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CLEANROOM SAFETY TRAINING 2015

Employees working in the cleanroom who do the following should take this class: • Service and maintain cleanroom

tools and support equipment (scrubbers, pumps, etc.)

• Handle any chemicals or gases • Handle any pieces of potentially

contaminated equipment or infrastructure

• Generate/handle hazardous waste

Includes, but not limited to: • WSOs who handle chemicals • Equipment Engineers/Field Service

Engineers • Gas/Chem /Waste handlers • ESTs • TGMS group • HPM - Cleanroom contractors • FOG

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Hazard Communication

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Labels communicate the hazard of the chemical

• Pictograms – diamonds indicating chemical hazards

• Signal Word- either “Danger” or “Warning” as identified on the chemical SDS. Signal Word is determined by hazard category.

• Hazard Statements- describe the nature and degree of the product risks

• Precautionary Statements- how to handle the product in order to minimize risk

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Product/Chemical Name

Physical, Health, Environmental Hazard Statements Precautionary Statements

Signal Word

Supplier Contact Information

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Circle the pictogram that corresponds to the listed hazard

Carcinogen

Acute Toxicity (Cat 1.)

Oxidizer

Serious eye damage

Skin sensitizer

BONUS: WHAT ARE THE NAMES OF THE PICTOGRAMS FOR EACH ANSWER??

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Circle the pictogram that corresponds to the listed hazard

Carcinogen

Acute Toxicity (Cat 1.)

Oxidizer

Serious eye damage

Skin sensitizer

BONUS: WHAT ARE THE NAMES OF THE PICTOGRAMS FOR EACH ANSWER??

Health Hazard

Skull & Crossbones

Oxidizer

Corrosive

Exclamation Mark

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Safety Data Sheets

• Provides information on the chemical including hazards, properties, and how to manage in an emergency

• Are available 24/7 through HAZMIN: http://cnse.comply1.com/

• Paper copies available in NFX EHS office • SDSs are required when ordering a new chemical. Step-

by-step procedures are located on the CNSE intranet pageEHS Approved Chemical List

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Physical and Chemical Hazards • Hazard Classifications

o Flammable o Pyrophoric o Peroxide-formers o Oxidizers o Irritants o Sensitizers o Corrosives (acids, bases) o Toxics (poison) o Asphyxiant o Carcinogens, Teratogens, Mutagens

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Flammable Storage A flammable liquid storage cabinet is designed to protect the contents

from external fires Must be self-closing Must be grounded Must be conspicuously labeled: “FLAMMABLE – KEEP FIRE AWAY”

• Storage of flammable liquids must not obstruct any exit • Flammable liquids should be stored separately from strong oxidizers,

shielded from direct sunlight, and away from heat sources • The lower the flashpoint, the easier it is to ignite the material • Use only explosion proof refrigerators for storing flammable material.

They must be labeled: NOTICE

FOR CHEMICAL STORAGE ONLY DO NOT STORE FOOD OR BEVERAGES IN THIS REFRIGERATOR

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Pyrophorics • A substance that spontaneously ignites in air at temperatures

at or below 130° F Examples: silane, phosphorus, tributylaluminum

• Pyrophoric chemicals should be stored under an atmosphere of inert gas and handled in a nitrogen purged environment

Store pyrophoric chemicals away from sources of ignition Do not store with flammable materials. Many pyrophoric chemicals also release noxious and/or

flammable gases.

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Pyrophoric Deliveries – Test your knowledge Q. When are pyrophoric deliveries allowed? Only between 9AM and 3PM, M-F. Q. During deliveries to and from the tool, the tool engineer and

Air Liquide (select the correct answer): a. Is allowed to leave it in a mutual agreed upon approved area b. Must coordinate a direct hand-off of the pyrophoric

Once received, it must be transported directly to the cabinet and installed immediately. Q. Max. quantity of pyrophoric liquid allowed at any single

workstation is ___? 0.5 gallons.

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Pyrophoric Deliveries Pyrophoric liquids shall be transported on a cart with the

ampoule inside a metal container/housing. Pyrophoric containers must be properly labeled and include

the contact name. Once loaded the status tag on the ampoule shall be marked as

‘in use’ and when removed shall be marked as ‘empty’.

