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Design, Test, and Microfabrication of MEMS and MOEMS

Design, Characterization, and Packaging for MEMS and Microelectronics

Design, Test, Integration and Packaging of MEMS/MOEMS

MEMS Reliability for Critical Applications

Design, Modeling, and Simulation in Microelectronics

MEMS Design, Fabrication, Characterization, and Packaging

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Reliability, Testing, and Characterization of MEMS/MOEMS

Design, Test, and Microfabrication of MEMS and MOEMS Joint Invited Papers

MEMS for space applications Linda Miller, [1999]

Physical modeling and simulation of microdevices and microsystems Gerhard Wachutka, [1999]

Design of MEMS and microsystems David Nagel, [1999]

III-V semiconductor-based MOEMS Pierre Viktorovitch, [1999]

Surface normal optical MEMS in dynamic WDM transport networks James Walker, Joseph Ford, Keith Goossen, David Bishop, Dennis Greywall, Vladimir Aksyuk, [1999]

Prospective MEMS applications at NEC

Kenichiro Suzuki, [1999]

CAD, Design and Test

Test and Optimization

MEMS resonator synthesis for testability Nilmoni Deb, Sitaraman Iyer, Tamal Mukherjee, Ronald Blanton, [1999]

Fault simulation of MEMS using HDLs Benoit Charlot, Salvador Mir, Erika Cota, Marcelo Lubaszewski, Bernard Courtois, [1999]

Testing philosophy behind the micro analysis system Hans Kerkhoff, [1999]

MEMS optimization incorporating genetic algorithms Gregory Kirkos, Robert Jurgilewicz, Stephen Duncan, [1999]

Automatic evaluation of a sensor's geometrical parameters Jean Blanc, Marc Belleville, Fabien Mieyeville, Hubert Bono, [1999]

Emerging CAD Methods

Coupling of length scales and atomistic simulation of MEMS resonators Robert Rudd, Jeremy Broughton, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.)

Emerging CAD Methods (cont.)

Extraction of compact models for MEMS/MOEMS package-device codesign Vladimir Rabinovich, Joost Van Kuijk, Susan Zhang, Stephen Bart, John Gilbert, [1999]

Effects of capacitors, resistors, and residual charges on the static and dynamic performance of

electrostatically actuated devices Edward Chan, Robert Dutton, [1999]

Optimization of cantilever probes for atomic force microscopy Niels Pedersen, [1999]

CAD Systems I

Correct-by-construction approach to MEMS design and analysis Barry Dyne, David Bernstein, [1999]

Computational simulation of microfluidics, electrokinetics, and particle transport in biological MEMS devices M. Giridharan, Soumya Krishnamoorthy, Anantha Krishnan, [1999]

Advanced integrated solution for MEMS design K. Liateni, David Moulinier, Bachar Affour, H. Boutamine, Jean Michel Karam, D. Veychard, Bernard Courtois, Ariel Cao, [1999]

Integrated CAD tools for top-down design of MEMS/MOEMS systems Bart Romanowicz, Stephen Bart, John Gilbert, [1999]

General contact and hysteresis analysis of multidielectric MEMS devices under thermal and

electrostatic actuation Yie He, James Marchetti, Carlos Gallegus, [1999]

Design

Simulation of nonideal behavior in integrated piezoresistive silicon pressure sensors Stefan Finkbeiner, Jochen Franz, Stefan Hein, Andreas Junger, Joerg Muchow, Berhard Opitz, Wolfgang Romes, Oliver Schatz,

Hans Trah, [1999]

Fabrication of a smart monolithic 2D quartz microscanner Moussa Hoummady, L. Majewski, V. Robert, C. Bonjour, B. Chahboune, [1999]

Design of a pigtailed tunable filter for optical fiber transmissions at 1.3 to 1.55 µm Jean-Philippe Gouy, A. Tixier, Gen Hashiguchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, [1999]


Design (cont.)

Modeling and optimization of microcoils for telemetric transmission at frequencies up to 20 MHz Sven Rehfuss, Claudia Marschner, Karl-Ludwig Krieger, Marcus Weser, Rainer Laur, [1999]

Evaporating two-phase flow mechanism in microchannels Yoav Peles, Leonid Yarin, Gad Hetsroni, [1999]

CAD Systems II

Modeling and simulating optical MEMS using Chatoyant Timothy Kurzweg, Steven Levitan, Philippe Marchand, Jose Martinez, Kurt Prough, Donald Chiarulli, [1999]

Interoperation of heterogeneous CAD tools in Ptolemy II Jie Liu, Bicheng Wu, Xiaojun Liu, Edward Lee, [1999]

Structured CAD methodology for integrated MEMS and IC design Linh Nguyen, Hee Jung Lee, Mary Ann Perez-Maher, Ying Xu, [1999]

Computational design of membrane pumps with active/passive valves for microfluidic MEMS Andrzej Przekwas, H. Yang, Mahesh Athavale, [1999]

SUNRED: a new field solving approach Vladimir Szekely, A. Pahi, Marta Rencz, [1999]

Infrastructure

Computer-aided design tools for economical MEMS fabrication processes Christian Schneider, Andreas Priebe, Rainer Brueck, Kai Hahn, [1999]

Providing technology infrastructure for MEMS Renato Ribas, D. Veychard, Jean Michel Karam, Bernard Courtois, [1999]

Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for

large sparse systems of equations Zeljko Mrcarica, Vladimir Risojevic, Michel Lenczner, Mirko Jakovljevic, Vanco Litovski, [1999]

Internet MEMS design tools based on component technology Rainer Brueck, Christian Schumer, [1999]


Poster Papers: CAD, Design and Test

CFD-ACE+: a CAD system for simulation and modeling of MEMS Phillip Stout, H. Yang, Paul Dionne, Andy Leonard, Zhiqiang Tan, Andrzej Przekwas, Anantha Krishnan, [1999]

Advanced 3D-CAD interface for micromachining with excimer lasers Hans Toenshoff, Ferdinand von Alvensleben, Christian Kulik, [1999]

SPICE models for simulating BDJ and BTJ detectors Annick Alexandre, Guo Lu, Mohamed Sedjil, [1999]

Design and implementation of integrated BDJ detector in a standard CMOS technology Guo Lu, Gerard Sou, Mohamed Ben Chouikha, Mohamed Sedjil, [1999]

Mechanical-thermal simulation of surface-micromachined polysilicon hot plates Mihail Dumitrescu, Corbel Cobianu, Dan Dascalu, Adrian Pascu, [1999]

Numeric investigation of vibrating microcantilever using Matlab/Simulink Arturas Ulcinas, Valentinas Snitka, Mindaugas Rackaitis, [1999]

Lumped-parameter model for a micropump based on the magnetohydrodynamic (MHD) principle Lei Huang, Wanjun Wang, Michael Murphy, [1999]

Modeling of BDJ and BTJ structures for color detection Mohamed Sedjil, Guo Lu, Mohamed Ben Chouikha, Annick Alexandre, [1999]

Fault modeling of electrostatic comb-drives for MEMS Benoit Charlot, Spiridon Moussouris, Salvador Mir, Bernard Courtois, [1999]

Design of spatial light modulator microdevices: microslit arrays Rainer Riesenberg, Thomas Seifert, [1999]

From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric

actuator F. Oms-Elisabelar, Christian Bergaud, L. Nicu, [1999]

Design and sensitivity optimization of vibration sensors for tool-state monitoring Jochen Thomas, Ralf Kuehnhold, Heiner Ryssel, [1999]


Poster Papers: CAD, Design and Test (cont.)

Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems (MEMS) Andrzej Przekwas, [1999]

Hollow glass for insulating layers Andreea Merticaru, Gabriel Moagar-Poladian, [1999]

Micromachining and Microfabrication

Mechanical and Eletrochemical Micromachining and Micromolding

Manufacturing of microstructures using ultraprecision machine tools Manfred Weck, Stephan Fischer, [1999]

Innovative molding technologies for the fabrication of components for microsystems Volker Piotter, Tobias Benzler, Thomas Hanemann, Heinz Woellmer, Robert Ruprecht, Juergen Hausselt, [1999]

Micromolding behavior of engineering plastics Oliver Kemmann, Carsten Schaumburg, Lutz Weber, [1999]

Microfabrication technique for thick structure of metals and PZT Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, Toshio Sano, [1999]

Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys David Allen, Sue Impey, Remi Robin, Tom Chen, [1999]

Examples of MEMS technologies resulting in industrial transfers Jean-Sebastian Danel, Michel Borel, Marie-Therese Delaye, Bernard Diem, Hubert Grange, France Michel, Patrice Rey, Sylvie

Viollet-Bosson, [1999]

LIGA

Optimum doses and mask thickness for synchrotron exposure of PMMA resists Stewart Griffiths, Jill Hruby, Aili Ting, [1999]

X-ray transmission lenses by deep x-ray lithography and LIGA technique: first results and fundamental limits Roland Kupka, Faycal Bouamrane, Marc Roulliay, Stephan Megtert, [1999]

New pattern on fabrication of fiber spinnerets by LIGA technology Shi Chang Tseng, C. Shi, Chia-Lung Kuo, Yu-chiao Cheng, [1999]


LIGA (cont.)

