Charge Multiplication - a Solution towards Radiation-Hard ... · a Solution towards Radiation...
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Charge Multiplication -
a Solution towards Radiation-Hard
Silicon Detectors
Joumlrn Lange University of Hamburg
Erice 2406 - 03072013
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 2
Results of my PhD thesis
Differential Top-Quark-Pair Cross Sections
Standard-model precision measurement
See poster
Radiation-Hard Silicon Detectors
RampD for high-luminosity upgrade of LHC (~2022)
This talk (fitting to Erice 2013 title bdquoNext Steps for LHCldquo)
Introduction
Design
RampD
Construction Commissioning
Calibration Running Particle-Phys
Analysis
EPJ C73 (2013) 2339 arXiv12112220
pTtop
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 3
The Future ndash High Luminosity LHC
Upgrade LHC HL-LHC (2022)
Instant luminosity 1034 cm-2s-1 5-10 x 1034 cm-2s-1
Int luminosity 500 fb-1 3000 fb-1
Fluence Feq(r=4cm) 3 x 1015 cm-2 ~ 1016 cm-2
Severe radiation damage of tracker (Si pixel and strip) expected
Tracker - heart of the experiments
pT charge ID vertexing for PU mitigation and b-tagging
Key ingredients of every particle-physics analysis
Needs to survive radiation-hard detectors
Higher occupancy Higher pile-up Higher radiation
Innermost pixel layer
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 4
Basics of Si Detectors
Signal-to-Noise Ratio (SNR) figure of merit Determines detection efficiency and resolution (for non-binary hit reco)
ADeffNNN
p+ implant
n-type bulk
with effective doping concentration depletion width and full depletion voltage Udep
electric field distribution
Reverse-biased p+-n diode depleted space-charge region = sensitive detector volume
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 5
Radiation Damage
Degradation of signal-to-noise ratio
Most limiting factor at HL-LHC fluences
Higher noise
Higher leakage current
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 6
Charge Multiplication ndash a Solution towards Radiation Hardness
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 2
Results of my PhD thesis
Differential Top-Quark-Pair Cross Sections
Standard-model precision measurement
See poster
Radiation-Hard Silicon Detectors
RampD for high-luminosity upgrade of LHC (~2022)
This talk (fitting to Erice 2013 title bdquoNext Steps for LHCldquo)
Introduction
Design
RampD
Construction Commissioning
Calibration Running Particle-Phys
Analysis
EPJ C73 (2013) 2339 arXiv12112220
pTtop
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 3
The Future ndash High Luminosity LHC
Upgrade LHC HL-LHC (2022)
Instant luminosity 1034 cm-2s-1 5-10 x 1034 cm-2s-1
Int luminosity 500 fb-1 3000 fb-1
Fluence Feq(r=4cm) 3 x 1015 cm-2 ~ 1016 cm-2
Severe radiation damage of tracker (Si pixel and strip) expected
Tracker - heart of the experiments
pT charge ID vertexing for PU mitigation and b-tagging
Key ingredients of every particle-physics analysis
Needs to survive radiation-hard detectors
Higher occupancy Higher pile-up Higher radiation
Innermost pixel layer
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 4
Basics of Si Detectors
Signal-to-Noise Ratio (SNR) figure of merit Determines detection efficiency and resolution (for non-binary hit reco)
ADeffNNN
p+ implant
n-type bulk
with effective doping concentration depletion width and full depletion voltage Udep
electric field distribution
Reverse-biased p+-n diode depleted space-charge region = sensitive detector volume
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 5
Radiation Damage
Degradation of signal-to-noise ratio
Most limiting factor at HL-LHC fluences
Higher noise
Higher leakage current
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 6
Charge Multiplication ndash a Solution towards Radiation Hardness
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 3
The Future ndash High Luminosity LHC
Upgrade LHC HL-LHC (2022)
Instant luminosity 1034 cm-2s-1 5-10 x 1034 cm-2s-1
Int luminosity 500 fb-1 3000 fb-1
Fluence Feq(r=4cm) 3 x 1015 cm-2 ~ 1016 cm-2
Severe radiation damage of tracker (Si pixel and strip) expected
Tracker - heart of the experiments
pT charge ID vertexing for PU mitigation and b-tagging
Key ingredients of every particle-physics analysis
Needs to survive radiation-hard detectors
Higher occupancy Higher pile-up Higher radiation
Innermost pixel layer
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 4
Basics of Si Detectors
Signal-to-Noise Ratio (SNR) figure of merit Determines detection efficiency and resolution (for non-binary hit reco)
ADeffNNN
p+ implant
n-type bulk
with effective doping concentration depletion width and full depletion voltage Udep
electric field distribution
Reverse-biased p+-n diode depleted space-charge region = sensitive detector volume
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 5
Radiation Damage
Degradation of signal-to-noise ratio
Most limiting factor at HL-LHC fluences
Higher noise
Higher leakage current
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 6
Charge Multiplication ndash a Solution towards Radiation Hardness
