Beco Catalog

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YOUR ONE STOP OUT-SOURCING SOURCE

BECO can solve all of your out-sourcing requirements

because:

BECO is NOT just a valve company!

BECO has for over FIVE (5) years been providing the following Out-Sourcedservices for OEMs and End Users:

Fluid Control ProductsStandard and Custom Valves, fittings, Pumps, Flow Meters, Spray Guns

Custom MachiningAir Cylinders, Linear Actuators, Machine Components and Substrate Carries

Custom Plastic FabricationTanks, Covers, Cabinets, Enclosures, Ducts, Plenums, Housings

Assembly ServicePlumbing, Electrical, Mechanical

Complete Turn-Key ProductsSmall Manually Operated Wet Stations, Filtration Systems, Testing Stations

CUSTOM OUTSOURCING SERVICES

23361 Peralta DriveLaguna Hills, CA 92653Ph:99.458.3731 Fax: 949.458.2787www.becomfg.com - [email protected]

www.becomfg.com

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ASSEMBLY SERVICE

BEC O ha s been a ssembling our own fluid control

products. We a re plea sed to a nnounce tha t we

a re now performing tha t sa me service for ma ny

customers tha t ha ve determined tha t O ut

Sourcing with BEC O is a via ble wa y of reducing

cost a nd reducing interna l work-loa d.

W hether your needs a re prototype or high

volume BEC O ca n help. We put together sma ll

electromecha nica l suba ssemblies or complete

ma chines constructed of welded or bolted

together components a nd tha t require ha rd

(welded) a nd soft plumbing, electrica l a nd

electronic control systems with or without software.

BEC O ha s a ssembly fa cilities tha t will fit a ny

requirements/ specifica tions including cla ss 10

clea n-room a rea s.

BEC O ’s skilled engineering sta ff will be plea sed

to help you with the development of any assembly

tha t you require. We opera te on A utoC A D, ProE

a nd SolidWorks electronic pla tforms.

If your assembly requirements are small and simple

or large and complex BECO can show the value of:

Out Sourcing with BECO

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PLASTIC FABRICATION

• PLASTIC FABRICATION FOR ALL APPLICATIONS

• FULL MACHINE SHOP WITH CNC CAPABILITIES

• LARGE FACILITY FOR WELDING, ROUTING,AND CUTTING

• 15 YEARS EXPERIENCE

• ENGINEERING SUPPORT – CAD/PRO-E/SOLID WORKS

• IN HOUSE DESIGN OR BUILD TO CUSTOMERS SPECIFICATIONS

• PLATING TANKS

• SEMICONDUCTOR INDUSTRY: TANKS, BENCHES, PLENUMS, GLOVEBOXES, ETC.

• OUR STOCK INCLUDES PVDF, HALAR, ACRYLIC, TEFLON, POLYPROPYLENE,FIRE RETARDENT POLYPRO, POLYCARBONATE, AND PVC

3

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PLASTIC FABRICATION

BECO MANUFACTURING CO. INC.23361 Peralta DriveLaguna Hills, CA 92653Phone: 949-458-3731 • Fax: 949-458-2787www.becomfg.com • [email protected]

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CUSTOM MACHINING SERVICEIn addititon to the high quality “turn_Key” productsand components that BECO can provide you withCustom Machining Services for any of your plasticpiece part requirements.

BECO’s state-of-the-art machine shop is the perfectsolution for your prototype, low volume or high vol-ume, high tolerance plastic part needs.

We hav all types of CNC and manual machiningequipment to ensure there is no part that we can’tmanufacture.

To prevent ion and lubricant contamination wereserve our machinng to plastic and only plastic.We do not machine metal.

If you are looking for assistance with assembliesthat are comprised of both plastic and metal com-ponents we will be pleased to outsource the metalparts and assemble them with the BECO machinedplastic parts to provide you with the assemby(s)you require.

We have been machinng plstic for our fluid controlproducts for almost 15 years. We ahve experiencemachining almost every kind of plastic available.

BECO’s engineering staff can help you with thedevelopment of your plastic parts, components,subassemblies, assemblies, or complete productson AutoCAD, ProE, or SolidWorks electronic pla-torms.

Give BECO Sales a call or send us your drawingfor a quotation. Let us show you the value of

OUT SOURCING with BECO

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Pneumatic ValvesPneumatic Valves

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MTV-TEFLON PNEUMATIC DIAPHRAGM VALVES

• ALL TEFLON WETTED SURFACE

• LIGHTWEIGHT COMPACT VALVE

• POLYPROPYLENE ACTUATOR

• AVAILABLE IN 2-WAY AND 3-WAY CONFIGURATION

Specifications2-Way 3-Way

Vacuum 1 Micron 1 MicronInlet Port (common) 40 psi 40 psi

Media Outlet Port 20 psi N/APressure NO Port N/A N/A

NC Port N/A 20 psiActuator Pressure 40-60 psi 40-60 psiMedia Temperature -50 to +100°C -50 to +100°CAmbient Temperature -50 to + 100°C -50 to + 100°C

1/16” Orifice .03 .03

1/8” Orifice .18 .18

1/4” Orifice .75 .75

3/8” Orifice 2.00 2.00{Cv

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BECO Manufacturing Co., Inc.23361 Peralta DriveLaguna Hills, CA 92653Phone: 949-458-3731 • Fax: 949-458-2787www.becomfg.com • [email protected]

Ordering Format

MTV - A B C D E - FA=PORT SIZE C=VALVE CONFIGURATION E=BODY SHAPE

2=1/8" 2C=2-Way Normally Closed R=Round4=1/4" 2O=2-Way Normally Open S=Square(Mandatory for6=3/8" 3W=3-Way Tube Ends and Long Flare)

B=ORIFICE SIZE D=PORT SELECTION F=VALVE SEAT2=1/8" F=Female Pipe Thread T=Teflon4=1/4" T=Tube End V=Viton6=3/8" LF=Long Flare K=Kalrez

MTVS - A B C D E - FA=PORT SIZE C=VALVE CONFIGURATION E=BODY SHAPE

1=1/16" 2C=2-Way Normally Closed R=Round2=1/4-28 2O=2-Way Normally Open S=Square3=1/8” 3W=3-Way F=VALVE SEAT4=10-32 D=PORT SELECTION T=Teflon

B=Orifice Size F=Female Pipe Thread V=Viton1=1/16” M=Male Pipe Thread K=Kalrez

10-32 UNF-2B

1/4-28 UNF-2BTYP

2-56 STUDFOR MOUNTING

2 PLACES

1.66 (N.O., 3W)1.48 (N.C.)

10-32 UNF-2B

1/16 TUBE1/8 TUBE


2 PLACES

1.00 DIA

1.66 (N.O., 3W)1.48 (N.C.)

1/8 FNPTPNEUMATIC

PORT

1/8 FNPTPNEUMATIC

PORT

4-40 STUDPNEUMATIC

PORT

1.75 DIA

3.10 (N.O., 3W)2.85 (N.C.)

1/8 FNPTPNEUMATIC

PORT

3.10 (N.O., 3W)2.85 (N.C.)

1/8 FNPT OR1/4 FNPT


2 PLACES

.495 SQ

1.00 DIA

.495 SQ

.875 SQ.800 SQ

1.12 SQ1.88 DIA

.800 SQ

1/16 " ORIFICESUB-MINIATURE - MTVS 1/8", 1/4", AND 3/8" ORIFICE


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CORROSION RESISTANT VALVESCorrosion Resistant (CR) Valves offercorrosion control through a completefluoroplastic design and construction. Thewetted surface is manufactured from virginTeflon® while the pneumatic side isconstructed from PVC. This is a large flowvalve capable of handling tough chemicalsinternally while operating in severe externalenvironments.

Size 1/4" Orifice 1/2" Orifice 3/4" Orifice 1" Orifice 1 1/2" OrificeCv 0.8 2.8 7.5 13.5 30.0

Flow Rate (GPM @ 60 psi) 4.6 10.7 23 42 94Max Pressure

Inlet Port-psi 60 60 60 60 60Outlet Port-psi 60 50 22 20 10

Actuator Pressure-min/max 40-60 40-60 50-70 50/70 40/60Max Media Temperature 240º 240º 240º 240º 240ºFMax Ambient Temperature 140º 140º 140º 140º 140ºFPneumatic Actuator Spring Return Spring Return Spring Return Spring Return Spring ReturnWetted Surfaces Teflon Teflon Teflon Teflon TeflonPneumatic Surfaces PVC PVC PVC PVC PVCActuator Port 10-32 1/8"FNPT 1/8"FNPT 1/8"FNPT 1/8"FNPTInlet Port 1/4"FNPT 1/2"FNPT 3/4"FNPT 1"FNPT 1 1/2"FNPTOutlet Port 1/4"FNPT or Tube 1/2"FNPT or Tube 3/4"FNPT or Tube 1"FNPT or Tube 1 1/2"FNPT or Tube

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Port 3 Port 2 Port 1

Inlet

CORROSION RESISTANT VALVES


Size A B C D E F G H I J K1/4" 3.00 3.00 3.20 1.50 1.50 3.00 4.50 0.75 1.27 0.75 1.501/2" 3.77 4.10 3.95 1.75 1.81 3.56 5.37 0.88 1.38 0.88 2.443/4" 5.75 5.75 5.88 2.75 2.81 5.56 8.37 1.38 2.25 1.38 3.501" 5.75 5.75 5.88 2.75 2.81 5.56 8.37 1.38 2.25 1.38 3.501.5" 6.75 n/a n/a 3.50 n/a n/a n/a 1.75 2.48 1.75 4.50

Ordering Flow ChartCR – 2W, 3W or 4W + 4, 8, 12, 16, or 24 + P or T, LF + C or O + C or O

Ordering FormatCR – 4W 8 P O C C

Long Flare

3"

Tube EndPipe

C

G

A B

D

FH

E

Inlet Port

1/8 NPT (NO)Air To Close

(1/4" and 1/2") 1/8 NPTAir To Close(1" and 1 1/2")

1/8 NPTAir To Open

K

I

J OutletPort

CorrosionResistant Valve

Configuration2W = 2 Way3W = 3 Way4W = 4 Way

Orifice Size4 = 1/4"8 = 1/2"

12 = 3/4"16 = 1"

24 = 1 1/2"

Port ConnectionP = Specify FNPT or MNPT

T = TubeLF = Long Flare

Port 1 (C = Closed or O = Open)



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DRAIN VALVESThe BECO “DV” series is a large orifice valvecapable of handling large volumes of corrosivefluids via an all non-metallic wetted surface. Forcost efficiency this valve is fabricated from PVCor Polypropylene. However, it is available inPVDF, with Kalrez O-rings.

This valve is also available in 2, 3 and 4 wayconfigurations with each port operating indepen-dently. The “DV” can be operated either by air toopen/air to close or by spring return. Either oper-ating method can be specified in the orderingformat. Custom configurations available.

Specifications

ApplicationsPrimarily used for quick draining and filling ofprocess tanks which contain mild solutions or DIwater. For hard to handle media the “DV” valve,machined from PVDF, is the perfect solution.