Construction and manufacturing of a microgearhead with 1.9-mm outer diameter for universal application Christian Thuerigen, Ulrich Beckord, Reiner Bessey, [1999]

3D Microfabrication

Precision machining using UV and ultrashort-pulse lasers Hans Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Guido Willmann, Thilo Wagner, [1999]

Production of novel 3D microstructures using excimer laser mask projection techniques Nadeem Rizvi, [1999]

Microstereolithography using a dynamic mask generator and a noncoherent visible light source Serge Monneret, Virginie Loubere, Serge Corbel, [1999]

Processing of complex microsystems: a micro mass spectrometer Peter Siebert, G. Petzold, Joerg Mueller, [1999]

Microfabrication of biofactory-on-a-chip devices using laser ablation technology Mark Talary, Julian Burt, Nadeem Rizvi, Phil Rumsby, Ron Pethig, [1999]

Sensors, Electronic Devices, and Actuators

Design, test, and simulation of self-assembled micromachined rf inductors Peter Gammel, Bradley Barber, Victor Lubecke, Nathan Belk, M. Frei, [1999]

Design and realization of a penny-shaped micromotor Matthias Nienhaus, Wolfgang Ehrfeld, H. Stoelting, Frank Michel, S. Kleen, S. Hardt, Felix Schmitz, T. Stange, [1999]

Silicon UV flame detector utilizing photonic crystals Zoran Djuric, Tatjana Dankovic, Zoran Jaksic, Danijela Randjelovic, Radomir Petrovic, Wolfgang Ehrfeld, Andreas Schmidt,

Klaus Hecker, [1999]

Integrated multicolor detector utilizing 1D photonic bandgap filter with wedge-shaped defect Zoran Jaksic, Radomir Petrovic, Danijela Randjelovic, Tatjana Dankovic, Zoran Djuric, Wolfgang Ehrfeld, Andreas Schmidt,

Klaus Hecker, [1999]


MOEM Devices

Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters Alain Spisser, Philippe Regreny, Christian Seassal, Jean Louis Leclercq, Pierre Viktorovitch, [1999]

High-spatial-frequency grating technology for microsystem applications Olivier Parriaux, Florent Pigeon, Y. Jourlin, Alain Mure-Ravaud, Alexandre Tishchenko, [1999]

Polymeric optical MEMS Jens Hossfeld, Thomas Paatzsch, Jens Schulze, Michel Neumeier, Lutz Weber, Hans-Dieter Bauer, Wolfgang Ehrfeld, [1999]

Optical microsystems with microchip lasers and micro-optics Laurent Fulbert, Engin Molva, Jeannine Marty, Philippe Thony, Marc Rabarot, Bernard Ferrand, [1999]

MOEMS at LETI Patrick Mottier, Eric Ollier, Patrick Pouteau, Karine Petroz, Sylvie Jarjayes, [1999]

Assembly and Production Techniques

Flip-chip integration of lenslet arrays on segmented deformable micromirrors Adisorn Tuantranont, Victor Bright, Wenge Zhang, Y. Lee, [1999]

Chip-level three-dimensional assembling of microsystems Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, [1999]

Conventional micromachining for microassembly applications Ramona Eberhardt, A. Gebhardt, Torsten Scheller, [1999]

Handling and assembly of functionally adapted microcomponents (HAFAM): a European network Gordana Popovic, Werner Brenner, Helmut Detter, [1999]

Poster Papers: Micromachining and Microfabrication

Characterization of on-chip coils for rf microsystems Marcus Weser, Josef Binder, Sven Rehfuss, Rainer Laur, [1999]

Electrostatically driven micromachined nickel resonators and gyroscopes Olaf Renken, Wolfgang Benecke, [1999]

Multichannel arrays on polymer substrates: toward a disposable proteomics chip Holger Becker, Wolfgang Ehrfeld, Rainer Pommersheim, [1999]


Poster Papers: Micromachining and Microfabrication (cont.)

High-precision positioning stage for microassembly purposes Manfred Weck, Bernd Petersen, [1999]

Infrastructure for microsystem production Henne van Heeren, Stefan Sanchez, Job Elders, Rene Heideman, [1999]

Micromachined capacitive electret microphone Christiane Thielemann, Gisela Hess, [1999]

Multimode frequency analysis for the dynamic characterization of microstructures Christian Bergaud, L. Nicu, A. Martinez, P. Gerard, M. Benzohra, [1999]

Laser diode wavelength locking using a micromachined silicon mirror Neila Kaou, Cedrick Chappaz, Skandar Basrour, Michel de Labachelerie, [1999]

Optical pressure sensor head fabrication using ultrathin silicon wafer anodic bonding Michael Beggans, Dentcho Ivanov, Steven Fu, Thomas Digges, Kenneth Farmer, [1999]

Silicon carbide-aluminum nitride: new high-stability composition for MEMS Victor Luchinin, Andrey Korlyakov, Alexander Vasil'ev, [1999]

Micro-EDM for silicon microstructure fabrication Xiaozhong Song, Dominiek Reynaerts, Wim Meeusen, Hendrik Van Brussel, [1999]

Optical fiber switching device with active alignment Yves-Alain Peter, Hans-Peter Herzig, Stefano Bottinelli, [1999]

Microstereolithography: a new process to build complex 3D objects Laurence Beluze, Arnaud Bertsch, Philippe Renaud, [1999]

Fabrication of MEMS using liquid jet dispensing technique Sergey Sarkisov, Abdalla Darwish, Hossin Abdeldayem, Grigory Adamovsky, Mykola Kulishov, Curtis Banks, JaChing Wang,

[1999]

Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems Peter Martin, Dean Matson, Wendy Bennett, Donald Stewart, Yuehe Lin, [1999]

Backside contacts for sensor structure packaging Barbara Janyszek, Ryszard Jachowicz, Dorota Pijanowska, Jerzy Jazwinski, [1999]



Reactive ion etching of quartz and glasses for microfabrication Patrick Leech, Geoffrey Reeves, [1999]

Fabrication of single-mode optical fiber ferrule mold insert with 12 channels Hsiharng Yang, Michael Vasile, [1999]

Optical switch driven by giant magnetostrictive thin films Sung Moon, Sang Lim, Sang Bae Lee, HoKwan Kang, Min Kim, Seok Han, Myung-Hwan Oh, [1999]

Measurement of surface profile of microstructure Mingbao Zhou, Linbo Bai, Zhan Li, HanMin Yao, [1999]

Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining Arvi Kruusing, Seppo Leppaevuori, Antti Uusimaki, Matti Uusimaki, [1999]

New method to design halftone mask for the fabrication of continuous microrelief structure Jingqing Su, Jinglei Du, Jun Yao, Fuhua Gao, Yongkang Guo, Zheng Cui, [1999]

Experimentation of electrostatically actuated monochip micropump for drug delivery Monique Dilhan, Josiane Tasselli, Daniel Esteve, Pierre Temple-Boyer, Henri Camon, Marc Anduze, Stephane Colin, [1999]

Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN

composition Victor Luchinin, Andrey Korlyakov, Givi Jandjgava, Stanislav Prosorov, Aleksander Solomatin, Anatoley Sorokin, Sergey

Kucherkov, Leonid Severov, Valeriy Ponomarev, [1999]

Design, fabrication, and thrust prediction of solid propellant microthrusters for space application Carole Rossi, N. Fabre, Veronique Conedera, Daniel Esteve, [1999]

Preliminary results on the use of mirrors for LIGA process Stephan Megtert, Franz-Josef Pantenburg, Sven Achenbach, Roland Kupka, Juergen Mohr, Marc Roulliay, [1999]

Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining Youn Tae Kim, Young-Yong Kim, Chi-Hoon Jun, [1999]

Thermal flow sensor with vacuum-sealed membrane fabricated by surface micromachining Chi-Hoon Jun, Suk Kim, Dong-Seong Kwag, Youn Tae Kim, [1999]



Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate

plane Yoon Hong, Jong-Hyun Lee, Chang Lee, Won-Ick Jang, Chang-Auck Choi, Soo Hyun Kim, Yoon Keun Kwak, [1999]

Preparation and characterization of sol-gel-derived PZT thin films for microactuators Zhanjie Wang, Ryutaro Maeda, Kaoru Kikuchi, [1999]

Characteristics of residual products in HF gas-phase etching of sacrificial oxides for silicon micromachining Won-Ick Jang, Chang-Auck Choi, Chang Lee, Yoon Hong, Jong-Hyun Lee, [1999]

Development of silicon microheaters for chemoresistive gas sensors Sebastiano Brida, Lorenza Ferrario, Flavio Giacomozzi, Domenico Giusti, Vittorio Guarnieri, Benno Margesin, Giorgio Pignatel,

Giovanni Soncini, Alexey Vasil'ev, Giovanni Verzellesi, Mario Zen, [1999]

Optimization of TMAH etching for MEMS Sebastiano Brida, Lorenza Ferrario, Vittorio Guarnieri, Flavio Giacomozzi, Benno Margesin, Makarand Paranjape, Giovanni

Verzellesi, Mario Zen, [1999]

Fatigue test of thin film materials on a silicon chip using resonating loading system Taeko Ando, Tetsuo Yoshioka, Mitsuhiro Shikida, Kazuo Sato, [1999]

Stress-induced curvature engineering in surface-micromachined devices Vladimir Aksyuk, Flavio Pardo, David Bishop, [1999]

Characterization of silicon cantilevers with integrated pyramidal metal tips in atomic force microscopy Thomas Hantschel, Robert Stephenson, Thomas Trenkler, Peter De Wolf, Wilfried Vandervorst, [1999]

Acoustic characterization of TiO2 film for humidity sensors applications Cinzia Caliendo, Enrico Verona, [1999]

Mass separation using thin PTFE membranes Zeno Rummler, Walter Bacher, Volker Saile, Werner Schomburg, [1999]

Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process Kaihsiang Yen, Chienliu Chang, Peizen Chang, Jinghung Chiou, Jenn-Yi Chen, Hunghsuan Lin, [1999]

