BELLOWS VALVES Microelectronics Product Line · PDF fileBELLOWS VALVES Catalog 4506/USA...

BELLOWS VALVES

Catalog 4506/USAOctober 2003

Microelectronics Product Line

table of contents

Veriflo Division . . . . . . . . . . . . . . . . . . . 1

P Series Manual Bellows . . . . . . . . 2 - 3

P Series Toggle Bellows . . . . . . . . . 4 - 5

P Series Pneumatic Bellows . . . . . . 6 - 7

P Series High Pressure Bellows . . . 8 - 9

Parker Hannifin Corporation . . . . . . . . 10

Catalog 4506/USAOctober 2003

Parker Hannifin CorporationVeriflo Division250 Canal BoulevardRichmond, CA 94804-0034Telephone 510.235.9590Fax 510.232.7396http://www.veriflo.com

BELLOWSVALVESMicroelectronics Product Line

11 • B E L L O W S VA LV E S

eriflo Division, Parker Hannifin Corporation is a leading manu-

facturer of precision valves,regulators and surface mountcomponents for the controland application of liquids andgases used in the fabricationof semiconductors, as well asin the chemical andpetrochemical industries.

Veriflo has maintained industryleadership over the past 95years through innovativeengineering, manufacturingand by placing a premium onquality customer care.

The division maintains twostate-of-the-art Class 10 CleanRooms at its Richmond, CA,facility and has adopted acorporate wide "LeanManufacturing" philosophy,which is delivering greatervalue to the customer byeliminating wasteful stepsthrough continuous improve-ment activities.

Veriflo Division's two manufac-turing facilities develop andmanufacture applications forthe Semiconductor/High Purityand Instrument/Analyzerindustries.

With the focus of maintainingthe highest industry standards,

Veriflo Division has achievedan ISO 9001 registration atboth its Richmond, CAmanufacturing plant and atits Carson City, NV facility. Thiscertification confirms Veriflo'scommitment to quality andexcellence as recognized bythe international community.

The Instrumentation Group ofParker Hannifin specializes inhigh quality, critical flow com-ponents for world-wide processinstrumentation, ultra-high-purity, medical, analyticaland biopharmaceuticalapplications.

Parker’s Instrumentation Grouphas ten manufacturing plantsand over 300 authorizeddistributor locations aroundthe world to provide localinventory and technicalsupport. Key markets for theInstrumentation Group include:Chemical Process, PowerGeneration, Oil and GasExploration, SemiconductorManufacturing, Biomedical,and Analytical Equipment.

Note: For further information onVeriflo Division and or its productline visit the division web site atwww.veriflo.com. For moreinformation on Parker HannifinCorporation visit the corporation’sweb site at www.parker.com.

VERIFLO DIVISION

V

A Leading ManufacturerOf Precision Valves,

Regulators & SurfaceMount Components

Maintained IndustryLeadership By Placing A

Premium On QualityCustomer Care

P Series Manual Manual Bellows Valve

featuresBottom or Panel mountable.

Minimal PCTFE to reduce outgassing and moisture absorption.

Electropolish surface finishes available at 10 Ra; GP finishes at 20 Ra.

▼▼

▼

Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series manual bellows valve.These valves are multi-purpose packlessexternally pressurized bellows valves thatmay be used in a wide variety of gas orliquid systems.

The P Series manual bellows valve offersclean, reliable operation at full systempressures in either flow direction.

▼▼ materials of construction

WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat. . . . . . . . . . . . PCTFE, Vespel®, Stainless SteelGasket . . . . . . . . . Teflon® Coated Stainless Steel,. . . . . . . . . . . . . . . Nickel with Stainless Steel seat

Non-wettedHandle . . . . . . . . . . . . . . . . . . . . . . . . . . Nylon6/6Bonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel

operating conditionsPressure Rating . . . . . . . . . . . . . . . . . . Vacuum to . . . . . . . . . . . . . . . . . . . . . . . 1250 psig (86.9 barg)Temperature:PCTFE . . . . . . -150°F to 300°F (-101°C to 148.9°C)Vespel® . . . . . -150°F to 400°F (-101°C to 204.4°C)Stainless Steel . -150°F to 600°F (-101°C to 316°C)

surface finishes20 Ra . . . . . . . . . . for A, W or Z type connections10 Ra. . . . . . . . . . . . . . . . . . . . . . . Electropolished

functional performanceFlow Capacity . . . . . . . . . . . . . . . . . . . . see chart

Design Leak Rateacross the seat. . . . . . . . . . . . . 4 x 10-9 cc/sec He

internal volume0.09 in3 (1.55 cm3)

▼▼

▼

B E L L O W S VA LV E S • 22

Dimensional Drawings

Ordering Information

P Series Manual

4 V P4 K SSV PE

INLET & OUTLETCONNECTION SIZE4 = 1/4"6 = 3/8"8 = 1/2"

Teflon® and Vespel® are registered trademarks of DuPont Company.A-LOK® is a registered trademark of Parker Hannifin Corporation.CPI™ is a trademark of Parker Hannifin Corporation.

