic Sensortechnik GmbH, Ilmenau-Unterpörlitz, Siegert Thinfilm Technology GmbH, Hermsdorf

Funded by: BMBF-Program „KMU-innovativ“ (Federal Ministry of Education and Research)

Funding period: 08/2011 - 01/2014

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Objectives/results: - Development of binary “zero power”-sensors (sensor switches) based on

polymers, which swell in dependence on ambient parameters (relative humidity, temperature, pressure, etc.).

- Selection and optimization of suitable polymers in relation to high sensitivity, low cross-sensitivity, high long-term stability and ease of patterning.

- Investigation of the applicability of bimorph- and volume-swelling effect for deflecting MEMS structures in a defined manner in dependence on the relative humidity.

- Design optimization of silicon flexure plates and MEMS-based boss structures to achieve a maximum deflection.

Related references: [5], [21], [22] Project: Basic studies for calibration of uncooled microbolometers Principal investigator: Dr.-Ing. Helmut Budzier Co-workers at IFE: Dipl.-Ing. Volker Krause Funded by: DIAS Infrared GmbH Dresden Funding period: 04/2012 – 12/2012 Objectives/results: - Analysis of calibration methods in different spectral ranges. - Development of moduls for novel IR microbolometer systems. Project: Stationary high-throughput and large-area precision

coating for optics and sensorics (PRECIOS) Project part: Plasma and layer diagnostics for large-area precision coating Principal investigator: Prof. Dr.-Ing. habil. Gerald Gerlach Co-workers at IFE: Dipl.-Ing. Stephan Barth,

Dipl.-Ing. (FH) Andy Drescher, Dipl.-Phys. Annekatrin Delan

Collaboration: Von Ardenne Anlagentechnik GmbH, Dresden LSA Leischnig Systemhaus GmbH, Hilmersdorf, Elektronik Ingenieurtechnik GmbH, Dresden, Fraunhofer-Institute for Electron Beam and Plasma Technology (FEP), Dresden, Leibniz-Institute for Surface Modification e.V. (IOM), Section Ion-beam Technology, Leipzig

Funded by: SAB (Development Bank of Saxony) Funding period: 01/2012 - 05/2014 Objectives/results: - Fundamentals of a technology for the fabrication of optical and sensoric precision

layer systems on large areas, with high throughput and high efficiency. - Characterization of plasma and layer properties. Related references: [49]

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4.3 Facilities and Equipment The Solid-State Electronics Labratory is equipped with process facilities which allow us to deal with sophisticated scientific tasks and projects. In detail, the following facilities are available: Sensor technology laboratory: • Precision crystal treatment by sawing (Struers), grinding, lapping, and polishing

(PM2A, Struers) • Photolithography • Wire bonding (type 1419 and 4126, K&S) Vacuum engineering laboratory: • Multi-target sputtering system for 150 mm silicon wafers (LS703S, von Ardenne

Anlagentechnik) • Sputter equipment • Ion beam etching equipment (Microetch 301 A, Veeco) • PECVD/RIE double chamber reactor (Plasmalab80Plus, Oxford Plasma

Technology) Plasma technology laboratory: • Vacuum system for fabrication of nanoparticles and nanocomposite layers • 60 MHz plasma source for deposition of plasma polymers and inorganic compo-

site layers • Gas flow sputter source for fabricating of anorganic nanoparticles • Vacuum deposition system Pfeiffer PLS570 with puls sputtering • RF-Sputter system Perkin Elmer 2400 • Plasma cleaner (RF and microwave) Plasma Electronics MR300D Process measurement instruments: • Scanning surface profile measuring system (Profiler Dektak) • FT-IR spectrometer (Spectrum 2000, Perkin Elmer) • Laser interferometer (SP 120, SIOS) • Dual-beam laser vibrometer (Polytec) • Ellipsometer Plasmos SD2000, • Optical contact angle instrumentation DataPhysics OCA20/6 PC-controlled measurement equipment: • Dielectric and pyroelectric properties of ferroelectric materials • Characteristic parameters of infrared detectors (single-element and line detectors,

focal plane arrays) • Sample response to pressure changes • Sample response to humidity and temperature changes • Measurement of amplitude and frequency for resonance frequency determination • Evaluation of the dynamic behavior of MEMS devices • Analysis of the thermal and temporal influence on sensors • Measurement set-up for gas sensor evaluation

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IR applications laboratory: • Blackbody radiators (Mikron M300, DIAS, HGH RCN 300) • Pyrometer (Heimann, infra sensor, Raytek) • Line scanner and 2D infrared cameras (DIAS GmbH) • Thermal vision camera (Inframetrics) • Climatic exposure test cabinet (mytron WB80KH) Ultrasound technology: • Scanning ultrasonic microscope D6000 (10 to 230 MHz) • One-channel ultrasonic test instrument for non-destructive examination • Ultrasound field measuring station with x-y-z positioning system • 8-channel ultrasonic sending-receiving system comprising ADC (125 MS/s

sampling rate per channel) for signal analysis • 10-channel ultrasonic sending-receiving system comprising ADC (500 MS/s

sampling rate per channel) for microscopy application (up to 200 MHz) • Measuring set-up for sound velocity determination in fluids without reference

reflectors (one-channel, x-y positioning system, thermostat) • Ultrasonic annular arrays (3...19 MHz), focussing transducers (8...100 MHz) CAE laboratory: • Software: ANSYS, PSpice, Matlab, LabView, Testpoint

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5. THESES AND CERTIFICATES 5.1. PhD theses In 2011 20 doctoral students (including 8 external ones) were supervised by the Chair of Solid-State Electronics. The following PhD theses were successfully de-fended: [DISS 1] Marco Schossig: Ultrathin, self-supporting lithium tantalate elements

for high-performance infrared detectors TU Dresden, TU Dresden, Electrical and Computer

Engineering Department Supervisor: Prof. Dr.-Ing. habil. Gerald Gerlach Thermal infrared detectors are of great importance for numerous applications, particularly for contact-free temperature measurement (pyrometry), thermography, and infrared spectroscopy, because they do not need cooling like photon detectors. For this reason, they are comparatively small and can be manufactured at low costs. Pyroelectric detectors have become one of the most important types of thermal infrared detectors because of their high thermal resolution. They feature a huge potential for uncooled high-performance infrared applications. Unfortunately, the thermal resolution of commercially available pyroelectric detectors is more than one order of magnitude lower than the theoretical limit that is given by the temperature fluctuation noise due to radiative heat exchange. This work investigates the possibilities to bring the thermal resolution of pyroelectric detectors based on lithium tantalate (LiTaO3) closer to the theoretical limit. A main focus is on the application of suitable absorption layers by means of techniques used in nanotechnology. A novel infrared absorber structure was developed and studied showing high absorption at small film thicknesses. Pyroelectric single-element detectors were fabricated having the highest thermal resolution reached so far. Thus, this work enables to improve the performance of pyroelectric detectors and to expand their fields of application. Publication: M. Schossig: Ultradünne, freitragende Lithiumtantalat-Elemente für hochdetektive Infrarotsensoren. Band 44. Dresden: TUDpress 2012. ISBN 978-3-942710-60-2.

