Comparison of Scale LM PG

A Comparison of Scale: A Comparison of Scale:

Macro, Micro, NanoMacro, Micro, Nano

Comparison of Scale PKComparison of Scale PK

Activities (3)Activities (3)

Participant GuideParticipant Guide

www.scmewww.scme--nm.orgnm.org

Southwest Center for Microsystems Education (SCME)

University of New Mexico

MEMS Introduction Topic

Scale Inquiry Activity: Cut to Size Shareable Content Object (SCO)

This SCO is part of the Learning Module

Scale

Target audiences: High School, Community College, University

Support for this work was provided by the National Science Foundation's Advanced Technological Education

(ATE) Program through Grants #DUE 0830384 and 0902411.

Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors

and creators, and do not necessarily reflect the views of the National Science Foundation.

Copyright © by the Southwest Center for Microsystems Education

and

The Regents of the University of New Mexico


800 Bradbury SE, Suite 235

Albuquerque, NM 87106-4346

Phone: 505-272-7150

Website: www.scme-nm.org

http://www.scme-nm.org/

Southwest Center for Microsystems Education (SCME) Page 2 of 10 Int_Scale_AC12_PG_040413 Cut to Size Activity

Southwest Center for Microsystems Education (SCME) Page 3 of 10 Int_Scale_AC12_PG_040413 Cut to Size Activity

Scale Inquiry Activity: Cut To Size

Activity

Participant Guide

Introduction

To understand microsystems, their applications and fabrication, you need to have a good

understanding of size and scale. This leads to a better understanding of the function of micro-sized

objects and the applications in which they are used.

Microchip containing a nano-sized insulin pump

[Printed with permission from Debiotech S.]

For example, this picture shows a microchip of a nano-sized pump used to supply a continuous

infusion of insulin to a diabetic. This device is small enough to be mounted on a disposable skin

patch. The nanopump inside the micro-size chip is able to control delivery at the nanoliter level, the

amount very close to the physiological delivery of insulin.(1)

This pump is constructed using MEMS

technology fabrication techniques.

In this activity you will discover similar devices in the macro, micro, and nano-scales. You will

identify objects that exist in each of these scales given a specific length. You will be asked to think

of ways that these objects can be used to perform a necessary task.

Description and Estimated Time to Complete

This activity allows you to explore the macro, micro and nano- scales and to begin thinking about

the types of objects found in these scales. In this activity you will cut a 20 cm paper ruler in half,

then continue to cut each new piece in half until it becomes too small to cut. For each cut, you will

identify an object that has the length of the remaining size. Even after the ruler becomes too small

to cut, you will continue to identify objects for several lengths all the way down into the nano-scale.

.

Estimated Time to Complete

Southwest Center for Microsystems Education (SCME) Cut to Size Activity - PG Int_Scale_AC12_PG_040413 Page 4 of 10

Allow approximately 60 minutes to complete this activity.

Activity Objectives and Outcomes

Activity Objectives

Demonstrate your knowledge of metric scales by identifying at least 15 objects that range in

size from the nano-scale to the macro-scale.

Identify at least 3 macro-size objects that perform the same tasks but in the micro-scale.

Activity Outcomes

For each cut of the ruler you will indicate on a chart the length of the new ruler and at least one

object that measures that length. When you are no longer able to cut the ruler in half, you will

continue to identify objects that measure specific micro and nano lengths as indicated on the activity

chart. By the end of this activity you should be able to answer the following questions:

How many cuts would it take to get to the size of a water molecule (approximately 1 nm)?

How do you denote lengths using the metric system?

What are some objects that overlap the micro and nano-scales?

What is an object in the micro or nano-scale that performs the same function or task as a macro-

sized object?

What are some tasks that micro or nano-sized objects perform that affect your life?

Team

It is recommended that you complete this activity with one or two other participants. Working with

others will promote more discussion and ideas.

Supplies

One 20 cm long strip of ruled paper. (One is provided on the Cut to Size Activity Chart at the

end of this activity).

One piece of stock paper (or thick printer paper) – if available

One pair of scissors

One Cut to Size Activity chart (last 2 pages of this activity)

One pencil

Computer with Internet access

Computer with PowerPoint or Adobe Reader


Documentation

Record your observations during this activity.

Complete the Cut to Size Activity Chart.

Record the results for each step of the activity.

Revise your hypothesis to reflect the results.

Summarize your discussions with other participants.

Answer the Post-activity questions.

Think About the Outcome

Answer the following based on what you think will be the outcome of this activity.

Expectations:

You will discover functional objects that range from the nano-scale to the macro-scale.

You will identify micro and nano-sized objects that work as efficiently as macro-sized

objects with equivalent functions.

Observations:

What is the difference between a micro-sized object and a nano-sized object?

Describe any previous experience or observations that you have had relating to micro and

nano-sized objects.

What types of objects do you think of when you think "micro"?

What types of objects do you think of when you think "nano"?

Hypothesis:

Write a statement on what you expect to discover in fulfilling the expectations.

Predictions:

What types of objects will you find in the micro and nano-scales that perform the same

functions as objects macro-scales (> 100 microns)?

What types of objects will you find in the micro-scale?

What types of objects will you find in the nano-scale?


Inquiry Activity: Cut To Size

Description

This activity allows you to explore the macro, micro and nano- scales. You will cut a

20 cm long paper ruler as small as you can get it and identify an object that has the

length of each cut size. This activity will help you begin to think about objects in the

micro and nano-scales.

1. View the Presentation: "Macro, Micro, or Nano?"

Description View either the PowerPoint or Flash version of the presentation

"Macro, Micro, or Nano?"

How did you do?

How many did you get correct?

2. Print out the Cut to Size Activity Chart

Description Print out the Cut to Size Activity Chart at the end of this

handout.

Print page 2 of the chart on stock paper, if available.