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Oxidizers • Oxidizers - Substances that initiate or promote

combustion in other materials • Chlorine

• Chlorine trifluoride

• Hydrogen peroxide

• Oxygen

Why shouldn’t oxidizers and flammables be stored together?

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CAUTION Avoid storage next to

flammables!

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Irritants • Produce inflammation or aggravation of tissue

upon contact o Can occur if a chemical irritant permeates through your glove onto your

skin o Can occur if you breath an irritating chemical vapor, gas, or mist

• Short term exposure to an irritant is generally reversible once the irritant is removed

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Sensitizers Cause allergic reactions (sensitization) Dose related Chemicals combine with a protein to form an antigen, which causes the

formation of antibodies Additional exposure causes an allergic response Can be severe or fatal Example:

Latex gloves Formaldehyde Diesel Fuel

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Corrosives Corrosives can seriously damage:

The skin upon contact, Mucous membranes and lungs if inhaled Gastrointestinal tract and stomach if ingested

o FIRST AID – Flush a minimum of 15 minutes.

• Acids and bases MUST be segregated for storage.

Use plastic trays, tubs or buckets for separation within the cabinet.

• Corrosives should be stored in non-metallic cabinets with design features that include:

• no internal metallic parts • acid resistant coating • cabinet floor constructed to contain spillage.

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Toxics

• Able to cause disease • Includes:

o Carcinogens o Mutagens o Organ Toxicity o Reproductive Toxins o Teratogens o Sensitizers

• Everything can be toxic! o The dose makes the poison

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Asphyxiants Simple Asphyxiants Displaces oxygen: non-toxic ex. N2

Chemical Asphyxiants Interfere with O2 delivery

Can have other hazards (flammable) Can also be odorless Ex. Carbon monoxide

20.8% 21% 19.5% 22%

Normal

Oxygen enriched Oxygen deficient

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Carcinogens

• Agents that produce or accelerate the development of malignant tumors - Can remain dormant for up to 40 years

• Contributory factors include:

o Lifestyle - diet, smoking and alcohol (80-90%) o Chemical exposure level o Genetics o Age o Sex o Hormone levels o Immunologic (AIDS)

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Chemical Hazards -Pregnant Women A women who works in a cleanroom while pregnant

should be especially careful to avoid contact with chemicals, particularly those that are embryo toxic or teratogenic.

If there is any possibility that you may be pregnant or

considering pregnancy, it is suggested that you consult your physician and supervisor concerning possible hazards from exposure to chemicals in the laboratory/cleanroom.

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Hydrofluoric Acid (HF) • Causes deep, painful, slow-healing burns • Burns may not be apparent for up to 24 hrs. • Fluoride ion destroys soft tissue & decalcifies bone • Call Security if exposures occur • ERTs have calcium gluconate to treat skin contact

Day 1 Day 6 Day 12 90 Days

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• TMAH is a hazardous chemical which can cause serious injury or death from skin contact with concentrations above 1% TMAH in water.

• CNSE uses concentrations from <1 % up to 25% • TMAH is corrosive to the skin, eye, and upper respiratory tract • TMAH can be highly toxic • Symptoms of toxicity in animal testing included

decreased locomotor activity hypothermia, loss of coordination convulsions salivation and abnormally slow breathing lethality

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Tetra Methyl Ammonia Hydroxide (TMAH)

AD-10 (contains 2.38% TMAH)

3 0 0

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Transporting Hazardous Production Materials (HPMs) within CNSE

• Liquid HPM transport requires secondary containment when outside their DOT shipping container

• Incompatible chemicals cannot be transported together on the same cart

• No one is to ride in an elevator with HPM chemicals. • Passenger elevators should never be used to transport HPMs in

buildings where chemical elevators are available (NFN, NFX, and NFC).

• Two qualified persons are required for transporting HPM chemicals in elevators.

