Computer technologyof aspherical

high-precision opticalmachning

Computer technologiesof aspherical

high-precision opticalmachining

TTechnologicSSystems of

AAutomated

MMachining

TSTS AA MM

PURPOSE

Production of high-precision optics, including aspherical and off-axis devices

CONTENT

Automated systems (computer-aided machines);

Metrology;

Technological software

Machining accuracy from λ/30up to λ/80 (λ = 0,6328 mcm);

TECHNICAL CHARACTERISTICS

Diameter of workpieces from 10 up to 2000 mm;

Type of worked surfaces flat, spherical, aspherical(of 2 and higher order), off-axis

.

Workpiece

Control before processing

WORK CYCLE

TSAM

Detailprocessing

On APD-250Machine tool

on APD-1000machine tool

Surface form control

InterferometerIKI-1

InterferometerPIK - PS

Surface Topographic

map

RMS, P-V

Detail certification

TSAM

ProgramProgram Int_to_TopInt_to_TopInterference

patternExtremum

searchTopographic

map

ProgramProgramof automated of automated

machining machining -- ADKADK

Program ofProgram ofprocessprocess

modelingmodelingMODEFORMODEFOR

ProgramProgram OSAOSAAxisymmetric detail machining

using a polishing tool

ProgramProgram IONIONAxisymmetric detail machiningusing an ion source

Automated computer-aided polishing machine APD

Basic control systemsFor polishing machine APD

Controlframe

Industrialcomputer

Drivingunit

Finishing machine APD-250

Automatic finishing machine APD-1000

Automated asphericalmirror machining

Interferometer PIKA Interferometer PIKA -- 11

Reference flat mirror

Objective

Laserλ = 0,63 mcm

optical sensor

Telescope objective

Folding mirror

Focusingobjective

Beam

sp l

itte r

Changeable objectives

Con

trol

led

surf

ace

Interference control systemsInterference control systemsSpherical surface controlSpherical surface control

AsphericalAspherical concave surface controlconcave surface control

InterferometerInterferometerPIKA PIKA --11

Reference flatmirror

Objective

Laserλ = 0,63 mcm

Optical sensor

Telescopeobjective

Folding mirror

Focusingobjective

Beam

-sp l

itte r

Changeable null lenses

Con

trol

led

surf

ace

Flat surface controlFlat surface control

Interferometer Interferometer PIKA PIKA --11

Reference flatmirror

Objective

Laserλ = 0,63mcm

Optical sensor

Telescopeobjective

Folding mirrorОбъективфокусирующий

Beam

-sp l

itte r

Con

trol

led

surf

ace

Collimatingsystem

Collimatingsystem

D=

20 m

m

D=

100

mm D=

600

mm

Spherical convex surface controlSpherical convex surface control

InterferometerInterferometerPIKA PIKA -- 11

Reference flat mirror

Objective

Laserλ = 0,63 mcm

Optical sensor

Telescopeobjective

Folding mirror

Focusing objective

Beam

-sp l

itte r

Unaberration lens

Con

trol

led

surf

ace

Changeable objectives

AsphericalAspherical convex surface controlconvex surface control

Reference flat mirror

Objective

Laserλ = 0,63 mcm

Optical sensor

Telescopeobjective

Folding mirror Focusingobjective

Beam

-sp l

itte r

Changeable objectives

Con

trol

led

surf

ace

Referencemirror

InterferometerInterferometerPIKA PIKA --11

Interference control systems in visible and IR ranges

Universal interference complex MIK

Control of spherical and aspherical surfaces;Wave front quality control;

In the lateral shift modeInterferometer is resistant to external effect

Working modewith reference wave front; lateral shift interference

RMS measurement λ/ 60 with reference wavefronterror λ/40 with lateral shift

Maximal aperture of controlled surface up to 1 : 3

Interferogram analysis software program Int_to_Top

Photoelectric phase interferometer

Control of of flat, spherical (convex and concave) and aspherical surfaces; control of

the wavefront quality

Controlled surfaces diameter up to 3000 mm

RMS measurement error λ/ 250

Aperture ratio 1 : 6 – 1:1

Interferogram analysis software program Int_to_Top

Interferometer for aspherical control

Control of aspherical surfaces using an aberration compensator

Diameter of controlled surfaces from 20 mm up to 3000 mm

RMS measurement error λ/ 150

Aperture ratio 1 : 6 – 1:2

Interferogram analysis software program Int_to_Top

IR interferometer

Control of grinded surfaces

Controlled surfaces aperture 1:6 – 1:2

RMS measurement error λ/ 60

Main wave length 10,6 mcm

Measurement method amplitude

Tuning wave length 0,6 mcm

Technological mountings for optical workpieces holding,

basing and off-loading

Membrane -pneumatic mounting for workpieces up to 600 mm

(vertical testing)

Membrane - pneumatic mountingfor workpieces up to 1000 mm

(vertical testing)

Mechanical tape mounting (horizontal testing)

Up to ∅ 1000 mmUp to ∅ 600 mm

.