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[DISS 2]: Waldemar Schönberger: Large area anti-reflective treatment of plastic films by plasma and ion beam technology TU Dresden, Electrical and Computer

Engineering Department Supervisor: Prof. Dr.-Ing. habil. Gerald Gerlach This work deals with the development, physical description and optimisation of a surface treatment process for large-area polymer anti-reflection nano-patterning. This process allows creating anti-reflection properties onto plastic films in a reel-to-reel process. The work describes the mechanisms and results of the procedure to achieve high-efficient anti-reflection properties with high economic performance. The main results of the work are: • The interaction between the plasma species of a low-temperature gas discharge

in a dual magnetron system and the surface of polymer materials leads to the formation of self-organised nano-structures. A dual magnetron system is the most suitable ion source for manufacturing nano-structures on large area polymer films in a reel-to-reel technology. This is due to a simple scaling-up capability of this source type from a few centimeters up to several meters, high treatment efficiency and long-therm stability of the process.

• The optical properties of the structured surface of the polymer film depend on both the dimension and the material of the structures. Assuming that the lateral dimensions of the structures are smaller than the wavelength of the electromagnetic irradiation, the structures can be described by the effective medium approximation. The optical properties of such a system can be evaluated using the Fresnelequations.

• It was shown that the self-organising mechanism of the structure growth on the polymer surface is based on the interaction between the polymer surface and high-energetic ions originating from the discharge zone. The native surface roughness promotes ion etching in the valleys of the surface topography. The most effective structure growth was observed in case when the characteristic spacial distribution parameters of the energy dissipated by an ion in the solid polymer and the native surface roughness of the film are of similar magnitude.

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[DISS 3]: Yvonne Querner Sensitivity increase of infrared sensors by internal

thermal amplification TU Dresden, Electrical and Computer Engineering

Department Supervisor: Prof. Dr.-Ing. habil. Gerald Gerlach This work describes a novel method for increasing the sensitivity of pyroelectric detectors. A three-dimensional pattern is etched into the sensitive area. This leads to thicker electrical active areas and thinner electrical passive areas. In such a structure, a lateral heat flux from thinner to thicker regions is generated caused by faster heating of the thinner parts due to less thermal mass. This additional heat flow into the thicker, electrically active areas increases the output signal of the sensors for equal radiation fluxes and, hence, increases the responsivity compared to an unstructured sensor. Qualitatively, the effect of the structuring parameters on sensitivity increase was estimated with adapted analytical models and numerical simulations. Based on the simulation results, design rules for structured sensors were derived and single-element detectors with different structure widths were fabricated. The deposition of a very thin absorption layer with homogenous thickness in the passive areas appeared to be a big technology challenge. The influence of different absorption layers was analyzed and their fabrication requirements for their application in structured sensor elements were discussed and evaluated. As a result of three-dimensional patterning, the sensitivity was increased by up to 45%, for sensors with an additional absorption layer even by up to 60 %. Additionally, a second method for increasing the responsivity of pyroelectric detectors was considered where the superposition of thermal waves in structures with specially adjusted dimensions leads to an increase of the temperature amplitude. In this case, the area of incident radiation absorption and the sensitive element are spatially separated from each other. Publication: Y. Querner: Empfindlichkeitssteigerung bei pyroelektrischen Infrarotsensoren durch interne thermische Verstärkung. Band 47. Dresden: TUDpress 2012. ISBN 9-783942-710930

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5.2. Diploma theses (Supervisors in brackets) [DA 1] Lingzhi Li:

Versuchsaufbau Lock-In-Thermographie (Experimental Set-up for Lock-in-thermography). (Prof. Dr.-Ing. habil. Gerlach / Dr.-Ing. Budzier)

[DA 2] Robert Herre: Untersuchung der temperaturabhängigen elektrischen Eigenschaften offen-zelliger keramischer Schäume aus Siliziumkarbid (Investigation of the temperature-dependent electrical properties of open-celled ceramic silicon carbide foams). (Prof. Dr.-Ing. habil. Gerlach / Dr. rer.nat. Suchaneck)

[DA 3] Dominic Hecker: Grundlegende Untersuchungen zu einem mechanischen Sensor mit rever-sibler dielektrophoretischer Partikelausrichtung in einem viskosen Medium (Fundamental investigations of a mechanical sensor with reversible dielectrophoretic particle alignment in viscous media) (Prof. Dr.-Ing. habil. Gerlach / Dipl.-Ing. Schulz)

[DA 4] Nils Eisfeld: Korrektur der Bildinhomogenität von Thermografiekameras mit einem Multi-positions-Verfahren (Correction of image inhomogenity of thermographic cameras by a multi-position method). (Prof. Dr.-Ing. habil. Gerlach / Dr.-Ing. Sorber, Dr.-Ing. Vollheim [InfraTec GmbH])

[DA 5] André Juhrig: Entwurf, Aufbau und Charakterisierung eines miniaturisierbaren Aktors hoher Energiedichte (Design, assembly and characterization of an actuator comprising a high energy density) (Prof. Dr.-Ing. habil. Gerlach / Dipl.-Ing. Schulz)

[DA 6] Sarah Hüller: Thermische Infrarot-Dünnschichtstrahler mit hoher Strahlungsleistung (Thermal infrared thin film emitters with high radiation power) (Prof. Dr.-Ing. habil. Gerlach / Dr.-Ing. Schossig)

[DA 7] Marit Timmermann: Entwicklung eines Low-cost-Ferninfrarot-Detektormoduls (Development of a low-cost far-infrared detector module) (Prof. Dr.-Ing. habil. Gerlach / Dr.-Ing. Budzier, Dipl.-Ing. Koop [Bosch, AE/ESE2])

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[DA 8] Ning Chen: Characterization of piezoelectric energy harvesters under dynamic load (Master thesis) (Prof. Dr.-Ing. habil. Gerlach / Dr. rer.nat. Suchaneck, Dipl.-Ing. Barth [Fraunhofer FEP])

5.3. Study Projects [SA 1] Martin Böhm:

Entwicklung und Aufbau eines Versuchsmessplatzes zur Untersuchung von thermischen Interferenzeffekten (Development and realization of a measuring set-up for the investigation of thermal interference effects). (Prof. Dr.-Ing. habil. Gerlach / Dipl.-Ing. Querner)

[SA 2] Ling Jiang: Hydrogel-basierter biochemischer Sensor mit einer neuartigen bioverträgli-chen Verkapselung (Hydrogel-based biochemical sensor with novel biocompatible packaging). (Prof. Dr.-Ing. habil. Gerlach / PD Dr.-Ing. Günther)

[SA 3] Shiyi Sun: Kohlendioxidsensor für die biomedizinische Diagnostik (Carbon dioxide sensor for biomedical diagnostics) (Prof. Dr.-Ing. habil. Gerlach / PD Dr.-Ing. Günther)

[SA 4] Andreas Heinke: Kalibrierkonzepte für Drucksensoren (Calibration concepts for presssure sensors) (Prof. Dr.-Ing. habil. Gerlach / Dr.-Ing. Budzier, Dipl.-Ing. Neumann [Silicon Micro Sensors GmbH])

[SA 5] Christian Deeg: Evaluierung von sensorischen Prinzipien zur Messung der Wundtemperatur (Evaluation of sensor principles for measuring the wound temperature) (Prof. Dr.-Ing. habil. Gerlach / Dipl.-Ing. Schröter)