- - -

INLET & OUTLETCONNECTION TYPEV1* = Female VacuSeal™V* = Male VacuSeal™VH* = Male VacuSeal™ SwivelBW = Tube StubT3 = Tube Stub (3" Long)W = Socket WeldA = A-LOK®

Z = CPI™

BASIC SERIESP4, P6, P8 = Inline PatternP4A = Angle PatternPT4 = Toggle Inline PatternPT4A = Toggle Angle Pattern

SURFACE FINISH = 20 Ra (Only Available for A, W or Z Type Connections)

PE = 10 Ra Electropolish

MATERIALSSV = 316L Stainless Steel VeriClean

STEM TIP MATERIALK = PCTFEVE = Vespel®

R = Stainless Steel**

* Only available in P4 and P8 versions.** P6R & P8R standard with Tee Handle.

3.60(91.4 mm)OPEN:

3.52(89.4 mm)CLOSED:

2.31(58.7 mm)

.56(14.2 mm)

1/4 FS-MOUTLET

1/4 FS-MINLET

Ø1.81(46 mm)

Ø1.00(25.4 mm)

45˚

(2X 10 - 32 UNF - 2B)


ValveSeries

Orifice

P4P4P4

.156

.156

.156

1050100

5.1214.1525.09

Maximum FlowCoefficient, Cv

Cv = .37

Water GPM @@ 70˚F (21˚C)

Pressure DropTo Atmospher

(∆P)

Air SCFM@ 70˚F (21˚C)

P4AP4AP4A

P6P6P6

P8P8P8

.281

.281

.281

.156

.156

.156

.312

.312

.312

Cv = .45

Cv = .73

Cv = .80

1050100

1050100

1050100

6.2317.2120.52

10.1027.9249.50

11.0730.6054.25

1.172.623.70

1.423.184.50

2.315.167.30

2.535.668.00

All Metal Stem Tips (R Stem)

ValveSeries

Orifice

P4P4P4

.156

.156

.156

1050100

5.2614.5425.77


Cv = .38



(∆P)


P4AP4AP4A

P6P6P6

P8P8P8

.281

.281

.281

.156

.156

.156

.312

.312

.312

Cv = .47

Cv = .87

Cv = .93

1050100

1050100

1050100

6.5017.9831.87

12.0433.2859.00

12.8735.5763.07

1.202.693.80

1.493.324.70

2.756.158.70

2.946.589.30

Soft Seat Stem Tips (K & VE)


P Series Toggle Toggle LeverBellows Valve

features

Bottom or Panel mountable.


Electropolish surface finishes available at10 Ra; GP finishes at 20 Ra.

▼▼

▼

Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series toggle bellows valve.These valves provide a quick open andclose operation with positive stem retractionin valve sizes 1/4” thru 1/2” tube.

These externally pressurized bellows valveswill operate in vacuum to 150 psig at 70°Fto handle shut-off control for toxic, ultra-pure, pyrophoric and corrosive media invacuum or pressurized systems.

▼▼

▼ materials of construction

WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PCTFEGasket . . . . . . . . . Teflon® Coated Stainless Steel

Non-wettedHandle. . . . . . . . . . . . . . . . . . . . . . . . . . . Nylon6/6Pin . . . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel

operating conditionsPressure Rating . . . . . . . . . . . . . . . . . . Vacuum to . . . . . . . . . . . . . . . . . . . . . . . . 150 psig (10.3 barg)Temperature:PCTFE . . . . . . -150°F to 300°F (-101°C to 148.9°C)





▼▼



P Series Toggle

4 V PT4 K SSV PE



- - -


Z = CPI™

BASIC SERIESPT4 = Toggle PatternPT4A = Toggle Angle PatternPT6 = Toggle PatternPT8 = Toggle Pattern

SURFACE FINISH= 20 Ra (Only Available for A, W or Z Type Connections)



STEM TIP MATERIALK = PCTFE

* Only available in PT4 and PT8 versions.