• See EHS-00005 Chemical Handling and Storage for requirements

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Arsenic, Arsine and III-V Chemicals

Arsenic & Arsine exposure symptoms: o Acute exposure can lead to nausea, abdominal pain, inflammation, jaundice, anemia,

internal bleeding and even death o Chronic exposure can lead to lung , bladder, liver and skin cancer, weight loss, CNS damage,

kidney failure and death

• Those working with arsenic must receive additional arsenic training annually • Reference EHS-00052 Arsenic Protection Program if you will be working with

Arsenic or III-V Wafers • Quick Reference:

o Use wet methods for cleanup o III-V FOUPS have white handles o Waste must be labeled as ‘Toxic Hazardous Waste contaminated with Arsenic’ o Tacky mats in work area o Make sure you have the correct PPE – you may need

a respirator

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How Can You Be Exposed? • Exposure can occur while working on chemical lines

or pumps and you do not do the following: Turn off gases and lock them out Remove any residual pressure from lines Wear adequate PPE to minimize exposure Work with/on equipment that is faulty Defeat safety interlocks

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Safety Interlocks • A safety interlock/switch is a means of safeguarding the employee

from the hazard.

• Safety switches are designed to work together with hinged, sliding, or lift-off doors, guards and/or barriers.

• When the door/guard/barrier is opened, the power supply to the equipment it is guarding is disconnected.

• Example: Laser safety Interlock DO NOT DEFEAT SAFETY INTERLOCKS without consulting EHS

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Bypassing TGMS system is NOT allowed without EHS approval • After CNSE has signed of on the TGMS testing, no wiring on

the tool or panel side may be modified without consulting EHS

• Any modifications require a retest of the affected points

DO NOT JUMPER or BYPASS the TGMS system without consulting EHS

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Ensure that proper notifications (Equipment support team, Security, etc.) have been made and permits completed

Ensure tool/equipment has been placed maintenance mode Use appropriate control measures:

Barricading (10’ perimeter of tool) Use snorkel exhaust or other forms of local exhaust ventilation control Personal protective equipment

Floor tile removal permit must be completed if floor tiles are removed

Ensure proper housekeeping and cleanup /disposal of contaminated waste

materials

Chamber Opening Guidelines

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Pouring Chemicals Guidelines Know the hazard before using a chemical (review SDS) and SOP

Use appropriate PPE; barricade the area

Gloves, safety glasses, arm guards, apron, faceshield

Work with hazardous materials ONLY under fume hood or local exhaust ventilation

Keep away from any ignition source when handling flammable substances

Don't eat or drink when performing any chemical handling task- wash your hands after when task has been completed

If pouring larger quantities of chemicals(>5L); use peristaltic or hand pump. If mixing solutions- ensure that the chemicals are compatible and proper

mixing protocols are established– Always ADD ACIDS TO WATER – AAA

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PERSONAL PROTECTIVE

EQUIPMENT 29

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Head Protection

• Hard Hats (Safety Helmets) – Required in the Subfab o Class A - Limited voltage protection o Class B - High voltage protection o Class C - No voltage protection o Class D - Firefighter’s helmet

• Bump Caps o Not recommended

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• Safety Glasses are always required when working in the cleanroom or lab areas

• Side shields • Z-87

• Goggles • Dust • Chemicals

• Face shield • Chemicals

• Eye and Face protection protects against: - Hazardous Substances (Liquids & Solids) - Optical Density (OD), Based on Laser Beam Power Density - Ultraviolet/Radiant Energy/Laser Beams - Flying Particles and/or Projectiles

• Contact lenses – if you get chemicals in your eye, start rinsing

immediately

Eye and Face Protection

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Foot Protection • Steel Toe • Rubber or Chemical • Shoes must be ASTM approved (ASTM

F2412-11) • Required for:

o Gas Cylinder handling o Chemical handling o Shipping/Receiving o Facilities Maintenance o Electrical Hazards, o Hot, Corrosive, Poisonous Substances, o Falling, Crushing, or Penetrating

Objects

• While working in Cleanroom and Lab areas shoes must have Closed heels and toes Heel height <2” Heel base at least ½”

• Chemical areas: Soles must be non-porous and

impervious NO moccasins or sandals

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Hand & Body Protection Many different materials and styles Gloves / Sleeves

Sharp objects/Cut resistant: Leather, Kevlar

Chemical Resistant - Tri-polymer blend of nitrile, neoprene and natural rubber– used for MOST (not ALL) acids, bases, solvents and chemical mixtures

Be sure you know that the material will protect you

against the hazard & that it is not

damaged or defective!!