[SA 6] Emmy Holst: Anpassung eines PVD-Prozesses für die Herstellung von Indium-Zinn-Oxid-Nanopartikeln und erste Charakterisierung der Beschichtungsprodukte (Adaption of a PVD process for the fabrication of indium-tin-oxide nanoparticles and first characterization of the deposited samples) (Prof. Dr.-Ing. habil. Gerlach / Dr. rer.nat. Suchaneck)

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6. PUBLICATIONS 6.1. Book series: Dresden Contributions to Sensorics Since 1996 the book series „Dresdner Beiträge zur Sensorik“ edited by G. GERLACH has been published. The aim of this series is the publication of outstanding scientific contributions of TU Dresden, especially of those produced at the Solid-State Electronics Laboratory. The 43 volumes published earlier were continued by four new ones in 2012. M. Schossig: Ultradünne, freitragende Lithiumtantalat-Elemente für hochdetektive Infrarotsensoren. Band 44. Dresden: TUDpress 2012. ISBN 978-3-942710-60-2. B. Lamek-Creutz: Bildgebende Auswerteverfahren für die akustische Mikroskopie auf der Basis mehrkanaliger Ultraschallwandler. Band 45. Dresden: TUDpress 2012. ISBN 978-3-942710-68-8. U. Marschner: Sensorische funktionale Mikroimplantate. Band 46. Dresden: TUDpress 2012. ISBN 978-3-942710-78-7. Y. Querner: Empfindlichkeitssteigerung bei pyroelektrischen Infrarotsensoren durch interne thermische Verstärkung. Band 47. Dresden: TUDpress 2012. ISBN 9-783942-710930 6.2. Books and Book contributions 1. K.-J. Wolter, M. Bieberle, H. Budzier, G. Gerlach, T. Zerna: Zerstörungsfreie

Prüfung elektronischer Baugruppen mittels bildgebender Verfahren. Templin: Verlag Dr. Markus A. Detert 2012.

2. G. Gerlach, K.-J. Wolter (eds.): Bio and Nano Packaging Techniques for

Electron Devices. Berlin, Heidelberg: Springer 2012. 3. G. Gerlach: Packaging for Electronic Systems. In: G. Gerlach, K.-J. Wolter

(eds.): Bio and Nano Packaging Techniques for electron Devices. Berlin, Heidelberg: Springer 2012. Chapter 1, 3-30.

4. G. Gerlach: Nano- and Biotechniques for Electronic Device Packaging. In: G.

Gerlach, K.-J. Wolter (eds.): Bio and Nano Packaging Techniques for Electron Devices. Berlin, Heidelberg: Springer 2012. Chapter 3, 49-76.

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6.3. Papers in journals 5. T. Frank, G. Gerlach, A. Steinke: Binäry Zero-Power Sensors: an alternative

solution for power-free energy-autonomous sensor systems. Microsystem Technology (2012), DOI 10.1007/s00542-012-1547-4.

6. M. Guenther, G. Gerlach, T. Wallmersperger, M.N. Avula, S.H. Cho, X. Xie, B.V. Devener, F. Solzbacher, P. Tathireddy, J.J. Magda, C. Scholz, R. Obeid, T. Armstrong: Smart hydrogel-based biochemical microsensor array for medical diagnostics. Advances in Science and Technology 85 (2013), 47-52.

7. N. Gust: Verbesserung der Signalauswertung für die Ultraschallmikroskopie.

ZfP Zeitung 127 (2011) 12, 36-40. 8. M. Henke, J. Sorber, G. Gerlach: EAP-actuators with improved actuation

capabilities for construction elements with controllable stiffness. Advances in Science and Technology 79 (2013), 75-80.

9. A. Kleiner, G. Suchaneck, B. Adolphi, A. Ponomareva, G. Gerlach: PZT thin

films deposited on copper-coated polymer film substrates. Ferroelectrics 429 (2012) 1, 75-81.

10. J. Kothe, A. Schröter, K. Zarschler, D. Wersing, M. Mkandawire, K. Ostermann,

W. Pompe, G. Rödel, G. Gerlach: Optischer Biosensor auf Basis abhängiger Expression fluoreszierender Proteine. Technisches Messen 79 (2012) 1, 60-64.

11. M. Lenz, N. Gust, E. Kühnicke, T. Rödig: Transducer characterisation by sound

field measurements. IEEE UFFC, Manuscript ID TUFFC-05302-2012 (accepted for publication).

12. M. Lenz, E. Kühnicke: Nichtinvasive Schallgeschwindigkeitsmessung in Fluiden

auf Basis von Streupartikelechos. Technisches Messen 79 (2012). No. 1, 23-28. 13. A.A. Ponomareva, V.A. Moshnikov, G. Suchaneck: Mesoporous sol-gel

deposited SiO2-SnO2 nanocomposite thin films. Materials Science and Engineering 30 (2012) 1, 012003 (5 pages).

14. A.A. Ponomareva, V.A. Moshnikov, D. Glöß, A. Delan, A. Kleiner, G.

Suchaneck: Metal-oxide-based nanocomposites comprising advanced gas sensing properties. Journal of Physics 345 (2012) 012029.

15. Y. Querner, V. Norkus, G. Gerlach: High-sensitive pyroelectric detectors with

internal thermal amplification. Sensors and Actuators 172 (2011) 1, 169-174. 16. V. Schulz, G. Gerlach, K. Röbenack: Compensation method in sensor

technology: a system-based description. Journal of Sensors and Sensor Systems 1 (2012), 5-27.

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17. V. Schulz, H. Ebert, G. Gerlach,: A closed-loop hydrogel-based chemical sensor. IEEE Sensors Journal, DOI: 10.1109/JSEN.2012.2227709, 2012.

18. G. Suchaneck, A. Eydam, W. Hu, B. Krantz, W.-G. Drossel, G. Gerlach:

Evaluation of polarization of embedded piezoelectrics by the thermal wave method. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 59 (2012) 12, 1950-1954.

19. G. Suchaneck, A. Eydam, M. Rübner, M. Schwankl, G. Gerlach: A simple

thermal wave method for the evaluation of the polarization state of embedded piezoceramics. Ceramics International (2012) Suppl. DOI: 10.1016/j.ceramint.2012.10. 141.

20. M. Waegner, M. Schröder, G. Suchaneck, H. Sturm, Ch. Weimann, L. M. Eng,

G. Gerlach: Enhanced piezoelectric response in nano-patterned lead zirconate titanate thin films. Japanese Journal Applied Physics 51 (2012) 11PG04 (5 pages).

6.5. Conference and Workshop Contributions 21. C. Bellmann, R. Sarwar, A. Steinke, T. Frank, H.-F. Schlaak, G. Gerlach:

Development of a humidity micro switch based on humidity-sensitive polymers. In: 23rd Micromechanics and Microsystems Europe Conference (MME), Ilmenau, September 9-12, 2012.

22. G. Brokmann, H. Übensee, G. Gerlach: Thermisches Verhalten von piezoresistiven Drucksensoren – Charakterisierung und Modellierung. In: Sensoren und Messsysteme 2012, 16. GMA/ITG-Fachtagung, 22 bis 23. Mai 2012, Nürnberg. Wunstorf: AMA Service GmbH 2012, 29-36.

