chap3

56
Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. Kamins Copyright © 2003 John Wiley & Sons. Inc. All rights reserved. These excess carriers can be created by Optical excitatio n Photolumi nescence Electron bombardmen t Cathodolum inescence Electrol uminesce nce due to current- a forward biased ‘pn’ junction

Transcript of chap3

Page 1: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

These excess carriers can be created by

Optical excitation

Photoluminescence

Electron bombardment

Cathodoluminescence

Electroluminescence due to current-a forward biased ‘pn’ junction

Page 2: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

OPTICAL ABSORPTION

* Good technique for measurement of band gap of a material

•Two possible cases arise when light of some particular wave length is shone on a sample.

hν ≥ Eg hν < Eg

Will be abosrbed in SC

Will be transmitted through SC.

Page 3: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Photon of energy Eg

a c

b

Eg

Ec

Ev

OPTICAL ABSORPTION ( Contd.)

Page 4: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

If a beam of photons with h > Eg falls on a semiconductor, then a predictable amount of absorption is going to occur.

Ratio of transmitted light to incident light will depend on

 1. Photon wavelength

2. Thickness of sample

OPTICAL ABSORPTION ( Contd.)

Page 5: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—4Band gaps of some common semiconductors relative to the optical spectrum.

Page 6: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—6Excitation and band-to-band recombination leading to photoluminescence.

Page 7: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

OPTICAL ABSORPTION ( Contd.)

E = hC / λ

= 1.24 / λ

Page 8: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Steady state ( Contd.)

Thus the excess carrier densities for electrons and holes under steady illumination will be given as :

δn = gop n

δp = gop p

Page 9: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Quasi Fermi levels

* Quasi Fermi levels are indicators of relative occupancy of bands, under conditions, when excess carriers are present

* There are separate Quasi Fermi levels for electrons and holes represented by Fn and Fp respectively.

Page 10: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Quasi Fermi levels ( Contd.)

The positions of Quasi Fermi levels relative to the position of intrinsic Fermi level are given by following two equations :

n = ni e (Fn – E

i) / kT

p = ni e (Ei – F

p) / kT

Page 11: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

In summary When excess carriers are present, the deviations of Fn and Fp from Ef indicate how far the electron and hole populations are from the equilibrium values no and po.

The separation of Quasi Fermi levels Fn – Fp is a direct measure of the deviation from equilibrium

( At equilibrium Fn = Fp = Ef).

Quasi Fermi levels ( Contd.)

Page 12: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Problem : Suppose that in a sample 1013 EHP / cm3 are created optically every microsecond in a silicon sample with n0 = 1014 / cm3 and n = p = 2 micro seconds.

(a)Calculate the steady state excess electron ( or hole ) concentration.

(b)Find out the percentage change in the concentration of electrons and holes as a result of induction of these excess carriers.

(c) Find the position of Quasi Fermi levels for electrons and holes w.r.t intrinsic level. Show these levels with the help of an energy band diagram.

Page 13: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—11Quasi-Fermi levels Fn and Fp for a Si sample with n0 = 1014 cm23, tp = 2 ms, and gop = 1019 EHP/cm3-s (Example 4–4).

Page 14: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—12Spreading of a pulse of electrons by diffusion.

Diffusion Process

Page 15: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—13An arbitrary electron concentration gradient in one dimension: (a) division of n(x) into segments of length equal to a mean free path for the electrons; (b) expanded view of two of the segments centered at x0.

Page 16: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—14Drift and diffusion directions for electrons and holes in a carrier gradient and an electric field. Particle flow directions are indicated by dashed arrows, and the resulting currents are indicated by solid arrows.

Page 17: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 4—15Energy band diagram of a semiconductor in an electric field %(x).

Page 18: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.2 (p. 142)(a) Allowed electronic-energy states g(E) for an ideal metal. The states indicated by cross-hatching are occupied. Note the Fermi level Ef1 immersed in the continuum of allowed states. (b) Allowed electronic-energy states g(E) for a semiconductor. The Fermi level Ef2 is at an intermediate energy between that of the conduction-band edge and that of the valence-band edge.

Page 19: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.3 (p. 142)Pertinent energy levels for the metal gold and the semiconductor silicon. Only the work function is given for the metal, whereas the semiconductor is described by the work function qΦs, the electron affinity qXs, and the band gap (Ec – Ev).

Page 20: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.4 (p. 144)(a) Idealized equilibrium band diagram (energy versus distance) for a metal-semiconductor rectifying contact (Schottky barrier). The physical junction is at x = 0. (b) Charge at an idealized metal-semiconductor junction. The negative charge is approximately a delta function at the metal surface. The positive charge consists entirely of ionized donors (here assumed constant in space) in the depletion approximation. (c) Field at an idealized metal-semiconductor junction.

Page 21: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.5 (p. 146)Idealized band diagrams (energy versus distance) at a metal-semiconductor junction (a) under applied forward bias (Va > 0) and (b) under applied reverse bias (Va < 0). The semiconductor is taken as the reference (voltage ground) as shown in (c). The vacuum levels for the two cases are not shown.

Page 22: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Many of the properties of pn junctions can be realized by forming a suitable Metal – Semiconductor contact ( Schottky Contact).

-Simple to fabricate

-Switching speed is much higher.

Metal Semiconductor junctions are also used as Ohmic contact to carry current into and out of the semiconductor device.

M S Junctions

Page 23: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Vacuum level EO refers to energy of free electrons . Difference between Fermi level EF and Vacuum level is called work function φ of materials.