• Example: Employee needs to hand pour 200 mLs of 96% sulfuric acid into a bath. What glove material could s/he use? To find out go to: http://www.mapa-pro.com*

*CNSE does not endorse a specific manufacturers.

Chemical resistant sleeve apron

Tyvek suit

Nomex hood

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HF Incident in subfab • A worker was working in the subfab on a line that contained

hydroflouric acid (49%), nitric acid, and acetic acid (1:1:1). The worker believed the line was locked out but it wasn’t

• He broke the line to do PM work but the line was still pressurized and a liquid was released from the line and sprayed under his face shield to the side of his face

• He was wearing the correct PPE- face shield, gloves, safety glasses, apron

• There was a buddy nearby who was able to get him to the shower immediately and call security

• The ERT responded, showered him and applied calcium gluconate. He was transported to Albany Med for observation

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Corrective Actions- HF Incident in subfab

• Patient suffered no injuries • A buddy was present which allowed for immediate action to

rinse off the worker and call security for help • Proper hazardous energy procedures were not followed – the

worker should have checked himself that the line was de-pressurized and locked out

• Proper PPE was worn but the employee still suffered chemical exposures – Think ahead: what hazards can I face? What could go wrong? What can I do to minimize risk?

No line of defense is 100%, always think ahead

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Waste Management

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Waste Types

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Hazardous Waste Universal Waste

Non-hazardous Waste Other Exempt Waste

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Waste Labeling

Identification and labeling is the responsibility of the “generator”, the faculty or staff who created the waste.

The New York State Department of Environmental Conservation (DEC) will issue a $500 fine for each container they find mislabeled or not labeled.

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Universal Waste

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Term used by EPA that includes: Batteries Mercury containing- equipment

(e.g, thermostats) Lamps (e.g, UV, fluorescent light

bulbs) Must be placed in a designated

collection area. Containers must be labeled with purple

‘universal waste label’ and closed at all times.

Waste must not be broken or leaking.

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“Non-Hazardous” Waste

• Does not meet the DEC’s definition of “hazardous waste” but still should not be thrown in regular trash or down the sink o For example, an acid liquid waste with pH of 3 would not need a red hazardous

waste label, however, it may still cause ecologic damage if released into the sewer system

• Do not put chemicals in trash or down the sink! • If you have any questions contact EHS:

• Kassey Brust @ (518)380-1847 or kbrust@sunycnse.com

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Hazardous Waste Characteristics of Wastes

o Ignitable (FP <140o F) o Corrosive (pH <2 or >12.5) o Reactive (reacts w/ H2O, gases) o Toxic

Hazardous waste containers/bags: • Must be Labeled • Good condition • Closed at all times (no funnels) • Waste is compatible with container • Incompatibles must be separated!

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Hazardous Waste Labels Hazardous waste that is generated and placed in a satellite accumulation area must be labeled, as described below. • Check Type: SOLID or LIQUID or MIXED • Check Hazard: IGNITABLE/FLAMMABLE, CORROSIVE, TOXIC or REACTIVE • START DATE: the date you first put waste into the container. • FILL DATE: the date you place the full container in the satellite accumulation area. • Write NAME of person responsible for generating waste and their department. • CONTENTS: Name of the ingredient that makes the waste hazardous

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Satellite Accumulation Areas

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Place properly labeled waste in the satellite accumulation area

Needs to have spill containment Only 1 container per waste stream (max of 55 gallons) Move to 90-Day Storage Area within 3 days of being filled Use a different shelves and containers for different waste

streams to keep incompatible waste apart

Satellite Accumulation Areas (Refer to EHS-00009, Attchmt 5 for full list)

NFN/NFC fab NFS/SX fab NFN Chem Mix rm

NFN Sematech fab NFX fab HPM Corridor

Chem passthrough N-208 SGF01

NFN subfab SNW03 Spill Containment

NFX gowning rms 205, 208, 216

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Empty Container Guidelines

• Empty container collection bins are available for collecting empty bottles that once had flammables/solvents or corrosives materials in them.