Patterning and bonding of TiNi shape memory thin film for fabrication of micropump Eiji Makino, Takashi Mitsuya, Tae Nakatsuji, Takayuki Shibata, [1999]



Production of movable metallic microstructures by aligned hot embossing and reactive ion etching Oliver Roetting, Bernd Koehler, Frank-Joachim Reuther, Hartmut Blum, Walter Bacher, [1999]

Thermal microactuator characterization Jacques Jonsmann, Siebe Bouwstra, [1999]

Silicon hillocks elimination using a complexant redox alkaline system Carmen Moldovan, Rodica Iosub, Dan Dascalu, Gheorghe Nechifor, Cornelia-Carmen Danila, [1999]

Stress-compensated metal stencil masks for selective deposition in microelectronics, micromechanics, and optoelectronics Niculae Dumbravescu, [1999]

Biomimetic photoreceptor Andreea Merticaru, [1999]

Electrochemical etching of silicon in aqueous solutions David Starosvetsky, Mark Kovler, Joseph Yahalom, [1999]

New method for reduction of corner undercutting in anisotropic KOH etching, and applications to MEMS and MOEMS Neila Kaou, J. Jeannot, Michel de Labachelerie, [1999]

DEM technique: a new three-dimensional microfabrication technique for nonsilicon materials Di Chen, Dacheng Zhang, Guifu Ding, Xiaolin Zhao, Jilin Zhang, Cunsheng Yang, Bingchu Cai, [1999]

Fabrication of thin film resistors and silicon microstructures using a frequency-doubled Nd:YAG laser Alexander Wogersien, Stefan Dauer, Stephanus Buettgenbach, [1999]

Positional accuracy study of a micro-EDM machine Heather Almond, Jagmohan Bhogal, David Allen, [1999]

Microfabrication of diamond probe for atomic force microscope Takayuki Shibata, Tae Nakatsuji, Yasutaka Kitamoto, Kazuya Unno, Eiji Makino, [1999]

Effect of polysilicon interface on stress in multistacked polysilicon films Chang-Auck Choi, Chang Lee, Won-Ick Jang, Jong-Hyun Lee, Byung-Ki Shon, [1999]



Micromachined photonic integrated circuits for sensor applications: experimental results Dana Cristea, Raluca Muller, Ioan Pavelescu, [1999]

Integration of SnO2 sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity

evaluation Corbel Cobianu, Raluca Iorgulescu, Cristian Savaniu, Antonela Dima, Dan Dascalu, Pietro Siciliano, Simona Capone, Roberto

Rella, Fabio Quaranta, Lorenzo Vasanelli, [1999]

Electrochemical microreactor Marin Gheorghe, Dan Dascalu, Mihaela Ghita, [1999]

Characterization of porous silicon for solar cell application by atomic force microscopy I. Simkiene, Valentinas Snitka, Kestutis Naudzius, Vaidas Pacebutas, Mindaugas Rackaitis, [1999]

Characterization of conductive probes for atomic force microscopy Thomas Trenkler, Thomas Hantschel, Wilfried Vandervorst, Louis Hellemans, Wilhelm Kulisch, Egbert Oesterschulze, P.

Niedermann, T. Sulzbach, [1999]

Microwave planar lumped circuit elements on micromachined thin dielectric membranes Sergiu Iordanescu, Alexandru Mueller, Romolo Marcelli, G. Bartolucci, Ioana Petrini, Dan Vasilache, Viorel Avramescu, [1999]

Design, Characterization, and Packaging for MEMS and Microelectronics

Plenary Session

Nonvolatile high-density high-performance phase-change memory memory G. Wicker, [1999]

Advanced rf CMOS technology H. Iwai, T. Ohguro, E. Morifuji, T. Yoshitomi, H. Kimijima, H. S. Momose, K. Inoh, H, Nii, Y. Katsumata, [1999]

Invited Paper Session

MEMS packaging and microassembly challenges R. Mehalso, [1999]

Review of the history and technology of micromachined miniature displays using foundry-

produced silicon backplanes foundry-produced silicon backplanes A. J. Walton, D. G. Vass, I. Underwood, G. Bodammer, D. Calton, K. Seunarine, J.T.M. Stevenson, A. Gundlach, [1999]

Application domains for synchrotron radiation sources of various energies Chantal Khan Malek, Volker Saile, [1999]

Nanometer x-ray lithography Frank Hartley, Chantal Khan Malek, [1999]

Integration of MEMS devices P.J. French, [1999]

High-efficiency silicon solar cells M.A. Green, [1999]

Packaging and Assembly

Analytical study on a MEMS microcooling system for cooling flip chips Andrew Tay, Francis Tay, Wenjie Li, [1999]

Tool and method for the theremal transient evaluation of packages Vladimir Szekely, Marta Rencz, Bernard Courtois, [1999]

New flexible building technique for microsystems Staffan Karlsson, Stefan Johansson, [1999]

Design, Characterization, and Packaging for MEMS and Microelectronics (cont.)

Design Methodologies for MEMS

Optimization criteria of CMOS-compatible thermopile sensors Chen-Hsun Du, Cheng-Kuo Lee, [1999]

Magnetic analysis of a micromachined magnetic actuator using the finite element method C. Ko, J. Yang, Jin-Chern Chiou, Shih Chen, T. Kao, [1999]

Model of an instrumented optoelectronic transmission system in HDL-A and VHDL-AMS Wilfried Uhring, Yannick Herve, Francois Pecheux, [1999]

Modeling and simulation of a three-axis acceleration sensing system with a mixed signal simulator David Greager, Barry Marlow, [1999]

Novel Devices

Development of power accumulation-type SiC MOSFET Handoko Linewih, Sima Dimitrijev, H. Barry Harrison, [1999]

Novel extension of neu-MOS techniques to neu-GaAs Peter Celinski, Derek Abbott, Jose Lopez, [1999]

Simulation

Algorithmic and practical questions of electrothermal circuit simulation Marta Rencz, Vladimir Szekely, A. Pahi, Andras Poppe, [1999]

Noise analysis of MESFET gallium arsenide circuits

Kamran Eshraghian, Hans-Joerg Pfleiderer, Stefan Lachowicz, [1999]

Simulation of circuits demonstrating stochastic resonance Gregory Harmer, Derek Abbott, [1999]

Simulation and properties of randomly switched control systems

Andrew Allison, Derek Abbott, [1999]


Test and Reliability Assessment

Automatic verification of asynchronous circuits using modified STG control graph Eddie Wong, Jie Gong, [1999]

Noise measurement used for reliability screening of optoelectronic coupled devices (OCDs) Jiansheng Xu, Derek Abbott, Yisong Dai, [1999]

MEMS Systems and Components I

Low-cost metal micropump for drug delivery Francis Tay, G. Xu, Wen Choong, Hong Xue, [1999]

Development of a high-energy-resolution x-ray microcalorimeter using Ti/Au TES Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Tohru Oshima, Youichi Aruga, Kana Maegami, Ryuichi Fujimoto, Toshiyuki

Miyazaki, Kazuhisa Mitsuda, [1999]

Novel design of a MEMS-based tactile sensor Ranjit Singh, [1999]

Programmable MEMS capacitor arrays Bruce Duewer, John Wilson, David Winick, Paul Franzon, [1999]

Novel Circuits

Asynchronous techniques for digital MESFET gallium arsenide circuits Kamran Eshraghian, Stefan Lachowicz, [1999]

Very high-speed differential optoelectronic algorithmic ADC using n-i(MQW)-n SEED technology Said Al-Sarawi, Neil Burgess, Warren Marwood, Petar Atanackovic, [1999]

MEMS Systems and Components II

Micromirror device with tilt and piston motions Jin-Chern Chiou, Yu-Chen Lin, [1999]

Design and performance evaluation of a silicon eye using micromirrors Natalie Clark, Paul Furth, [1999]

Motion detection using color templates Kevin Chin, Derek Abbott, [1999]


Characterization

High-temperature testing of nickel wire bonds for SiC devices Ravi Burla, Shuvo Roy, Vishal Haria, Christian Zorman, Mehran Mehregany, [1999]

Laser-beam-induced current technique as a quantitative tool for HgCdTe photodiode characterization Charles Musca, David Redfern, John Dell, Lorenzo Faraone, [1999]

Poster Session

Fully parallel fuzzy logic processor architecture: exceeding one billion rules per second Michael Lees, Duncan Campbell, [1999]

Toward high-torque electrostatic tubular motors Philippe Helin, Gilles Bourbon, Patrice Minotti, Hiroyuki Fujita, [1999]

Mechanical stress in polysilicon layers and evaluation by a new procedure Florin Gaiseanu, Jaume Esteve, [1999]

Modular exponential accelerator chip based on precomputations for RSA cryptography application Victor Ramschie, Ahsan Hariz, Malcolm Haskard, [1999]

Optimizing the simulation of bipolar transistor packages using sliding mode techniques Vardan Mkrttchian, Armen Simonyan, Knarik Mkrtchyan, [1999]

Modeling HEMT intermodulation distortion characteristics Guoli Qu, Anthony Parker, [1999]

Design and simulation of a micromirror array for a projection TV Bumkyoo Choi, Junghoon Lee, Kyuwon Jung, Hyungjae Shin, [1999]

Mechanical characterization of magnetostrictively actuated microresonators Tarik Bourouina, Amalia Garnier, Hiroyuki Fujita, Toshiro Hiramoto, Elisabeth Orsier, Jean-Claude Peuzin, [1999]

Area, time, power optimization for radix-2 redundant CORDIC rotation engines Thambipillai Srikanthan, Bimal Gisuthan, K. Asari, [1999]

Modeling malfunctions of the circuits arising from external influence Vardan Mkrttchian, Asmik Eranosian, Armen Simonyan, Knarik Mkrtchyan, [1999]


Poster Session (cont.)