2.60(66 mm)

4.20(106.7 mm)

2.31(58.7 mm)

.56(14.2 mm)

1/4 FS-MOUTLET

1/4 FS-MINLET

Ø1.00(25.4 mm)

45˚

(2X 10 - 32 UNF - 2B)


ValveSeries

Orifice

PT4PT4PT4

.156

.156

.156

1050100

5.2614.5425.77


Cv = .38



(∆P)


PT4APT4APT4A

PT6PT6PT6

PT8PT8PT8

.281

.281

.281

.156

.156

.156

.312

.312

.312

Cv = .47

Cv = .87

Cv = .93

1050100

1050100

1050100

6.5017.9831.87

12.0433.2859.00

12.8735.5763.07

1.202.693.80

1.493.324.70

2.756.158.70

2.946.589.30

Soft Seat Stem Tips (K)


P Series Pneumatic PneumaticActuated

Bellows Valve

features

Bottom mountable.



12AC has compact design - 1-1/4” diameter.

360° rotation of actuator for easy installation.

Stem guide out of flow path.

▼▼

▼▼

Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series Pneumatic Actuatedbellows valve.

The P Series bellows valve offers a 360°rotation of the air inlet port for postionpurposes and ease of use. The P Seriesbellows valve provides clean, reliableoperation at full system pressures.

▼▼


WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat . . . . . . . . . . . . . . . . . . . . . . . . PCTFE, Vespel®

Gasket . . . . . . . . . Teflon® Coated Stainless Steel

Non-wettedActuator Body . . . . . . . . . . . . . . . Aluminum 6061Bonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel

operating conditionsPressure ratings:Normally Closed (11AC, 12AC). . . . . . . . . . . . . . . . Vacuum to 200 psig(14 barg)

Normally Open (11AO, 12AO). . . . . . . . . . . . . . . . Vacuum to 600 psig(41 barg)

Double Acting (11AD, 12AD). . . . . . . . . . . . . . . . Vacuum to 700 psig(48 barg)

Temperature:PCTFE . . . . . . -150°F to 300°F (-101°C to 148.9°C)Vespel® . . . . . -150°F to 400°F (-101°C to 204.4°C)





▼▼

▼▼



P Series Pneumatic

4 V P4 K SSV PE


- - -


Z = CPI™

BASIC SERIESP4, P6, P8 = Incline PatternP4A = Angle Pattern



ACTUATOR11AC, 12AC = Air Operated, Normally Closed11AO, 12AO = Air Operated, Normally Open11AD, 12AD = Air Operated, Double ActingNote: Series 12 Actuator is a compact design at1-1/4" diameter.



12AC

* Only available in P4and P8 versions.


-

3.19(81 mm)

2.31(58.7 mm)

.56(14.2 mm)

1/4 FS-MOUTLET

1/4 FS-MINLET

Ø1.25(31.6 mm)

Ø1.00(25.4 mm)

45˚

(2X 10 - 32 UNF - 2B)

10-32 UNF-2B

Ø1.00(25.4 mm)

45˚

(2X 10 - 32 UNF - 2B)

2.31(58.7 mm)

1/4 FS-MOUTLET

1/4 FS-MINLET

.56(14.2 mm)

3.28(83.3 mm)

Ø1.87(47.5 mm)

1/8-27 NPTF

12 AC 11 AC


ValveSeries

Orifice

PT4PT4PT4

.156

.156

.156

1050100

5.2614.5425.77


Cv = .38



(∆P)


PT4APT4APT4A

PT6PT6PT6

PT8PT8PT8

.281

.281

.281

.156

.156

.156

.312

.312

.312

Cv = .47

Cv = .87

Cv = .93

1050100

1050100

1050100

6.5017.9831.87

12.0433.2859.00

12.8735.5763.07

1.202.693.80

1.493.324.70

2.756.158.70

2.946.589.30

Soft Seat Stem Tips (K)


P Series HP High PressureBellows Valve

features

Bottom mountable.



Remote actuation.

▼▼

▼▼

Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series HP Pneumatic bellowsvalve. These valves are multi-purpose pack-less externally pressurized bellows valvesthat may be used in a wide variety of highpressure gas or liquid systems.

The P Series HP Pneumatic bellows valveprovides clean, reliable operation at fullsystem pressures in either flow direction.