23. A. Eydam, G. Suchaneck, G. Gerlach: Evaluation of the polarization state of

integrated piezoelectric sensors and actuators using the thermal wave method. In: International Conference on Materials and Applications for Sensors and Transducers (IC-MAST), Budapest (Hungary), May 24-28, 2012, Oral contribution, Abstract book, 52.

24. A. Eydam, G. Suchaneck and G. Gerlach: Evaluation of the polarization state of

embedded piezoceramics by charge monitoring during periodic heating. In: Electroceramics XIII, Enschede (Netherlands), June 24-27, 2012, Abstracts, 135.

25. D. Glöß, P. Frach, M. Maicu, E. Holst, R. Schmittgens, G. Gerlach, C.H. Lu, T.

Roch, M. Bieda, A. Lasagni, M. Beckmann: Plasma deposition of hydrophobic coatings on structured surfaces for condensation and heat transfer applications. In: PSE (13th International Conference on Plasma Surface Engineering), September 10 - 14, 2012, Garmisch-Partenkirchen, Germany.

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26. M. Guenther, G. Gerlach, T. Wallmersperger, M. N. Avula, S. H. Cho, X. Xie, B.

V. Devener, F. Solzbacher, P. Tathireddy, J. J. Magda, C. Scholz, R. Obeid, T. Armstrong: Smart hydrogel-based biochemical microsensor array for medical diagnostics. In: 4th International Conference Smart Materials, Structures, and Systems CIMTEC 2012. Montecatini Terme, Italy, June 10-14, 2012. Book of Abstracts, 135.

27. N. Gust, E. Kühnicke, M. Wolf, S. Kümmritz: Determination of size and shape of small inclusions from sound-field information. In: IEEE International Ultrasonics Symposium Proceedings (2012), 764-766.

28. N. Gust: High frequency 16 channel ultrasonic microscope for annular arrays. In: IEEE International Ultrasonics Symposium (2012), Dresden.

29. M. Henke, J. Sorber, G. Gerlach: Multi-layer beam with variable stiffness based on electroactive polymers. In: Y. Bar-Cohen (ed.): Electroactive Polymer Actuators and Devices (EAPAD) 2012. Proceedings of SPIE, Vol. 8340, 83401P-1…13.

30. M. Henke, J. Sorber, G. Gerlach: Actuator for stiffness-control of stacked flexure

beams: principle, set-up, design. In: Actuator 2012, Proceedings, 400 – 403. 31. M. Henke, A. Renner, W.J. Fischer, G. Gerlach: Novel approaches for self-

sensing and –control of smart structures. In: W.A. Hufenbach (Hrsg.): Tagungsband Internationales Kolloquium des Spitzentechnologieclusters ECEMP, Dresden, 2012, 149 – 171.

32. N. Kaneva, A. Ponomareva, L. Krasteva, K. Papazova, G. Suchaneck, A. Bojinova, V. Moshnikov, D. Dimitrov: Photocatalytic and surface properties of nanostructured ZnO thin Films doped with iron. In: International Conference “Advanced Functional Materials”, Riviera Resort (Bulgaria), September 5-8, 2012, Book of Abstracts, 64.

33. A. Kleiner, G. Suchaneck B. Adolphi; G. Gerlach: Composition control of

piezoelectric PZT thin films deposited onto Cu-coated polymer substrates. In: Electroceramics XIII, Enschede (Netherlands), June 24-27, 2012, Abstracts, 46.

34. A. Kleiner, G. Suchaneck, B. Adolphi, V. Lavrentiev, Z. Hubicka, M. Cada, L.

Jastrabik, G. Gerlach, A. Dejneka: Composition profiling of piezoelectric PZT thin films deposited onto Cu-coated polymer substrates. In: International Symposium on Applications of Ferroelectrics (ISAF), European Conference on the Applications of Polar Dielectrics (ECAPD), International Symposium Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (PFM) Joint Symposium; Aveiro (Portugal), July 9-13, 2012, Electronic Proceedings, Abstract 150.

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35. E. Kühnicke, M. Lenz: Novel approach for locally resolved non invasive sound

velocity measurements. In: AIP Conf. Proc. 1433 (2012), 652-655; doi: 10.1063/1.3703268.

36. E. Kühnicke, M. Lenz, M. Bock: Non-invasive measurement of sound velocity

profiles. In: IEEE International Ultrasonics Symposium Proceedings (2011), 2150-2153.

37. S. Kümmritz, M. Wolf, E. Kühnicke, N. Gust: Determination of the size of

spherical inclusions smaller than the width of the sound beam. In: Ultrasound in the Control of Industrial Processes (UCIP), April 2012, Madrid (Spain), IOP Conference Series: Materials Science and Engineering.

38. S. Kümmritz, M. Wolf, E. Kühnicke: Improvement of the resolution limit caused

by the width of the sound beam. In: IEEE International Ultrasonics Symposium (2012), Dresden.

39. M. Lenz, E. Kühnicke: Non-scanning measurement of convex and concave

curvature with an annular array. In: AIP Conf. Proc. 1433 (2012), 55-58. 40. M. Lenz, M. Bock, E. Kühnicke, J. Pal, A. Cramer: Sound velocity

measurements in fluids using echo signals from scattering particles. In: 8th International Symposium on Ultrasonic Doppler Methods for Fluid Mechanics and Fluid Engineering (ISUD8), September 19-21, 2012, Dresden, Germany.

41. M. Lenz, E. Kühnicke: Non-scanning curvature measurement with a segmented

ultrasound array. In: Ultrasound in the Control of Industrial Processes (UCIP), April 2012, Madrid (Spain), IOP Conference Series: Materials Science and Engineering.

42. V.S. Levitckii, A.I. Maksimov, S.Yu. Zemlyakova, V.A. Moshnikov, G.

Suchaneck: Sol-gel fabrication of catalytic CoO-SiO2 thin films. In: 10th International Symposium on Ceramic Materials and Components for Energy and Environmental Applications (CMCEE), Dresden (Germany), May 20-23, 2012, Program and Abstracts, 106.

43. M. Meicu, D. Gloess, P. Frach, E. Holst, R. Schmittgens, G. Gerlach, C.H. Lu, T. Roch, M. Bieda, A. Lasagni, M. Beckmann: Plasma deposition of hydrophobic coatings on structured surfaces for condensation and heat transfer applications. In: PSE (13th International Conference on Plasma Surface Engineering), September 10 - 14, 2012, Garmisch-Partenkirchen, Germany.

44. A.A. Ponomareva, V.A. Moshnikov, E.V. Maraeva, G. Suchaneck: Fractal analysis of surfaces comprising hierarchical structures. In: ECCM15, 15th European Conference on Composite Materials, Venice (Italy), 24-28 June 2012, Electronics proceedings No. 306 (8 pages).

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45. A.A. Ponomareva, V.A. Moshnikov, O.A. Maslova, D. Glöß, A. Delan, A.

Kleiner, M. Waegner, S. Danis, V. Valvoda, G. Suchaneck: Microstructural analysis of nanocomposite gas-sensitive metal oxide films fabricated by sol-gel technology [in Russian]. In: Proc. VIII International Conference on Amorphous & Microcrystalline Semiconductors, St.-Petersburg (Russia), July 2-5, 2012, 338-339.

