Cleanroom Suitability Assessment of Equipment...
Transcript of Cleanroom Suitability Assessment of Equipment...
Cleanroom Suitability Assessment of Equipment according to upcoming ISO standards
Frank Buerger, Fraunhofer IPA, October 10th 2013, Dresden
Technology and Cleanliness Trends
MARKET TECHNOLOGY RESULTING CLEANROOM REQUIREMENTS
Status quo:
manufacturing of 300 mm wafers
line widths of approx. ~ 20 nm
Forecast:
manufacturing of 450 mm wafers
smaller line widths (approx. ~10 nm)
Up to 200 mm fabs:
ISO Class 4, ballroom-fabs / ISO Class 2 SMIF-fabs
300 mm fabs: room-in-room-concepts:
ISO Class 2, FOUP technology, minienvironments: surrounding: ISO Class 5
AMC/ESD-control is highly necessary
trend: higher local air cleanliness
Thin-Film Transistor Liquid Crystal Displays (TFT-LCDs)
Organic Light Emitting Diode (OLED)
flexible panels
Field Emission Displays (FED)
Requirements similar to semiconductor industry:
particles can cause shorts between layers
ESD is critical
AMC is not that critical
sunlight falling on silicon shakes loose electrons and create positive and negative charge
more efficiently cells, e.g. thin film technology or alternative contact methods
status quo at present: ISO Class 6 to greyrooms
more efficient contact methods (e.g. with thousands of tiny metal dots) requires cleanrooms like in chip industry
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What to take care of?
Equipment &Materials
PersonnelBehaviour
Cleanroom Technology
ControlAirborne Particles
LogisticsConcept
AvoidCross-Contamination
AvoidCross-Contamination
ProtectClean Environment
For clarifying “Cleanroom Suitability” task: focus on EQUIPMENT
Typical tool particle specifications
Particles per Wafer and Pass (PWP)
Equipment – overall particle performance on substrates even for vacuum
Testing possible for complete equipment
Localization of particle sources not possible
Airborne particles (ABP)
Equipment – local particle concentrations mostly on the wafer path
Only atmospheric tools with clean air supply
No international specification of the
particle emission behavior of tools/components without own clean air supply (ex. VDI 2083-9.1)
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APB
ISO/TC 209 WG 11 - Assessment of suitability of equipment for cleanrooms
New Work Item Proposal accepted and activated by ISO/TC 209 in
February 2012
The new standard will provide basic requirements and guidance on suitability of equipments for cleanroom use
The scope of WG 11 will be limited to airborne and surface cleanliness for particles and chemicals (including outgassing)
Guidance will be provided for the mechanisms, methods, principles for determining the emissions and cleanliness levels
This equipment guidance will be linked closely to the cleanliness classes within the ISO-family (ISO 14644-1,-8,-9 and -10)
Links between contamination of interest and assessment standard
Contamination of interest
Category Item to be assessed
Applicable assessment
standard
Reference classification
standard Designation
particle airborne equipment 14644-14 14644-1 ISO-ACP
particle airborne materials 14644-xx 14644-1 ISO-ACP
particle surface equipment 14644-15 14644-9 ISO-SCP
particle surface materials 14644-xx 14644-9 ISO-SCP
chemical airborne equipment 14644-xx 14644-8 ISO-ACC
chemical airborne materials 14644-xx 14644-8 ISO-ACC
chemical surface equipment 14644-xx 14644-10 ISO-SCC
chemical surface materials 14644-xx 14644-10 ISO-SCC
Airborne Particle Cleanliness acc. to 14644-1 and NWIP
Particle concentration within air volume of 1 m3 cleanroom classification (acc. to 14644-1)
Particle concentration on single point of an equipment, “emitted into” air volume of 1 m3 equipment classification (acc. to NWIP-proposal)
Particle Emission Test of a Robot System – Interpretation of Measurement Values
ISO CLASS 3
ISO CLASS 5?
ISO CLASS 4 ?
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Test series ABB Robotics - Robots ; IRB 1600 ; Ax is 4 ; full velocity ;
Overv iew measuring points MP17 to MP20
Measuring point MP17
Measuring point MP18
Measuring point MP19
Measuring point MP20
Measurement point 1
Measurement point 2
Measurement point 3
Measurement point 4
Participants by Name and Country
Overall Time Line
© Fraunhofer IPA, Department Ultraclean Technology and Micromanufacturing
page 11
– Standards & Guidelines Compilation 1. NFPA 287: Standard Test Methods for Measurement of Flammability of Materials in Cleanrooms Using a Fire Propagation
Apparatus (FPA)
2. ISO 14644-5: Cleanrooms and associated controlled environments - Part 5: Operations
3. ISO 14644-7: Cleanrooms and associated controlled environments -- Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
4. UNE-ENV 1631: CLEANROOM TECHNOLOGY. DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAN AIR DEVICES.
5. ASTM E 1731: Standard Test Method for Gravimetric Determination of Nonvolatile Residue from Cleanroom Gloves
6. ASTM E 2312: Standard Practice for Tests of Cleanroom Materials
7. ASTM E 1549: Standard Specification for ESD Controlled Garments Required in Cleanrooms and Controlled Environments for Spacecraft for Non-Hazardous and Hazardous Operations
8. JIS B 9917-3: Cleanrooms and associated controlled environments - Part 3: Test methods
9. JIS B 9917-1: Cleanrooms and associated controlled environments - Biocontamination control - Part 1: General principles and methods
10.VDI 2083, Part 17: Compatibility of materials with required cleanliness class and surface cleanliness
11.VDI 2083, Part 9.2: Verbrauchsmaterialien (german working draft, not finalysed yet)
12.VDI 2083, Part 9.1: Compatibility with required cleanliness and surface cleanliness
13.IEST-RP-CC031: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components
14.IEST-RP-CC040: Cleaning of Equipment Surfaces in the Cleanroom and Controlled Environments
15.MIL-HDBK-406: Contamination Control Technology: Cleaning Materials for Precision Pre-Cleaning and Use in Cleanrooms and Clean Work Stations
16.MIL-HDBK-407: Contamination Control Technology: Precision Cleaning Methods and Procedures
17.IEST-RP-CC032.1: Flexible Packaging Materials for Use in Cleanrooms and Other Controlled Environments
18.ASTM E 2090-06: Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy
19.ASTM E 2352: Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments-Cleanroom Operations
20.ASTM E 2217: Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas
Related Documents
Contact Information
Fraunhofer Institute for Manufacturing Engineering and Automation IPA Ultraclean Technology and Micromanufacturing Head of Department Dr. Udo Gommel | Phone +49 711 970-1633 | [email protected] Key Account Manager Certification Frank Buerger | Phone +49 711 970-1148 | [email protected]
ADDRESS: Nobelstr. 12, 70569 Stuttgart, Germany INTERNET: www.ipa.fraunhofer.de/cleanroom www.ipa-qualification.com www.tested-device.de