Hydrophilic and hydrophobic phenomena on silicon substrate for MEMS Daiki Kamiya, Mikio Horie, [1999]

Designing online self-testing control units with guaranteed fault coverage Serge Demidenko, [1999]

Anomalous drain current-voltage characteristics in AlGaN/GaN MODFETs at low temperatures Gilberto Umana-Membreno, John Dell, Lorenzo Faraone, Yi-Feng Wu, Giacinta Parish, Umesh Mishra, [1999]

Integrated millimeter-wave antenna for early warning detection Abdulla Mohamed, Andrew Campbell, David Goodfellow, Derek Abbott, Hedley Hansen, Ken Harvey, [1999]

Sandwich-type structure for economical MEMS and MOEMS assembly Niculae Dumbravescu, [1999]

Development of low-temperature wafer level vacuum packaging for microsensors Wei-Feng Huang, Jin-Shown Shie, Cheng-Kuo Lee, Shih Gong, Cheng-Jien Peng, [1999]

Fabrication of fine metal microstructures packaged in the bonded glass substrates Akihito Kawamura, Shinichi Ike, Shuichi Shoji, [1999]

Modeling of electrohydrodynamically enhanced pool boiling heat transfer using helical coil electrodes Thai Nguyen, Jafar Madadnia, [1999]

X-Y nanopositioners using high-density arrays of mechanical oscillators Gilles Bourbon, Patrice Minotti, Philippe Helin, Hiroyuki Fujita, [1999]

Design, Test, Integration, and Packaging of MEMS/MOEMS Joint Invited Papers

Microactuated optical MEMS (abstract only) Hiroyuki Fujita, [2000]

CAD for integrated MEMS design Tamal Mukherjee, [2000]

Compliant MEMS: design methods and applications Sridhar Kota, [2000]

Coupling of length scales in MEMS modeling: the atomic limit of finite elements Robert Rudd, [2000]

Challenges and opportunities in deployment of MEMS for in-vivo monitoring of cardiovascular systems Roop Mahajan, [2000]


Model Generation and Behavioral Simulation

Automated generation of compact models for fluidic microsystems Marek Turowski, Zhijian Chen, Andrzej Przekwas, [2000]

THERMODEL: a tool for thermal model generation and application for MEMS packages Vladimir Szekely, Marta Rencz, Andras Poppe, Bernard Courtois, [2000]

Efficient reduced order modeling for system simulation of micro-electro-mechanical systems

(MEMS) from FEM models Bachar Affour, Philippe Nachtergaele, Stevan Spirkovitch, Dale Ostergaard, Miklos Gyimesi, [2000]

Numerical spring models for behavioral simulation of MEMS inertial sensors Sitaraman Iyer, Tamal Mukherjee, [2000]

Design and optimization of passive components for optical interconnects Pascal Bontoux, Ian O'Connor, Frederic Gaffiot, Gilles Jacquemod, [2000]

Design Methods and Optimization I

Increasing the dynamic range of a micromechanical moving-plate capacitor Jukka Kyynaeraeinen, Aarne Oja, H. Seppae, [2000]

Design, Test, Integration, and Packaging of MEMS/MOEMS (cont.)

Design Methods and Optimization I (cont.)

Nonlinear analysis of beams under electrostatic loads A. Gugliotta, Aurelio Soma, S. Di Mauro, F. De Bona, F. Roccaforte, [2000]

High-thermal-impedance beams for suspended MEMS Salvador Mir, Benoit Charlot, F. Parrain, D. Veychard, [2000]

Development and application of a computer-supported method for design optimization of micro-optical systems Ingo Sieber, Helmut Guth, Horst Eggert, Klaus-Peter Scherer, [2000]

Design Methods and Optimization II

Acoustic and magnetic MEMS components for a hearing aid instrument Sazzadur Chowdhury, Graham Jullien, Majid Ahmadi, W. Miller, Daniel Keating, Nora Finch, [2000]

Mathematical modeling on the quadrature error of low-rate microgyroscope for aerospace applications Bao Yeh, Yung Liang, Francis Tay, [2000]

Design of an APS CMOS image sensor for space applications using standard CAD tools and

CMOS technology Jerome Goy, Bernard Courtois, Jean Michel Karam, Francis Pressecq, [2000]

Electromagnetic analysis of the IR sensor focal plane arrays of micro-optics Zbigniew Sikorski, [2000]

Electronics for MEMS

Signal processing electronics for a capacitive microsensor Gilles Amendola, Guo Lu, [2000]

Modeling, design, and test of a monolithic integrated magnetic sensor in a digital CMOS technology using a switched current interface system C. Rubio, Sebastian Bota, J. Macias, Josep Samitier, [2000]

1-GHz CMOS VCO design for wireless application using MEMS technology Amal Mohamed, Hamed Elsimary, Mohammed Ismail, [2000]


CAD Systems

Moving from analysis to design: a MEMS CAD tool evolution K. Liateni, Hee Lee, Mary Ann Perez-Maher, Jean Michel Karam, [2000]

CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations Zhiqiang Tan, M. Furmanczyk, Marek Turowski, Andrzej Przekwas, [2000]

Robust and versatile software system for optimal design of MEMS structures Byung Kwak, Sang Lee, Jae Huh, [2000]

Mixed-technology system-level simulation Steven Levitan, Jose Martinez, Timothy Kurzweg, Philippe Marchand, Donald Chiarulli, [2000]

Standardization for microsystem technology Werner Brenner, A. Stelmach, J. Baret, [2000]

Testing and Failure Analysis

High-level fault modeling in surface-micromachined MEMS Nilmoni Deb, Ronald Blanton, [2000]

MEMS physical analysis in order to complete experimental results return Xavier Lafontan, Christian Dufaza, Guy Perez, Francis Pressecq, [2000]

MEMS IC test probe utilizing fritting contacts Toshihiro Itoh, Kenichi Kataoka, Gunter Engelmann, Juergen Wolf, Oswin Ehrmann, Herbert Reichl, Tadatomo Suga, [2000]

Test structures for CMOS-compatible silicon pressure sensor reliability characterization Enric Montane, Sebastian Bota, Santiago Marco, M. Carmona, Josep Samitier, [2000]


International frequency sensor association (IFSA): goals and activities Sergey Yurish, [2000]

Dynamic checking improves MEMS design methodology Xavi Marin, Jordi Carrabina, Juan Bausells, [2000]


Poster Papers: CAD, Design and Test (cont.)

Computational framework for modeling one-dimensional subgrid components and phenomena in multidimensional microsystems Maciej Pindera, Sami Bayyuk, Vasudeva Upadhya, Andrzej Przekwas, [2000]

New methodology of work with concurrent engineering in electronic design P. Owezarski, V. Baudin, S. Owezarski, G. Fabre, T. Gayraud, J. Dorkel, P. Tounsi, [2000]

Modeling and design of multiple buried junctions detectors for color systems development Annick Alexandre, Gerard Sou, Mohamed Ben Chouikha, Mohamed Sedjil, Guo Lu, George Alquie, [2000]

Evaluation of the orientation of thermal deformation in the surface-micromachined membrane

of gas microsensors Marius Dumitrescu, Corbel Cobianu, Adrian Pascu, [2000]

Microfabrication, Integration and Packaging

Assembly Technologies

Advanced flip chip technologies in rf, microwave, and MEMS applications Hermann Oppermann, C. Kallmayer, M. Klein, R. Aschenbrenner, Herbert Reichl, [2000]

Residual thermomechanical stresses in ultrathin chip stack technology J. Puigcorbe, Sergio Leseduarte, Santiago Marco, Eric Beyne, Rita Van Hoof, Antoine Marty, Stephane Pinel, Olivier Vendier,

Augustin Coello-Vera, [2000]

New ultrathin 3D integration technique: technological and thermal investigations Stephane Pinel, Josiane Tasselli, Antoine Marty, Jean-Pierre Bailbe, Eric Beyne, Rita Van Hoof, Santiago Marco, Sergio

Leseduarte, Olivier Vendier, Augustin Coello-Vera, [2000]

Integration and packaging of MEMS relays Jungsang Kim, Cristian Bolle, R. Boie, John Gates, A. Ramirez, Sungho Jin, David Bishop, [2000]

Devices and Components I

SCREAM micromachined high-aspect-ratio low-g microaccelerometer Francis Tay, V. Logeeswaran, Yung Liang, [2000]


Devices and Components I (cont.)