Cut out the metric ruler along the red line.

3. Cut the ruler in half.

Description Cut the ruler in half.

Discard one half of the ruler.

Answer the following questions:

a. What is the new length of the ruler? Record the length on

the activity chart. (Be sure to use metric notation).

b. Give an example of an object of this size. (You are

welcome to Google images for ideas)

c. What is the function (task) of this object? (i.e. red blood

cells (6 to 8 μm in diameter) carry oxygen from the lungs to

the body)

d. Is this object macro, micro, or nano in length? Refer back

to the presentation if you need to.

e. Record your answers to these questions on the chart.


4. Repeat Step 3

Description Repeat step 3 until the ruler gets too small to cut in half.

Use the activity chart to keep track of the number of times you cut.

5. How many cuts did you get?

Description How many cuts did you get before the ruler got too small to cut?

On the activity chart, highlight the number of cuts you were able to

do before the last piece was too small to cut.

6. Complete the Activity Chart

Description For the remaining cuts indicated on the chart, answer the following.

a. Give an example of an object of this size?

b. What is the function of this object?

c. Is it macro, micro, or nano?

7. How many cuts to 1 nm?

Description a. Determine how many cuts it would take to get to 1 nanometer.

b. How many cuts? ______________

c. What are two objects that are 1 nm in length or diameter?

8. Revisit your hypothesis and predictions

Description a. Revise your hypothesis to reflect your results.

b. How well did your results match your predictions? (Be

specific)

9. Answer the Post-Activity Questions

Description Answer the Post-Activity Questions at the end of this procedure.

10. Discuss results with other participants

Description Discuss your activity results with other participants.

11. Write up your documentation

Description See the Documentation section and complete your documentation

for this activity.

Submit your documentation as required.


Post-Activity Questions

1. How many cuts would it take to get to the size of a molecule approximately 1 nm in

diameter?

2. What types of objects did you find in the micro-scale? Nano-scale?

3. Based on the types of objects that you found in the micro and nano-scales, what types of

professions do you think directly utilize the functional capabilities of these objects? (Be

specific)

4. What are some objects that overlap the micro and nano-scales?

5. What is an object in the micro-scale that performs the same function or task as a macro-

sized object?

6. What are some functions that micro and nano-sized object perform that affect your life?

Summary

This activity allowed you to explore objects in three different scales – macro, micro, and nano.

Even though nano, and most micro-sized objects cannot be seen with the naked eye, you should

have found that there still exists billions and billions of functional objects within these scales.

It is important that you get a sense of relative size and develop a good understanding of scale and

units. This understanding will assist in all aspects of your life.

References

1 "Debiotech's Insulin Nanopump™". MedGadget. April 23, 2007.

http://medgadget.com/archives/2007/04/debiotechs_insulin_nanopump.html

Support for this work was provided by the National Science Foundation's Advanced Technological

Education (ATE) Program.

http://medgadget.com/archives/2007/04/debiotechs_insulin_nanopump.html

Southwest Center for Microsystems Education (SCME) Page 1 of 22 Int_Scale_PK12_PG_040813 Comparison of Scale - PK




A Comparison of Scale:

Macro, Micro, Nano Primary Knowledge (PK)

Shareable Content Object (SCO)


Scale







and



800 Bradbury Drive SE, Suite 235


Phone: 505-272-7150




A Comparison of Scale:

Macro, Micro, Nano

Primary Knowledge

Participant Guide


In order to grasp many of the concepts associated with MEMS and MEMS devices and components,

you need to understand scale and the size of objects associated with different scales. This unit

introduces you to various concepts associated with scale, and a comparison of the macro, micro and

nano-scales.


Allow approximately 30 minutes to complete.

Introduction

The Milky Way

[Image credit: NASA/JPL-Caltech2]


At one time or another everyone has asked the question "How big is the universe?" Trying to

develop the answer can be overwhelming because there is no answer. The size of the universe is

unknown; however, the size of objects within the universe is known. These objects are constantly

being studied, measured, and compared. These comparisons are a means of evoking some sense of

scale as to how big the universe could be. For example, the Milky Way (pictured above) is one of

billions of galaxies. Our sun is one of several 100 billion stars within The Milky Way. There are

over 50,000 billion, billion stars. There are more stars in the universe than there are grains of sand

on our planet.1

Our sun is considered a middle-sized star. Giant stars are as much as 10 times larger. However,

when compared to Earth, the sun is approximately 109 times larger in diameter meaning that 1.3

million earths could fit inside the sun! Do the math!

The sun is much larger than Earth. From the sun's center to its

surface, it is about 109 times the radius of Earth. Some of the

streams of gas rising from the solar surface are larger than

Earth.

[Image source: NASA - Image credit: World Book illustration

by Roberta Polfus]

For years astronomers have explored the universe looking

for hints as to how big it really is. At the same time, other

scientists have been exploring how small things are and how

small something has to be before it goes beyond the reach of

manipulation or measurement. In these explorations, another

whole universe has been discovered, but on a much smaller

scale. Instead of objects being measured in kilometers and

light-years, objects are measured in micrometers and

nanometers, and even the number of atoms (see image right).

This unit will explore the concept of scale:

what is big,

what is small, and

how do these objects compare in size?

When working with micro and nanotechnologies it is

important to have an understanding of size and of

scale. This will lead to a better understanding of the

processes and applications used in these technologies.

This atomic force microscope image by

German physicist Franz Giessibl shows

dozens of silicon atoms. Scientists have debated whether the light and dark crescents

- or wing-shaped features seen on the atoms

represent orbitals - the paths of electrons orbiting the atoms. [Printed with

permission. See F. J. Giessibl et al., Science

289, 422 (2000)]


Objectives

Explain the differences in the macro, micro and nano scales in terms of size, applications, and

properties.

Define microtechnology and nanotechnology.

Identify objects and applications in the micro-scale and the nano-scale.