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 4
Basics of Si Detectors
Signal-to-Noise Ratio (SNR) figure of merit Determines detection efficiency and resolution (for non-binary hit reco)
ADeffNNN
p+ implant
n-type bulk
with effective doping concentration depletion width and full depletion voltage Udep
electric field distribution
Reverse-biased p+-n diode depleted space-charge region = sensitive detector volume
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 5
Radiation Damage
Degradation of signal-to-noise ratio
Most limiting factor at HL-LHC fluences
Higher noise
Higher leakage current
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 6
Charge Multiplication ndash a Solution towards Radiation Hardness
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 5
Radiation Damage
Degradation of signal-to-noise ratio
Most limiting factor at HL-LHC fluences
Higher noise
Higher leakage current
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 6
Charge Multiplication ndash a Solution towards Radiation Hardness
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 6
Charge Multiplication ndash a Solution towards Radiation Hardness
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 7
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 8
Charge Multiplication ndash a Solution towards Radiation Hardness
CCEgt1 Charge multiplication (CM) trapping overcompensated
In EPI diodes strip detectors
CM well-known in gas APD SiPM - But novel effect in irradiated Si tracking sensors
Does radiation damage heal itself Can CM be used for HL-LHC detectors
Are there detrimental side effects (higher noise instability)
Detailed understanding of the formation and properties of CM in irradiated sensors needed
before irradiation
Signal loss (trapping)
Charge-Collection Efficiency
deposited
measured
Q
QCCE
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 9
Investigated Devices
Epitaxial (EPI) Si on thick insensitive substrate
Thin 75 100 150 microm (cf 300 microm now)
High oxygen concentration
24 GeV proton irradiation (CERN PS) to Feq=1016 cm-2
relevant for HL-LHC innermost pixel layer
25 mm or 5 mm
Pad Diodes Unsegmented test structures
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 10
Experimental Methods
Charge Collection for Different Radiation
Radiation creates free charge carriers
670 830 1060 nm laser
aparticles (58 MeV 244Cm source)
b particles (90Sr source MIP-like)
Their drift induces signal current
Measure collected charge
Charge Collection Efficiency
by normalising to unirradiated diode CCE = QQ0
dttIQ )(
n p+
Laserab -
+
n+
El field
Setup for diodes
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 11
Charge Multiplication and Electric Field
Impact ionisation (avalanche)
Needs high electric field
At low fields only e multiplication
1016 cm-2 high Neff (Udep=750 V)
Unirradiated low Neff (Udep=150 V)
0 n p+ n+ d
U = 900 V dEdx ~ Neff
ae 1016 cm-2
ah 1016 cm-2
Diode
Ionisation coefficient
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 12
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 13
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 14
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 15
Localisation of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
0
|E|
CM
e h
h e
670 nm
1060 nm
n p+ n+
d
all e multiplied
only small fraction multiplied
670 nm
1060 nm
830 nm
a particles
a Particles + 12 microm absorber
a Particles + 24 microm absorber
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 16
Uniformity
x-y-scan with focussed 660 nm laser very uniform
Stability
Repeated measurements over days stable in time
Properties of Charge Multiplication
x
y
Example 800V
Proportionality
Proportional mode (not Geiger mode)
700 V
500 V
300 V
900 V
EPI-ST 75 microm 1016 cm-2
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 17
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Depends on thickness and oxygen
concentration
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 18
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 19
Noise
1
MshotshotFM
1
MIMI
1
MMQQ
before irradiation
Nois
e [
e]
U [V]
excess noise factor (stat fluctuations in multiplication)
Pad Diodes
Strong noise increase already at low voltages (6 ndash 50 ke at 600 V) Depends on device (materialgeometry) operation conditions and setup
From pad diodes to pixels smaller area ApixelApad ~ 11700
lower current (I A)
lower shot
(naively by factor 140
130 ndash 300 e at 600 V
excluding two highest)
keeping readout threshold (2 ndash 3 ke)
seems possible
has to be studied with real
pixels and readout chip
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 20
Conclusions
Properties of charge multiplication in proton-irradiated EPI diodes investigated
Thin CM region at the front side
Proportional uniform stable
High signals at HL-LHC fluences possible
Impact on noise and SNR depends on conditions (readout device operation)
Outlook
Can noise increase be controlled or tolerated in segmented detectors
Charge multiplication hot topic
Numerous studies on classical irradiated devices