Media Pressure 20 psi

Media Temperature

PVC 140 F /60 C

Polypropylene 160 F /70 C

PVDF 212 F /100 C

Actuation Pressure 45-60 psi

O-Ring Material Ethylene Propylene (standard)

Viton or Kalrez / Chemraz

o

o

o

o o

o

OR

OR OR

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Media O-Ring TypeEP = Ethylene Propylene

VT = VitonKA = Kalrez /Chemraz


Ordering Format

DV PVC 16 C EP2

Drain Valve ValveConfiguration2 = 2 Way3 = 3 Way4 = 4 Way

Material of ConstructionPVC = Polyvinyl Chloride

POL = PolypropylenePVDF = Polyvinylidene Fluoride

PortingConfiguration

C = Spring to Close, Air to OpenO = Spring to Open, Air to CloseA = Air to open, Air to Close

Orifice Size

12 = 3/4”16 = 1”24 = 11/2”

32 = 2”

1/8 FNPT

J FNPT

H

Port (to open valve)

OR OR

4-Way Example: COA = (C= Port 1/ O= Port 2/ A= Port 3(Shown Top Left)

Custon Configurations Available

Orifice K FNPT L FNPT M FNPTSize A B C D E F G H Dia J FNPT Port 1 Port 2 Port 33/4" 2.16 2.56 3.50 6.07 8.63 1.79 5.50 4.00 3/4" 3/4" 3/4" 3/4"1" 2.16 2.56 3.50 6.07 8.63 1.79 5.50 4.00 1" 1" 1" 1"

1.5" 2.81 3.00 4.38 7.38 10.38 1.97 6.06 4.00 1.5" 1.5" 1.5" 1.5"2" 3.00 3.50 4.81 8.31 11.81 2.28 6.88 5.00 2" 2" 2" 2"

M L KAB

F

D(3-Way)

C(2-Way)

E(4-Way)

Inlet Port(common)

1/8 FNPT 1/8 FNPT

J FNPT

H

G

Actuation Port (to close valve) Actuation Port (to open valve)

DRAIN VALVES

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DILUTION DRAIN VALVESThe BECO Dilution Drain Valve is ideal forcooling and diluting solutions while draining.The valve is designed to shut off the drainautomatically if the water flow is interrupted.The DDV fits tanks with 1/2” and 3/4” maindrain hook-up. Standard dilution ratios are2:1 and 6:1.

Other dilution rates are available at an addi-tional charge.

Note: Higher dilution rates will cause slow-er drain rates.

Specifications

Water Pressure 30 - 60 psi

Media Temperature 150 C max

Ambient Temperature 100 C max

o

o

ApplicationsUsed to drain a tank while diluting and cool-ing the discharge.

Water InDiluted Chemical Out

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DDV 08 V T02

Dilution Ration02 = 2:1 (std)06 = 6:1 (std)

10 = 10:120 = 20:1

Main Drain Port08 = 1/2” FNPT12 = 3/4” FNPT

Body MaterialT = TeflonP = PVDF

O-Ring TypeV = VitonK = Kalrez

Ordering Format

5.25

1.75 Main Drain Port

2.00 Dia

1/2" FNPT Outlet

3/8 " FNPT Inlet

1.62

2.12

Dilution Drain Valve

OR

OR OR

DILUTION DRAIN VALVES

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INLINE DIAPHRAGM VALVESFeatures all Teflon® wetted pathdiaphragm design for ultra pure use as aDI water valve or acid drain valve. The IDFvalve can significantly reduce bacteriabuildup and maintain a consistent flow viaan independent mechanism. This controlmechanism will allow for preciseadjustments and a cleaner cavity. The IDFvalve is presently offered in a two-wayclosed configuration. The anti-bacteriaconfiguration can be designatedby adding –AB onto the suffix of themodel number.

Size 1/2" 3/4"Cv 2.8 7.5Max. Pressure (psi)

Inlet Port 60 60Outlet Port 60 60

Actuator Pressure (min./max.) 60/80 60/60Max. Media Temperature 300˚F 300˚FMax.Ambient Temperature 140˚F 140˚FWetted Surfaces Teflon® Teflon®

Pneumatic Surfaces Polypropylene PolypropyleneInlet Port 1/2" 3/4"Outlet Port 1/2" 3/4"Actuator Port 1/8" 1/8"Anti-Bacteria Valve Stem Option Polyvinylidene - Fluoride Polyvinylidene - FluorideAdjustable Bleed By Option 0 - .75 GPM 0 – 2.5 GPM

Specifications

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INLINE DIAPHRAGM VALVES


Size A B C D E F G1/2" 3.38 1.00 2.75 1.75 2.25 1.125 1.2753/4" 4.50 1.25 3.25 2.30 2.80 1.225 1.625

Ordering FormatIDF – 103233 – 001 – AB

InlineDiaphragm

Valve

Port/OrificeSize

103233 = 1/2”103188 = 3/4”

Anti-Bacteria(option)

EndConnection001 = FNPT002 = Tube

003 = Longflare (Tube)

B

A

D

MTG. HOLES.201 DIA.

E

F

G

ACTUATOR

C

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MULTI PURPOSE VALVESThe BECO MP Valve Body is manufactured in Teflon, PVC, Polypropylene, or PVDF depending onthe individual application. The Teflon configuration isideal for anti-corrosion and elevated temperatureapplications as well as making an excellent acid drainvalve. The PVC, Poly, and PVDF configurations are thechoice for wet bench manufacturers and semiconductorfacilities where ultra pure DI Water is required.

SpecificationsSize 1/2" Orifice 3/4" Orifice 1" Orifice

Cv 2.8 7.5 13.5

Max Pressure

Inlet Port-psi 75 60 60

Outlet Port-psi 45 10 10

Actuator Pressure-psi (min/max) 40/80 40/80 40/80

Max Media Temperature

PVC 140˚ F 120˚ F 120˚ F

Poly 160˚ F 140˚ F 140˚ F

PVDF 212˚ F 175˚ F 175˚ F

Teflon 350˚ F 302˚ F 302˚ F

Max Ambient Temperature

PVC 140˚ F 120˚ F 120˚ F

Poly 160˚ F 140˚ F 140˚ F

PVDF 212˚ F 175˚ F 175˚ F

Teflon 350˚ F 302˚ F 302˚ F

® TEFLON is a registered trademark of The DuPont Corporation

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MULTI PURPOSE VALVES


�

Size Inlet Port Outlet Port A B C D E F

1/2" 1/2" FNPT 1/2" FNPT 3.40 2.75 0.650 1.337 2.345 2.00

3/4" 3/4" FNPT 3/4" FNPT 4.85 4.00 1.000 2.160 3.465 3.00

1" 1" FNPT 1" FNPT 4.85 4.00 1.000 2.160 3.465 3.00

MP PVC 8 P C RC

IndicatesMultipurpose

Valve

Material of ConstructionPVC = Polyvinyl Chloride

POL = PolypropylenePVDF = Polyvinylidene

Fluoride

IndicatesOrifice & Port

Size8 = 1/2"12 = 3/4"16 = 1"

Indicates PortConnection

P = FNPTS = Socket

LF = Longflare(PVC, POLY,and PVDF

only)

IndicatesValve

ConfigurationC = ClosedO = Open

OptionRC = Restricted Closure

RO = Restricted OpeningRB =Restricted BothAB = Anti-Bacteria

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TEFLON PNEUMATIC VALVESFeatures

• One Piece Teflon Body• Optimum Anti-Corrosion Design• Hi-Temp use-Upgraded Materials• Justifies use as DI Water Valve• No Media Contact with Elastomers,• Lube or Spring

Materials of ConstructionBody................... TFE TeflonBellows/Poppet.... TFE TeflonBacking Plate....... TFE TeflonPiston.................. PVDFCap.................... PolypropyleneSpring.................Stainless Steel

Size 1/2" Orifice 3/4" Orifice 1" OrificeCv 2.2 2.8 7.5

Max Pressure2

Port A 75 psi 60 psi 60 psiPort B 45 psi 10 psi 10 psi

Actuator Pressure-psi min/max 40/80 40/80 40/80Max Media Temperature2 350°F 302°F 302°F1. Specifications applicable for both normally open and normally closed configurations2. See Pressure vs. Temperature graph for full range

Specifications

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TEFLON PNEUMATIC VALVES

Type Size Port A Port C D E F G H J(FNPT) (FNPT)

2 Way 1/2" 1/2" 1/2" 3.30 2.50 1.05 2.06 .700 .530 1/4-202 Way 3/4" 3/4" 3/4" 4.50 3.56 1.38 2.69 1.210 .850 1/4-202 Way 1" 1" 1" 4.50 3.56 1.38 2.69 1.210 .850 1/4-203 Way 1/2" 1/2" 1/2" 3.30 4.25 1.05 2.06 .700 .530 1/4-203 Way 3/4" or 1" 3/4" or 1" 3/4" 4.50 6.00 1.38 2.69 1.210 .850 1/4-20

1/8" FNPT

E F

PORT B

PORT A

G TYPJ (TAPPED HOLE FOR MOUNTING)

H

D

C

80

70

60

50

40

30

20

10

0100 200 300 350 400

TEMPERATURE ºF1/2" ORIFICE

PR

ES

SU

RE

(P

SIG

)

AB OPTION

.563 DIA.

≈ .800 CLOSED≈ .900 OPEN

80

70

60

50

40

30

20

10

0100 200 300 350 400

TEMPERATURE ºF3/4" & 1" ORIFICE

PR

ES

SU

RE

(P

SIG

)

PRESSURE VS. TEMPERATURE

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ANTI-BACTERIA TP

This new style of TP Valve can significantly reducebacteria build up and maintain a consistant flow viaan independent mechanism. This control mecha-nism will allow for more precise adjustments and acleaner cavity. This valve is presently offered only inthe closed model configuration and is designatedby adding -AB onto the suffix of any of our closedTP Valves.

Ordering FormatTP – 2W 8 P – C RC

Teflon Pneumatic

Orifice & Port Size8 = 1/2”

12 = 3/4”16 = 1”

Female PipePort Connection

PortConfigurationC = ClosedO = Open

OptionsRC = Restricted ClosureRO = Restricted Open

AB = Anti-Bacteria

2-Way

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WIDE BODY TP


The BECO Wide Body TP Valve series, like its smaller(2 way) counterpart, is an extremely reliable allTeflon® pneumatic valve. It features the expandabilityof the “CR” line, the benefits of one piece contruction,and the purity and chemical resistance of Teflon.

G (TYP) J (TAPPED HOLE FOR MOUNTING)

H (TYP)

3/4" & 1" ONLY

1.875

D

1/2" ONLY

1.200

C

PORT A

PORT B2 PLACES

1/8" FNPT

E F

Ordering FormatTP – 3W 8 P – 0 C

Teflon Pneumatic 3-Way Orifice &Size

8 = 1/2”12 = 3/4”16 = 1”

FemalePipePort

Connection

Port A (1)ConfigurationC = ClosedO = Open

Port B (2)ConfigurationC = ClosedO = Open

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SUCKBACK VALVESBECO offers two styles of Suckback Valves. Theoriginal Suckback (this page) must be used with othervalving to first shut off the flow. BECO’s latest design(back page) incorporates everything into one valve,and the vacuum is adjustable.