Size is Relative

Size is Relative

"The sun is big" is a relative statement. Big relative to what? "An ant is small." Again, another

relative statement. Relative to the size of a human being, yes, an ant is small (anywhere from 2mm

long to 25 mm long); however, relative to a human hair (0.1 to 0.06 mm), an ant is huge.

The comparative size of an object in relative terms (big, small, huge) can be illustrated in a scale.

In the top scale of "Size is Relative", the ant is the smallest object. However, in the bottom scale

the ant is the largest object. Additional comparison scales could be created at both ends of these

two scales illustrating even smaller and largest objects.

Question: In the top scale, the ant is the smallest object. What are three additional objects that

could be added to this scale that are bigger than the ant, but smaller than the bumblebee?


Scale is a Relationship

Scale is the relationship between what is being compared and how

that relationship is represented numerically or visually. Two scales

can look very similar, but be completely different in the range

represented. Two objects can look the same size, but when put in the

correct scale, the difference becomes obvious. Take a look at the two

objects in the figure. They look close to the same size, don't they? In

reality, the ant is approximately 5 mm in length and red blood cells

are approximately 5 μm in diameter or 1,000 times smaller!

How Big is Small?

One light-year is 9,460,730,472,580.8 km or about 9.5 x 1015

meters!

One kilometer (km) is 1000 meters or 1x103 meters.

One micrometer is 10-6

(a millionth) of a meter.

One nanometer is 10-9

(a billionth) of a meter.

One kilogram (kg) is 1000 grams or 1x103 grams.

One milligram (mg) is 10-3

(a thousandth) of a gram.

An attogram is 10-18

of a gram.


The Scale of Things

[Graphic courtesy of the Office of Basic Energy Sciences, U.S. DOE]

In the above chart "The Scale of Things – Nanometers and More", you can get a feeling of how

things can look the same size, but when placed next to a scale, the real size becomes more apparent.

Take a few minutes to study the objects on this chart. Which would you consider macro (large than

micro)? Which objects would you place in the micro-scale and which objects in the nano-scale?


Macro, Micro and Nano – What's the difference?

Macro, Micro, Nano

[Micro image of microgears courtesy of Sandia National Laboratories]

[Nano image Printed with permission Craighead Group/Cornell University and © Cornell

University]

Macro – anything that can be seen with the naked eye or anything greater than ~100 micrometer.

Micro – 100 micrometers to 100 nanometers

Nano – 100 nanometers to 1 nanometer

Electrical and mechanical devices, components and systems are being manufactured in a variety of

sizes from macro to nano. The figure shows such components:

Standard light bulb with a diameter of ~8 millimeters (mm) or 3.2 inches

Microgears with individual gear teeth ~8 micrometers (µm) wide

Microcantilever with a gold nano-dot 50 nanometers (nm) in diameter.

In commercial and residential electrical applications, components such as switches, light bulbs and

fans are macro-size objects (greater than 100 micrometers). Airbag actuation sensors, shock sensors

for computers and implantable drug delivery systems are micro-sized objects. Biomolecular sensors

for proteins and antigens, carbon nanotubes as connectors, and gene analysis devices are nano-sized

objects.

Can you add objects to the following table?

Macro Micro Nano

Switches Microswitches Carbon Nanotubes

Light bulbs Inertial sensors Biomolecular sensors

Fans Chemical sensors Biomolecular motors

Pumps Micropumps

Table 1: Macro, Micro and Nano Objects


A Sense of Size

A honey bee is approximately 12 mm long

A human hair is 60 to 100 micrometers in diameter

A red blood cell averages about 7 micrometers in

diameter

The DNA helix is 0.002 micrometers wide or 2 nm

wide.

Something for you to do: Estimate the size of other

objects that you are familiar with.

This is a good time to take and break and do one of the activities in this Scale Learning Module. A

good activity to do is "Cut To Size."

Scales

As seen in previous graphics, a good way to compare the size of different objects is to place the

objects on a scale. There are two basic scales that are used: the linear scale and the logarithmic scale. Following is a brief discussion and illustration of both types of scales.

Linear Scales

Linear Scale

In a linear scale each increment and incremental increase is equal to the one before (in other words –

equal divisions for equal values). For example, the linear scale above goes from 0 millimeters to 25

millimeters in 5 mm increments. This scale works fine when the total range in the size of objects is

small, such as illustrating the sizes of five objects from the size of a bumble bee (~24 mm long) to the

size of a pinhead (~1 mm in diameter).

Can you estimate the size of each object in the scale?


Logarithmic Scales

Logarithmic Scale

But what happens when the range becomes bigger (e.g. from 1.5 Gm to 5 μm)? In such a

comparison, a linear scale is not practical, nor as effective; therefore, a logarithmic scale could be

used (above). A logarithmic scale uses the logarithm of a physical quantity rather than the quantity

itself. It is effective for comparing the relative size of objects when the actual range in size is huge.

The above graph covers a range from the diameter of the sun (1.39 Gm) to the size of a pin head (1.5

mm). Imagine how long a linear graph would be that compared these objects.

Linear vs. Logarithmic

These two graphs above illustrate the exact same

information, but look how different they look.

They both show the increase in the number of

transistors per die from 1970 to 1995. The graph on

the top is a linear scale and the one on the bottom is

a logarithmic scale. Notice in the linear scale, the

growth is easily seen as being exponential. In the

log scale, it almost looks linear; however, since it is

logarithmic, you can easily see that the growth

between 1970 and 1975 went from over 1000 to just

under 10,000 transistors per die. Between 1990 and

1995, the growth was from 1,000,000 to almost

10,000,000 per die! That's a significantly larger

increase. By 2008 transistors per die has increased

to over 200 million!


Macro vs. Microdevices

When comparing macroscopic devices to their micro equivalents, the micro devices are

much smaller,

much lighter,

more energy efficient, and

constructed with fewer materials.