▼▼


WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat . . . . . . . . . . . . . . . . . . . . . . . . PCTFE, Vespel®

Gasket . . . . . . . . . Teflon® Coated Stainless Steel

Non-wettedActuator Body . . . . . . . . . . . . . . . Aluminum 6061Bonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel

operating conditionsPressure rating. . . . . . . . . . . . . . . . . . . Vacuum to . . . . . . . . . . . . . . . . . . . . . . . 3500 psig (241 barg)

Temperature:PCTFE . . . . . . . . . . . . . . . . . . . . . . -150°F to 150°F. . . . . . . . . . . . . . . . . . . . . . . . . . (-101°C to 66°C)

Vespel® . . . . . . . . . . . . . . . . . . . . . -150°F to 400°F. . . . . . . . . . . . . . . . . . . . . . . . (-101°C to 204.4°C)


functional performanceFlow Capacity . . . . . . . . . . . . . . . . . . . . . CV = .33


internal volume.22 in3 (.56 cm3)

▼▼



P Series HP

4 V1 HP4 K SSV PE

INLET & OUTLETCONNECTION SIZE4 = 1/4"

- - -

INLET & OUTLETCONNECTION TYPEV1 = Female VacuSeal™V = Male VacuSeal™VH = Male VacuSeal™ SwivelBW = Tube StubW = Socket WeldA = A-LOK®

Z = CPI™

BASIC SERIESHP4 = Inline Pattern



ACTUATOR14AC = Air Operated, Normally Closed14AO = Air Operated, Normally Open



14AC -


3.44(87.4 mm)

2.78(70.6 mm)

.44(11.2 mm)

1/4 FS-FOUTLET

1/4 FS-FINLET

Ø2.12(53.8 mm)

Ø1.00(25.4 mm)

45˚

(2X 10 - 32 UNF - 2B)

1.39(35.3 mm)

1/8-27NPT



Parker’s CharterTo be a leading worldwide manufacturer of compo-nents and systems for the builders and users of durablegoods. More specifically, we will design, market andmanufacture products controlling motion, flow andpressure. We will achieve profitable growth throughpremier customer service.

Product InformationNorth American customers seeking product infor-mation, the location of a nearby distributor, or repairservices will receive prompt attention by calling theParker Product Information Center at our toll-freenumber: 1-800-C-PARKER (1-800-272-7537). In Europe,call 00800-C-PARKER-H (00800-2727-5374).

The Fluid ConnectorsGroup designs, manufacturesand markets rigid and flexibleconnectors, and associatedproducts used in pneumaticand fluid systems.

The Hydraulics Groupdesigns, produces and marketsa full spectrum of hydrauliccomponents and systems tobuilders and users of industrialand mobile machinery andequipment.

The Automation Groupis a leading supplier of pneu-matic and electromechanicalcomponents and systems toautomation customers world-wide.

The Seal Group designs,manufactures and distributesindustrial and commercialsealing devices and relatedproducts by providingsuperior quality and totalcustomer satisfaction.

The Filtration Groupdesigns, manufactures andmarkets quality filtration andclarification products, provid-ing customers with the bestvalue, quality, technical sup-port, and global availability.

The InstrumentationGroup is a global leader inthe design, manufacture anddistribution of high-qualitycritical flow components forworldwide process instrumen-tation, ultra-high-purity, medi-cal and analytical applications.

About Parker Hannifin CorporationParker Hannifin is a leading global motion-controlcompany dedicated to delivering premier customerservice. A Fortune 500 corporation listed on the NewYork Stock Exchange (PH), our components and sys-tems comprise over 1,400 product lines that controlmotion in some 1,000 industrial and aerospace mar-kets. Parker is the only manufacturer to offer itscustomers a choice of hydraulic, pneumatic, andelectromechanical motion-control solutions. OurCompany has the largest distribution network in itsfield, with over 7,500 distributors serving nearly400,000 customers worldwide.

Instrumentation

Parker Hannifin Corporation6035 Parkland Blvd.Cleveland, Ohio 44124-4141Telephone: (216) 896-3000Fax: (216) 896-4000www.parker.com

Parker Hannifin Corporation

The Aerospace Group isa leader in the development,design, manufacture and ser-vicing of control systems andcomponents for aerospace andrelated high-technology mar-kets, while achieving growththrough premier customerservice.

The Climate & IndustrialControls Group designs,manufactures and markets sys-tem-control and fluid-handlingcomponents and systems torefrigeration, air-conditioningand industrial customersworldwide.

Catalog: 4506LitPN: 25000180Revision: A • 10/03

Parker Hannifin CorporationVeriflo Division250 Canal BoulevardRichmond, CA 94804-0034Telephone 510.235.9590Fax 510.232.7396Web site: http://www.veriflo.com

BELLOWS VALVES Microelectronics Product Line · PDF fileBELLOWS VALVES Catalog 4506/USA...

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