Silicon micro-electro-mechanical systems for millimeter-wave applications Katia Grenier, Patrick Pons, T. Parra, Robert Plana, Jacques Graffeuil, [2000]

Design, fabrication, and packaging of closed-chamber PCR chips for DNA amplification Christian Schabmueller, Alan Evans, Arthur Brunnschweiler, Graham Ensell, Dario Leslie, M. Lee, [2000]

Devices and Components II

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links Jussi Graeffe, Mika Suhonen, Hannu Sipola, Teuvo Sillanpaeae, [2000]

Packaged bulk micromachined resonant force sensor for high-temperature applications M. Haueis, Juerg Dual, Claudio Cavalloni, M. Gnielka, Rudolf Buser, [2000]

Design and fabrication of a novel thermally actuated vertical bimorph scanner for an integrated AFM Harald Sehr, Alan Evans, Arthur Brunnschweiler, Graham Ensell, [2000]

Micromachined CMOS magnetic field sensor with ferromagnetic actuation Laurent Latorre, V. Beroulle, Y. Bertrand, Pascal Nouet, I. Salesse, [2000]

MOEMS Packaging

Photovoltaic miniarrays assembled using multichip module technology (MCM) P. Ortega, L. Castaner, [2000]

Integrated Process and Manufacturing

Scheduling MEMS manufacturing Francis Tay, Loo Lee, Lixin Wang, [2000]

Preliminary results at the ultradeep x-ray lithography beamline at CAMD Georg Aigeldinger, Philip Coane, Benjamin Craft, Jost Goettert, Sam Ledger, Zhong-geng Ling, Harish Manohara, Louis Rupp,

[2000]

Rapid fabrication of microcomponents Thomas Hanemann, Juergen Hausselt, Robert Ruprecht, M. Skrifvars, K.-H. Zum Gahr, Wilhelm Pfleging, [2000]


Reliability and Characterization

Influence of materials selection and quality on ink jet nozzles fabricated by micro-

electrodischarge machining Heather Almond, David Allen, [2000]

Effects of dc and ac bias on the dynamic performance of microresonators Francis Tay, R. Kumaran, B. Chua, V. Logeeswaran, [2000]

New types of silicon torsion microspring and their characterization Werner Brenner, Gh. Haddad, H. Rennhofer, M. Rennhofer, Aleksandar Vujanic, Gordana Popovic, [2000]

Failure of polymer-metal interfaces under hygrothermal loading Andrew Tay, Y. Ma, Sim Heng Ong, [2000]

Posters on Microfabrication, Integration and Packaging

High-aspect-ratio electroformed Ni-Co microstructures with improved mold adhesion using a

LIGA-like process and a Novolak sublayer Chantal Khan Malek, Lowell Thomas, [2000]

Microsystems reliability estimation features A. Andonova, Ch. Roumenin, [2000]

Micromechanical silicon precision scale Aarne Oja, Teuvo Sillanpaeae, H. Seppae, Jyrki Kiihamaeki, P. Seppaelae, Jani Karttunen, Kari Riski, [2000]

Application of a new electrometric approach to study interaction between biological molecules Nickolaj Starodub, Igor Goraychuk, Valentyna Starodub, Vasyl' Il'chenko, Gennagij Kuznetsov, [2000]

Silicon optoelectronic integrated circuits for MOEMS Dana Cristea, Florea Craciunoiu, M. Caldararu, [2000]

Array of niobium nanotips formed in porous anodic alumina matrix Victor Surganov, G. Gorokh, [2000]

Technical comparison of micro-electrodischarge machining, microdrilling, and copper vapor

laser machining for the fabrication of ink jet nozzles David Allen, Heather Almond, Peter Logan, [2000]

Surface investigation of porous GaAs used for luminescent films Valentinas Snitka, I. Simkiene, K. Grigoras, Vytautas Jasutis, Kestutis Naudzius, Vaidas Pacebutas, J. Sabataityte, Vida Mizariene,

[2000]


Posters on Microfabrication, Integration and Packaging (cont.)

Development of miniature pantograph mechanisms with large deflective hinges for new surface mount systems Mikio Horie, Toru Uchida, Daiki Kamiya, [2000]

MEMS structure: micromirror array Martin Huja, Miroslav Husak, [2000]

Anodic oxidation in polysilicon microactuators Pierre Voumard, Patrick Debergh, G. Perregaux, S. Gonseth, [2000]

3D resolution gray-tone lithography Niculae Dumbravescu, [2000]

Additional Poster Paper on CAD, Design and Test

Analysis of electromechanical parameters of electrostatic microrelay with a movable elastic

cantilever electrode Georgy Efremov, Nikolay Mukhurov, A. Galdetskiy, [2000]

Additional Paper from Session on Reliability and Charaterization

Si-based microphone testing methodology and noise reduction C. Premachandran, Zhe Wang, Tai Chai, S. Chong, Mahadevan Iyer, [2000]

MEMS Reliability for Critical Applications

Plenary Session

MEMS/MOEMS for lightwave networks: Can little machines make it big? David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, Jim Walker, [2000]

Bulk micromachining for sensors and actuators Masayoshi Esashi, [2000]

Microsystems for diverse applications using recently developed microfabrication techniques Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe

Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij, [2000]

MEMS Failure Analysis

Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode Jeremy Walraven, Jerry Soden, Danelle Tanner, Paiboon Tangyunyong, Edward Cole, Richard Anderson, Lloyd Irwin, [2000]

Fracture tests of etched components using a focused ion beam machine Jonathan Kuhn, Rainer Fettig, S. Harvey Moseley, Alexander Kutyrev, Jon Orloff, [2000]

Failure analysis of tungsten-coated polysilicon micromachined microengines Jeremy Walraven, Seethambal Mani, James Fleming, Thomas Headley, Paul Kotula, Alejandro Pimentel, Michael Rye, Danelle

Tanner, Norman Smith, [2000]

MEMS Process and Packaging Reliability

Ultrasonic actuation for MEMS dormancy-related stiction reduction Ville Kaajakari, Shyi-Herng Kan, Li-Jen Lin, Amit Lal, M. Steven Rodgers, [2000]

Effects of temperature on surface adhesion in MEMS structures Jeffrey Jennings, Leslie Phinney, [2000]

Characterization of Kovar-Pyrex anodically bonded samples: a new packaging approach for

MEMS devices Stephen Vargo, Amanda Green, Juergen Mueller, David Bame, Robert Reinicke, [2000]

MEMS Reliability for Critical Applications (cont.) Surface-Micromachined MEMS Reliability

Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors Arman Gasparyan, Vladimir Aksyuk, Paul Busch, Susanne Arney, [2000]

Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures Carolyn White, Herbert Shea, Kimberly Cameron, Flavio Pardo, Cristian Bolle, Vladimir Aksyuk, Susanne Arney, [2000]

Micro nano technology visualization (MNTV) of micromachined MEMS polysilicon structures Russell Lawton, Gisela Lin, Joanne Wellman, Leslie Phinney, Jose Uribe, Edward Griffith, Ingrid De Wolf, Eric Lawrence, [2000]

MEMS Qualification

Mechanical effects of fatigue and charge on CMOS MEMS Kevin Frederick, Gary Fedder, [2000]

Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages Herbert Shea, Arman Gasparyan, Carolyn White, Robert Comizzoli, David Abusch-Magder, Susanne Arney, [2000]

Effect of storage life and drive signals on the reliability of the Sandia Microengine Chad O'Neal, Ajay Malshe, William Eaton, [2000]

Diagnosis of microcrack initiation and estimation fracture toughness for micromachined silicon comb device with prenotch actuated by electrostatic force Se-Ho Lee, Jae Kim, Y. Eugene Pak, Jong up Jeon, Dongil Kwon, [2000]

Design, Modeling, and Simulation in Microelectronics

Novel Areas of CAD for Microelectronics and MEMS

Behavioral modeling of short-distance optical interconnects Fabien Mieyeville, Gilles Jacquemod, Ian O'Connor, Frederic Gaffiot, [2000]

From MEMS to the global simulation of SoCs Marta Rencz, Vladimir Szekely, Andras Poppe, Bernard Courtois, [2000]

Applications of mixed-signal test strategies to next-generation microsystems Carl Jeffrey, Richard Rosing, Andrew Richardson, [2000]

MEMS and RF Components Modeling

Microcoil modeling: benefit and implementation of a permeable layer Sven Rehfuss, Claudia Marschner, Dagmar Peters, Hilmar Bolte, Rainer Laur, [2000]

Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model Dagmar Peters, Hilmar Bolte, Claudia Marschner, Sven Rehfuss, Rainer Laur, [2000]

Simple and accurate method of modeling spiral inductor up to six times its first self-resonant

frequency Aik Ng, Lye Chua, Geok Ng, Choi Law, [2000]

Advanced Design Methods

Numerical simulation of microassembly of MEMS devices and post-assembly electromechanical actuation Daniel Keating, Yie He, Nora Finch, James Marchetti, [2000]

Modular approach for simulation-based optimization of MEMS Peter Schneider, E. Huck, S. Reitz, Sandra Parodat, Andre Schneider, Peter Schwarz, [2000]

CAD modeling of scratch drive actuation Nora Finch, James Marchetti, Hiroyuki Fujita, Jean-Philippe Gouy, [2000]

DSP systems design in a SystemC-based design flow Babu Mailachalam, Thambipillai Srikanthan, [2000]

Design, Modeling, and Simulation in Microelectronics (cont.)