Suckback Valve BECO Suckback Valves are ideal for photoresist dispensing equipment to prevent excess dripping ofthe photoresist solution from dispense nozzles. Whenair pressure is removed from the valve actuator, thediaphragm is pulled up forming a vacuum in the valvebody chamber, thus pulling and sucking the last dropof photoresist. The BECO Suckback Valve features allTeflon® wetted surfaces.

SpecificationsActuator Pressure (min/max) 40/60psi

Max Media Temperature 160˚F/ 70˚C


SBV 2 4 M

ORIFICE SIZEAll Orificesare 1/8”

Ordering Format

SUCKBACK VALVE

PORT SIZE

PORT SIZEM = MNPTF = FNPTT = Tube-CompressionLF = Tube Longflare

2 = 1/8” 4 = 1/4”

TYPE PORT “A” “B”F 1/4” FNPT 2.25M 1/4” MNPT 2.25T 3/8” Tube 2.25LF 3/8” Longflare 3.15

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SUCKBACK VALVES


Suckback Valve #SBV-104168This BECO Suckback Valve, is a normally closedDiaphram Valve. As the air pressure is removed from the valve actuator, a diaphram moves upwardcreating a vacuum. The adjustment knob on top of thevalve allows the amount of vacuum to be controlled,thus controlling the volume of suckback. The BECOSuckback Valve features all Teflon® wetted surfaces.

SpecificationsActuator Pressure (min/max) 40/60psi

Max Media Temperature 160˚F/ 70˚C

SBV 104168 MOrdering Format

SUCKBACK VALVE

PORT SIZEM = MNPTF = FNPTT = Tube-CompressionLF = Tube Longflare

TYPE PORT “A” “B”F 1/4” FNPT 2.745M 1/4” MNPT 2.745T 3/8” Tube 2.745LF 3/8” Longflare 3.625

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WATER VALVESThe BECO Water Valve (WV) is manufacturedfrom industrial plastics such as PVC, Polypropylene, and PVDF. The valve has a springreturn and is pneumatically actuated to open orclose depending upon the model.

The valve is compact and comes with fourtapped holes on the base for ease of mounting.Porting is generally 1/2" or 1" FNTP. Butt weldend configurations are available on the PVDFmodel to eliminate any chance of bacteria build up in the pipe threads.

ApplicationsPrimarily used for DI water in rinse tanks andquick dump applications. Valves of PVC are themost widely used, but for severe applications,polypropylene or PVDF will generally meet therequirements.

SpecificationsSize 1/4" 1/2" 3/4" 1"

Cv 0.8 2.8 7.5 13.5

Max Pressure Inlet 80 psi 80 psi 60 psi 60psi

Max Media Temperature

PVC 140˚F/ 60˚C

Polypropylene 160˚ F/ 70˚ C

PVDF 212˚ F/100˚ C

Actuator Pressure (min/max) 35/70 psi


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WATER VALVES

�

Orifice Size A B C D Dia E Thd F Dia1/4" 1.520 1.000 2.440 2.25 1/4"-20 UNC-2B 1.811/2" 1.690 .955 2.780 2.75 1/4"-20 UNC-2B 2.001/2" 1.146 1.146 2.250 2.75 1/4"-20 UNC-2B 2.003/4" 2.280 1.330 3.660 3.00 1/4"-20 UNC-2B 2.501" 3.825 1.685 4.425 4.00 1/4"-20 UNC-2B 3.44

=Low Profile (in line) water valve

IWC PVC 2C8 EPINLINE (Low Profile) MATERIALS OF VALVE O-RING TYPE

WATER VALVE CONSTRUCTION CONFIGURATION EP = Ethylene PropylenePVC = Polyvinyl Chloride 1/2” 2 Way VT = Viton

POL = Polypropylene Normally Closed KA = KalrezPVDF = Polyvinylidine Fluoride

Options:


WV PVC 8 8 P NC EPWATER VALVE ORIFICE SIZE PORT SIZE

MATERIAL OF CONSTRUCTION

PVC = Polyvinyl ChloridePOL = Polypropylene

PVDF = Polyvinylidine Fluoride

PORT TYPEP = FNPT

LF = Longflare

VALVECONFIGURATION

NC = NormallyClosed

NO = NormallyOpen

O-RINGTYPE

EP = EthylenePropyleneVT = Viton

KA = Kalrez

4 = 1/4” 8 = 1/2”12 = 3/4” 16 = 1”

Ordering Format

Eliminate Bacterial Build-Up: A PVC adjusting screw is installed offCenter at top of valve. Clockwise screw rotation prevents complete Valveclosure thereby allowing a controlled "drip". Ideal for DI Water users. Add "-AST" to suffix of part number. Example: WV-PVC-88NC-EP-AST.

Metering Effect: A PVC Adjusting screw is installed at center of valvebase. Clockwise rotation will decrease orifice opening. Add "-ASB" to suffix of Part number. Example: WV-PVC-88NC-EP-ASB.

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QUICK DUMP

The Quick Dump (QD) Valve is designed to bewelded to the bottom of a tank and allows forquick drainage. This valve is manufactured inpolypropylene, or PVDF stainless steeldepending on the individual application. TheQuick Dump is available with either an O-Ring of domed hardseat design whichprevents ponding and allows for slight trickleaction. The valve is compact and comes withoptional air to open/spring to close or air toopen/air to close configurations.

Specifications 2” 4” 6”Actuator Pressure-psi min/max 60/70 45/70 25/30

Media Temperature

Polypropylene 160˚ F/70˚ C

PVDF 212˚ F/ 100˚ C


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QUICK DUMP

�

P/N A B C D2” 104520 2” 3” 3.0” .78”

104521 2” 3” 3.0” .78”

4” 103809 4” 5” 3.0” .80”103952 4” 5” 3.0” .80”

4”(High Flow) 104602 4” 5” 4.0” 1.5”104683 4” 5” 4.0” 1.5”

6” 103951 6” 7” 6.6” 2.5”104162 6” 7” 6.6” 2.5”

Hard Seat QD 103952 POL 001


O-Ring Seat QD 103809 POL EP 001QUICK DUMP MATERIAL OF CONSTRUCTION

POL = PolypropylenePVDF = Polyvinylidene Fluoride

O-RING TYPEEP = Ethylene PropyleneVT = VitonKA = Kalrez

CONFIGURATION001 = Air Open/ Spring Close002 = Air Open/ Air Close

Ordering Format

BECO PART NUMBER104520 - 2”103809 - 4”104602 - 4“ High Flow103951 - 6”

QUICK DUMP MATERIAL OF CONSTRUCTIONPOL = PolypropylenePVDF = Polyvinylidene Fluoride

CONFIGURATION001 = Air Open/ Spring Close002 = Air Open/ Air Close

BECO PART NUMBER104521 - 2”103952 - 4”104683 - 4“ High Flow104162 - 6”

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TEFLON ASPIRATORS

BECO Aspirators are machine from virgin Teflon, andare designed for efficient and rapid siphoning of hardto handle chemicals. The Air Aspirator, using city or DIWater pressures from10-50 psi or more will effect aspiration of viscous acids such as HF and H2SO4.Both Liquid & Air Aspirators may be ordered individually or in kit form.


Air & Liquid

Air & Liquid Aspirator(Common Dimensions)

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TEFLON ASPIRATORS


How To OrderAir Aspirators

Part No. Description Inlet Port Siphon Port Outlet PortA-A-1866 Air Aspirator 3/8” suction 3/8” FNPT 3/8”FNPT 1/2”FNPTKA-A-1866 Air Aspirator Kit (standard) 3/8” FNPT 3/8”FNPT 1/2”FNPTKA-A-1866-CHK Air Aspirator Kit with Check Valve 3/8” FNPT 3/8”FNPT 1/2”FNPTKA-A-1866 PRO Air Aspirator Kit with Poly Fittings 3/8” FNPT 3/8”FNPT 1/2”FNPTAH-1 Handle, 3/8” Suction N/A N/A N/AA-A-1886 Air Aspirator 1/2” suction 3/8” FNPT 1/2”FNPT 1/2”FNPTKA-A-1886 Air Aspirator Kit (standard) 3/8” FNPT 1/2”FNPT 1/2”FNPTKA-A-1886-CHK Air Aspirator Kit with Check Valve 3/8” FNPT 1/2”FNPT 1/2”FNPTKA-A-1886 PRO Air Aspirator Kit with Poly Fittings 3/8” FNPT 1/2”FNPT 1/2”FNPTAH-2 Handle, 1/2” Suction N/A N/A N/A

Liquid Aspirators

Part No. Description Inlet Port Siphon Port Outlet PortL-A-1866 Liquid Aspirator 3/8” suction 3/8” FNPT 3/8”FNPT 1/2”FNPTKL-A-1866 Liquid Aspirator Kit (standard) 3/8” FNPT 3/8”FNPT 1/2”FNPTKL-A-1866-CHK Liquid Aspirator Kit with Check Valve 3/8” FNPT 3/8”FNPT 1/2”FNPTKL-A-1866 PRO Liquid Aspirator Kit with Poly Fittings 3/8” FNPT 3/8”FNPT 1/2”FNPTAH-1 Handle, 3/8” Suction N/A N/A N/AL-A-1886 Liquid Aspirator 1/2” suction 3/8” FNPT 1/2”FNPT 1/2”FNPTKL-A-1886 Liquid Aspirator Kit (standard) 3/8” FNPT 1/2”FNPT 1/2”FNPTKL-A-1886-CHK Liquid Aspirator Kit with Check Valve 1/2” FNPT 3/8”FNPT 1/2”FNPTKL-A-1886 PRO Liquid Aspirator Kit with Poly Fittings 1/2” FNPT 3/8”FNPT 1/2”FNPTAH-2 Handle, 3/8” Suction N/A N/A N/A

Standard Kits1. Standard Kit includes: Aspirator, Handle, 3 Teflon CompressionFittings mounted to each port and 8’ of Teflon Tubing.2. Check Valve Kit includes: Aspirator, Handle, 2 Teflon CompressionFittings mounted to inlet and outlet ports, a Teflon Check Valve mounted tothe siphon port and 8’ of Teflon Tubing.3. Poly Fitting Kit includes: Aspirator, Handle, I Teflon CompressionFitting mounted to the siphon port, 2 polypropylene compression fittingsmounted to inlet and outlet pods and 8’ of teflon Tubing.Recommendations for Air Aspirator1. Minimum pressure to initiate siphoning - 5psi.2. Suction and flow can be slightly increased by using the A-A-1886model. Further variations of performance can be expected due to viscositychanges in fluids being siphoned.

3. For maximum continuous flow it is best to actuate the Aspirator with 30psi of air for 5-10 seconds then turn off air supply and allow Aspirator towork by siphoning action only.4. When mounting in a hood, it is recommended that the Air Aspirator bemounted approximately 14” below the point of suction.

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TEFLON® CHECK VALVE

Tthe BECO Check Valve features all Teflon® wet-ted surfaces to make this valve inert to corrosives,able to handle varying viscosities and maitainpurity levels. External materials used in addition toTeflon®, are polypropylene, and/ or anodizedaluminum. Custom configurations available.