In equivalent applications, such as sensors or transducers, microdevices exceed their macroscopic

equivalents in

reliability,

efficiency,

selectivity,

response time, and

energy consumption.

Micro-sized objects allow us to go places where no objects have gone before.

Microtechnology

"Microtechnology is the art of creating, manufacturing or using miniature components, equipment

and systems that have been mass produced. The first and foremost feature in this field is its

multidisciplinary nature, as microtechnology systems use electronic, computerised, chemical,

mechanical and optical elements as well as various other materials." [Federal School of

Polytechnics]5

The products of Microtechnology are microsystems and microsystem components.


What are Microsystems?

Microsystems are miniaturized integrated systems in a small package or

more specifically, micro-sized components working together as a system

and assembled into a package that fits on a pinhead (see figure above).

In the United States, these devices are referred to as

microelectromechanical systems or MEMS. European countries referred

to such devices as microsystems or MST. These two terms – MEMS and

MST – are often used interchangeably.

Microsystems are microscopic, integrated, self-aware,

stand-alone products that can sense, think, communicate

and act. Some systems can do all of these things, plus

scavenge for power.

Three MEMS blood pressure

sensors on a pin head

[Photo courtesy of Lucas

NovaSensor, Fremont, CA]


Microsystems Applications

MicroFluidic pump used for inkjet printheads (The piezoelectric crystal expands and contracts to

move fluid from the reservoir through the nozzle)

Ink Jet Print Heads (see figure)

Automobile applications (flowrates, tire and oil pressures, crash sensors, airbag

deployment)

Biomedical applications (drug delivery, diagnostics, therapeutics)

Optical applications (digital light processing, microopticalelectromechanical systems,

digital mirror devices)

Homeland security (gas detections, motion detectors)

Environmental applications (earthquake, volcano and tsunami sensors, atmospheric sensors)

RF (Radio Frequency) MEMS (digital communications, switching)

Mass Storage Devices

Aerospace (leak detection, vibration sensors, positioning, navigation, monitoring space

personnel health)


Nano meets Micro

The smaller microsystems become the smaller their

components become. For example, IBM has been working

on a read/write storage device that can fit 1 Terabit of data

on a surface the size of a standard postage stamp.6 In order

to do this, the "bit-making" component needs to be nano-

size, not micro-size. Hence the overlap occurs of micro and

nano devices. In the IBM read/write storage devices, the

cantilevers are approximately 2 microns wide while the

read/write tip is approximately 10 nm wide at the apex (see

figure right).

MEMS Read/Write Storage Device (IBM Millipede –

prototype)

[Photo courtesy of IBM]

Nanotechnology

The term Nanotechnology is so new, that how it is defined, depends on who you ask. Below are

some definitions of Nanotechnology:

"Nanotechnology is the understanding and control of matter at dimensions of roughly 1 to 100

nanometers, where unique phenomena enable novel applications. Encompassing nanoscale

science, engineering and technology, nanotechnology involves imaging, measuring, modeling, and

manipulating matter at this length scale." National Nanotechnology Initiative (NNI)

"Research and technology development at the atomic, molecular or macromolecular levels, in

the length scale of approximately 1-100nm range.

Creation and use of structures, devices and systems that have novel properties and functions

because of their small and/or intermediate size.

An ability to control or manipulate on the atomic scale."

MANCEF Roadmap 2nd Edition, p.161 (based on NNI)

"The name nanotechnology originates from [the] nanometer. In the processing of materials, the

smallest bit size of stock removal, accretion or flow of materials is probably of one atom or one

molecule namely 0.1-0.2nm in length. Therefore, the expected limit size of fineness would be of the

order of 1nm. Accordingly, nanotechnology mainly consists of the processing of separation,

consolidation and deformation of materials by one atom or one molecule."

N. Taniguchi, "on the Basic Concept of Nanotechnology," Proc. Intl. Conf. Prod. Eng. Tokyo, Part

II – Japan Society of Precision Engineering, 1974


Nanoscience

Structure of a bacterial flagellar motor.

The flagellum is used to move the bacterium through the system. The flagellum is powered by the

rotary engine anchor to the cell wall and powered by proton motive force. The rotor can rotate at

speeds as high as 17,000 revolutions per minute, moving the flagellar filament at speeds as high as

1000 rpms. Microtechnology is studying this biomolecular devices to see if it can be manufactured

and use to move cargo such as medicine to specific parts of the body..7

[Image courtesy of LadyofHats]

Nanotechnology, or more specifically, nanoscience has been around for quite a long time.

Nanoscience is concerned with the study of novel phenomena and properties of materials that occur

at extremely small length scales.

Physicists and biologists have been studying nanodevices such as cells, molecules, and atoms for

years, and in some cases, centuries. In the 18th century, John Dalton, a British chemist and

physicist, made the earliest steps toward recognizing that matter was composed of atoms. In 1952,

a series of experiments by Alfred Hershey and Martha Chase, known as the "Hershey-Chase

Blender Experiments", supported the role of DNA as the carrier of genetic information.

Nanotechnology is the application of nanoscale science, engineering and technology to produce

novel materials and devices.


So what is Nano?

Nano is a lot of things:

Anything less than 100 nm in any dimension regardless of how it was made.

Anything made by specifically placing materials atom by atom or molecule by molecule.

Anything made from the bottom up (one atom at a time).

Anything with unique properties because of its small size (Some of the laws of physics that

apply to macroscopic objects, do not apply to nano-size objects).

Micro vs. Nanotechnology

In addition to the actual size of the objects, fabrication is another primary difference between micro

and nanotechnology. Nanotechnology normally uses what is referred to as the "bottom up"

approach to fabrication. Microtechnology normally uses the "top down" approach.

