Design of a single-crystal silicon-based micromechanical resonator using finite element simulations

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Transcript of Design of a single-crystal silicon-based micromechanical resonator using finite element simulations

Page 1: Design of a single-crystal silicon-based micromechanical resonator using finite element simulations
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Microstructural and micromechanical evolution during ...

Microstructural and micromechanical evolution during ...

MICROMECHANICAL CHARACTERIZA ON AND TEXTURE …

MICROMECHANICAL CHARACTERIZA ON AND TEXTURE …

Novel Micromechanical Bulk Acoustic Wave Resonator Sensing

Novel Micromechanical Bulk Acoustic Wave Resonator Sensing

Probabilistic micromechanical spatial variability ...

Probabilistic micromechanical spatial variability ...

Coupled-resonator micromechanical filters with voltage ...asim.lip6.fr/~galayko/papers/coupled_resonator... · High-order electromech anical filter design involves several ele-mentary

Coupled-resonator micromechanical filters with voltage ...asim.lip6.fr/~galayko/papers/coupled_resonator... · High-order electromech anical filter design involves several ele-mentary

Micromechanical Behavior of CuAlBe Shape

Micromechanical Behavior of CuAlBe Shape

Micromechanical modeling and simulations of transformation-induced plasticity in multiphase

Micromechanical modeling and simulations of transformation-induced plasticity in multiphase

Graphene related magnetic materials: micromechanical ...

Graphene related magnetic materials: micromechanical ...

Proceedings Mechanically-Coupled Micromechanical Resonator ...people.eecs.berkeley.edu/~ctnguyen/Research/... · correspond to -112 and -136dBc/Hz, respectively, which rep-resent

Proceedings Mechanically-Coupled Micromechanical Resonator ...people.eecs.berkeley.edu/~ctnguyen/Research/... · correspond to -112 and -136dBc/Hz, respectively, which rep-resent

FULLY MONOLITHIC CMOS NICKEL MICROMECHANICAL ...

FULLY MONOLITHIC CMOS NICKEL MICROMECHANICAL ...

An Integrated CMOS Micromechanical Resonator …people.eecs.berkeley.edu/~ctnguyen/Research/IEEEJournal...Excessive series resistance substrate losses and distributed parasitic capacitance

An Integrated CMOS Micromechanical Resonator …people.eecs.berkeley.edu/~ctnguyen/Research/IEEEJournal...Excessive series resistance substrate losses and distributed parasitic capacitance

CHARACTERIZATION AND MICROMECHANICAL INVESTIGATION OF ...

CHARACTERIZATION AND MICROMECHANICAL INVESTIGATION OF ...

Fabrication of SOI micromechanical devices

Fabrication of SOI micromechanical devices

Supplementary Information: Synchronization of Micromechanical

Supplementary Information: Synchronization of Micromechanical

Patch Resonator

Patch Resonator

Proceedings Mechanically-Coupled Micromechanical Resonator ...ctnguyen/... · correspond to -112 and -136dBc/Hz, respectively, which rep-resent more than 17 and 26dB improvements

Proceedings Mechanically-Coupled Micromechanical Resonator ...ctnguyen/... · correspond to -112 and -136dBc/Hz, respectively, which rep-resent more than 17 and 26dB improvements

MICROMECHANICAL˜BIOCHEMICAL STUDIES OF ...markolab.bmbcb.northwestern.edu/marko/Poirier.UICthesis...MICROMECHANICAL˜BIOCHEMICAL STUDIES OF MITOTIC CHROMOSOME ELASTICITY AND STRUCTURE

MICROMECHANICAL˜BIOCHEMICAL STUDIES OF ...markolab.bmbcb.northwestern.edu/marko/Poirier.UICthesis...MICROMECHANICAL˜BIOCHEMICAL STUDIES OF MITOTIC CHROMOSOME ELASTICITY AND STRUCTURE

Presentasi Resonator

Presentasi Resonator

High Quality Factor Lamb Wave Resonators · 2014. 12. 15. · Lamb wave resonators have attracted attention among various micromechanical resonator technologies. The lowest-order

High Quality Factor Lamb Wave Resonators · 2014. 12. 15. · Lamb wave resonators have attracted attention among various micromechanical resonator technologies. The lowest-order

Spectrum Slicer: Spectrum Slicer: Curtis Mayberry and David Giles Narrowband Micromechanical Resonator Filters for RF Applications Georgia Tech, October.

Spectrum Slicer: Spectrum Slicer: Curtis Mayberry and David Giles Narrowband Micromechanical Resonator Filters for RF Applications Georgia Tech, October.