Specifications

ApplicationsPrevents unwanted fluids from backflowing intoclean process tanks or other plumbing. Ideal forapplications where directional control is a must.

Opening Pressure � 1 psi

Max Operating Pressure 50 psi

Media Temperature 100 º C

Ambient Temperature 50º C

5

1

2 3 4

THROUGH FLOWSTOP FLOW

1. Body2. Nut3. Spring

4. Diffuser5. Poppet

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Nut or Band StyleHA = Halar

TA = Aluminum Banded TFE

BECO MANUFACTURING CO. INC.23361 Pera lta Drive

La guna Hills, C A 92653

Phone: 949-458-3731 • Fa x: 949-458-2787

www.becomfg.com • info@ becomfg.com

Rev. 1/03

Ordering Format

BCV 2 P HA2

Check Valve OrificeSize

2 = 1/8”4 = 1/4”6 = 3/8”8 = 1/2”

Inlet & OultetSize

2 = 1/8”4 = 1/4”6 = 3/8”8 = 1/2”

12 = 3/4”

EndConnectionP = FNPTT = Tube

LF = Longflare

TEFLON® CHECK VALVE

BCV-88 3.13 1.750

Model A* B

BCV-22 2.13 1.250

BCV-44 2.49 1.250

BCV-66 2.75 1.750

* Tube ends slightly longer

A

B Dia

CHECK VALVE OPTIONS:

The BECO Check Valve comes standardwith female pipe. Longflare and com-pression fittings can also be requested.

With BECO, cutom configurations areavailable so you can configure yourpart to exactly what you need

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Solenoid ValvesSolenoid Valves

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TEFLON SOLENOID VALVESBECO Solenoid Valves are offered with 3 differentinternal designs. The all TFE Teflon wetted surface,Teflon with Viton O-Rings or Teflon with KalrezO-Rings. All of our valves are isolated from mediawith long lasting Teflon diaphragms and can beordered in a variety of body shapes, internaldesigns, end connections, flow configurations andvoltages.

Specifications

{

{Type Subminiature Miniature

NC NO 3W NC NO 3WLo Watt Hi Watt Lo Watt Hi Watt Lo Watt Hi Watt

Inlet 2 Way 30 30 30 40 30 40Outlet 2 Way 15 8 15 25 8 8Common 3 Way 30 30 40NC 3 Way 15 15 25NO 3 Way 8 6 8

Media Temperature -50 to +100°CAmbient Temperature -50 to +100°CVacuum – – – 1µ 1µ 1µ

1/16 Orifice .031/8 Orifice – 0.181/4 Orifice – 0.753/8 Orifice – 2.001/2 Orifice – 2.80

Coil Temp 100% Duty Cycle 70°C 35°C 75°C 35°C 75°CVoltage Tolerance ±10%Wattage 5 5-6 10-13 5-6 10-13 5-6 10-13Coil Leads 2 (12” Long) 3 (12” Long) Red/White=Power, Green=Ground

MAXMEDIA

PRESSURE(PSI)

Cv

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TEFLON SOLENOID VALVES

TYPE A B C Port

2 Way NC 1.81 N/A 1/4-282 Way NC 2.191 N/A 1/8 FNPT2 Way NO N/A 2.00 1/4-282 Way NO N/A 2.38 1/8 FNPT3 Way N/A 2.00 1/4-283 Way N/A 2.381 1/8 FNPT

Subminiature Solenoid Valve

1.12 DIA.1.12 DIA.

CA

CB

2-56 MOUNTING STUDS

2-56 MOUNTING STUDS

.500 SQ. .500 SQ.

2 WAY N.C. 2 WAY N.O.3 WAY

Consult factory for custom porting configurations.

Note: All coils are high pot tested.

Ordering FormatS 1 2C 1A F R – V

Indicates Indicates Valve SeatSubminiature V = VitonValve K = KalrezSeries T = Teflon

Indicates IndicatesPort Size Round Body Shape1 = 1/4 -282 = 1/8 FNPT3 = 10 – 32

Indicates Indicates1/16’ Orifice Size Female Port Selection

Indicates Valve Indicates Coil VoltageConfiguration 1A = 115 VAC2C = 2 Way Normally Closed 2A = 230 VAC2O = 2 Way Normally Open 1D = 12 VDC3W = 3 Way 2D = 24 VDC

Order Flow Chart:

S + 1, 2 or 3 + 2C, 2O or 3W + 1A, 2A, 1D or 2D + F + R – V, T or K

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TEFLON SOLENOID VALVESMiniature Solenoid Valve

1/8 - 1/4 ORIFICE 3/8 ORIFICE

3.75

.75

4-40 X .56 LGMOUNTING STUD2 PLACES

2.12

.80 SQ.

1.12 SQ.SQUARE BODY

1.88 DIA.ROUND BODY

1.75 SQ.

2.87

1.50

45º

1.12

4.69

8-32 X .28 DPMOUNTING HOLES

1/2 ORIFICE

4.725

1.000

1.750

2.750

0.201 MOUNTING HOLES

2.2502.750

1.126Ordering FormatM 6 6 2C 1A F S – H T

Indicates Indicates Valve SeatValve Series V = VitonIndicates K = KalrezPort Size T = Teflon2 = 1/8 Indicates Coil Wattage4 = 1/4 H = Hi Watt (10-13 Watts)6 = 3/8 L = Lo Watt (5-6 Watts)8 = 1/2 Indicates Body ShapeIndicates R = RoundOrifice Size S = Square ( Mandatory for2 = 1/8 tube ends and long flare)4 = 1/4 Indicates Port Selection6 = 3/8 F = Female NPT8 = 1/2 T = Tube EndsIndicates Valve LF = LongflareConfiguration Indicates Coil Voltage2C = 2 Way Normally Closed 1A = 115 VAC 1C = 110 VDC2O = 2 Way Normally Open 2A = 230 VAC 1D = 12 VDC3W = 3 Way 3A = 24 VAC 2D = 24 VDC

1B = 115 VDC 5D = 105 VDC40 = 20VDC

Order Flow Chart1/8 OrificeM + 2 or 4 + 2 + 2C, 2O or 3W + 1A, 2A, 3A, 1B, 2B, 1D, 2D or 5D + F, T or LF + R or S – H or l + V, K or T1/4 or 3/8 OrificeM + 4 or 6 + 4 or 6 + 2C, 2O or 3W + 1A, 2A, 3A, 1B, 2B, 1D, 2D or 5D + F, T or LF + R or S – H or l + V, K or T1/2 OrificeM + 8 + 8 + 2C + 1A, 2A, 3A, 1B, 2B, 1D, 2D or 5D + F, T or LF + R or S – H or l + V, K or T

Consult factory for custom porting configurations.

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TEFLON SOLENOID VALVES


High Pressure Solenoid Valves (70psi)

Available with Teflon seat, 1/4 FNPT, and 115 VAC only.

Part Number Description103113-1 2 Way Normally Open103113-2 2 Way Normally Closed103113-3 3 Way (123 configuration unless otherwise specified)

Port Arrangements

All Beco 3 Way Teflon Solenoid Valves my beordered with any of 6 different porting arrange-ments as shown in the following chart.

Unless otherwise specified, 3 Way valves will besupplied in the 132 configuration. To order any ofthe other 5 configurations simply add the appropri-ate three digits after the basic part number selectedform the Ordering Format Chart.

Other Options:

• Valves with special port connections such as com-binations of pipe or tube ends and connectors tomate with spherical and tapered glass joints.

• Extra long wire leads (12" is standard). Orderingmy depend on quantity and delivery lead time.

• Valves without studs or valves with 4 mountingstuds ( 2 are standard).

Example:M223W1AFR-HT-123This part number describes a 3 Way valve identicalto the standard configuration except that the nor-mally open and normally closed ports are reversed.

StandardConfiguration

132 C 123 C 213 NO

231 NC 312 NO 321 NC

NC NO NO NC C NC

NO CNC CC NO

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AIR CYLINDERS

BECO air operated cylinders are frequentlyused where splash-back or fumes from high-ly aggressive chemicals is a prime consider-ation. Often close to corrosive chemicals,these PVC, polypropylene or PVDF cylindersare just right for providing strength, durabil-ity and reliability.

Beco air cylinders are available in strokesfrom 1 – 22 inches and have standard easyto use mounting and optional postition sen-sors. We are also happy to discuss cus-tomizing air cylinders to fit your individualneeds.

ApplicationsRemote pneumatic control for opening andclosing doors, actuating drains, or position-ing moving proccess loads.

SpecificationsCylinder Bore 1.25”

Port Connections 1/8 FNPT

Actuator Pressure Inlet Min. Max

1” – 12” 20 psi 60 psi

13” – 22” 20 psi 50 psi

Ambient Temperature

PVC 140˚ F/60˚ C

Polypropylene 160˚ F/ 70˚ C

PVDF 212˚ F/100˚ C


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POSITION SENSOR OPTIONTo order add -PS to part number.

CLEVIS BRACKET OPTION To order add -CB to part number.

HIGH QUALITY PLASTIC AIR CYLINDER

Plastic Is Better!

Sensor SpecificationsReed Swtich: 120 V/ .03 A/ W max

Sensor has onboard LED indicator.

Beco plastic air cylinders are non-corrosive, durable,lightweight, inexpensive, and have many optionsfrom which to choose. We are also happy to discuss cus-tomizing air cylinders to fit your individual needs. BecoPlastic Air Cylinders are the logical and economicalchoice for your application.

METAL Air Cylinder PLASTIC Ai

r

Cylinder

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AIR CYLINDER ORDERING INFORMATION

1/16" Orifice

Stroke A B C1 " 4 . 1 2 5 3 . 1 2 5 2 . 5 6 52 " 6 . 1 2 5 4 . 1 2 5 3 . 5 6 53 " 8 . 1 2 5 5 . 1 2 5 4 . 5 6 54 " 1 0 . 1 2 5 6 . 1 2 5 5 . 5 6 55 " 1 2 . 3 1 0 7 . 3 1 0 6 . 7 5 06 " 1 4 . 3 1 0 8 . 3 1 0 7 . 7 5 07 " 1 6 . 3 1 0 9 . 3 1 0 8 . 7 5 08 " 1 8 . 3 1 0 1 0 . 3 1 0 9 . 7 5 09 " 2 0 . 3 1 0 1 1 . 3 1 0 1 0 . 7 5 01 0 " 2 2 . 3 1 0 1 2 . 3 1 0 1 1 . 7 5 01 1 " 2 4 . 3 1 0 1 3 . 3 1 0 1 2 . 7 5 01 2 " 2 6 . 3 1 0 1 4 . 3 1 0 1 3 . 7 5 01 3 " 2 8 . 3 1 0 1 5 . 3 1 0 1 4 . 7 5 01 4 " 3 0 . 3 1 0 1 6 . 3 1 0 1 5 . 7 5 01 5 " 3 2 . 3 1 0 1 7 . 3 1 0 1 6 . 7 5 01 6 " 3 4 . 3 1 0 1 8 . 3 1 0 1 7 . 7 5 01 7 " 3 6 . 3 1 0 1 9 . 3 1 0 1 8 . 7 5 01 8 " 3 8 . 3 1 0 2 0 . 3 1 0 1 9 . 7 5 01 9 " 4 0 . 3 1 0 2 1 . 3 1 0 2 0 . 7 5 02 0 " 4 2 . 3 1 0 2 2 . 3 1 0 2 1 . 7 5 02 1 " 4 4 . 3 1 0 2 3 . 3 1 0 2 2 . 7 5 02 2 " 4 6 . 3 1 0 2 4 . 3 1 0 2 3 . 7 5 0

Air Cylinder

Materials ofConstructionPV C = Polyvinyl C hloridePO L = PolypropylenePV DF = Polyvinylidine Fluoride

AC PVC 1.0 EP CB

ORDERING FORMAT

Stroke( In Inches)

O-Ring TypeEP = Ethylene PropyleneV T = VitonK A = K a lrez

Options ( if a pplica ble)C B = C levis Bra cket PS = Position SensorC B-PS = Both O ptions

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P = 20-60 psi

Fe F

e= P A

e

Ae = ~r2r=.625


A1= ~r

12

A2 = ~r

22

P = 20-60 psi

Fr F

r= P A

r

Ar

= A2- A

1

r2=.325

r1=.375

In these equations, F equals thevamountvof force exerted by the pis-

ton depending on the actuationpressure. The Air Cylinder hasavmin/max actuation pressure of

20-60 psi. Fe is thevvariable given

for the force extending the pistonand Fr is the variable given for the

force retracting the piston.