Bottom up

Assembling a quantum corral

[Images courtesy of IBM STM Image Gallery]

The bottom up approach means a structure is made by building it atom by atom or molecule by

molecule from the bottom up. Each individual atom or molecule is manipulated or controlled for

correct placement.

The figure on the left (above) shows four stages in the assembly of a quantum corral. The figure on

the right (above) shows the final assembly of a corral that has been made by placing 48 iron atoms

in a circle, one at a time, onto the surface of gold.

So what does the bottom up approach sound like?

Nature or the building of a living object.

The cells of a seed multiply to become a full blown tree.

The tree continues to grow by taking individual atoms and molecules and assembling its leaves.


Top down

Creating suspended cantilevers using the top down approach

The top down approach selectively removes material until the desired structure is achieved. In

semiconductor and some MEMS processes, one

applies a pattern,

selectively etches away exposed material and

ends up with a circuit or component (as illustrated above).

The above graphic shows how microcantilevers (red) are initially incorporated into a block of

layered material. By removing the layer below (green), the microcantilevers are released and

suspended over the substrate (blue).

What does the top down approach sound like?

Sculpturing

A sculptor can start with a tree trunk and by removing select pieces of the tree, end up with a totem

pole, bird, desk, or any desired object. What about Mount Rushmore? How was that made? Start

with a cliff, and remove everything that doesn’t look like a president!


Shrinking Technology

The space of one transistor, now holds hundreds of transistors (graphic not to scale)

Semiconductors have evolved over the years with technological advancements in the deposition of

materials and the selective removal of materials through the photolithography and etch processes.

Deposition layers have become thinner and etched widths have become smaller (see figure).

A deposited gate oxide layer used to be 20 microns or larger. Now it can be as thin as 1 nm! Gate

widths, patterned and subsequently etched have shrunk from more than 1 micron dimensions to less

that 50 nm! Since today's semiconductor manufacturing processes are creating structures less than

100 nm, this technology can be considered Nanotechnology.

Nano meets Micro

As devices shrink, the necessity to use nano-

sized objects when constructing micro-sized

devices increases. Take for instance the

electronic electrodes shown in the figure to the

right. The image on the left shows carbon

nanotubes (green) linked to four electronic leads

(gold). The leads were made using a standard

semiconductor technology deposition of metal

by evaporation, followed by lithography and

etch for the electrode pattern. The carbon

nanotubes were deposited onto the chip from

solution and located using an Atomic Force

Microscope (AFM). Attaching the nanotubes to the

leads required the "find 'em and wire 'em" technique.

[University of California – Berkeley]8 This

technique does not lend itself to high volume

production! [The right graphic is an illustration of a

carbon nanotube from the Southwest Center for

Microsystems Education.]

Nanotube connectors for

microelectronics

[University of California – Berkeley,

Image source: Office of Basic Energy

Sciences, U.S. DOE]


BioMEMS

One of the greatest applications for micro / nano devices is in the biomedical field. The overlap

between microbiology and microsystem feature sizes makes integration between the two possible.

Devices fabricated for the medical field are referred to as bioMEMS.

Examples of BioMEMS

Drug delivery system using a micropump and nanosized needles

Examples of BioMEMS are

Drug delivery systems with nanosize needles and microsize pumps

Diagnostics arrays that use microcantilevers and nano coatings (monolayers) to capture

nanosize particles.

Artificial Retina Prostheses that use an electrode microarray implanted on the retina.

Micro-sized laboratories for analyzing liquid samples such as blood, urine and sputum.

Numerous devices used for diagnostic and therapeutic applications


A Biosensor

A gold dot, about 50 nanometers in diameter, fused to the end of a cantilevered oscillator about 4

micrometers long. A one-molecule-thick layer of a sulfur-containing chemical deposited on the

gold adds a mass of about 6 attograms, which is more than enough to measure.10

[Printed with permission Craighead Group/Cornell University and © Cornell University]

A biosensor is a devices used to detect, capture and analyze analytes (i.e. antibodies, antigens,

proteins) within a sample solution. The biosensor in the figure consists of a gold dot, about 50

nanometers in diameter, fused to the end of a cantilever oscillator about 4 micrometers long. A

one-molecule-thick layer (monolayer) of a sulfur-containing chemical is deposited on the gold. An

external excitation causes the cantilever to oscillate.

This biosensor cantilever could be used to detect and collect e-coli cells in a sample. The cells

would stick to the chemically treated layer on the gold dot adding a few attograms of mass to the

cantilever. Even though a few attograms is very small, it is enough to affect a measurable change

in the oscillations of the cantilever. This allows the concentration of e. coli cells in the sample to

be measured.

Matching Activity

Match the following components with their scale

Component Scale

1 Strain of hair A Macro

2 A molecule B Micro

3 75 nm C Nano

4 233 mm

5 48 microns

6 Pollen

Table 2: Components and Their Scale


Summary

Milky Way (left) [Image courtesy of NASA/JPL-Caltech]

Quantum Corral of 48 iron atoms [Courtesy of IBM STM Gallery]

How big is big? How small is small? It depends on the scale. A macro-scale can be millions of

times bigger than a microscale. The microscale is a thousand times bigger than the nanoscale. In

the macro-scale, the earth is small when compared to the sun, but huge compared to a baseball. In

the micro / nano-scales, an 8 micron wide red blood cell is huge compared to a 2 nm diameter

carbon nanotube.

The discovery of nano-sized particles has made an already big universe even bigger. Distances are

now measured in lengths from light years to nanometers (see pictures above). Modern technologies

are taking advantage of the wide range of sizes in order to improve existing processes and develop

new ones.


Food For Thought

How have discoveries in the microscale affected the study of the universe?

How have discoveries in the micro and nano-scales affected our daily lives?

In today's world, what is small?