New research field tracking devices with enhanced CM junction engineering thin ultrafast Si detectors low-gain avalanche detectors low-resistivity 3D detectors
More research needs to be done Promising prospects for radiation-hard Si detectors
NIM A 622 (2010) 49 NIM A 624 (2010) 405 PoS Vertex 2010 025
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 21
THANK YOU
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 22
BACKUP SLIDES
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 23
CMS Detector
2-Layer Trigger Level 1 + HLT reduces data rate 4020 MHz 100-300 Hz
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 24
Fluence vs Radius
S Muumlller PhD thesis
Mainly charged hadrons at inner radii (mostly 100-500 MeV pions eq ~ to 800 MeV p)
Mainly neutrons backscattered from calo at outer layers
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 25
Signal Formation
Ramo-Shockley Theorem (general)
Ramo-Shockley Theorem (pad)
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 26
Noise and CM
Chynoweth parametrisation
Gain for electron injection at 0
Noise contributions
Excess Noise Factor
(e injection)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 27
Radiation Damage
before irradiation shallow donors
after irradiation + (deep) defects
EC
EV
ED EC
EV
ED
Etr
A Junkes
Minimum energy transferred to Si atom needed for a) Frenkel-Pair (Interstitial-Vacancy) 25 eV b) Cluster 5 keV
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 28
Idea Damage of different particles and energies can be compared using energy going into displacement damage
Displacement-damage cross section
Fluence typically scaled to equivalent fluence of mono-chromatic neutrons of 1 MeV with same NIEL
NIEL
Prob for generation of PKA with recoil energy ER by particle with E
Lindhardt partition function portion of energy for displacement damage
Sum over all possible reactions
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 29
Trapping
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 30
Depletion Voltage (from CV at 10 kHz)rlm
Annealing curve
Stable Damage
CVIV measurable up to 4x1015 cm-2
at room temperature
Annealing curve at 80degC (isothermal) no type inversion
Stable Damage (8 min at 80degC) first donor removal then donor introduction with gC(DO)gtgC(ST)rlm
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 31
Depletion Voltagerlm
Pintilie et al NIM A 611 (2009) 52
ST FZ EPI-DO
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 32
TCT Setup (Hamburg)
Laser repetition rate 50 Hz (Multi-channel TCT scan 1 kHz spot size 20 microm)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 33
CCE 670 nm laser (Different Fluences)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 34
Localisation
of the CM Region
Smaller penetration depth stronger CM
Thin CM region located at the front side
Pen
etra
tion
dep
th
)dx (E(x))exp(M
d
x 0
e
a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 35
CCE Dependence on Annealing
In the CM regime
Maximum of CCE at 8 min
CCE annealing curve shows the same
behaviour as the one of Udep Neff
higher Neff higher Emax higher CM
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 36
CCE Dependence on Temperature
In the CM regime
Decreases with decreasing temperature
Opposite naive expectation due to T dependence of ionisation coefficient
Change of laser light absorption length not a large effect
Does electric field change with T (eg less current) -gt see simulation of field
Simulation E Verbitskaya
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 37
MIP-like b particles
Charge-sensitive preamplifier (Ortec 142B)
+ shaper (25 ns shaping time)
Scintillator
high-purity trigger
signals with SNRlt1 measurable
T ~ -29degC
~5000 signals recorded with oscilloscope
Most Probable Value (MPV) not
determinable for highly-irradiated diodes (Landau-Gauss fit failed due to high noise)
Mean still determinable for low
Signal-to-Noise Ratio (SNR)
Collected Charge with 90Sr Beta Setup (Ljubljana)
Oscilloscope
G Kramberger
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 38
n-EPI-ST 150 microm unirr 333 V
90Sr Beta Setup
(Ljubljana)
MPV
Mean
37 MBq source Sr-gtY half life 29 a Emax=05 MeV Y half life 29 d Emax=23 MeV Triggered only on high-energetic part (30-50 Hz) Calibrated with Am241 595 keV gamma
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 39
Collected Charge with 90Sr b-Setup
At least 2500 single waveforms taken
Most Probable Value (MPV) determined by Landau-
Gauss fit to spectrum
not possible for highly-irradiated diodes due to noise
Mean determined by averaging waveforms also for
low Signal-to-Noise Ratio (SNR) possible
well-defined without truncations
MPVMean 075 ndash 085
Trapping + CM at high fluences and voltages
Unirradiated diodes
Collected charge proportional to thickness
Slightly higher than MPVPDG=73 e-hmicrom
residual difference MIP - b
Noise 2000-3300 e (pad diodes) depending
on size thickness
80 e-hmicrom
97 e-hmicrom
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 40
Mean Charge for Different Fluences
Charge multiplication at high fluences
and voltages
