C08: Effect of on-chip magnetic shielding for TES microcalorimeters
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C08: Effect of on-chip magnetic shieldi C08: Effect of on-chip magnetic shieldi ng for ng for TES microcalorimeters TES microcalorimeters Y. Ishisaki, H. Kurabayashi, A. Hoshin o, T. Ohashi, T. Yoshino 2) , T. Hagihara 2) , K. Mitsu da 2) , , K. Tanaka 3) Department of Physics, Tokyo Metropolitan Univ. 2) ISAS/JAXA, 3) SII Nano-Technology 350 µm SII-182 a b SiNx membrane Al Nb Ti/Au Au Abs. b a ross Section Si SiO 2 membrane On-chip Mag shield Current TES calorimeter TES calorimeter needs a magnetic needs a magnetic shield shield to work stably. to work stably.
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Cross Section. Au Abs. a. b. Ti / Au. Nb. SiO 2 membrane. Al. SiNx membrane. Si. C08: Effect of on-chip magnetic shielding for TES microcalorimeters. SII-182. a. TES calorimeter needs a magnetic shield to work stably. 350 µm. b. - PowerPoint PPT Presentation
Transcript of C08: Effect of on-chip magnetic shielding for TES microcalorimeters
C08: Effect of on-chip magnetic shielding for C08: Effect of on-chip magnetic shielding for TES microcalorimetersTES microcalorimeters
Y. Ishisaki, H. Kurabayashi, A. Hoshino, T. Ohashi,
T. Yoshino 2), T. Hagihara 2), K. Mitsuda 2),,
K. Tanaka 3)
Department of Physics, Tokyo Metropolitan Univ.
2) ISAS/JAXA, 3) SII Nano-Technology
350 µm
SII-182
a
b
SiNx membraneAl
Nb Ti/Au
Au Abs.ba
Cross Section
Si
SiO2 membrane
On-chip Mag shieldCurrent
TES calorimeter needs TES calorimeter needs a magnetic shielda magnetic shieldto work stably.to work stably.
300T
0T
6T0T
26T
300T
100T
SII-14b
SII-182
SII-14b(no shield)
SII-182On-chip shield