References 1. To see the Universe in a Grain of Taranaki Sand, by glen Mackie.

http://astronomy.swin.edu.au/~gmackie/billions.html 2. Milky Way Image. "Our Milky Way Gets a Makeover". NASA/JPL-Caltech. 06/03/08.

http://www.nasa.gov/mission_pages/spitzer/multimedia/20080603a.html 3. Image credits from NASA.gov: Sun and Earth(Image credit: World Book illustration by Roberta

Polfus), Earth (Image credit: NASA/Goddard Space Flight Center), Sun (Image credit:

NASA/Transition Region & Coronal Explorer), Greek Islands (NASA/GSFC/LaRC/JPL, MISR

Team), MEMS Gyroscope (NASA Jet Propulsion Laboratory) 4. Image of Nanowire looped on human hair. NSF image. Credit: Limin Tong/Harvard University.

http://www.nsf.gov/od/lpa/news/03/pr03147_images.htm 5. "Microtechnology". Micronora.com. http://www.micronora.com/ref/microtechnologies.htm 6. "IBM's Millipede Project Demonstrates Trillion-Bit Data Storage Density". IBM Research.

Zurich. June 22, 2002. 7. "EU supports research towards the construction of nanomotors". Max Planck Institute for

Biophysical Chemistry. Nanowerks News. March 16, 2006. 8. "Carbon Nanotube Electronics". Nanoelectronics Research Group. Department of Physics.

University of Maryland. http://www.physics.umd.edu/condmat/mfuhrer/ntresearch.htm 9. Quantum Corral Images. IBM STM Image Gallery.

http://www.almaden.ibm.com/vis/stm/stm.html and

http://www.almaden.ibm.com/vis/stm/corral.html 10. Silicon Atoms Image. “Observing the Wings of Atoms”. Feng Lui. University of Utah News and

Public Relations. June 2, 2003. http://web.utah.edu/news/releases/03/jun/orbitals.html 11. Image of micro-sized gears (Macro, micro, nano) – Courtesy of Sandia National Laboratories.

www.mems.sandia.gov 12. Micro to Nano – An Introduction. Mathius Pleil, SCME, CNM 13. Microtechnology Education Resource Center (MERC)

Related SCME Units (can be downloaded from scme-nm.org)

Units of Weights and Measures PK

Units of Weights and Measures Activity

Conversion of Weights and Measures Activity

Scale Activity: Cut to Size

Scale Activity: The Scale of Biomolecules

Scale Activity: Zoom In / Zoom Out

http://astronomy.swin.edu.au/~gmackie/billions.html

http://www.nasa.gov/mission_pages/spitzer/multimedia/20080603a.html

http://www.nsf.gov/od/lpa/news/03/pr03147_images.htm

http://www.micronora.com/ref/microtechnologies.htm

http://www.physics.umd.edu/condmat/mfuhrer/ntresearch.htm

http://www.almaden.ibm.com/vis/stm/stm.html

http://www.almaden.ibm.com/vis/stm/corral.html

http://web.utah.edu/news/releases/03/jun/orbitals.html

http://www.mems.sandia.gov/

scme-nm.org


Glossary

Linear Scale: A scale each increment and incremental increase is equal to the one before.

Logarithmic Scale: A scale that uses increments in powers of 10

Macroscopic: Objects greater than 100 microns or visible to the naked eye

MEMS: Microelectromechanical Systems

Micro: A scale between 0.1 μm and 100 μm

Micrometer: One thousandths of a meter (10-6

meter)

Micron: A unit of measurement equal to 1 milli Torr or 1 millionth of a meter.

Nano: A scale between 0.1 nm and 100 nm

Nanometer: One billionth of a meter (10-9

meter)

Nanotechnology: Technology involved with design and fabrication of devices and thin films with

dimensions in the nanometer range (1E-9 m).





MEMS BioMEMS Topic

The Scale of Biomolecules Activity SCO

This SCO is part of the Learning Modules

Biomolecular Applications for bioMEMS and

Scale




This Learning Module was developed in conjunction with Bio-Link, a National Science Foundation Advanced

Technological Education (ATE) Center for Biotechnology @ www.bio-link.org.




and





Phone: 505-272-7150


http://www.bio-link.org/


Southwest Center for Microsystems Education (SCME) Page 2 of 4 Int_Scale_AC13_PG_040413 The Scale of Biomolecules Activity

The Scale of Biomolecules Activity

Participant Guide


This activity is an exploration of the scale of biomolecules (nucleic acids, carbohydrates, proteins,

and lipids). You will identify the relationship between the sizes of different biomolecules and cells.

An understanding of the size of cells and biomolecules allows you to better understand how these

components can be used within MEMS devices and as bioMEMS devices.


Allow approximately 45 minutes to complete

Introduction

Nanoscience is concerned with the study of novel phenomena and properties of materials that occur

at extremely small scales. Nanotechnology is the application of nanoscale science, engineering and

technology to produce novel materials and devices.

"Nanotechnology is the understanding and control of matter at dimensions of roughly 1 to 100

nanometers, where unique phenomena enable novel applications. Encompassing nanoscale science,

engineering and technology, nanotechnology involves imaging, measuring, modeling, and

manipulating matter at this length scale. " National Nanotechnology Initiative (NNI)

BioMEMS is one of the outcomes of the merging of Nanotechnology and Microelectromechanical

Systems (MEMS). Biomolecules are enabling the design and fabrication of MEMS devices with

components in both the micro and nanoscales. BioMEMS takes advantage of the properties of

biomolecules to do the same work as fabricated components.

To better understand Micro and Nanotechnologies, it is important to understand the components and

the size of these components relative to each other.


Activity Objectives

Demonstrate your understanding of the relative size of biomolecules by creating an illustration

that consists of correctly proportioned molecules joined to other molecules and cells.

Describe two applications of biomolecules in MEMS.

Activity Outcomes

You will be become familiar with the scale of cells and biomolecules and how they are used in

bioMEMS devices.


