CMUt Patent
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Transcript of CMUt Patent
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Fraunhofer IPMS
New applications for ultrasound technology through CMUTs
Anartz Unamuno
26-09-2013
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 2
Agenda Capacitive Micromachined Ultrasonic Transducers (CMUT)
What is ultrasound
1o1 ultrasound transducers
Comparison Piezoelectric & CMUT
History of CMUTs
Challenges CMUT & IPMS
Strengths, Weaknesses, Opportunities, Threads
Initial results of IPMS CMUTs
Current research for CMUT applications (worldwide)
Conclusion
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 3
What is ultrasound?
Sample applications:
Medical imaging
Non-destructive testing
Level sensors
Speed sensors
Etc T.G. Leighton / Progress in Biophysics and Molecular Biology 93 (2007) 383
Images form Wikipedia search: Ultrasound
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 4
1o1 -- Ultrasonic transducers
Oralkan O., 2002
Capacitve Micromachined Ultrasonic Transducer
Piezoelectric Transducer
Image form Wikipedia search: Piezoelectricity
Mechanical displacement generates US waves
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 5
Advantages -- Piezoelectric & CMUTs transducers
Piezoelectric CMUT
Accepted technology CMOS integration
Reliability(*) Batch production reduced cost
Output acoustic pressure(*) RoHS compatible
Tight parameter specification
High temp. capable (ca. 800 C)
Scalability (size, shape, array, 2D)
Axial resolution
(*) Two factors that need to be addressed on CMUTs
Solving these two, CMUTs should be a winning technology!
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 6
History of CMUTs
Khuri-Yakub, http://www-kyg.stanford.edu/khuriyakub/opencms/en/research/cmuts/History/index.html
A MEMS device researched over the last 20 years
But no products on Euro nor US market using CMUTs yet!!
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 7
Challenges of fabricating CMUTs matches Fraunhofer IPMS expertise
Many issues have been previously solved at IPMS
Requirement Fraunhofer IPMS has marketed product
Large arrays of MEMS elements with quasi-identical performance
High voltage drive for capacitive MEMS
Low noise amplifiers or receive side
Integration MEMS-CMOS
Material expertise (process control)
Testing capabilities
Infrastructure to access and service small-to-medium size customers
US system integration
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 8
Testable CMUT devices
Work at IPMS -- Electrically testable 1D CMUT array
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 9
Work at IPMS -- Electrical impedance measurement
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 10
Resonance frequency spread, SD = 17 kHz (62 array elements)
Work at IPMS -- Resonance frequency distribution
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 11
Applications Intra Vascular UltraSound (IVUS)
Khuri-Yakub, 2009
Degertekin, 2012
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 12
Applications Harsh environment
Reference 1
High Temperature
High Pressure
1. Kupnik et Al., US patent 7,843,022 2. M.-C. Ho, M. Kupnik, K. K. Park, K. Eckhoff, and B. T. Khuri-Yakub, Wide pressure range
operation of air-coupled CMUTs, in Proc. IEEE Ultrasonics Symposium, pp. 93-96, 2012.
Reference 2
Reference 2
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 13
Applications Chemical sensors
Almira Ramanaviciene, Darius Virzonis, Gailius Vanagas and Arnas Ramanavicius, Capacitive micromachined ultrasound transducer (cMUT) for immunosensor design, Analyst, 2010, 135, 1531 DOI: 10.1039/c0an00104j
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 14
Applications Neural stimulation
1. Omer Naor et al, Towards multifocal ultrasonic neural stimulation II: design considerations for an acoustic retinal prosthesis, J. Neural Eng. 9 026006, 2012
2. Menz, Michael D - Oralkan, Omer - Khuri-Yakub, Pierre T - Baccus, Stephen A, Precise neural stimulation in the retina using focused ultrasound, The Journal of neuroscience: the official journal of the Society for Neuroscience, Vol. 33, No. 10
Reference 1
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 15
Conclusions
CMUTs enable novel ultrasonic applications
CMUTs should not be seen as a replacement for pezoelectric transducers, but they are the only option in some applications (e.g. High temp, large 2D array integration, etc.)
Technology is reaching a mature state to be deployed to the markets.
IPMS has one of the few fabrication facilities around the world, where it is possible to produce large MEMS arrays at tight tolerances.
Several team around the Globe are developing clever applications to make use of the CMUT capabilities.
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Fraunhofer IPMS
Anartz Unamuno I 26.09.2013 I slide 16
Thanks!