46. A.A. Ponomareva, V.A. Moshnikov: Influence of solvents on sol-gel deposited SnO2 gas-sensitive film formation. In: Proc. International Conference on Oxide Materials for Electronic Engineering (OMEE-2012), Lviv (Ukraine), September 3–7, 2012, Oral Contribution O1-7, Lviv: Publ. House Lviv Polytec (2012), 23-24, DOI: 10.1109/OMEE.2012.646486.

47. A.A. Ponomareva, V.A. Moshnikov, G. Suchaneck: Microstructural charac-

terization of meso- and nanoporous ceramics by scanning probe microscopy. In: 2nd International Conference on Competetive Materials and Technology Processes, Miskolc-Lillafüred (Hungary), October 8-12, 2012. Book of Abstracts, 182.

48. A.A. Ponomareva, V.A. Moshnikov, G. Suchaneck: Quantitative evaluation of

the surface of metal oxide nanocomposite films fabricated by the sol-gel method [in Russian]. In: III International Scientific Conference “Nanostructured Materials 2012: Russia-Ukraine-Belarus”, Saint Petersburg (Russia), November 19-22, 2012, 398.

49. P. Pötschick, H. Bartzsch, A. Delan, P. Frach: Magnetron assisted PECVD process for deposition of amorphous and microcrystalline hydrogen containing silicon layers from a silane-hydrogen-argon gas mixture. In: 55th Annual Technical Conference Proceedings, Santa Clara, CA, USA, April 28 - May 3, 2012, ISSN 0737-5921.

50. A. Schröter, J. Kothe, A. Walther, K. Fritzsche, A. Rösen-Wolff, G. Gerlach: Investigation of infection defense using impedance spectroscopy. In: O. Kanoun (ed.): Lecture Notes on Impedance Spectroscopy. Vol. 3. CRC Press, 2012. 65-69.

51. V. Schulz, B. Ferse, A. Große, K.-F. Arndt, G. Gerlach: Clay nanocomposite

hydrogels applied to MEMS-based chemical microsensors. In: Proceedings of IEEE NEMS 2012 Conference, 2012, 103-104.

52. G. Suchaneck, A.A. Ponomareva, M. Brychewvskyi, I. Brodnikovskyi, O.

Vasylyev, G. Gerlach: Fractal analysis of surface topography of solid oxide fuel cell materials. In: International Conference on Oxide Materials for Electronic Engineering OMEE-2012. September 3-7, 2012, Lviv, Ukraine. Proceedings, 289-290, DOI: 10.1109/OMEE.2012.6464763.

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53. G. Suchaneck, A. Eydam, G. Gerlach: A simple thermal wave method for the

evaluation of the polarization state of embedded piezoceramics. In: 8th Asian Meeting on Electroceramics (AMEC-8 ), Penang (Malaysia), July 1-5, 2012, Oral contribution O032, Program and Abstract book; 37.

54. G. Suchaneck, A. Kleiner, V. Valvoda, Z. Hubicka, M. Cada, P. Adamek, L. Jastrabik, G. Gerlach, A. Dejneka: PZT thin films on kapton substrates - a comparison of sputter deposition technologies. In: 13th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen (Germany), September 10-14, 2012, Electronic Proceedings, Keynote lecture KN2300.

55. G. Suchaneck, A. Eydam, G. Gerlach: A laser intensity modulation method for the evaluation of the polarization state of embedded piezoceramics. In: 8th Asian Meeting on Ferroelectrics (AMF-8), Pattaya (Thailand), December 9-14, 2012.

56. M. Waegner, M. Schröder, G. Suchaneck, H. Sturm, C. Weimann, L.M. Eng, G. Gerlach: Domain formation in nano-patterned PZT thin films. In: MRS Proceedings 1454 (2012) 267-272. DOI:10.1557/opl.2012.1230.

57. M. Waegner, M. Schröder, G. Suchaneck, G. Gerlach, L.M. Eng: Nanostructured material for potential sensor and actuator applications. In: International Symposium on Applications of Ferroelectrics (ISAF), European Conference on the Applications of Polar Dielectrics (ECAPD), International Symposium Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (PFM) Joint Symposium; Aveiro (Portugal), July 9-13, 2012, Electronic Proceedings, Abstract 86.

58. M. Wolf, E. Kühnicke, M. Lenz, M. Bock: Measurement of sound velocity profiles in fluids for process monitoring. In: Ultrasound in the Control of Industrial Processes (UCIP), April 2012, Madrid (Spain), IOP Conference Series: Materials Science and Engineering.

59. M. Wolf, E. Kühnicke, M. Lenz, M. Bock: Noninvasive, locally resolved temperature monitoring via simultaneous measurement of sound velocity and distance. In: IEEE International Ultrasonics Symposium (2012), Dresden.

60. L. Yurchenko, I. Bykov, A. Vasylyev, V. Vereshnyak, G. Suchaneck, L. Jastrabik, A. Dejneka: Defect structure of zirconium oxide nanosized powders with Y2O3, Sc2O3, Cr2O3 impurities. In: Proc. International Conference on Oxide Materials for Electronic Engineering (OMEE-2012), Lviv (Ukraine), September 3–7, 2012, Poster P3-8, Lviv: Publ. House Lviv Polytec (2012), 114-115, DOI: 10.1109/OMEE.2012.6464776.

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6.6. Essays: 61. G. Gerlach: Not just another new journal of sensors. Editorial. Journal of

Sensors and Sensor Systems. 1 (2012), 1-3. 62. G. Gerlach, R. Tutsch: 30 Jahre Fachtagung Sensoren und Messsysteme.

Editorial und Gastherausgeberschaft. Technisches Messen 79 (2012) 10. 63. R. Lerch, R. Werthschützky, E. Wagner, G. Gerlach: SENSOR + TEST

Konferenzen 2011 in Nürnberg. Editorial und Gastherausgeberschaft. Technisches Messen 79 (2012) 1. 3.

6.7. Guest lectures (if not included in section 6.5) 64. G. Gerlach: Hydrogels for biomedical sensors. 16.03.2012, University of

Alabama, Huntsville, USA. 65. M. Henke: Smart composite sandwich structures based on electroactive

polymers. Mechanics of Composite Materials – MCM 2012, Riga, Lettland, 31.05.2012.

66. M. Henke: EAP-actuators with improved actuation capabilities for construction

elements with controllable stiffness. CIMTEC 2012, Montecatini Terme, Italien, 13.06.2012.

67. M. Henke: Composite structure with tunable resonant frequency for vibration

control. ASME 2012 Conference on Smart Materials, Adaptive Structures and Intelligent Systems, Stone Mountain, GA, USA, 21.09.2012.

68. E. Kühnicke: Ultraschall–Sensorarrays. 14th Leibniz-Conference of Advanced

Science, Sensorsysteme 2012, Lichtenwalde, Deutschland, 18.-19. Oktober 2012.

69. E. Kühnicke, M. Lenz, B. Köhler: Novel measurement techniques in medicine

and NDE based on sound field simulation. IEEE International Ultrasonics Symposium, 2012, Dresden, Short Course, October 7, 2012.

70. S. Kümmritz: Bestimmung der Größe von kugelförmigen Einschlüssen kleiner

als die Schallbündelbreite. Workshop Messtechnische Anwendungen von Ultraschall, Kloster Drübeck, 20.6.2012.