AIR CYLINDER FORMULAS

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Manual ValvesManual Valves

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STOPCOCKS AND METERING VALVES

BECO Stop cocks (plug valves) are precisionmachined valves that function in much thesame way as a ball valve. When the handlepoints in the direction of flow, the valve is fullyopen; when the handle points perpendicular tothe direction of flow, the valve is fully closed;and at the 45 position the valve is halfwayopen and thereby has a metering effect.

BECO Metering Valves use a tapered plug-stem to give a fine adjustment to the flowin addition to a full, open, or positive shutoffpostition.

Media Pressure Vacuum to 60 psiMedia temperature 100 CAmbient temperature 50 CSealing Bubble tightShutoff PositiveAll Wetted Surfaces Virgin Teflon

Specifications Specifications

o

o

o

oR

Stopcocks

oR TEFLON is a registered trademark of The DuPont Corporation

Metering Valves

Media Pressure Vacuum to 40 psiMedia temperature 40 COperation ManualOperating Position AnyAll Wetted Surfaces Virgin TeflonoR

o

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STOPCOCKS AND METERING VALVES


Metering ValvesStraight Angle Flow OrificeThru Flow Pattern SizeMV-22P-A MV-22P-B 1/8" FNPTMV-22T-A MV-22T-B 1/8" TubeMV-24P-A MV-24P-B 1/4" FNPTMV-24T-A MV-24T-B 1/4" TubeMV-34P-A MV-34P-B 1/4" FNPTMV-33T-A MV-33T-B 3/16" TubeMV-34T-A MV-34T-B 1/4" TubeMV-44P-A MV-44P-B 1/4" FNPTMV-44T-A MV-44T-B 1/4" TubeMV-66P-A MV-66P-B 3/8" FNPTMV-66T-A MV-66T-B 3/8" TubeMV-88P-A MV-88P-B 1/2" FNPTMV-88T-A MV-88T-B 1/2" Tube

1/2"

EndConnections

1/8"

3/16"

1/4"

3/8"

Panel mount add - P to part number suffix.Longflare connection add - LF to part number suffix.

Part Orifice Body EndNo. Size Style Connections

SC-400 2-waySC-401 3-waySC-402 4-waySC-403 2-waySC-404 3-waySC-405 4-waySC-409 2-waySC-410 3-waySC-411 4-waySC-412 2-waySC-413 3-waySC-414 4-waySC-500 2-waySC-501 3-waySC-502 4-way

1/8"

1/4"

1/8" FNPT

1/8" Tube

1/4" FNPT

1/4" Tube

1/4" FNPT

Part Orifice Body EndNo. Size Style Connections

SC-503 2-waySC-504 3-waySC-505 4-waySC-600 2-waySC-601 3-waySC-602 4-waySC-609 2-waySC-610 3-waySC-611 4-waySC-700 2-waySC-701 3-waySC-702 4-waySC-709 2-waySC-710 3-waySC-711 4-way

1/2" Tube

3/8"

1/4"

1/2"

1/4" Tube

3/8" FNPT

3/8" Tube

1/2" FNPT

ORDERING FORMAT

Options:

Other handles available.Longflare connection add - LF to part number suffix

Options:

Stopcocks

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PRESSURE RELIEF VALVESFeatures all Teflon and elastomer wetted fluidpath. This relief valve is fully adjustable from 10-90 psi by simply adjusting the upper stainlesssteel screw and locking in place with the stainlesssteel nut.

Applications

Ideal for applications such as pumps, pressurecontainers or other fluid handling componentswhere excess pressure must be relieved to protectthe plumbing system or individual components.

Media Pressure To 90 psiMedia Temperature To 150°CAmbient Temperature To 100°CAdjustment Range 10-90 psi

Specifications

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PRESSURE RELIEF VALVES


Size A B C D E1/4" 2.87 1.75 2.38 1.75 1/4" P1/4" 2.75 1.75 2.38 1.75 1/4" T1/4" 3.75 1.75 2.38 1.75 1/4" LF3/8" 2.87 1.75 2.38 1.75 3/8" P3/8" 2.75 1.75 2.38 1.75 3/8" T3/8" 3.75 1.75 2.38 1.75 3/8" LF1/2" 3.25 1.75 2.56 1.75 1/2" P1/2" 2.87 1.75 2.56 1.75 1/2" T1/2" 3.95 1.75 2.56 1.75 1/2" LF

Ordering FormatRV — 4 — 4 — P — EP

Pressure Relief Orifice End Size End O-RingValve Size 4=1/4” Connection Type

4=1/4” 6=3/8” P=FNPT EP=Ethylene6=3/8” 8=1/2” T=Tube Propylene8=1/2” LF=Longflare KA=Kalrez

VT=Viton

A

E

D

C

END CONNECTION

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Hand SpraysHand Sprays

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TEFLON HAND SPRAYS

Spray Guns (SG)Our spray guns are constructed of Teflon andpolypropylene to provide them with a longer lifespan in harsh acidic or corrosive environments thancomparable sprays on the market. Due to theirdesign and comfortable grip BECO Spray Guns arequickly becoming the industry standard in semicon-ductor fab plants, wet benches and work process-ing stations. All the sprays may be purchased indi-vidually or with a variety of fittings, hoses and O-rings.

Recirculating Spray Gun (RC)The BECO recirculating hand sprays all have mold-ed Teflon bodies with PVDF pistons. This hand sprayis designed so that there is very little dead space forbacteria to grow. DI water is able to circulate up tothe sealing seat through out the entire gun and pis-ton. From the sealing seat on, bacteria build up iskept to a minimum by using a 1/16" thick spray noz-zle.

Dispense Guns (DG)Both of the BECO dispense guns, standard or highflow, are designed with the spring totally isolatedfrom the media, thus making them the perfect choicefor dispensing acids and solvents. The longer noz-zle on the dispense guns allows for them to beinserted into a container thus minimizing splashing.

Nitrogen Sprays (Nitro)Our Teflon Nitrogen spray (Nitro) can deliver maxi-mum anti-corrosion protection wherever extremechemical environments are used in the vicinity ofnitrogen dispensing or dying. Like its companion,the DI Water Spray, Nitro is manufactured of thesame durable materials to resist acid attacks.

Eye Wash (EW)BECO’s Teflon Eye Wash is designed to provideemergency eye/facial rinse. When activated a softflow of aerated water is released. The non-metallicaerator converts harsh city water into a bubblysmooth stream while the Teflon body remains inert toits potentially hostile chemical environment.

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TEFLON HAND SPRAYS

DI SPRAY/ RINSING GUNS(Max. operating pressure 75 psi)

Part No. DescriptionSG-103 Standard spray gun with 1/2" FNPT inlet thread.SG-102 Spray gun with 3/8" FNPT inlet thread.SG-101 Spray gun with 1/4" FNPT inlet thread.SG-100 Spray Gun with 29/32"-16 inlet thread.** NOTE: This style gun has a shallow thread engagement zone, and is highlysusceptible to thread stripping as opposed to the FNPT models, in the event overtightening occurs.

Assemblies Intercon. SourcePart No. Gun Hose Fitting FittingSG-207 SG-103 504 MC-F-68-HA MC-F-68-HASG-206 SG-103 502 J68 J68SG-204 SG-103 101 J108 J108SG-203 SG-103 101 J108 -SG-202 SG-103 100 J88 J88SG-201 SG-103 300 MC-F-88-HA MC-F-88-HASG-200 SG-100 100 SW-10 -

RECIRCULATING SPRAY GUNS(Max. operating pressure 75 psi)

Part No. DescriptionRC-103 Recirculating spray gun with 1/2"

FNPT inlet thread (gun only).

AssembliesPart No. Gun Hose Assy. NotesRC-104 RC-103 RC-1RC-105 RC-103 RC-3RC-106 RC-103 RC-5RC-105330 RC-103 RC-5 With swivel interconnect fitting.

RC-105330 RC-103 RC-5 With swivel interconnect fitting and hook.

2.0

3.9

SG-100, SG-101,SG-102, SG-103

SG-206 SG-204

2.62

2.60

3.90

3.50

RC-103

RC-104 RC-106

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TEFLON HAND SPRAYS

NITROGEN DISPENSING/ DRYING GUNS(Max. operating pressure 90 psi)

Part No. DescriptionNitro 1 Standard nitrogen hand spray with 1/4"

FNPT inlet thread, filter housing with disposable filter.Nitro 2 Same as Nitro 1 only using a standard spray gun body

configuration

Assemblies Intercon. SourcePart No. Gun Hose Assy. Fitting FittingNitro 3 Nitro 1 603 J44 J44Nitro 4 Nitro 2 603 J44 J44Nitro 4T Nitro 2 605 MC-F-44-HA MC-F-44-HAAll Teflon ComponentsNitro 16904 Nitro 2 605 MC-F-44-HA MC-F-44-HA

EYE WASH(Max. operating pressure 75 psi)

Part No. DescriptionEW-101 Standard eye wash with 1/4" FNPT inlet thread.

Assemblies Intercon. SourcePart No. Gun Hose Fitting FittingEW-302 EW-101 502 J64 -EW-303 EW-101 502 J64 J64

3.7

1.5

3.9

2.0

NITRO 1 NITRO 2

NITRO 3 NITRO 4

EW-101 EW-303

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TEFLON HAND SPRAYS


LIQUID DISPENSING(Max. operating pressure 75 psi)

Standard dispense gun with isolated spring, flow rate 1 gpm. Available in choice of O-ring material: Ethylene Propylene (EP), for use with solvents; Viton(VT), for use with most acids; Kalrez (KA), for use with highly aggressivefluids. To order dispense gun with the correct O-ring, replace "XX" in the DG part number; with the applicable suffix (EP, VT or KA).

Part No. DescriptionDG-501-XX Standard dispense gun with 1/4" FNPT inlet threadDG-502-XX Standard dispense gun with 3/8" FNPT inletDG-503-XX Standard dispense gun with 1/2" FNPT inlet threadDG-800-XX High flow dispense gun (replaces DG-504).