High-Level Synthesis and Testing

Compact trace generation and power measurement in software emulation Fabian Wolf, Judita Kruse, Rolf Ernst, [2000]

Interconnection optimization during high-level synthesis of digital systems Hongwei Zhu, Ching Jong, Yu Zheng, [2000]

Data path allocation for low power in high-level synthesis Yu Zheng, Ching Jong, Hongwei Zhu, [2000]

Delay-bound determination for path constraint satisfaction Nadine Azemard, Michel Aline, Daniel Auvergne, [2000]

Analysis of fault coverage and simulation of test data compactors for online testing control

units Serge Demidenko, [2000]

Device Modeling I

RF modeling of MOSFETs Mohamed Deen, Chih-hung Chen, S. Naseh, Y. Cheng, M. Matloubian, [2000]

Correlation between distributed and lumped FET model parameters Subrata Halder, Geok Ng, Choi Law, [2000]

Characterization and modeling of avalanche multiplication in HBTs Fujiang Lin, Bo Chen, Tianshu Zhou, Ban Ooi, Pang Kooi, [2000]

Design and Synthesis of Analog Circuits

Synthesis system for analog circuits Yvonne Lam, Mark Zwolinski, [2000]

Novel circuit concept for PSK-demodulation in passive telemetric systems Claudia Marschner, Sven Rehfuss, Dagmar Peters, Hilmar Bolte, Rainer Laur, [2000]

Monolithic adaptively biased micropower CMOS variable gain amplifier Ram Rana, [2000]


Novel Circuits and Systems

Pipelining flat CORDIC-based trigonometric function generators Thambipillai Srikanthan, Bimal Gisuthan, [2000]

Fully scalable ROM-less architecture for precomputing the polarity of microrotations in CORDIC-based sine/cosine generators Bimal Gisuthan, Thambipillai Srikanthan, [2000]

Low-cost speech recognition system for small vocabulary and independent speaker Chih Chiang Teh, Ching Jong, Liter Siek, [2000]

Interactive Web-based tutorials for teaching digital electronics Donald Bailey, [2000]

Integrative approach to teaching electronics design Donald Bailey, Ken Mercer, Bob O'Driscoll, Colin Plaw, Wyatt Page, Ross Nilson, [2000]

Device Modelling II

Diffusion current and thermal noise in short-channel MOSFETs Michael Obrecht, Tajinder Manku, [2000]

Empirical model of effective channel length (Leff) for 0.25-µm LDD nMOSFET Po-Ching Liu, H. Lin, [2000]

Surface-potential-based model of reverse short-channel effect in submicrometer MOSFETs

with nonuniform lateral channel doping Wensheng Qian, Xing Zhou, Yuwen Wang, Khee Lim, [2000]

Extraction of VBIC model for SiGe HBTs made easy by going through Gummel-Poon model Fujiang Lin, Tianshu Zhou, Bo Chen, Ban Ooi, Pang Kooi, [2000]

Analytical model for subthreshold current in short-channel fully depleted SOI MOSFETs incorporating velocity overshoot

A. H. M. Zahirul Alam, Mohammad Momen, Md. Islam, Pran Saha, [2000]


TCAD

Steep retrograde indium channel profiling for high-performance nMOSFETs device fabrication Shiang Ong, Eng Chor, Ying Leung, James Lee, Wen Li, Alex See, Lap Chan, [2000]

Extensible TCAD optimization framework combining gradient-based and genetic optimizers Clemens Heitzinger, Siegfried Selberherr, [2000]

Parallel unstructured grid DSMC for the study of molecular gas dynamics in semiconductor

manufacturing Abhinav Singh, Yong Zhao, [2000]

Tuning dielectric constant and Young's modulus by nanofabrication Changqing Sun, Beng Tay, Shu Ping Lau, Xiao Sun, [2000]

MEMS Components

Design considerations in micromachined silicon microphones Jianmin Miao, Rong Lin, Longqing Chen, Quanbo Zou, Sin Lim, Suan Seah, [2000]

Model for fabricating close-coupling pumped microchip lasers Jingang Liu, Siu Chung Tam, Yee Loy Lam, Hongru Yang, Wenjie Xie, Deyuan Shen, [2000]

Geometry optimization of the interdigitated metal-semiconductor-metal photodiode structures Stanislav Averine, Yuen Chuen Chan, Yee Loy Lam, [2000]

Poster Session

Modeling and simulation of phase-locked loops in the time and frequency domain Michael Hinz, Ingo Koenenkamp, Ernst-Helmut Horneber, [2000]

Design of high-speed high-performance, serial bus data transceiver Saravanan Kuppusamy, S. M. Rezaul Hasan, [2000]

High-performance transimpedance amplifier for OC-48 optical transceiver application Nasir Quadir, S. M. Rezaul Hasan, [2000]



Design and analysis of RAM transparent March test for BIST implementation Serge Demidenko, Scott Henderson, [2000]

Investigation of reverse short channel effect with numerical and compact models Yuwen Wang, Khee Lim, Wensheng Qian, Xing Zhou, [2000]

Multilevel transmission line macromodeling and latency for the time domain simulation Methee Hwangkhunnatham, Ekachai Leelarasmee, [2000]

Optomechanical analysis of silicon integrated optical pressure sensors based on Mach-

Zehnder interferometry Ioan Pavelescu, Nicoleta Mierlacioiu, [2000]

MEMS Design, Fabrication, Characterization, and Packaging

Introductory Paper

MEMS and mil/aero: technology push and market pull Thomas Clifford, [2001]

Modeling and Design

Model library and tool support for MEMS simulation Peter Schwarz, Peter Schneider, [2001]

Suspended substrate stripline structures evaluation for millimeter-wave circuits application Jeffrey Fu, Chao Lu, Boon Kwok, Wendy Lee, [2001]

Experimental investigation, modeling, and simulations for MEMS-based gas sensor used for

monitoring process chambers in semiconductor manufacturing Ijaz Jafri, Frank DiMeo, Jeffrey Neuner, Sue DiMascio, James Marchetti, [2001]

Component-based assistants for MEMS design tools Kai Hahn, Rainer Brueck, Christian Schneider, Christian Schumer, Jens Popp, [2001]

Design of a micro-Wankel rotary engine for MEMS fabrication Kyle Jiang, Philip Prewett, M. Ward, Y. Tian, H. Yang, [2001]

SPICE modeling of liquid capacitance in micromachined silicon capillaries Paul Rainey, Neil Mitchell, Harold Gamble, [2001]

Electromechanical analysis of microelectromechanical structures and dynamic simulations of

laterally vibratory microgyroscope Jing Fang, W. Zhang, C. Wang, Z. Li, D. Zhang, [2001]

MEMS Design, Fabrication, Characterization, and Packaging (cont.)

Processes and Fabrication Technologies I

Characterization and optimization of deep dry etching for MEMS applications Alexandra Rickard, Mark McNie, [2001]

Comparison of Bosch and cryogenic processes for patterning high-aspect-ratio features in silicon Martin Walker, [2001]

Fabrication of silicon sidewall profiles for fluidic applications using modified advanced silicon etching Chi-fu Wu, Lars Erdmann, Kaigham Gabriel, S. Yao, [2001]

Nd:YAG laser micromachining of SiC precision structures for MEMS Ernst Kreutz, Ruth Weichenhain, Alexander Horn, [2001]

Profile control of SU-8 photoresist using different radiation sources Zheng Cui, Derek Jenkins, Andreas Schneider, Geoff McBride, [2001]

Computational synthesis of lithographic mask layouts for silicon microcomponents Stephanus Buettgenbach, Ulli Hansen, Lars Steffensen, [2001]

Advances in silicon-to-glass bonding with laser Michael Wild, Arnold Gillner, Reinhart Poprawe, [2001]

Fine-grained polysilicon films with built-in tensile strain Mohammed Rahman, [2001]

Processes and Fabrication Technologies II

Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS Vijay Varadan, Vasundara Varadan, [2001]

Characterization, Packaging, and Interconnection

Novel equipment for friction force measurement on MEMS and microcomponents Martin Schmidt, Andreas Wortmann, Holger Luethje, Stephanus Buettgenbach, [2001]


Characterization, Packaging, and Interconnection (cont.)

Bio/chemical microsystem designed for wafer scale testing Anders Jorgensen, Klaus Mogensen, Weimin Rong, Pieter Telleman, Joerg Kutter, [2001]

Breakdown voltage behavior of electrostatic microactuators Resh Dhariwal, Mohamad Ahmad, Marc Desmulliez, [2001]

3D-CSP: an innovative packaging method based on RMPD Helge Bohlmann, Reiner Goetzen, Andrea Reinhardt, [2001]

Method of localized and low-temperature wafer bonding for microsystem packaging Shengchih Shen, Chengtang Pan, Hwai-Pwu Chou, [2001]

Optical MEMS

MEMS hybridization: bridging the free-space gap Paul Blair, Duncan McMillan, Jean Podlecki, Mark Begbie, Kevin Yallup, [2001]

Investigation of improved designs for rotational micromirrors using multiuser MEMS processes Julianna Lin, Feras Michael, Andrew Kirk, [2001]

Wafer scale packaging for a MEMS video scanner Mark Helsel, Jon Barger, David Wine, Thor Osborn, [2001]

New actuation structure for the deformation of continuous mirrors for adaptive optics Emmanuel Quevy, Lionel Buchaillot, Dominique Collard, [2001]

RF and Wireless MEMS

Silicon MEM technology for millimeter-wave applications Katia Grenier, D. Dubuc, Patrick Pons, Robert Plana, L. Rabbia, T. Parra, Jacques Graffeuil, [2001]

Infrastructure needs for RF MEMS production Henne van Heeren, [2001]


RF and Wireless MEMS (cont.)

Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays Seong-Hwoon Kim, Jeff Dean, Leslie Kramer, [2001]

Wireless surface acoustic wave and MEMS-based microsensors Vijay Varadan, Vasundara Varadan, [2001]

MEMS technologies for rf communications Qun Wu, B. Kim, [2001]

Bio/Chemical/Other MEMS and Actuators

Electrothermal modeling of silicon PCR chips Zheng Cui, Zhan Zhao, Shanhong Xia, [2001]

Microfabrication and application of reservoir pins for liquid transfer in biotechnology Jonathan Pearson, David Moore, William Milne, Alastair Taylor, Stuart Elmes, Martin Davies, [2001]

Fabrication of microshutter arrays for space application Mary Li, I. Aslam, Audrey Ewin, Rainer Fettig, David Franz, Carl Kotecki, Alexander Kutyrev, S. Harvey Moseley, Carlos

Monroy, David Mott, Yun Zheng, [2001]

Novel fabrication process for 3D meander-shaped microcoils in SU-8 dielectric and their application to linear micromotors Volker Seidemann, Stephanus Buettgenbach, [2001]

Design and performance of a polysilicon surface micromachined microengine realized with arrays of asymmetrical electrothermal microactuators Edward Kolesar, Matthew Ruff, Simon Ko, Richard Wilks, Jeffrey Howard, Peter Allen, Josh Wilken, Jorge Bosch, [2001]

Poster Session

Operation cycle modeling for electrostatic-type microrelay Georgy Efremov, Nikolay Mukhurov, [2001]



Modeling and simulation of a silicon microdiaphragm piezoresistive pressure sensor using finite element analysis (FEA) tools A. Pang, Marc Desmulliez, [2001]

High-level simulation of an electrostatic micromotor Aitor Endemano, Matthew Dunnigan, Marc Desmulliez, [2001]

Integrated microsystems in standard CMOS technology with applications in the field of chemical sensors Salvatore Baglio, Bruno Ando, Nicolo Savalli, [2001]

High-volume production cost savings methods in MEMS fabrication Joe Brown, [2001]

Coplanar waveguides on SOI and OPS substrates Harold Gamble, Kam Leong, Syed Raza, Brian Armstrong, Neil Mitchell, Suidong Yang, Vince Fusco, Carson Stewart, [2001]

Novel silicon bulk micromachining process for submillimeter rectangular waveguide fabrication Ken Ma, Timothy Drysdale, Richard Blaikie, David Cumming, [2001]

Development of a laser micromachining toolbox and its application to the production of 3D

microstructures Jako Greuters, Nadeem Rizvi, [2001]

Micro-CT for nondestructive 3D reconstruction of MEMS and sensors Alexander Sasov, [2001]

Heterogeneous substrates for high-temperature and optical applications Manfred Reiche, V. Dragoi, M. Alexe, Ulrich Goesele, Erich Thallner, Ch. Schaefer, F. Lindner, [2001]

Self-parking fiber and self-latching vertical mirror for fiber optical switch array Shengchih Shen, C. Pan, Hwai-Pwu Chou, [2001]

Transport in a deformable microchannel flow W. Chu, Jing Fang, [2001]



Microwave frequency acoustic resonators implemented on monolithic Si/AIN substrates Cinzia Caliendo, Enrico Verona, Alessandro Cimmino, [2001]

Vertical hall sensor of high sensitivity and excellent confinement fabricated on the (110) silicon substrate Hong-Wei Chiu, Sheyshi Lu, Hai Lan, [2001]

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Joint Invited Papers

Micromachined rf switches (Abstract Only) Ci Song, [2001]

Ultrahigh capacity MEMS-based optical cross-connects (Abstract Only) Keren Bergman, Nicolas Bonadeo, Igal Brener, Kophu Chiang, [2001]

Low-cost MOEM interconnect modules for Tb/s.cm2 aggregate bandwidth to silicon chips

Hugo Thienpont, Valerie Baukens, Bart Volckaerts, Heidi Ottevaere, Christof Debaes, Michael Vervaeke, Patrik Tuteleers, Pedro

Vynck, Alex Hermanne, Mike Hanney, Marnik Brunfaut, Jan Van Campenhout, Irina Veretennicoff, [2001]

Challenges of packaging MEMS components for the all-optical networks of the future Ronald Scotti, Nagesh Basavanhally, Yee Low, David Ramsey, David Bishop, [2001]

MEMS torsion: mirrors, nanoprobes, and failure (Abstract Only) Noel MacDonald, [2001]

Statistical design and analysis of computer experiments for the generation of parsimonious metamodels Selden Crary, [2001]


Design of MEMS Components

Low-voltage vibratory microgyroscope with ASIC control Yung Liang, Tao Zhao, Yong Xu, Siau Boh, [2001]

Design of a new in-plane microactuator for airflow control applications Michel de Labachelerie, Fransois Bastien, C. Edouard, [2001]

Micromechanical dc-dc converter Mikko Mottonen, Aarne Oja, [2001]

Tunable rf MEMS resonators and filters E. Larique, Pierre Blondy, M. Chatras, D. Mercier, D. Cros, L. Basteres, B. Guillon, [2001]

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 (cont.)

Design and Characterization of MEMS Components

Design and characterization of an optical VLSI processor for real-time centroid detection Boon Pui, Barrie Hayes-Gill, Matt Clark, Michael Somekh, Chung Wah See, Jean-Francois Pieri, Stephen Morgan, Alan Ng,

[2001]

Thermal-induced stress in dielectric membranes suitable for micromechanized gas sensors J. Puigcorbe, A. Vila, Isabel Gracia, Carles Cane, Juan Morante, [2001]

Design and coupled-effect simulations of CMOS micro gas sensors built on SOI thin membranes Chih-Cheng Lu, Florin Udrea, Julian Gardner, D. Setiadi, T. Dogaru, T. Tsai, James Covington, [2001]

Self-testable CMOS thermopile-based infrared imager Benoit Charlot, F. Parrain, Salvador Mir, Bernard Courtois, [2001]

Methods and Tools for the Design of MOEMS

Dynamic simulation of optical MEM switches Timothy Kurzweg, Jose Martinez, Steven Levitan, Philippe Marchand, Donald Chiarulli, [2001]

Integrating optical wave simulation into microsystems CAD tools Bassam Saadany, Diaa Khalil, [2001]

Top-down design flow for MOEMS Gunar Lorenz, Arthur Morris, Issam Lakkis, [2001]

Modeling and simulation under SPICE of optoelectronic systems including BDJ detector Annick Alexandre, Mohamed Sedjil, Mohamed Ben Chouikha, George Alquie, [2001]

Testing and Failure Analysis

Finite element analysis to support component level fault modeling for MEMS R. Reichenbach, Richard Rosing, Andrew Richardson, A. Dorey, [2001]


Design Flows

MEMS synthesis and optimization Zein Juneidi, Kholdoun Torki, Benoit Charlot, Bernard Courtois, [2001]

MEMSMaster: a new approach to prototype MEMS David Moulinier, Philippe Metsu, Marie-Pierre Brutails, Stephane Bergeon, Philippe Nachtergaele, [2001]

Application-specific design methodology for microsystems Oliver Nuessen, Hilmar Bolte, Dagmar Peters, St. Bechtold, Rainer Laur, [2001]

Design and modeling of a silicon resonant pressure sensor Zheng Cui, Deyong Chen, Shanhong Xia, [2001]

Analysis Tools and Methods

Design methods for microelectromechanical bandpass filters Dimitri Galayko, Andreas Kaiser, [2001]

Behavioral modeling of rf VCO circuit with MEMS LC resonator Amal Mohamed, Hamed Elsimary, Mohammed Ismail, [2001]

New approach for 3D full-wave electromagnetic analysis Igor Balk, [2001]

Meshing approach in nonlinear FEM analysis of microstructures under electrostatic loads Aurelio Soma, Francesco De Bona, A. Gugliotta, E. Mola, [2001]

Effects of squeezed film damping on dynamic finite element analyses of MEMS Daniel Keating, Lee Ho, [2001]



Enhanced optimization algorithms for the development of microsystems Dagmar Peters, Hilmar Bolte, Claudia Marschner, Oliver Nuessen, Rainer Laur, [2001]

Modular concept for the design of application-specific integrated telemetric systems Claudia Marschner, Sven Rehfuss, Dagmar Peters, Hilmar Bolte, Rainer Laur, [2001]

Simulations-based design for a large-displacement electrostatically actuated microrelay Gooi Chong, Kam Hoon, Ijaz Jafri, Daniel Keating, [2001]

Numerical approach for the frequency-shifting analysis of electrostatic micromechanical actuator Kie-Chan Kwon, Wan-Sul Lee, Bong-Kyu Kim, Ji-Hyon Cho, Sung-Kie Youn, [2001]

Optical modeling of the analytical chamber of an IR gas sensor Ingo Sieber, Horst Eggert, Karl-Heinz Suphan, Oliver Nuessen, [2001]

Microfabrication, Integration and Packaging

Manufacturing of Components for Communication Applications I

Optical fiber switch using a draw-bridge mirror for large array of interconnects AiQun Liu, Xu Ming Zhang, [2001]

Insertion losses in micromachined free-space optical cross-connects due to fiber misalignments Sergio Martinez, Bernard Courtois, [2001]

Light-induced parametric amplification in MEMS oscillators Maxim Zalalutdinov, Anatoli Olkhovets, Alan Zehnder, Bojan Ilic, D. Czaplewcki, Jeevak Parpia, Harold Craighead, [2001]

Design and test of new high-Q microresonators fabricated by UV-LIGA Skandar Basrour, H. Majjad, Jean-Rene Coudevylle, Michel de Labachelerie, [2001]


Integrated Process and Manufacturing

Development of a micromolding process Wayne Hung, Shu Yuan, E. Lee, Mohammad Ali, [2001]

Replication of refractive micro-optomechanical components made with deep lithography with protons Patrik Tuteleers, Pedro Vynck, Heidi Ottevaere, Christof Debaes, Alex Hermanne, Irina Veretennicoff, Hugo Thienpont, [2001]

Fabrication of an electrostatic microactuator with curled p+ silicon cantilevers Tae Park, Sang Yang, [2001]

Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation Vincent Agache, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard, [2001]

Test of hot electron emission for the micro mass spectrometer HyeunJoong Yoon, J. Kim, Tae Park, Sang Yang, K. Jung, [2001]