71. V. Norkus, G. Gerlach: Anwenderspezifische pyroelektrische Infrarot-

sensoren.14th Leibniz Conference of Advanced Science. Sensorsysteme 2012. 18.-19. Oktober 2012, Lichtenwalde.

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72. G. Suchaneck: Evaluation of hierarchical oxide surfaces by atomic force

microscopy. Institute for Problems of Material Science, Kyiv (Ukraine), 30. August 2012.

73. G. Suchaneck: Prüfen ohne kaputt zu machen: Was können thermische

Wellen? PT-PIESA Studentinnen Akademie, Dresden, 01.10.2012. 74. M. Wolf: Nichtinvasive und ortsaufgelöste Messung von Schallgeschwindigkei-

ten in Fluiden mit Streuteilchen. Workshop Messtechnische Anwendungen von Ultraschall, Kloster Drübeck, 19.6.2012.

6.8. Patents 75. H. Bartzsch, P. Pötschick, P. Frach, M. Fahland, C. Gottfried: Verfahren zum

Abscheiden dielektrischer Schichten im Vakuum sowie Verwendung des Verfahrens (Method for deposition of dielectric layers in a vacuum and application of the method). Patent application DE 10 2010 055 659 A1, 28.06.2012.

76. H. Bartzsch, P. Frach, M. Fahland, C. Gottfried, P. Pötschick: Verfahren zum

Abscheiden dielektrischer Schichten im Vakuum sowie Verwendung des Verfahrens (Method for deposition of dielectric layers in a vacuum and application of the method). Patent application EP 2 468 915 A1, 27.06.2012.

77. M. Henke, G. Gerlach: Mehrlagige flächige Struktur mit kontrolliert einstellbarer

Nachgiebigkeit auf Basis von Formgedächtniswerkstoffen (Multilayer laminar structure with controllable complience based on shape-memory materials). Patent application DE 10 2012 021 062.0 filed 24.10.2012.

78. M. Schossig, V. Norkus, G. Gerlach: Verfahren zur effizienten Herstellung eines

thermischen Infrarot-Dünnschichtstrahlers mit hoher Strahlungsleistung und hoher Lebensdauer (Method for efficient fabrication of a thermal infrared thin-film emitter with radiation power and high durability). Patent application 20.03.2012.

79. E. Kühnicke, M. Lenz, M. Wolf, S. Kümmritz, M. Bock: Verfahren zur Bestimmung von Parametern von Schallköpfen und Ultraschallgeräten durch Ermittlung der Fokuslage aus der gemittelten Echosignalamplitude von Streuteilchen (Method for determination of the parameters of receiving transducers and ultrasound devices by identification of the focus position from the averaged amplitude of the echo signal caused by scattering particles). Patent application DE 10 2012 010 737.4, 25.5.2012.

80. J. Sorber, G. Gerlach, M. Henke: Bauteil mit veränderbarer Nachgiebigkeit und Federkonstante bei einer Biegung (Device with controllable complience and spring constant at bending). Patent application DE 10 2011 117 778 B3, 25.10.2012.

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7. GUEST LECTURES In the last year we could welcome numerous guest speakers at our Laboratory. Significant financial support was provided in most cases by the Research Training Group 1401/1 “Nano- and Biotechniques for Electronic Device Packaging” enabling the financement of the travel costs and lectures. 25.01.2012

Prof. Sabirov, Rashvan Academy of Science, Uzbekistan

Ion Channels – nanoscopic pores in membranes gated by electric field and chemical signals

21.03.2012

Dr. Seidel, Jan Lawrence Berkeley National Laboratory, USA

Domain all functionality in complex oxide ferroelectrics

19.04.2012

Dipl.-Ing. Permyakov, Nikita St. Petersburg Electrotech-nical University, Russia

Atomic-force microscopy

03.05.2012

Prof. Müser, Martin Research Center Jülich

Friction mechanism at the nano-scale and the role of chemica detail

03.05.2012

Prof. Pum, Dietmar University of Natural Resources and Life Sciences,Vienna

S-layer protein self-assembly

03.05.2012

Prof. Kanoun, Olfa TU Chemnitz

Potential of impendance spectroscopy

03.05.2012

Prof. Lang, Heinrich TU Chemnitz

New materials and chemistry: small molecules – great progress

03.05.2012

Prof. Czichos, Horst Beuth University of Applied Sciences, Berlin

What is wrong on a false Rembrandt – Technical diagnostics in arts and culture

04.05.2012

Prof. Albrecht, Manfred TU Chemnitz

Magnetic nanostructures

04.05.2012

Prof. Hietschold, Michael TU Chemnitz

High spacial resolution microscopy and analysis of nanostructured sur-faces

04.05.2012

Prof. Maitz, Manfred IPF Dresden

Hemocompatibility of biomaterials

10.05.2012

BSc Levitckii, Vladimir St. Petersburg Electrotech-nical University, Russia

Investigation of catalytic materials prepared by sol-gel technology in the system Si-Co-O

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10.05.2012

B.Sc. Startceva, Arina St. Petersburg Electrotech-nical University, Russia

Local anodic oxidation (LAO)

25.05.2012

Prof. Wlodarski RMIT University Melbourne

Optical-based gas and vapor nanosensors

21.06.2012

Dipl.-Ing. Nováková, Kateřina TU Liberec, Czech Republic

Application of piezoelectric macro-fi-ber-composite actuators for the sup-pression of noise transmision through glass windows

15.11.2011

Prof. Scharnweber, Dieter TU Dresden, Institute for Materials Science

Bio-surface engineering

15.11.2011

Prof. v. Rienen, Ursula University Rostock

Bio-electromagnetic modeling

15.11.2011

Dr. Gebauer, Denis University Konstanz

Bio-inspired mineralizations

15.11.2011

Dr. Seidel, Ralf Biotec Dresden

Single-molecule investigation of DANN motors

15.11.2011

Prof. Jarvis, Suzi University Dublin

Biological systems at the nanoscale

16.11.2012

Dr. Derix, Jonathan Thermo Fisher Scientific, München

Being a R&D engineer at Thermo Fisher Scientific Co.

16.11.2012

Dr. Schuster, Christiane Fraunhofer IZFP, Dresden

Dresden (D) – Fribourg (CH) – Dresden (D)

16.11.2012

Dr. Krauß, Matthias InfraTec GmbH, Dresden

InfraTec – A university spin-off com-pany

16.11.2012

Prof. Qu, Wenmin Saarland University of Applied Sciences

Development of industrial sensors

16.11.2012

Dr. Wade, Xiong Advanced Micro Devices

CMOS scaling: An energy crisis and an opportunity for innovation

16.11.2012

Dr. Werner, Ansgar Novaled AG, Dresden

Starting in a start up

16.11.2012

Dr. Ostermaier, Ulrike Saxonian Secondary School St. Afra, Meißen

Intellectual giftedness

27.11.2012

Prof. Erhart, Jiří TU Liberec, Czech Republic

Piezoelectric ceramic discs, plates and bars for electrical signal transformation