Supplies

This activity can be completed using a graphics software program such as PowerPoint. If no such

program is available, then a paper graphic can be constructed with the following supplies.

Per participant or team

One large sheet of graph paper

Ruler

Colored markers

Pictures of items in the following table - "Relative size of Biomolecules in Nanometers". Pictures

can be drawn or downloaded from the internet. If downloaded, adjust the size of each object

relative to the size given in the activity table before printing.

Activity – The Scale of Biomolecules

Complete one of the following two procedures using the table on the next page – Relative Size of

Biomolecules in Nanometers.

Procedure 1:

Using a graphics program or a large sheet of graph paper and printed or drawn pictures, create a

scaled graphic of the following:

A red blood cell attached to a spore,

which is attached to a bacterium,

which is attached to a liposome vesicle,

attached to a tobacco mosaic virus.

Add a porin channel to the liposome vesicle.

Place a 10,000 nm long flagellum on the bacterium.

Even though your graphic will be in the macroscale, you must maintain the correct proportion to the

actual sizes of the objects. The actual size of each object is listed in the table Relative Size of

Biomolecules in Nanometers..

Procedure II:

Using a graphics program or a large sheet of graph paper and printed or drawn pictures, create a

scaled graphic of ALL of the objects in the table (Relative Size of Biomolecules in Nanometers)

illustrating relative sizes and the correct size proportions.


Relative Size of Biomolecules in Nanometers

Object Diameter (nm) Inside diameter (nm)

Hydrogen atom 0.1

Water molecule, H2O 0.3

Amino acid 1

DNA (width) 2.5

Cell membrane 5-9

Ferritin iron-storage

protein

12 8

Bacterial S-layer 5-35 2-8

Porin channel 4-10 2-3

Actin filament 5-9

Intermediate filament 10

Microtubule 25 12-15

Bacterial flagellum 12-25 2-3

Tobacco mosaic virus 18 4

Magnetosome crystals 35-150

Liposome vesicle 100 (minimum) 85 (minimum)

Pores in synthetic

membrane

200 (minimum)

Bacterial cell 250 (minimum)

1000 (maximum)

Spores 1,000-8,000

Red blood cell 6,000-8,000

Human hair 60,000 to 100,000

Post-Activity Question

Briefly discuss two applications of biomolecules as a component in a MEMS or bioMEMS device.

Your discussions should include the sources of your information as well as how the devices works and the function of the biomolecule within the device.

Summary

It is important to understand the actual size of an object to better understand its function and

application in a bioMEMS device. The nanoscale of biomolecules enables functions to be

performed that were not possible a few years ago. We now have the technology to incorporate

nanosize particles such as short chains of DNA, antibodies, proteins, and other biomolecules into a

fabricated MEMS.

SCME Resources

Biomolecular Applications for bioMEMS Learning Module (Can be downloaded from scme-

nm.org. Select Educational Materials/BioMEMS)

Support for this work was provided by the National Science Foundation's Advanced Technological Education (ATE)

Program. This Learning Module was developed in conjunction with Bio-Link, a National Science Foundation

Advanced Technological Education (ATE) Center for Biotechnology @ www.bio-link.org.

scme-nm.org

scme-nm.org

http://www.bio-link.org/




Scale Activity: Zoom In / Zoom Out Shareable Content Object (SCO)


Scale







and





Phone: 505-272-7150



Southwest Center for Microsystems Education (SCME) Page 2 of 6

Int_Scale_AC15_PG_040413 Zoom In / Zoom Out Activity

Scale Activity: Zoom In / Zoom Out

Activity

Participant Guide


As you learned in the Scale unit and other activities, macro objects consist of micro and nano-sized

objects. In this activity you will illustrate what you've learned about the various scales by creating

an illustration of an object and the various sized objects that it contains. For example, you could

start with a macro-sized object (such as a human) and slowly zoom in to its nano-sized components

(like DNA). You may also choose to go the other way and zoom out from the nano-sized object to

the macro-sized object.

To get you started, we'll take you through the universe to our galaxy, to earth, to man, and end up

somewhere inside of the human body to parts yet unknown.


You should set aside approximately 2 – 3 hours to complete this activity.

Introduction

Exploring the universe involves the study of the objects within it as well as its composition.

Measurements and comparisons are constantly being made in an effort to discover something new

and to move closer to how big the universe could be. While astronomers have been trying to figure

out how big the universe really is, scientists and engineers have been exploring how small things are

and how small something has to be before it cannot be manipulated or measured.

So what have these scientist found?

In this activity, you will illustrate what these scientists have found.


Activity Objective

Illustrate the relationship of scale by breaking an object into its various sized components:

macro (> 100 microns), micro, nano.

Calculate how much bigger (in powers of 10) one object is over another object in a different

scale.

Activity Outcomes

The outcome of this activity should illustrate your understanding of how objects are constructed

from smaller objects all the way down to the nano-scale and beyond. At the end of this activity you



should be able to answer the following questions:

When constructing micro-sized objects, would it be more logical to construct the object from the

bottom up or from the top down? Be prepared to justify your answer.

When constructing nano-sized objects, would it be more logical to construct the object from the

bottom up or from the top down? Be prepared to justify your answer.

Team

You can do this activity by yourself or with one other participant.

Supplies

The supplies that you need for this activity is dependent upon how you choose to illustrate the

assignment.

Resources

Exploring the World of Optics and Microscopy. Molecular Expressions.

http://micro.magnet.fsu.edu/index.html

Virtual Scanning Electron Microscopy. Molecular Expressions. Interactive Java Tutorial.

http://micro.magnet.fsu.edu/primer/java/electronmicroscopy/magnify1/index.html

Introduction to Optical Microscopy, Digital Imaging, and Photomicrography. Molecular

Expressions. http://micro.magnet.fsu.edu/primer/index.html

Secret Worlds: The Universe Within. Molecular Expressions. Interactive Tutorial.

http://micro.magnet.fsu.edu/primer/java/scienceopticsu/powersof10/

Documentation

Your documentation will include (but not limited to) the following items:

A discussion of each on-line tutorial and answers to questions about the tutorials.