Characterization and Reliability

Determining the most likely site and mode of thermomechanical failure in multimaterial systems Andrew Tay, K. Lee, W. Zhou, K. Lim, [2001]

Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs Xavier Lafontan, Christian Dufaza, Michel Robert, Francis Pressecq, Guy Perez, [2001]

Reliability of self-assembled 3D microstructures: snap-through modeling and experimental validation Olivier Millet, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard, [2001]

Development of a workstation for optical testing and modification of IMEMS on a wafer John Hedley, Alun Harris, James Burdess, Mark McNie, [2001]


Packaging and Assembly

Packaging of optical MEMS devices Yee Low, Ronald Scotti, David Ramsey, Cristian Bolle, Steven O'Neill, Khanh Nguyen, [2001]

Compact dynamic thermal multiport models of packages for MEMS-package cosimulation Marta Rencz, Vladimir Szekely, [2001]

Flat micro heat pipe arrays for cooling and thermal management at the package level J. Park, J. Choi, H. Cho, Sang Yang, J. Yoo, [2001]

Manufacturing of Components for Communication Applications II

Two-plane-parallel fixed electrodes micromachined tunable oscillator Yee Loke, AiQun Liu, Kim Liew, Q. Zou, [2001]

Thermal and mechanical evaluation of micromachined planar spiral inductors Renato Ribas, Jerome Lescot, Jean Louis Leclercq, Bernard Courtois, [2001]

Miniature pressure acquisition microsystem for wireless in-vivo measurements Stephane Renard, C. Pisella, J. Collet, F. Perruchot, C. Kergueris, Ph. Destrez, Patrice Rey, Nicolas Delorme, E. Dallard, [2001]

Telemetry silicon pressure sensor of LC resonance type SoonYoung Kim, Hak Kim, J. Park, Sang Yang, [2001]

Devices and Components

Electromechanical stability of capacitive transducers Aarne Oja, Jukka Kyynaeraeinen, Heikki Seppa, [2001]

Large-area polymer replication for microfluidic devices Mathias Heckele, Andreas Gerlach, Andreas Guber, Thomas Schaller, [2001]


Devices and Components (cont.)

RibCon: micromolded easy-assembly multifiber connector for single- and multimode applications Ulrike Wallrabe, H. Dittrich, G. Friedsam, Thomas Hanemann, Juergen Mohr, K. Mueller, Volker Piotter, Patrick Ruther, Thomas

Schaller, W. Zissler, [2001]

Posters on Microfabrication, Integration and Packaging

Development of microelectromechanical varactors Chun-Hsien Lee, Shu-Hui Tsai, Chung-Hsien Lin, Ryutaro Maeda, Jiunn-Jye Tsaur, Kuan-Jen Fang, Ju-Mei Lu, Cheng-Kuo Lee,

Weileun Fang, [2001]

Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin

films for microactuators Zhanjie Wang, Ryutaro Maeda, Hiroyuki Kokawa, [2001]

Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching,

bonding, and metal powder injection Yoichi Murakoshi, Toru Shimizu, Hideki Takagi, Yaomin Li, Kazuyoshi Uchino, Tetsuro Yokoi, Ryutaro Maeda, [2001]

Mathematical modeling of sputtering-induced surface roughness Mohammad Ali, Wayne Hung, Shu Yuan, [2001]

Assembly of micromechanical components: European network HAFAM Gordana Popovic, Elias Chatzitheodoridis, Werner Brenner, Dragan Petrovic, Aleksandar Vujanic, Helmut Detter, [2001]

Microscanner actuated by double PZT thin film Lulu Zhang, Wenmei Lin, Ryutaro Maeda, [2001]

Complex ceramic-polymer composite microparts made by microstereolithography Christophe Provin, Serge Monneret, [2001]

Electrostatic actuator designed for capacitive detections of orthogonal displacements of a few

micrometers with a subnanometric sensitivity E. Lennon, T. Fournier, J. Chaussy, F. Ayela, [2001]

Thermally excited SiN beam resonant pressure sensor Deyong Chen, Dafu Cui, Zhongyao Yu, Li Wang, Zheng Cui, Shanhong Xia, [2001]

Reliability, Testing, and Characterization of MEMS/MOEMS

Keynote Paper

MEMS reliability, characterization, and test Allyson Hartzell, David Woodilla, [2001]

Reliability Methodology

Design for reliability of MEMS/MOEMS for lightwave telecommunications Susanne Arney, Vladimir Aksyuk, David Bishop, Cristian Bolle, Robert Frahm, Arman Gasparyan, C. Randy Giles, Suresh

Goyal, Flavio Pardo, Herbert Shea, Michael Lin, Carolyn White, [2001]

Physical and reliability issues in MEMS microrelays with gold contacts Xavier Lafontan, Francis Pressecq, Guy Perez, Christian Dufaza, Jean Michel Karam, [2001]

Parametric yield enhancement of a microresonator using statistical optimazation tools Flavien Delauche, Bachar Affour, Christian Dufaza, [2001]

MEMS Reliability: Thermomechanical

Thermally induced change in deformation of multimorph MEMS structures David Miller, Martin Dunn, Victor Bright, [2001]

Holographic rapid access system for onboard testing of MEMS in microgravity Valery Petrov, [2001]

MEMS Reliability: Methodology and Qualification

Design and fabrication of MEMS-based micropropulsion devices at JPL Juergen Mueller, Eui-Hyeok Yang, Amanda Green, Victor White, Indrani Chakraborty, Robert Reinicke, [2001]

Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes Steven Gross, Qingqi Zhang, Srinivas Tadigadapa, Susan Trolier-McKinstry, Thomas Jackson, Frank Djuth, [2001]

Method for testing electrostatic discharge tolerance for fingerprint sensor LSI Yasuyuki Tanabe, Hideyuki Unno, Katsuyuki Machida, Norio Sato, Hiromu Ishii, Satoshi Shigematsu, Hiroki Morimura, Hakaru

Kyuragi, [2001]

CNES reliability approach for the qualification of MEMS for space Francis Pressecq, Xavier Lafontan, Guy Perez, Jean-Pierre Fortea, [2001]

Reliability, Testing, and Characterization of MEMS/MOEMS (cont.)

MEMS Reliability: Testing and Characterization

Reliability of self-assembled 3D microstructures: dynamic snap-through modeling and experimental validation Olivier Millet, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard, [2001]

Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers Christian Rembe, Pamela Caton, Richard White, Richard Muller, [2001]

Detailed study of scratch drive actuator characteristics using high-speed imaging Lijie Li, Gordon Brown, Deepak Uttamchandani, [2001]

Experimental microfluidics toolbox for MEMS characterization Steve Wereley, Carl Meinhart, Shannon Stone, Vince Hohreiter, Jacob Chung, [2001]

Reliability of MEMS Materials and Surfaces I

Strength assessment of wafer-bonded micromechanical components using the micro-chevron

test Matthias Petzold, Heiko Knoll, Joerg Bagdahn, [2001]

Nanoscale elastic imaging of micro-electro-mechanical system based micromirrors Bruce Altemus, Gajendra Shekhawat, Bai Xu, Robert Geer, James Castracane, [2001]

Conduction properties of microscopic gold contact surfaces Joseph Tringe, Warren Wilson, Jack Houston, [2001]

Fracture toughness and fatigue investigations of polycrystalline silicon Joerg Bagdahn, Jan Schischka, Matthias Petzold, William Sharpe, [2001]

Reliability of MEMS Materials and Surfaces II

Characterization of an inchworm actuator fabricated by polysilicon surface micromachining Maarten de Boer, David Luck, Jeremy Walraven, James Redmond, [2001]

Surface preparation for selective tungsten deposition on MEMS structures Paul Resnick, Seethambal Mani, [2001]

Whole wafer critical point drying of MEMS devices Paul Resnick, Peggy Clews, [2001]


MEMS Package Reliability

Reliability of micro-electro-mechanical systems (MEMS) Srinivas Tadigadapa, Nader Najafi, [2001]

Printing systems for MEMS packaging Donald Hayes, W. Royall Cox, David Wallace, [2001]

Moisture and impurities detection and removal in packaged MEMS Stefano Tominetti, Anna Della Porta, [2001]

MEMS Back End of Line (BEOL)

Packaging issues using FEA and experimental verification on a Si-based capacitive microrelay C. Premachandran, Xiaowu Zhang, T. Chai, Victor Samper, T. Lim, [2001]

Optimization of anodic bonding to MEMS with self-assembled monolayer (SAM) coatings Melissa Collins, Lauren Rohwer, Andrew Oliver, Matthew Hankins, Deidre Hirschfeld, [2001]

Parametric monitoring for the SUMMiT V surface-micromachining process Andrew Oliver, Danelle Tanner, Seethambal Mani, Scott Swanson, Karen Helgesen, Norman Smith, [2001]

Failure Analysis of MOEMS/MEMS

Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS) Jeremy Walraven, Edward Cole, Lynn Sloan, Susan Hietala, Chris Tigges, Christopher Dyck, [2001]

Nondestructive acoustic microimaging (AMI) analysis of MEMS materials, manufacturing, and packaging Steven Martell, Janet Semmens, Lawrence Kessler, [2001]

High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution W. Merlijn van Spengen, Ingrid De Wolf, Bob Puers, [2001]


Poster Session

Analysis and design of a capacitive accelerometer based on a electrostatically levitated microdisk Ruth Houlihan, Alena Kukharenka, Mircea Gindila, Michael Kraft, [2001]

Characterization of MEMS mechanical properties using nanoscale techniques Nicholas Randall, Richard Soden, [2001]

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