Technological equipment and accessory for the technology of optical coating vacuum sputtering with ion assistance

SUBSTRATE- glass (n=1,48-1,8)- crystals (n=1,8-3,0)- semiconductors

(n=3,0-4,0)- plastics

FILM-FORMINGMATERIALS:

fluorides, oxides,selenides,

rare-earth metalssulphides(n=var)

REQUIRED SPECTRAL CHARACTERISTICS

R, T, λΔ0,5/λ etc

COATINGCORRECTION

TECHNOLOGICALEQUIPEMENT:

ILO-200;the system of gas

SNA-2 puffing;

evaporators

VACUUM UNIT VU-2M:the coating deposition

process( substrate ion cleaning,

coating deposition

with ion assistance ILO-200)

TECHNOLOGICALCONTROL:multiwave

spectrophotometer

FINISHEDPRODUCTS

REQUIRED SPECTRAL

CHARACTERISTICSOBTAINING

ProgramPLENKA

Coating design and synthesis, adapted for the use of ILO-

200 source, the photometric control process calculation

BASIC DATA:

.

ION-BEAM SOURCE ILO - 200

Masks set for ion machining

OpticalOptical coatingscoatings

Multilayer narrowMultilayer narrow--band band filters for UV, visiblefilters for UV, visibleand IR spectral and IR spectral rangesranges

длина волны

пропускание Т(

%)

Tmax

Δλ0,5

λmax

Тmax

Achromatic AR Achromatic AR Coatings for spectral Coatings for spectral range 0,3range 0,3÷÷1,2 1,2 µµmm

0.50 0.55 0.60 0.65 0.70 0.75 0.80 0.85 0.90длина волны (мкм)

0.000.200.400.600.801.001.20

отражение

R(%

)

AR coatings of AR coatings of semiconductingsemiconductingmaterials and optical materials and optical ceramic for IR spectral ceramic for IR spectral rangerange

8 9 10 11 12 13 14

8486889092949698

Длина волны, мкм

Т, %

Multilayer dielectric Multilayer dielectric coatingscoatings for for mirrorsmirrors

0.40 0.50 0.60 0.70 0.80длина волны, мкм

0

20

40

60

80

100отраже

ние

R(%

)

Optical work bay for automated machining

Номер сеанса обработки

Stages of parabolic mirror machining Stages of parabolic mirror machining ∅∅ 1000 mm1000 mm

Results of the mirror processing of different diameterResults of the mirror processing of different diameter

λ/30λ/35,7

∅ 200 мм

λ/30λ/46,9

∅ 500 мм

λ/30λ/40

∅ 1500 мм

∅ 300 мм

λ/30λ/42,2

∅ 400 мм

λ/30λ/52,6

Form accuracy:RMS nominalRMS real

for wave length λ = 0,6328 mm

Optical details produced with computer technologies

Hyperbolic mirror(Zerodur, diameter = 1540 mm,

axial thickness = 300 mm)

RMS=0,015 мкм= λ/42 P-V=0,075 мкм= λ/8,4

RMS=0,025 мкм= λ/25 P-V=0,15 мкм= λ/4,21

Thin adaptive mirror(quartz, diameter = 1550 mm,

axial thickness = 45 mm)

Off-axis parabolic mirror

∅ 400 mm

RMS=0,009 мкм=λ/70P-V=0,091 мкм=λ/6,96

RMS=0,06 мкм=λ/11P-V=0,31 мкм= λ/2

Central and off-axis elements of parabolic mirror

(off-axis parameter = 375 mm,diameter of circumcircle = 420 mm)

Interference control of aspherical mirror ∅700 mm

Adaptive mirror ∅ 3000 mm

Toroidal mirror

Optical elements with aspherical surfaces

Mirror collimator ∅ 700 mm

Lightweight parabolic mirrors

D = 250 mmD = 400 mm

Silicon carbide aspherical mirror ∅ 250 mm

Aspherical reflector ∅ 1000 mm

Radiometer asphericalcomponents

Radiometer(optical-mechanical

system)

Optical element with two aspherical surfaces glued