Work function φm is an invariant property of metal. Is the minimum amount of energy required to free up electrons ( 3.66 eV for Mg and 5.15 eV for Ni. )

Some definitions

M S Junctions

Page 24: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Ideal MS Contacts : Assumptions

M and S are in intimate contact, on atomic scale

No oxides or charges at the interface.

M S Junctions

Page 25: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

When negative charges are brought near the metal surface, positive (image charges) are induced in the metal.

When this image force is combined with an applied electric field, the effective work function is somewhat reduced.

This barrier lowering is called the Schottky effect.

Some facts

M S Junctions

Page 26: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Four different cases arise

M – n SC

Φ M > φS

M – n SC

Φ M < φS M – p SC

Φ M > φS

M – p SC

Φ M < φS

M S Junctions

Page 27: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

The band-bending, and thus the depletion region, lies entirely within the semiconductor as the metal cannot be depleted. Also that although the currents are described as diffusion currents, the physical situation is very different to that in a semiconductor and so the usual diffusion equations (in particular the Einstein relations) cannot be used.

M S Junctions

Page 28: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

M S JunctionsMetal - n SC ( φ m > φ SC )

Page 29: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

M S JunctionsMetal - p SC ( φ m < φ SC )

Page 30: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

M S JunctionsAppreciation of rectifying contacts

Page 31: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

General condition to ensure an Ohmic Contact

Contacts must provide minimal resistance. Extremely easy flow of carriers. That is least expected from a Contact.

M S Junctions

Page 32: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

M S Junctions

Page 33: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.6 (p. 147)Plot of 1/C2 versus applied voltage for an ideal metal-semiconductor junction.

Page 34: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.7 (p. 148)Schematic representation of space charge at a metal-semiconductor junction with nonuniform doping in the semiconductor.

Page 35: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Example: Schottky Barrier Diode (p. 149)

Page 36: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Example: Schottky Barrier Diode (cont., p. 150)

Page 37: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.8 (p. 151)Classical energy diagram for a free electron near a plane metal surface at thermal equilibrium [E1(x)], and with an applied field –ξ [E2(x)].

Page 38: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.9 (p. 154)(a) Band diagram of a rectifying metal-semiconductor junction under forward bias. The applied voltage Va displaces the Fermi levels: qVa = Efs – Efm. (b) The potential across the surface depletion layer is decreased to Φi – Va.

Page 39: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.10 (p. 156)Measured values of current (plotted on a logarithmic scale) versus voltage for an aluminum-silicon Schottky barrier. Values for Is = JśA and n are obtained from an empirical fit of the data to Equation 3.3.17.

Page 40: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.11 (p. 157) Electron-energy diagram for a Mott barrier (near-insulating region at the surface with a sharp transition at x = xd to a highly conducting region). The solid line indicates thermal equilibrium; the dotted line, a forward bias of Va volts with the metal held at ground potential. (b) Potential diagram for the Mott barrier.

Page 41: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.12 (p. 159)Metal-semiconductor barrier with a thin space-charge region through which electrons can tunnel. (a) Tunneling from metal to semiconductor. (b) Tunneling from semiconductor to metal.

Page 42: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.13a (p. 160)(a) An idealized equilibrium energy diagram for a Schottky ohmic contact between a metal and an n-type semiconductor.

Page 43: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.13b (p. 160)(b) Charge at an ideal Schottky ohmic contact. A delta function of positive charge at the metal surface couples to a distributed excess-electron density n’(x) in the semiconductor.

Page 44: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.13b (p. 160)(c) Field.

Page 45: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.13c (p. 160)(d) Potential at an idealized Schottky ohmic contact. The Debye length LD is a characteristic measure of the extent of the charge and field.

Page 46: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.14 (p. 162) Bonding diagram for a silicon crystal near its surface (straight lines indicate coupled pairs of bonding electrons). The bonds at a clean semiconductor surface are anistropic and, consequently, the allowed energy levels differ from those in the bulk.

Page 47: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.15 (p. 163)Approximate distribution of Tamm-Schockley states in the diamond lattice [8]. The distribution appears to peak sharply at an energy roughly one-third of the bandgap above Ev.

Page 48: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.16 (p. 164)Band structure near a metal-semiconductor contact according to the model of Cowley and Sze [9]. The model considers a thin interfacial layer of thickness that sustains a voltage Δ at equilibrium. Acceptor-type surface states distributed in energy are assumed to be described by a distribution function Ds states cm-2 eV-1.

Page 49: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.17 (p. 165)Band diagram for a semiconductor surface showing a thin surface layer containing acceptor-type surface sates distributed in energy. A surface-depletion region is present because of charge in the surface states.

Page 50: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.18 (p. 167)Schottky-barrier-gate, field-effect transistor. Current ID flowing from drain to source is modulated by gate voltage VG that controls the dimensions of the depletion region. This, in turn, modulates the cross-sectional conducting area for ID. The source and drain contacts are ohmic because they are made to highly doped material.

Page 51: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.19 (p. 167)Special processing techniques improve the performance of Schottky diodes shown here in cross section. (a) The diffused p-type guard ring leads to a uniform electric field and eliminates breakdown at the junction edges and corners. (b) The metal field plate is an alternative means for achieving the same effect.

Page 52: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.20 (p. 168)Linear plot of current versus voltage for a Schottky diode illustrating the concept of a diode “turn-on voltage.”

Page 53: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure 3.21 (p. 170) Diagrams for ideal metal-semiconductor Schottky diodes.

Page 54: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure P3.2 (p. 171)

Page 55: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure P3.2 (cont., p. 172)

Page 56: chap3

Device Electronics for Integrated Circuits, 3/E by Richard S. Muller and Theodore I. KaminsCopyright © 2003 John Wiley & Sons. Inc. All rights reserved.

Figure P3.4 (p. 172)