• A pair of bins for empty bottles can be found in: • The NFN Fab level tool move-in area. • The NFN & NFC Subfab level tool move-in areas. • The NFSX loading dock.

• MUST be capped before placing into the correct bin. • Nowpak containers should not be placed in bins, please treat

them as Hazardous Waste. • Other trash should not be placed in these bins.

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What’s wrong with this picture?

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What’s Wrong with this Label?

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It should have a red hazardous waste label Label should identify hazard, content and be dated $500 fine for each wrong label…

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What’s Wrong with this Label?

47 No ingredients, pH not circled or written in, no name !

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Emergencies

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Emergency Response Team “ERT” • ~100 members from Facilities, Engineering, EH&S,

Cleanroom and Research Departments o ERT are paged and immediately respond to the emergency

24/7 o They evaluate and decide how to deal with each situation o Provide First Aid o Handle bloodborne pathogens o Do not go back into the building/cleanroom/lab until the ‘all

clear’ is given

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Gas Alarm Procedures (does not apply to Campus labs)

• Automatically activated • Are tied to Toxic Gas Monitoring

System (TGMS) – set at conservative levels to allow sufficient time to exit safely

• ERT are paged immediately • Audible and visual alarms • Evacuate via the nearest cleanroom

exit (gowned) • Regroup in:

o NFS rotunda in NFS o CESTM rotunda if in NFN, NFC, NFX, or

CESTM

INTERMITTENT TONE

BLUE FLASHING LIGHT

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How to Minimize Chemical Burns • Don’t get over-confident

• Always handle chemicals with local exhaust ventilation

• Wear the appropriate PPE o Inspect gloves before use for holes, tears, deterioration, etc. o Don’t touch the outer surface of the glove with your skin o Wash hands after discarding gloves

• If contact with chemical is suspected take immediate action: Remove all contaminated clothing Decontaminate – rinse for 15min. Report – call for help! 518-437-8600 Begin medical treatment Report to EHS

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Chemical Emergency? • Do you know the nearest location of your

safety shower and eye wash?

Did You Know:

Showers/ eyewashes must be within a 10

second walk!!

• How do you activate the shower?

• How do you activate the eyewash?

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1. Preparation/Self Education –Know the hazards of the chemicals you work with (e.g., SDS); Discuss spill prevention and control with your co-workers. 2. Assess the hazard - what chemical? Quantity? Injured person? Type of PPE needed?

3. Call Security – (518) – 437 – 8600 You will NOT get in trouble 4. Alert others in the area 5. Barricade the area 6. Stay until the ERT arrive

53 © MMIII Bongarde Holdings Inc.

CHEMICAL SPILLS – General

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• <1 pint of known chemical o If comfortable and qualified, wear proper PPE &

Clean it up o If uncomfortable, call security 513-437-8600 (ERT

will respond)

• <1 pint of unknown chemical OR >1 pint o Call Security 513-437-8600 (ERT will respond)

54 © MMIII Bongarde Holdings Inc.

CHEMICAL SPILLS – Potential Scenarios

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Work Alone Policy • A “Buddy” is required when working with highly hazardous

materials (e.g., TMAH, HF, pyrophorics) or on high hazard equipment

• Buddies should help each other in case of exposure/emergency o Help victim to emergency shower/eye wash o Call the emergency number

• Supervisor will determine when a “Buddy” is needed.

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Additional Safety Training Based upon your duties, you may need additional training such as: • Arsenic Awareness Training (III-V materials) • Radiation safety • Laser safety • Compressed gas cylinder handling • LOTO/Electrical Safety • Fall protection • Respiratory protection • Others…. See CNSE intranet site EHS Training for more information. Contact CNSEEHS@sunycnse.com to register for safety courses.

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EHS Intranet Homepage

To register user name and password:

Login to http://intranet.sunycnse.com/

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If you have any questions, contact CNSE EHS at CNSEEHS@sunycnse.com