DRY VACUUM PUMPS - ebara.co.jp · EBARA's energy-saving dry vacuum pumps are used for many...

EBARA's energy-saving dry vacuum pumps are used for many different applications

Model ESAModel ESA are designed for fast pump-down of large chamber volumes.

EBARA PRECISION MACHINERY BUSINESS

• Ideal design for fast pumping on large volume chamber• Intelligent rotor RPM control function for flexible gas throughput.• Large diameter rotors enables compact size as pump unit• Optional exhaust configuration is available for organic solventapplication• Advanced warning & alarm data storage capability• Hands on feature for warning setting (programmable from LCDcontroller)• SEMI-S2/CE marking/NRTL available

Model ESA is built on EBARA's robust roots pump technology. Model ESA200W and larger models are best suited for fast pump down requirement on large volume chamber in industries such as LCD, photovoltaic manufacturing equipment. Model ESA25-D and Model E SA70W dry vacuum pumps have the largest installed base pump on MO-CVD applications. Model ESA dry vacuum pumps also feature intelligent rotation sequence for high gas loads and advanced interlock function.

Features

DRY VACUUM PUMPS

Model ◯◯◯ in this site is our model code



Specification Table

*1 Model "N": All Model ESA use Niresist iron*2 At maximum pumping speed and standard N2 purge flow rate.

L/min

1,400(50Hz)1,700(60Hz)

2,500(50Hz)3,000(60Hz)

7,000(50Hz)8,400(60Hz)

8,400 10,000 20,000

28,000(50Hz)30,000(60Hz)

47,000(50Hz)50,000(60Hz)

Pa

400(50Hz)270(60Hz)

5.3(50Hz)4.0(60Hz)

0.27(50Hz)0.13(60Hz)

0.4(50Hz)0.27(60Hz)

0.13 0.27 0.13 0.27 0.53 0.53 0.53

NW40 NW50 NW80 ISO100 ISO160

NW40

kW

2.9(50Hz) 3.2(60Hz)

2.6(50Hz)2.9(60Hz)

3.6(50Hz)4.0(60Hz)

4.2 4.9

3.2(50Hz)3.4(60Hz)

6.6(50Hz)7.3(60Hz)

5.1(50Hz)6.7(60Hz)

L/min 3.5～8 6～9

℃ Max. 30

Pa•m3/s14-17(4.6)

17-20(3.8)

24-27(4.7)

54-57 17-20(3.8)

7.5-10.5

8.5-11

3Phase/200V/50Hz3Phase/200-220V/60Hz

3Phase/380-400V/50Hz3Phase/380-440V/60Hz

- 3Phase/380-400V/50Hz3Phase/380-440V/60Hz

-3Phase/ 440V/ 50Hz3Phase/ 440-480V/ 60Hz

kVA 6.4 10.3 12.6 12.0 23.7 41.3

kg 240 380 400 410 700 750

Model

Pumping Speed

Ultimate Pressure

ConnectionGas Inlet

Gas Outlet

Approx.Power at Ultimate Pressure

CoolingWater

Flow rate

Temperature

N2 GasApprox. Flow rate(N2-0 Mode)

Utility

200V Model

400V ModelPower

SupplyPhase/Volt/Freq.

400V Model

Power capacity

Mass

ESA15-D

ESA25-D

ESA70W(-D)

ESA70WN(-D)

ESA80W-HDF

ESA80WN-HDF

ESA100W

ESA100WN

ESA200W

ESA300W

ESA500W

*1

*2



Performance Curves

DRY VACUUM PUMPS - ebara.co.jp · EBARA's energy-saving dry vacuum pumps are used for many...

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