Features the same isolated spring design, buthas a flow rate of 3 gpm. 1/2" FNPT inlet thread.

Assemblies Intercon. SourcePart No. Gun Hose Fitting FittingDG-601-XX DG-503-XX 101 J108 -DG-602-XX DG-503-XX 101 J108 J108DG-605-XX DG-503-XX 300 MC-F-88-HA MC-F-88-HADG-606-XX DG-503-XX 502 J68 J68DG-607-XX DG-502-XX 502 J66 J66DG-901-XX DG-800-XX 101 J108 -DG-902-XX DG-800-XX 101 J108 J108DG-905-XX DG-800-XX 300 MC-F-88-HA MC-F-88-HADG-906-XX DG-800-XX 502 J68 J68

DG-501, DG-502, DG-503

3.9

3.90

4.56

3.94

DG-800

DG-602 DG-603

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HAND SPRAY SPARES & ACCESSORIES

Part No. Description

100 Hose #1 - .250 ID x .500 OD x 8’ long. Nylon braided clear PVC hose. Very flexible - Endscut and sealed – Completely bonded. Not recommended for use with solvents and/or highlyaggressive fluids.

101 Hose #2 .380 ID x .630 OD x 8’ long. Same description and characteristics as P/N 100above.

300 Hose #3 (BEPE-500-063) - .375 ID x .500 OD x 8’ long bendable Teflon tubing for use withsolvents and/or highly aggressive fluids.

502 Hose #4 - .250 ID x .375 OD x 7’ long (fully extended). Black PVC coiled hose.

503 Hose #5 – Same description and characteristics as P/N 502 above plus includes J66 fittingson both ends.

504 Hose #6 - .250 ID x .375 OD coiled FEP tubing.

505 Hose #7 – Same description as P/N 504 plus Teflon fittings on both ends.

602 Hose #8 - .150 ID x .250 OD x 7’ long (fully extended). Black PVC coiled hose.

603 Hose #9 – Same description as P/N 602 above, plus J44 fittings on both ends.

604 Hose #10 - .125 ID x .250 OD coiled FEP tubing.

605 Hose #11 – Same description as P/N 604 above, plus Teflon compression fittings on both ends.

RC-1 Hose #12 – Number 101 hose with PVC interconnecting and source fitting plus Teflonrecirculating tube.

RC-3 Hose #13 – Number 300 hose with Teflon source and interconnecting fitting, plus Teflonrecirculating tube.

RC-5 Hose #14 – Number 504 hose with Teflon source and interconnecting fitting, plus Teflonrecirculating tube.

RC-7 Hose #15 - .250 ID x .375 OD coiled FEP tubing with Teflon recirculating tube.

RC-9 Teflon source fitting for recirculating spray gun.

RC-11 PVC source fitting for recirculating spray gun.

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HAND SPRAY SPARES & ACCESSORIES


Part No. Description

J44 JACO (interconnecting and/or source fitting) Male Connector – Polypropylene –Off white color – Plastic gripper. Requires one each tube insert TI-4. No washersnecessary. Teflon tape required. 1/4" tube x 1/4" MNPT.

J64 Same as J44, but with 3/8" tube x 1/4" MNPT: Requires one each tube insert TI-6.




TI-4 Tube insert for 1/4" OD x .150 ID tubing – Polypropylene. Natural or White in color.

TI-6 Tube insert for 3/8" OD x 1/4" ID tubing – Polypropylene. Natural or White in color.

TI-10 Tube insert for 5/8" OD x .380 ID tubing – PVC. Gray in color.

900 Nitrogen filter housing.

901 Nitrogen filter retaining ring.

902 Nitrogen filter O-ring.

N2F-10 Disposable nitrogen filters. Each filter is composed of a 25mm diameterN2F-50 .45micron PVC – copolymer filter element sandwiched between and supportedN2F-100 by two pieces of molded acrylic plastic. Available in quantities of 10, 50, or 100.

EW-AHA Eye Wash Aerated Head Assembly. Polypropylene construction complete withscreens.

NOTE: Accessories and spare parts are not covered under any warranty unless such partsare installed at for by BECO Mfg., and are used for the purposes for which theyare designed.

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FittingsFittings

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TEFLON FITTINGSMaterials of Construction

BODIES AND FERRULES: Precision machined fromhigh density 100% Virgin TFE Teflon.

NUTS: The "HA" style nuts are precisionmachined from solid Halar. The "TA" style nutsare machined from TFE Teflon and include anexternal anodized aluminum band.

Size CodesFRACTIONAL/PIPE/LONGFLARE:2 = 1/8" 5 = 5/16" 10 = 5/8"3 = 3/16" 6 = 3/8" 12 = 3/4"4 = 1/4" 8 = 1/2" 16 = 1"

METRIC4 = 4mm 8 = 8mm 10 = 10mm6 = 6mm 9 = 9mm 12 = 12mm

Fitting Numbering Code

XX – _____ – __ __ – _____FittingStyle

Always given

FittingCategory

F = FractionalM = Metric

P = PipeLF = Longflare*

SizeCode

Tube firstIf Applicable

Nut or BandStyle

HA = HalarNut

TA = Aluminum

*Longflare connections made of TFM

Example: RU – F – 4 2 – HA 3Halar Nut Price Code1/8 Tube1/4 TubeFractionalReducing Union

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BULKHEAD UNION 1S/B - BU - ___ - ___ - ___

MALE BRANCH TEE 1MBT - ___ - __ __ - ___

FEMALE BRANCH TEE 1FBT - ___ - __ __ - ___

MALE RUN TEE 1MRT - ___ - __ __ - ___

FEMALE RUN TEE 1FRT - ___ - __ __ - ___

BULKHEAD MALE 2CONNECTORBMC - ___ - __ __ - ___

UNION ELBOW REDUCER 2UER - ___ - __ __ - ___

MALE ELBOW 3ME - ___ - __ __ - ___

BULKHEAD FEMALE 2CONNECTORBFC - ___ - __ __ - ___

UNION ELBOW 2UE - ___ - ___ - ___

UNION 2U - ___ - ___ - ___

TEE 2T - P - ___ - ___

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FEMALE ELBOW 3FE - ___ - ___ - ___ - ___

REDUCING UNION 3RU - ___ - ___ ___ - ___

MALE CONNECTOR 4MC - ___ - ___ - ___

FEMALE CONNECTOR 4FC - ___ - ___ ___ - ___

ELBOW 4E - P - ___ - ___

BARB 4S/B - BF - ___ - ___

BUSHING 5B - P - ___ ___ - ___

SB - P - ___ - ___ 5

PLUG 6P - P - ___

PIPE NIPPLE 5PN - P - ___

COUPLING 5C - P - ___ - ___

NUT 6N - ___ - ___ - ___

FERRULE 6F - ___ - ___

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TEFLON FITTINGS


If you still haven’t found whatyou’re looking for just call oursales department or your localdistributor We will make everyeffort to provide you with that specialfitting for your application.

PANEL NUT 7PN - ___ - ___

FEMALE REDUCER 7FR - P - ___ - ___ - ___

PIPE UNION BPU - P - ___ - ___

UNION CROSS CUC - ___ - ___ - ___

BUGLE “BUG” TEE EBUG - ___ - ___ - ___

BUGLE “BUG” STRAIGHT DBUG - ___ - ___

UNION TEE AUT - ___ - ___ - ___

Temperature, pressure and combina-tions of both will affect the perform-ance of these fittings. The user shallbe responsible for determining thecorrect use of this product BecoManufacturing cannot be heldresponsible for the incorrect use ofthese fittings and is not liable forinjuries or losses.

Glass Joint(Bug End)

Glass Joint(Bug End)

Tube OD(Opposite Bug)

Tube OD(Opposite Bug)

Tube OD(Branch)

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TEFLON DISC FILTERThe BECO Teflon Filter has been designed tofulfill the special requirements of inline microfiltration for sensitive medias. All contact surfacesare constructed so that nothing but Teflon comesinto contact with the media being filtered. TheDisc Filter utilizes replaceable Zitex* filter elementswhich form a continuous mat of Teflon fibers.These fibers are fused together to form a screen-like membrane structure. The resultant membraneis hydrophobic, hence aqueous suspensions mustbe filtered at high rates to overcome surface ten-sion. Because of the non-stick characteristics ofTeflon, the natural lubricity of all wetted surfaces,and the easy replacement of filter elements,entrapped contaminates may be easily removed.

* DuPont Trademark

* Chemplast Trademark

PTFE Filter Membranes

• No Non-Teflon backing

• Doesn’t support fungi or bacterial growth

• Easily cleaned – auto-clavable or clean with bactericial solutions

• Will withstand temperatures to 20˚C

• Fluted membranes, special sizes and shapes available

• Available in large pore sizes for ventingapplications

• Available in extra strength, easy to handlesmall pore sizes

• Chemically inert, non-contaminating, non-flammable

• High retention efficiency

• Self gasketing, heat sealable

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TEFLON DISC FILTER


Membrane Properties:Grades Finest Extra Fine Medium Coarse G104 G108 G110Pore(µm) 0.20 0.45 0-20 20-30 5-6 3-5 1-3Thickness(mm) 0.065 0.07 0.13 0.20 0.10 0.20 0.25

How to Order: (Assemblies with filters A-I)

BDF – 47 – F IN – 4T

BECO Disc Filter 47mm Fin(Finest) (47mm Only) 2T – 1/8 Tube (47mm Only)90mm EXF (Extra Fine) (47mm Only) 4T – 1/4 Tube (47mm & 90mm)

MED (Medium) (47mm & 90mm) 4MP – 1/4 MNPT (47mm & 90mm)COR (Course) (47mm & 90mm) 4FP – 1/4 FNPT (47mm & 90mm)G104 (47mm Only) 6T – 3/8 Tube (90mm Only)G108 (47mm Only) 6MP – 3/8 MNPT (90mm Only)G110 (47mm Only) 6FP – 3/8 FNPT (90mm Only)

2.50

OUTLET 2.50INLET

Example: Shown is a 47mm diameter Beco Desc Filter with a 0.20 µm pore and 1/4” tube fittings.

1 – GPM/ft2 13.5psi2 – Time in seconds required for 100cc to pass thru 1 square inch ∆P = .176 psi3 – Pressure differential necessary to overcome hydrophobic resistance

56

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The constantly increasing demand forquality and safety standards of theultra-clean electronic and semiconductormanufacturing processes requires innovativesolutions to fluid movement and aggressivechemical filtration. In an ultra clean manu-facturing environment, it has always beendifficult to reliably pump and filtercorrosive liquids over a broad spectrum ofoperating pressures and temperatures.BECO provides the innovative solutions forchemical filtration that meet or exceed thedemanding performance criteria of theeletronic and semiconductor manufacturingenvironment. BECO is committed toprovide the highest quality filter housingsto solve the problems of the filtration ofaggressive fluids.

HIGH TEMPERATURE FILTER HOUSINGS

FH-PTFE Series of Filter HousingsManufactured with Certified 100% Virgin PTFE (no metal-lic components)

• Designed for use with filters for high temperature(to 190C @ 45psi) acids and chemicals.