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 41
MPV Charge for Different Fluences
Landau-Gauss fit to spectrum not
possible at high voltages (too high
noise)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 42
Charge for Different Materials
and Thicknesses at Highest Fluence
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
due to higher E-field and weighting
field in thin diodes
less trapping effects more CM
Q(DO)ltQ(ST) below the CM regime
Q(DO)gtQ(ST) in the CM regime
due to higher donor introduction
rate in DO
smaller depleted region at low
voltages higher Emaxhigher CM
For all materialsthicknesses
Mean gt 9 ke (~ MPV gt 7 ke)
possible at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke )
at 600 V
670 nm laser
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 43
Collected Charge for b particles at 1016 cm-2
Q0 (75 microm)
Q0 (100 microm)
Q(75microm)gtQ(100microm)gtQ(150microm)
higher E EW in thin diodes
less trapping effects more CM
Q(DO)gtQ(ST) in the CM regime
higher donor introduction rate in DO
higher Emax higher CM
For all materialsthicknesses after HL-LHC
target fluence for innermost pixel layer
Mean gt 9 ke (~ MPV gt 7 ke) at high voltages
Mean 5 - 8 ke (~ MPV 4 ndash 6 ke ) at 600 V
~ 2x readout threshold of
current pixel detectors (2 ndash 3 ke)
|E|
ST
Neff (DO) gt Neff (ST)
x
DO
x
|E| 75 microm
150 microm d
EW
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 44
Current and Noise
CM expected to increase signal current and noise
Current and noise increase strongly
Larger for thinner diodes
Larger for DO
Same material and thickness dependence as signal
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
1
MMQQ
b-setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 45
Current and Noise
Noise not proportional to sqrt(I)
but approximately to I
-gt no bdquoclassicalldquo but multiplied shot noise
22
noiseshotnoise)M(
1
MshotshotFM
1
MIMI
Much flatter
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 46
TCT Noise at 1016 cm-2
22)(noiseshottotal
M
1
MshotshotFM
1
MIMI
1
MMQQ
TCT
Higher intrinsic noise lsquonoise
Increase only for Ugt650 V
Nois
e [
e]
before irradiation
EPI-ST 75 microm 1016 cm-2
670 nm
1060 nm
U [V]
Depends on setup device and operation excess noise factor
EPI-ST 75 microm 1016 cm-2 Q0 = 18x106 e
670 nm
1060 nm
TCT
SNR continuously improves
900 V
900 V
22
1
)(noiseshot
M
total M
MQQSNR
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 47
Width of Charge Spectrum
Fluctuations due to CM might increase
spectrum width
Statistical fluctuations in CM process
Fluctuations in amount of Q deposited in CM region
Laser no fluctuations in CM process
a particles varying Q deposition in CM region
b particles no signif increase (but high noise)
22
noisemeasspsp
EPI-ST 100 microm
EPI-ST 75 microm
b setup
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 48
Width of Charge Spectrum
unirr
CCE1
Fluctuations due to CM might increase
spectrum width
No significant increase of noise-corrected
relative width with voltage
no significant impact of CM fluctuations
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 49
Charge Multiplication in Segmented Sensors
I Mandić NIM A 603 (2009) 263 M Koumlhler NIM A 659 (2011) 272
n-in-p strips 3D
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 50
Joumlrn Lange ndash Charge Collection in Si detectors 50
10 June 2009 Wildbad Kreuth
TCT electron signals (n-type)
a) measured Imeas b) trapping-corrected Icorr=Imeasexp((t-t0)teff)
Measurements
30min at 80degC anneal
performed at 20degC
670nm laser (front)
e-signal in n-type
No type inversion
(confirms conclusions from
annealing curve)rlm
Double Junction
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 51
Charge Correction Method
Idea Charge in unirradiated diode does not depend on voltage (always full charge) Correct until voltage-independent Q(U) curve found (slope 0) Assumption teff= const (same for all depths and U)
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 52
Results from
Charge Correction Method
Relies on trapping correction
of time-resolved TCT signal
(670nm)
Icorr = Imeasexp((t-t0)teff)
Also in Epi
If assumed to be constant at
each fluence trapping
probability found to be
fluence-proportional
Damage parameter b
similar values as in FZ
Determination of teff
cfrlmGKrambergerlsquosrlmPhDrlmthesis
n-type
be [10-16 cm2ns-1]
p-type
bh [10-16 cm2ns-1]
EPI-ST 53 plusmn 04 74 plusmn 09
EPI-DO 45 plusmn 05
EPI comb 50 plusmn 03 74 plusmn 09
cf FZ 51 65
eqhe
heeff
Fbt
1
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a
Joumlrn Lange Erice 2013 Charge Multiplication in Highly-Irradiated Si Sensors 53
Comparison Simulation Measured data
Simulation with const teff underestimates measured data (even if vdr=vsat assumed everywhere vdr(E)- and E(x) model uncertainties are not the reason)
Possible Reasons avalanche effects (only at high U F) field-enhanced detrapping non-const teff (variable cross section non-const occupation eg due to trap filling at high Irev)
First try voltage-dependent teff good fits possible cf LBeattie NIM A 421 (1999) 502
n-type a