A short description of your project – what you are going to illustrate.

A visual presentation of your illustration. It could be animated PowerPoint, flash animation,

physical model, manual flip animation, or expanded drawing.

Answers to Post-Activity Questions

http://micro.magnet.fsu.edu/index.html


http://micro.magnet.fsu.edu/primer/index.html




Activity: Zoom In / Zoom Out

Description

In this activity you should demonstrate what you have learned about the various scales by

creating an illustration of an object and the various sized objects that it contains.

1. Complete an on-line tutorial.

Description a. Read the following instructions BEFORE going to the tutorial.

b. Go to


and put the tutorial in the Manual Mode. (Click on the "manual"

button)

c. Familiarize yourself with the screen. Find where the name and the

size of the objects are illustrated.

d. Zoom In – Read what the object is and its size.

e. Answer the following questions:

What is the first object in the micro-scale? How big is this

object?

What is the first object in the nano-scale? How big is this object?

How much bigger is the "oak tree leaf" to the "cells on the leaf's

surface"?

How big is an individual leaf cell?

How big is the nucleus of a carbon atom? (Use a metric prefix.)

How much bigger is the nucleus of a leaf cell than the nucleus of

a carbon atom?

Now Zoom Out.

2. Complete another on-line tutorial.

Description a. Go to

http://micro.magnet.fsu.edu/primer/java/electronmicroscopy/magnify1/in

dex.html

b. Zoom in and out on several objects in this tutorial.

c. "Play" with the four slider controls and figure out what they do.

What type of analytical tool was used to capture these images?

When viewing these images, what effect did the amount of light

(brightness) have on the object's details?






3. Layout your illustration.

Description a. Pick an object that you would like to create your own zoom in or zoom

out.

b. Ideas: Pencil, piece of fruit, any animal (chicken, cat, etc.), MP3 player

c. Outline how you will present this object from the macro to nano-scale or

vice versa.

4. Create your illustration.

Description Create an illustration with at least 15 steps covering three scales that carry

the viewer from a nano-sized object to a macro-sized object (zoom out) or

vice versa (zoom in).

Here are some ideas on how to create your illustration. You are welcome to

use other methods.

a. Animated PowerPoint presentation

b. Flash animation

c. Physical model

d. Manual flip animation

e. Expanded drawing

For each step in your illustration indicate what the object is and its size.

5. Present your illustration.

Description Present your illustration to your instructor and other participants of this

activity.

Solicit feedback.

What were the strengths and weaknesses?

What could have made it better?

What is accurate? If not, where were the inaccuracies?

Was this a good illustration for what you were trying to represent? If

not, why not?

6. Answer the Post-Activity Questions.

Description Answer the Post-Activity Questions at the end of this procedure.

7. Complete your documentation.

Description Complete your documentation as outlined in the previous Documentation

Section.

8. Submit your illustration and documentation.



Post-Activity Questions

1. When constructing micro-sized objects, would it be more logical to construct the object

from the bottom up or from the top down? Explain the reasoning behind your answer.

2. When constructing nano-sized objects, would it be more logical to construct the object from

the bottom up or from the top down? Explain the reasoning behind your answer.

3. What type of analytical tools enable scientist to see objects in the micro and the nano-

scales? (List at least three. Briefly discuss each. In your discussion identify the distinct

differences between the tools in relation to "what" they can see.)

Summary

In this activity you continued to explore what matter is made of and how small matter can be.

References

A Comparison of Scale: Macro, Micro, and Nano PK

Scale Inquiry Activity: Cut to Size



Revision: 5/20/11 www.scme-nm.org


Learning Modules available for download @ scme-nm.org

MEMS Introductory Topics

MEMS History

MEMS: Making Micro Machines DVD and LM (Kit available)

Units of Weights and Measures

A Comparison of Scale: Macro, Micro, and Nano

Introduction to Transducers, Sensors and Actuators

Wheatstone Bridge (Pressure Sensor Model Kit available)

MEMS Applications

MEMS Applications Overview

Microcantilevers (Dynamic Cantilever Kit available)

Micropumps Overview

BioMEMS

BioMEMS Overview

BioMEMS Applications Overview

DNA Overview

DNA to Protein Overview

Cells – The Building Blocks of Life

Biomolecular Applications for bioMEMS

BioMEMS Therapeutics Overview

BioMEMS Diagnostics Overview

Clinical Laboratory Techniques and MEMS

MEMS for Environmental and Bioterrorism Applications

Regulations of bioMEMS

DNA Microarrays (GeneChip® Model Kit available)

MEMS Fabrication

Crystallography for Microsystems (Breaking Wafers

and Origami Crystal Kits available)

Oxidation Overview for Microsystems (Rainbow Wafer Kit available)

Deposition Overview Microsystems

Photolithography Overview for Microsystems

Etch Overview for Microsystems (Rainbow Wafer and Anisotropic Etch Kits available)

MEMS Micromachining Overview

LIGA Micromachining Simulation Activities (LIGA Simulation Kit available)

Manufacturing Technology Training Center Pressure Sensor Process (Three Activity Kits available)

MEMS Innovators Activity (Activity Kit available)

Safety

Hazardous Materials

Material Safety Data Sheets

Interpreting Chemical Labels / NFPA

Chemical Lab Safety

Personal Protective Equipment (PPE)

Check our website regularly for the most recent

versions of our Learning Modules.

For more information about SCME and its Learning Modules and kits, visit our website

scme-nm.org or contact

Dr. Matthias Pleil at [email protected]

Comparison of Scale LM PG

Documents

Transcript of Comparison of Scale LM PG