• Industry Proven Seal design prevents leaksbetween cap and body during heat cycling andhigh temperature use.

• Non-Scoring Removable Top Cap: Filter Cartridgecan be changed without damaging o-rings. (Noparticles generated by the cap twisting into thefilter housing body)

• Design of housing body helps to prevent o-ringfrom losing its seal. (Seal is between filtered andunfiltered fluid)

• Built in pulsation dampener eliminates the needfor external dampener, absorbs hammering andpulsation of incoming fluid to help preventparticles dislodging from the filter.

• Optional fluid input and output configurationavailable, as well as size and location to meetcustomer’s needs.

• Compatible with a wide range of standard 10inch filter cartridges

• 12 Month Warranty

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HIGH TEMPERATURE FILTER HOUSINGS


FHT/FHP Series of Filter HousingsSpecificationsModel:

FH-104033-PTFE FH-104033-PolyproWeight:

10.2kg/22.5lbs. 6.1kg/13.45lbs.Vent Tube:

1/8" NPT (F) 1/8" NPT (F)with 1/8" PFA tube with1/8" PFA tube

Inlet/Outlet Connections:3/4" FNPT 3/4"FNPTWelded Fittings and Welded Fittings andTubes (optional) Tubes (optional)

Mounting Holes:12.7mm (1/2") diameter 12.7mm (1/2") diameter12.7mm (1/2") deep 12.7mm (1/2") deep10.16cm (4") centers 10.16cm (4") centers

Filter Requirements:25.4 cm/ 10" cartridge 25.4 cm/ 10" cartridge2-222 double O-ring 2-222 double O-ringflat end flat end

Performance:Operating Temp:20ºC to 190ºC 20ºC to 190ºC(68ºF to 374ºF) (68ºF to 374ºF)

Max Pressure:3.15 bar/ 45 psi 3.15bar/45psi

+ +

4.0

Ø.50 X .50 DEEP

MOUNTING HOLES

1

1

1 1

Ø6.0

1.0 2.2

14.8

3/4" FNPTFILTERED CHEMICALS

3/4" FNPTUSED CHEMICALS

1.25+

NOTES: STANDARD DIMENSIONS APPLY CONSULT FACTORY FOR CUSTOM LOCATIONS.

FH-PolyPro Series of Filter HousingsManufactured with Certified 100% Polypropylene (no metal-lic components)

• Designed for use with filters for low temperature (to 55˚C) acids and chemicals.

• Industry proven seal design prevents leaks between capand body during heat cycling and high temperature use.

• Non-Scoring Removable Top Cap: Filter Cartridge can bechanged without damaging o-rings. (No particles generatedby the cap twisting into the filter housing body)

• Design of housing body helps to prevent o-ring fromlosing its seal. (Seal is between filtered and unfiltered fluid)

• Built in pulsation dampener, eliminates the need forexternal dampener, absorbs hammering and pulsationof incoming fluid to help prevent particles from dislodgingfrom the filter.

• Optional fluid input and output configuration available, aswell as size and location to meet customer’s needs.

• Compatible with a range of standard 10 inch filtercartridges

• 12 month warranty

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Pumps/ Fluid MeteringPumps/ Fluid Metering

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METERING PUMP


BECO’s large "Family" of metering pumps illustrated above ensures accurate, programmable chemical pump availability for every application.

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METERING PUMP

�

The BECO Metering Pump offers a precision method for chemical dispensing. Designed for process applications wherereliability, purity, accuracy, repeatability, programmability and chemical compatibility are a must. These unique pumpsare available in unlimited dispense capacity with programmable dispense volume and programmable rate from 0.1ccto 350.0cc per minute and are repeatedly accurate to +/-.50%. Continuous feedback confirms performance during operation. All wetted surfaces are PTFE or Chemraz 570. Design includes Chemraz rolling diaphragm between the nitrogen-purged electronics compartment and the wetted section to insure 100,000 MCBF. These nonpulsing pumpsare the perfect solution for single tank wet processing, accurate in insitu solution generation, precision dilute chemical development and measured spray dispensing.

BECO metering pumps can be ordered in unlimited dispense volume and in any of the configurations shown on thecover including the flange mounted version, the bottle mount and the stackable nesting box. All of the pumps can dispense from a reservoir (bottle or tank) or from a pressurized line (chemical distribution system (CDS) and are capable of dispensing chemicals or solutions that have a viscosity rating of up to 60 units.

BECO Metering Pumps can be controlled and operated by a PC, PLC (with stepper motor signal generator module) orthe BECO Process Controller that can operate up to 8 pumps and can store up to ten recipes.

The output pressure will vary due to variations in viscosity. The " Output Pressure" graph below is typical for fluid hav-ing a viscosity of 5 centipoise. High pressure pumps are available for high viscosity fluids and precision measuredspray applications. Please consult the factory.

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METERING PUMP

�

�

�

PFA WETTED SURFACES HIGHLITED IN YELLOW

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METERING PUMP


BECO Metering Pump Specifications:

High Purity PTFE / Chemraz® 570 ConstructionFlow Rate 0.1 to 350.0 cc/minAccuracy +/- .25% AccuracySafety Leak detection

Durable outer casingContinuous feedback confirming performance during operation

Flexibility Address up to eight (8) pumps for use with one BECO controllerCompact DesignRS-485 Communication

BECO Process Controller Specifications:

Stores up to 10 recipesEasily program each recipe with up to nine (9) stepsOperate up to eight (8) pumps with one controllerLCD readout with backlightAlarm indicators for: leak detection, temperature, N2 purge, operation, of pump12 Volt DC Power Requirement8 Optically isolated inputs4 SPDT Output Relays

ORDERING INFORMATION:

Consult Factory 800-926-2326

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TanksTanks

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Tanks can be fitted with product/ carrier locating "furniture" that iswelded into the tank to prevent the particle traps that are associatedwith "drop in" or temporary style furniture.

BECO Yield Enhancement Tanks can be supplied with any availablemegasonic, or can be prepared for the megasonic of your choice.

Shown Above: The tank's interior is fabricated from a single, precisionmachined and folded sheet of plastic. This minimizes welds, and pro-vides smoth rounded interior corners.

Please refer to our Tank Ordering Worksheet for part numbers andordering information.

The interior process chamber of BECO's YieldEnhancement Process Tanks are fabricated froma single piece of sheet material. The sheet is pre-cision machined, and then in the Japanese"origami" method, folded into the form of atank. This unique approach minimizes welding,and provides smooth, seamless, rounded interi-or corners void of traps, and leaks due to poorworkmanship, thermal cycling, and chemicalcontact.

The tank includes weir containment for chemistryrecirculation. Ports for fill and recirculation onthe Yield Enhancement Tanks are located onopposing sides near the bottom providing opti-mum processing recirculation flow, An optionalperforated diffuser plate provides for an evenlaminar flow through the chemical processingtank to help improve process uniformity. All plumbing connec-tions are longflaretypes unless other-wise specified.

YIELD ENHANCEMENT PROCESS TANKS

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YIELD ENHANCEMENT QUICK DUMP TANKS

clearance when neces-sary, and minimizeoperator strain wheremanual wafer transferbaths is required. The

BECO's Yield Enhancement Quickdump RinseTanks are fabricated with the same "origami" styletechniques as used in the Process Tanks. A singlepiece of sheet material is precision machined andfolded to result in smooth, rounded interior cor-ners. This provides the rinse tanks with the sameconstruction quality benefits, and for rinsing appli-cations, the smooth corners also improve rinsingdynamics which reduces rinsing time and waterconsumption.

All of the BECO Quickdump Tanks are equippedwith spray manifolds that assist in preventing par-ticle reattachment, and rinse the interior of thetank during the dumping function. The cone pat-tern spray nozzles are staggered from side to sideand are positioned high above the tank to providethe best coverage. BECO's optional articulatdspray manifolds and nozzle covers ensure robot

articulated nozzle covers prevent chemical "drag out" from dripping onthe spray nozzles and being deposited on the clean, rinsed wafers dur-ing the spray cycle. All the plumbing connections are longflare typesunless otherwise specified.

Tanks can be fitted with product/ carrier locating "furniture" that is weld-ed into the tank to prevent the particle traps that are associated with"drop in" or temporary style furniture.

BECO Quickdump Tanks can also be supplied with any available mega-sonic, or can be prepared for the megasonic of your choice.

Quickdump designs caneither be the "drop bot-tom" style shown here forultra-fast dumping, or thetraditional circular paddletype. Also shown here, isthe optional articulatedspray manifold.

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YIELD ENHANCEMENT TANKSSTANDARD ORDERING FORMAT

The Single Construction Quick Dump Tank comes complete with fill manifold, adjustable spray bars and your choice of Quick Dumpvalve or full bottom drop.

The fill inlets do not involve outside pip-ing welded to the tank. Channels for fill-ing the batch are integrated into thewalls of the seamless tank. BECO tanksare furnished with longlfare fittings.Crossbars are located on the ends ofthe tank for mounting.

Also, ask BECO sales about creatingyour own Yield Enhancement Tank Kitin which you can include pilot valves,media valves, plumbing and a QuickDump Rinser!

Material of ContructionPOLPOL = Polypropylene PVDFPVDF = Polyvinyldifluride

PFA PFA = Perfluoroalkoxy (Teflon®)

Single Const. Quick Dump Tank

SQDSQD =

Wafer Size4", 5", 6", 8", 12"4", 5", 6", 8", 12"

available

SQD S4 PVDF QD

S = D =

Single cassette sizeDouble cassette size

QDQD =

F =

Quick Dump valve on bottom of tanks*Full bottom of tank will drop during Quick Dump operation*Note: One QD valve for an 'S' designated *Note: One QD valve for an 'S' designated

tank and two for a 'D' designated tank.tank and two for a 'D' designated tank.

Single Const. Chemical Tank

SQDSQD =

Wafer Size4", 5", 6", 8", 12"4", 5", 6", 8", 12"

available

Material of ContructionPOLPOL = Polypropylene PVDFPVDF = Polyvinyldifluride

PFA PFA = Perfluoroalkoxy (Teflon®)

SCT S4 PVDF

S = D =

Single cassette sizeDouble cassette size

Like the Quick Dump, the inner tank ismanufactured as a single piece. The fillinlet configuration is integrated directlyinto the tank.

The chemical tank comes standard withfill manifalds and longflare fittings forthe drains. Drains are located in theinner tank and in the overflow weir.

Don’t forget to ask BECO sales aboutour Yield Enhancement Tanks Kits com-ing soon!