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8. AWARDS Dipl.-Ing. Severin Dominok: „Best Diploma Thesis Award 2011” of the Solid-State Electronics Laboratory, donated by the Dresden-based company INFRA TEC GMBH, for his diploma thesis “Entwicklung eines Schaltmoduls für die schnelle Arc-Unterdrückung in Kaltkathoden-Elektronenstrahlkanonen (Development of a switching module for fast arc-depression in cold-cathode electron beam guns)”, 2011. Dr.-Ing. Stefan Flachowsky: „Dr. Walter-Seipp Award 2011“ donated by Dr. Walter Seipp for his PhD thesis „Verspannungstechniken zur Leistungssteigerung von SOI-CMOS-Transistoren (Mechanical straining concepts for performance improvement of SOI-CMOS transistors)“, 2011. Dr.-Ing. Andreas Nocke: „Georg Helm Award 2012” for his PhD thesis „Mikrobolometer auf der Basis von Polymerkomponenten (Fabrication of microbolometers based on polymer materials)“, 2011. Dr.-Ing. Lars Schubert: “Young Investigator Award” of the German Society for Non-Destructive Testing (DGZfP) for his PhD thesis „ Zustandsüberwachung an Faserverbundwerkstoffen mit geführten Wellen (Structural health monitoring in fiber composites using guided waves)“, 2012.

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9. BOARD MEMBERSHIPS Prof. Dr.-Ing. habil. G. Gerlach: • Member of the DFG Senate and the DFG steering committee. • Member of the DFG Senate Committee and the DFG Granting Committee for

Collaborative Research Centers. • Dean of Educational Affairs for the Electrical Engineering study program (until

12/2012). • Member of the Senate of the TU Dresden. • Member of the Senate Committee for Education at TU Dresden. • Member of the Council of the Electrical and Computer Engineering Department. • Member of the Board of Directors of the VDI/VDE Society for Measurement and

Automatic Control (GMA). • Vice chairman of the VDE Engineering Education Committee. • Chairman of the VDE Committee „VDE-Ehrenring“. • Member of the Advisory Board of the Fraunhofer Institutes for Electron Beam and

Plasma Technology (FEP) and for Photonic Microsystems (IPMS), Dresden. • Member of the Advisory Board of the Kurt-Schwabe-Institute for Measuring and

Sensor Technology e.V., Meinsberg. • Member of the Advisory Board of the Kurt-Schwabe Foundation. • Member of the Advisory Board of the Institute of Automation and Communication

e. V. (ifak), Magdeburg. • Member of the Scientific Advisory Board of the CiS Research Institute for

Microsensor Systems and Photovoltaics, Erfurt. • Chairman of Working Group “Microelectronics”, VDE Dresden Branch. • IEEE Sensors Journal, Associate Editor, Topical Editor (since 07/2012),

Associated Editor-in Chief (since 12/2012). • Chief Editor, JSSS Journal of Sensors and Sensor systems (cp. chapter 13) • Member of the Scientific Board of the Journal „Technisches Messen“. • Member of the Scientific Board of the Journal „Pomiary Automatyka Kontrola”,

Poland. • Member of the Board of Directors of the fair SENSOR+TEST-Messtechnikmesse

Nuremberg. • TU Dresden’s godfather to the Martin-Andersen-Nexö Highschool (MANOS),

Dresden.

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apl. Prof. Dr. rer. nat. et Ing.habil. E. Kühnicke • Member of IEEE, German Society for Non-Destructive Testing (DGZfP), Technology in Medicine and Health Care (TIMUG), German Acoustical Society (DEGA), and German Association of University Professors. • Vice-chairman of the Working Group “University Professors” of the DGZfP. • Member of the Working Group “Ultrasound” of the DGZfP, Member of the sub-

committtees "Models and Theories for Ultrasound Testing" and "Phased Array". • Referee for the scientific journals “Journal of the Acoustical Society of America

(JASA)”, “Wave Motion”. • Referee of the Alexander von Humboldt Foundation. Dr. rer. nat. G. Suchaneck • Member of the Center of Applied Photonics at the Institute of Applied

Photophysics at TU Dresden. • Member of the Working Group “Plasma Technology” of the Association of

German Engineers (VDI), http://www.akplasma.org. • Referee for the scientific journals “Journal Vacuum Science and Technology”,

“Physica Status Solidi A”, “Journal of Material Science and Technology”, “Journal of Micro-Nano Mechanics”, “Materials Science in Semiconductor Processing”, and “Journal of Alloys and Compounds”.

• Project referee for the 7th Framework program of the European Union. • Project referee for the Southeast European Research Area Network (SEE-

ERA.NET). • Project referee for the subject "Thin film technology" of the Grant Agency,

Academy of Science of the Czech Republic. • Deputy member of the Empoyee Committee of the TU Dresden. PD Dr.-Ing. Margarita Günther: • Referee for the scientific journals “Sensors and Actuators B: Chemical”, “Materials

Science and Engineering C”, “Soft Matter”, “Polymer Chemistry”, “Progress in Polymer Science“, “Journal of Intelligent Material Systems and Structures” and “Analyst”.

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10. CONFERENCES 2012 10.1. Sensoren und Messsysteme 2012 Place: CongressCenter Nuremberg West Date: Mai 22-23, 2012 Conference chair: Prof. Dr. G. Gerlach, TU Dresden

Prof. Dr. R. Tutsch, TU Braunschweig Organization: VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik

(GMA) und AMA-Fachverband für Sensorik e. V. Topics: Mechanical sensors: MEMS sensors Mechanical sensors: Force and acceleration Mechanical sensors: Pressure and flow Mechanical sensors: Strain gauges Autonomous sensors Radio sensor systems Chemical sensors Bioanalytics Sensors for high temperatures and for gas detection Acoustic sensors Structural health monitoring Ultrasound measuring technology Impedance spectroscopie Complex measuring systems and sensor fusion Measurement uncertainty Temperature sensors Magnetic sensors Optical 3D-/surface measurement technology Optical sensor systems Fiber- and microoptic sensors Optical techniques in production measurement Website for download of contributions: www.ama-science.org

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10.2. 14th Leibniz Conference of Advanced Science - Sensorsysteme 2012 - Place: Best Western Hotel Lichtenwalde (Saxony) Date: October 18-19, 2012 Organization: Leibniz-Institut für interdisziplinäre Studien e.V. (LIFIS) in Zusammenarbeit mit First Sensor AG, Berlin Program committee: Bernd Junghans, Leibniz-Institut für interdisziplinäre Studien (LIFIS), Dresden Gerhard Banse, Institut für Technikfolgenabschätzung GmbH, Karlsruhe Gerald Gerlach, TU Dresden Volker Kempe, SensorDynamicsAG, Graz/Österreich Peter Krause, First Sensor AG, Berlin Norbert Meyendorf, Fraunhofer IfZP, Dresden Hans Richter, Institut für Halbleiterphysik (IHP), Frankfurt (Oder) Gert Wangermann, Leibniz-Institut für interdisziplinäre Studien (LIFIS), Berlin Bernd Wilhelmi, Jenoptik AG, Jena Topics: 1. Application of sensor systems 2. Fabrication of sensor systems 3. Power supply and communication of autonomous sensor systems 4. Human and social aspects of mass application of sensor systems Publication of contributions: www.leibniz-institut.de

