Coventor Tutorial
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Transcript of Coventor Tutorial
Kyoto UniversityHong Kong University of Science and Technology
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Kyoto UniversityHong Kong University of Science and Technology
Coventor-Process : Material Deification Change the electric conductivity of Silicon since it was doped.
For detailed information on Material Deification, please refer to the Section 2.3 of the manual “Designer” ! ! !
Kyoto UniversityHong Kong University of Science and Technology
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
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Coventor-Process : Create Substrate
For detailed information on editing process, please refer to the Section 2.4 of the manual “Designer” ! ! !
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Coventor-Process : Oxide Formation
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Coventor-Process : Si Formation
Only this Si layer for simulation: Accurate “Thickness”!!
Si layer for layout: Accurate “Layer Name”!!
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Coventor-Process : Si Patterning
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Coventor-Process : Metal Formation
Metal layer for layout: Accurate “Layer Name”!!
Kyoto UniversityHong Kong University of Science and Technology
Coventor-Process : Metal Patterning
Kyoto UniversityHong Kong University of Science and Technology
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Kyoto UniversityHong Kong University of Science and Technology
Coventor – Create Layout
For detailed information on editing layout, please refer to the Section 2.5 & 3.2.1 of the manual “Designer”! ! !
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Coventor – Check Layers
The layer names are from the pre-defined “Layer Names” in the last Process Editor!!
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Coventor – Edit Your Layout
Standard drawing tools
Edit by input
co-ordinate
Other useful functions
For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! !
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Coventor – Edit Your Layout
For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! !
ForBended beam:The beam and anchor should be merged. How?Select beam and anchor and then using “boolean->Or” for merge.
Otherwise, solid model can’t be built!!
ERROR
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Coventor – Finish Layout
Two Layers: SILICON!!METAL!!
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Coventor – Finish Layout
The layout should contains TWO Layers with the names of SILICON &METAL!!
The final cell name should be “top cell_Group number”, e.g., “top cell_6a” and “top cell_6b”.
Kyoto UniversityHong Kong University of Science and Technology
Coventor – Flat Hierarchy
Before exporting the layout to top cell, the top cell should be flattened.
For detailed information on editing layout, please refer to the Section 2.5.7 of the manual “Designer” ! ! !
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Coventor – Gds OutChose a file to output the layout.
For detailed information on editing layout, please refer to the Section 2.6.6 of the manual “Designer” ! ! !
Kyoto UniversityHong Kong University of Science and Technology
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Kyoto UniversityHong Kong University of Science and Technology
Coventor – Initial Solid Model
The SILICON is a whole bulk material!
Since only SILICON layer is simulated, other can be hided.
For detailed information on solid model, please refer to the Section 4.5 of the manual “Designer” ! ! !
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Coventor – PartitionPartition the Si into several parts.(Partition the beam (moved parts) from the anchor (fixed parts) .
1. Choose 3 points to generate a plane
2. Choose the plane and the Silicon bulk (needed for partition)
3. “Partition” under “Solid Model”
For detailed information on solid model, please refer to the Section 4.5.1 of the manual “Designer” ! ! !
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Coventor – Partition (After)
After partition, one Silicon bulk is cut into two parts.
After several times of partition, the beams will be completely separated from the anchor.
For detailed information on solid model, please refer to the Section 4.5.1 of the manual “Designer” ! ! !
After partition, the plane can be hided.
Finally, the one Silicon bulk will be cut into many parts.
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Coventor – Add Layer to Mesh Model
Select ALL Silicon parts and add them to Mesh Model
For detailed information on solid model, please refer to the Section 4.7 of the manual “Designer” ! ! !
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Coventor – Add Layer to Mesh Model
ALL Silicon parts move into Mesh Model
For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !
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Coventor – Meshing Settings
For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !
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Coventor – Generate Meshing
For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !
Select ALL Silicon parts and Generate Mesh.
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Coventor – Finish Meshing
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Coventor –Naming Entities
For detailed information on Mesh model, please refer to the Section 4.6 of the manual “Designer” ! ! !
Name electrodes on the top faces!
“Potential” will be applied on these faces.
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Coventor –Naming Entities
For detailed information on Mesh model, please refer to the Section 4.6 of the manual “Designer” ! ! !
Name anchors on the bottom faces!
“Fixall” and “Temperature” will be applied on these faces.
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Coventor –Naming Entities
For detailed information on Mesh model, please refer to the Section 4.6 of the manual “Designer” ! ! !
Name the front faces or other needed faces of the actuator, amplifier or bistable beam on the side faces!
“Pressure” or “Displacement” will be applied on these faces
Kyoto UniversityHong Kong University of Science and Technology
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Kyoto UniversityHong Kong University of Science and Technology
Choose the 2nd solver
Choose your mesh model& then Set the solver
Coventor – Solver Setting
For detailed information on editing layout, please refer to the Section 3.5 of the manual “analyzer_standard” ! ! !
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Coventor – Solver Setting
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Coventor – Surface Boundary conditions
Example: apply voltage to actuator to analysis the temperature, displacement, stress and so on.1.Fixall for anchor2.Set the temperate of all anchor as room temperature (300K). The units is “K”. 3.Apply voltage to electrodes. The units is “voltage”.
For detailed information on setting boundary conditions, please refer to the Section 3.5.3 of the manual “analyzer_standard” ! ! !
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Coventor – Surface Boundary conditions
For other simulations:1.“Fixall” and “Temperature” are always applied on anchor faces.2.“Potential” can be applied on electrode faces.3.“Pressure” or “Displacement” can be applied on side faces
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Coventor – SBCs for Bistable Beam
Apply one Displacement to get one Force
For detailed information on Simulation methodology of Bistable Beam, please refer to the “Tutorial on simiulation of bistable beam” ! ! !
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Coventor – Displacement-Force Simulation
• For simulation, one can not solve an arbitrary displacement directly, according to my experience. Instead, one need to increase the displacement bit by bit from zero, and telling Coventor to start the analysis from the result of the previous one.
• In this manner, the simulation will not fail easily, because defining the displacement resolves the large non-linearity of buckling.
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Coventor – One or Multi Point Simulation1. Correspond the displacement to a variable,
“mechBC1”, based on “MemMech” Solver.
2. Start to set Variable
3. Correspond the “mechBC1” to a Trajectory
3. Set the Trajectory
4. Set the value
5. Run here for simulating a series of values
6. Run here for simulating one value
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Coventor – Contact Boundary Conditions
Plan: AMP CON2
Plan: BEAM CON
Otherwise, they actuator will move across the amplifier, or the amplifier will move across the beam rather than push it.
Plan: ACT CON
Plan: AMP CON1
If you want to use the actuator to push the amplifier, or use the amplifier to push the beam
you need to define the Planes of actuator, amplifier and beam as contact planes.
Kyoto UniversityHong Kong University of Science and Technology
Coventor Tutorial
Bi-Stable Mechanical Beam Simulation
-Material definition
-Fabrication (Process flow design)
-Layout (Structure design)
-Device fabrication (Meshing and Naming Entities)
-Analyzer setting (Boundary conditions)
-Simulation (Finite State Analysis)
-Viewing result
Kyoto UniversityHong Kong University of Science and Technology
Real-time Simulation
Progress/health Monitoring
Coventor – Simulation
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Coventor – View Resluts
For detailed information on Visualizer, please refer to the Section 9 of the manual “analyzer_standard” ! ! !
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Coventor – 3D Result Viewing
For detailed information on Visualizer, please refer to the Section 9 & 9.1 of the manual “analyzer_standard” ! ! !
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Coventor – Simulation Result of the Displace-Fore of Bistable Beam
For detailed information on Visualizer, please refer to the Section 9 & 9.4 of the manual “analyzer_standard” ! ! !
Checking the displacement deformation using Geometry Scaling
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Coventor – Simulation Result of the Displace-Fore of Bistable Beam
For detailed information on Visualizer, please refer to the Section 9 & 9.4 of the manual “analyzer_standard” ! ! !
Checking the Force Value using Table – rxnForces.
Sign of rxnForces changes from + to – or – to +, indicating two stable states.