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11. CONFERENCES 2013

11.1. IRS² 2013, 13th International Conference and Exhibition on Infrared Sen-

sors & Systems Place: Nuremberg, Exhibition Centre, Germany Date: May 14-15, 2013 Chairman: G. Gerlach, TU Dresden Conference Committee: G. Hofmann DIAS Infrared GmbH Dresden J. Hollandt Physikalisch-Technische Bundesanstalt, Berlin U. Kienitz Optris GmbH, Berlin W. Minkina University of Technology Czestochowa, Poland F.-H. Möllmann Brandenburg University of Apllied Sciences

R. Riesenberg Institut für Photonische Technologien e. V., Jena J. Schieferdecker Heimann Sensor GmbH, Dresden

H. Schlemmer Carl Zeiss Optronik GmbH, Oberkochen M. Tacke Fraunhofer IOSB, Ettlingen E. Wagner Fraunhofer IPM, Freiburg M. Walther Fraunhofer IAF, Freiburg J. Wendler AEG Infrarot Module GmbH, Heilbronn Topics: 1. Infrared Sensors

Photon detectors Thermal detectors Cooled detectors Unooled detectors Sensor modules Sensor packaging

2. Infrared System Components Infrared optics Optical modulators Infrared optical filters Signal and image processing 3. Infrared Systems and Applications Thermal imaging Pyrometry / contactless temperature measurement Gas analysis Spectroscopy Motion control and presence detection Security and safety monitoring Non-destructive testing

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11.2. SENSOR 2013 Place: Nuremberg, Exhibition Centre, Germany Date: May 14-16, 2013 Chairman: R. Lerch University Erlangen-Nuremberg R. Werthschützky TU Darmstadt Topics: A Sensor principles A1 Mechanical sensors A2 Flow sensors A3 Dimensional measurement A4 Ultrasonic sensors A5 Microacoustic sensors A6 Magnetic sensors A7 Impedance sensors A8 Gas sensors A9 Temperature and humidity sensors A10 Chemosensors A11 Biosensors A12 Embedded sensors A13 Sensor-actuator systems B Sensor technology B1 Sensor design B2 Numerical simulation of sensors B3 Sensor materials B4 MEMS-technology B5 Micro-Nano-Integration B6 Packaging B7 Materials B8 Thin films B9 Sensor production B10 Sensor reliability B11 Calibration and testing C Sensor electronics and communication C1 Sensor electronics C2 Sensor networks C3 Wireless sensors C4 Sensor communication C5 Energy harvesting C6 Measuring systems C7 Embedded systems C8 Self-monitoring and diagnosis

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D Applications

D1 Medical measuring technology D2 Ambient-assisted living D3 Process measuring technology D4 Automotive D5 Sensors in energy technology D6 Production technology D7 Security technology D8 Smart home D9 Household technology 11.3. 11. Dresdner Sensor-Symposium Place: Dreikönigskirche Dresden Date: December 9-11, 2013 Organization: Forschungsgesellschaft für Messtechnik, Sensorik und

Medizintechnik e.V. Dresden Information: www.fms-dresden.de

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12. VDE WORKING GROUP MICROELECTRONICS

12.1. Mission The Working Group “Microelectronics”of the VDE Dresden branch was established in 2003. It provides a panel for experience exchange to engineers, technical staff, scientists and students and is focused on all areas of microelectronics. The settlement of the world-leading suppliers of computer processors, random access memories, and silicon wafers in the Dresden region, and the advanced development of the traditional microelectronics companies made Saxony with itscenter of Dresden to one of the World leaders in microelectronics. The Working Group meetings take place in enterprises or research institutes. Thereby, the objectives of the work group are: • to establish a panel of free-of-charge education by interesting presentations

which mirror new developments in all areas of microelectronics, • to introduce componies and research institutions, • to promote contacts industrial employees to universities and their students. The topics of the Working Group are spread over all areas of microelectronics: • Wafer fabrication, • Semiconductor technology, • Electronic components and their design, • Applications (for instance sensorics, automotive, biotech, medical engineering). Prof. Dr.-Ing. habil. G. Gerlach has been chairman of the working group since its foundation in 2003.

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12.2. Meetings 2012 April 25, 2012

„Chemical-mechanical polishing“ TU Dresden, Institute of Semiconductors and Microsystems Technology

June 6, 2012

„Nonvolatile SRAMs at Anvo-Systems Dresden GmbH“ Anvo-Systems Dresden GmbH

September 5, 2012

„Large-diameter GaN-on-Si-wafer-technology “ AZZURRO Semiconducters AG

12.3. Meetings 2013 Information about next: www.vde.com/Regionalorganisationen/bezirksvereine/dresden.

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13. Journal of Sensors and Sensor

Systems (JSSS)

Aims and Scope Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, measumrement theory and uncertainty, sensor technologies and applications. The goal of JSSS is to provide a platform for scientists and academicians as well as for developers, engineers and users to discuss new developments and advancements in sensors and sensor systems. Issuing Body Journal of Sensors and Sensor Systems (JSSS) is published by the Copernicus GmbH (Copernicus Publications) on behalf of the AMA Association for Sensor Technology (AMA). ISSN: 2194-8771 eISSN: 2194-878X http://www.j-sens-sens-syst.net Chief Editor:

Gerald Gerlach

Associate Editors

• István Bársony; Hungarian Academy of Sciences, Research Centre for Natural Sciences, Budapest, Hungary

• Marco Jose da Silva, Federal University of Technology Parana, Curitiba, Brazil • Bernhard Jakoby, Johannes Kepler University Linz, Austria • Michael Kraft, University of Southampton, United Kingdom • Anita Lloyd Spetz, Linköping University, Sweden • Ryutaro Maeda, National Institute of Advanced Industrial Science and

Technology, Tsukuba, Japan • Nam-Trung Nguyen, Nanyang Technological University, Singapore • Michele Penza, Italian National Agency for New Technologies, Energy and

Sustainable Economic Development, Brindisi, Italy • Ulrich Schmid, Vienna University of Technology, Wien, Austria • Andreas Schütze, Saarland University, Saarbrücken, Germany • Klaus-Dieter Sommer, Physikalisch-Technische Bundesanstalt, Braunschweig,

Germany • Rainer Tutsch, Technische Universität Braunschweig, Germany

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Journal Subject Areas Sensor principles and phenomena

• Mechanical and inertial sensors; • Thermal sensors; • Optical and infrared sensors; • Magnetic sensors; • Chemical and biochemical sensors.

Measurement systems

• Sensor signal processing and electronics; • Sensor-actuator systems; • Multi-sensor systems; • Sensor networks.

Measurement theory, uncertainty and modeling of measurements • Measurement uncertainty; • Measurement theory and science.

Sensor technologies • Sensor materials; • Modeling and simulation; • MEMS technology; • Packaging; • Characterization and test.

Applications

• Process control; • Automation; • Smart home; • Robotics; • Production measurement technology; • Automotive and mobility; • Medical; • Environmental monitoring; • Safety and security; • Energy (generation, transport, distribution, storage, consumption); • Biotechnology.

Manuscript Types

• Regular Research Articles report original scientific work. • Short Communications report original scientific work that is of an urgent

nature. The length is limited to 2 journal pages. • Review Papers review recent progress in a particular topic by synthesis of

primary sources, mainly research papers presented in academic journals. • Feature Articles transfer comprehensive knowledge in areas of special

excitement and progress.

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