QUICK DUMP TANKS

CHEMICAL PROCESS TANKS

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Drain Port Size Specifiy:Drain Port Location Specifiy:BECO Drain Valve Specifiy:Extra Drain Port Y/NMegasonic Y/NMegasonic Supplier BECO

Other:Overflow Configuration Knife Edge, Sawtooth(all 1"x1" standard pitch) Knife Edge, Scallop

Knife Edge, StraightSpray Bar Stationary

ArticulatedSpray Pattern Fan

ConeLevel Sensors Y/NFill Location Bottom of sides with opposing ports

Other:Fill Rate Specifiy:BECO Fill Control Valve Specifiy:Recirculation Rate Specifiy:Plumbing Connection Type Flare Fittings

Compression TubeFNPT

Plumbing Connection Size 1/4, 3/8, 1/52, 5/8, 3/4, 1"Diffuser Plate Y/NDiffuser Plate Design Hole Size:

Hole Pattern:Tank Mounting Specifiy:Temperature Control Y/N

Y/N/XTank Style Process

QuickdumpMegasonic ProcessMegasonic Quickdump

Inner Tank Length "A"Width "B"Height "C"

Outer Tank Length "D"Width "E"Height "F"

Tank Material PolypropylenePFAPVDFHalarPVCOther:

Material Thickness 3/8"1/2"5/8"

Recirculation Y/NCover Manual

AutoQuickdump Style Drop Bottom

Qucikdump ValveQuickdump Valve Size Specifiy:Dump Rate Required Specifiy:Ozone Compatible Y/NBECO Quickdump Controller Y/NProduct Locating Furniture Specifiy:

Yield Enhancement Tank Ordering

CUSTOM YIELD ENHANCEMENT TANKS ORDERING WORKSHEET

BECO Manufacturing’s capabilitiesallow for excellent custom compo-nents. We can cover all of your speci-fications thanks to our knowledgableenginering staff and highly skilledmachininsts and fabricators.

We customize anything to fit yourneeds and strive to make any projecta perfect fit for your application.

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Turn-Key Turn-Key Products

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WET PROCESS STATIONS

CCuussttoomm PPrroocceessssAApppplliiccaattiioonnss

WafersMEMS

Photo-masks

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Facility Connection Notes Size/LocationAmbient D I WaterClean Dry Air (CDA)Nitrogen (N2) InletChemical Inlets (please list)Plenum DrainChemical DrainsExhaustElectrical

FeatureLoad Capacity (wafer size and qty)Carrier Part NumberCarrier Handle

FeatureMaterial of ConstructionCabinet DimensionsCabinet StyleExhaust LocationLiquid Facility ConnectionsDrain LocationDI Water Spray GunN2 Spray GunDeck IncludedDeck HeightPlenum Access DoorBeaker WashSink with GooseneckGlove Wash

Hardware Configurations

Notes

Notes

Cabinet

Cabinet Facility Connections

Process Tool

WET STATION OPTIONS

Please fill out information tables to define bench specification. Information such as pressure ratings, chemistryspecific notes, vendor specific components, or any special application needs can be requested in the appropri-ate notes column. We have an engineering staff that can help you with any questions you may have.

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(Multiple tanks may be requested)

WET STATION OPTIONS

Sample Tank Options

FeatureProcess Chemistry Tank MaterialFill TypeMegasonicRe-CirculationFiltrationIn-Line HeaterImmersion HeaterProcess TimeProcess TemperatureTime to Reach Process TempOverflowLidTank Level SensorsTank DrainAlarm(s)

FeatureProcess ChemistryTank MaterialRinse Tank StyleFill TypeProcess TimeProcess TemperatureOverflowRinse to ResistivityN2 Process AgitiationDumpDrainAlarm(s)

Notes

NotesProcess Tank

Quickdump Rinse Tank

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The Manual Wet Process Station from BECO offersa cleaning and rinsing station designed with thesmallest footprint in the industry. Construction isavailable in PVC or White, Natural, FlameRetardant Polypropylene, CP7, Halar, or CPVC.

The Wet Process Station is compatible with mostMegasonic cleaning systems, and comes standardwith BECO’s Quick Dump Rinse Tank. All BECO WetStations are adaptable to other types of processtanks.

Other standard features include: active spray barwith cover, recirculating DI spray gun, adjustablelegs, and wrap around clear operator/processshield. The shield guarantees operator safety andprocess integrity with a load/unload door providingeasy access to the process environment. All process-es are controlled by BECO Programmable ProcessController with optional touch screen I/O panelwith fully programmable controller.

The BECO Wet Process Station is designed to opti-mize Laminar Flow characteristics in the processarea. Consideration of flow effects led to the opencase design which eliminates the more conventionalheadcase style station. Another feature which allowsfor clean laminar flow is our “floating” tankpedestal.

For controllerdetails refer tothe programma-ble process con-trollers page.

Rev. 1/03

BECO MANUFACTURING CO. INC.23361 Peralta Drive

Laguna Hills, CA 92653Phone: 949-458-3731 • Fax: 949-458-2787

www.becomfg.com • [email protected]

BECO STANDARD WET PROCESS STATION

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PROGRAMMABLE PROCESS CONTOLLER

The BECO controller is designed to operate Chemical and Quick Dump Rinsing processes.

Easy to use six key touch pad

Keypad surface is Lexan® polycarbonate with an epoxy hard coat for durability

Messages displayed on a 24 character LCD display featuring “super twist” technology for high contrast viewing and LED backlighting for visiblitiy in all lighting conditions.

The enclosure is an industry standard 3" wide by 7" tall and is molded from chemical resistant plastic.

The enclosure is also provided with front mounting for easy installation

All connections are made to plug-in terminal blocks for ease of wiring and maintenance

Powered from 12VDC nominal (other voltages or AC input available)

Stores up to five recipes

Recipes may contain up to 64 steps

Operates pilot valves for FILL, SPRAY, and DUMP

Can actuate up to 16 pilot valves for special applications

Special programming instructions include: WAIT, LOOP, and BEEPR

•

•

•

•

•

•

•

•

•

•

•

•

•

Four LEDs are located under the LCD to indicate Run,

Program, Test, and Error status

Heater/ Temperature Regulator Option Available

•

•

•

Your logo goes here!

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PROGRAMMABLE PROCESS CONTROLLER

Process Overwiew:The recipe is a made series of steps. Each step contains a function, a start time, and an endtime. The steps are shown in the table (right). All timing is in seconds. Steps may overlap in timeor coincide. There are three special programming instructions to provide further convenience.

MODE NAME ACTIONRUN Runs the recipe

PROG Mode in which you program the recipeTEST Test your recipe

ERROR process stopped

STEP NAME DESCRIPTIONFILL Fill tank

SPRAY Spray nozzlesDUMP Empty the tank

LOOPUsed to repeat a group of recipe steps "x" number of times

WAITUsed to pause a program until its corresponding input is satisfied

BEEPR

Special output that beeps at end of recipe and can be programmed to beep when specified in a recipe

Step Step NumberNumber

FunctionFunction Begin Begin TimeTime

End End TimeTime

Segment Segment DisplayDisplay NotesNotes

0 FILL 0000 0060 SG1 Fill the tank for 60 seconds01 SPRAY 0050 0070 SG1 Run the sprayer for 20 seconds from 0050 to 0070

02 DUMP 0060 0070 SG1Dump the tank for 10 seconds from 0060 to 0070. This overlaps spray; the spray will be on while the tank is dumping

03 LOOP 0075 0003 SG1 At 0075 seconds (dump is over), start over and repeat this segment 0003 times

BEEPR * * * Programming not required. Beeps when recipe is complete



End End TimeTime





04 FILL 0000 600 SG2 Fill (overflow) for 0600 seconds (10 minutes) With each segment the time starts over at 0000




End End TimeTime





04 FILL 0000 0600 SG2 Fill (overflow) for 0600 seconds (10 minutes) With each segment the time starts over at 0000

WAIT1 0300 N/A SG2

Program halts after '0300 seconds of fill and waits for Input 1 to come on. After Input 1 is made, timer continues and will continue timing to '0600 A resistivity controller must be connected to Input 1 (supplied by customer).




End End TimeTime


0 FILL 0000 0060 SG1 Fill the tank for 60 seconds01 DUMP 3600 3610 SG1 Dump the tank after 1 hour (3600 seconds) for 10 seconds

03 LOOP 3610 9999 SG1 After dump, loop the recipe 9999 times. This recipre will run for 9999 hours (416 dyas). Press STOP to cancel recipe

Temperature Regulator Optionavailable.

Sample Recipes: Recipe 0 (REC0) Simple Quick Dump Rinse

Recipe 1 (REC1) Quick Dump Rinse with 10 Minute Overflow

Recipe 2 (REC2) Quick Dump Rinse with Rinse to Resistivity

Recipe 3 (REC3) Maintenance Recipe to Prevent Bacteria

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CHEMISTRY SUPPLYCHEMISTRY SUPPLY

DI WATER SUPPLYDI WATER SUPPLY

CHEMISTRY DRAINCHEMISTRY DRAIN

DI WATER DRAINDI WATER DRAIN

DI WATER RETURNDI WATER RETURN

QUICK DUMPQUICK DUMPRINSE TANKRINSE TANK

AIR SUPPLYAIR SUPPLYPROCESS CONTROLLER

ERRORTESTPROGRUN

-+

#* STOPSTART

ITEM

MENU

BECO

INLE

T

1 2 3 4 5 6 7 8 9 10

CHEMICAL TANKCHEMICAL TANK

DUMPDUMP

FILLFILL

SPRAYSPRAY

PUMPPUMP


PROCESS CONTROLLER

ERRORTESTPROGRUN

-+

#* STOPSTART

ITEM

MENU

BECO

.38PANEL THICKNESS2.46

TYP

6.00

2.75

FILL

SPRAY

DUMP

5/16 " TUBE, CDA INLET

1 2 3 4 5 6 7 8 9 10 INLE

T

12 V +

EARTH GROUND (IMPORTANT FOR NOISE IMMUNITY)

12 V -

GND

-

+

THIS TERMINAL BLOCK MAY BE USEDTO SUPPLY POWER TO OTHER CONTROLLEROR ACCESSORIES.

SEE VIEW A NORM CLOSED

NORM OPEN

COMMON

RELAY 4

NORM OPEN

NORM CLOSED

COMMON

RELAY 3

COMMON

NORM CLOSED

NORM OPENRELAY 2

COMMON

NORM CLOSED

NORM OPENRELAY 1

INPUT 1 (WAIT 1)

INPUT 2 (WAIT 2)

INPUT 3 (WAIT 3)

INPUT 4 (WAIT 4)

INPUT 5

INPUT 6

INPUT 7

INPUT 8

12 V COM

+ 12 V TO SUPPLY SENSORS

COM

+

-

RS-485 COMM (NOT USED IN THIS APPLICATION)

INPUTS(- TRUE)

VIEW A2X SCALE

3.00

6.38

Input/ OutputOptically isolated inputs are provided forremote start and stop, liquid level, safety inter-lock, and resistivity control. Outputs are pro-vided to interface with remote pneumaticvalves (or relays). The remote pneumaticvalves provide for easy separation of electri-cal and pneumatic circuits and simplify instal-lation. Four on-board relay outputs are pro-vided to interface external electrical euipment,such as megasonic cleaning equipment. Allconnections are made to plug-in terminalblocks for ease of wring and maintenance.

Process Controller/ Quick Dump Rinser shown belowin application.

Part Number: PLC-106752- 000 004008016} number of neumatic actuator ports

desired on pilot valve

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Also, check out our Pnuematic Valves, Yield Enhancement Tanks, andWet Process Station pages for more information on our capabilitiesand our custom products.

Some of our commonly used media valves are ourQuick Dump (above) and our Teflon PneumaticValves (below)

Yield Enhancement Chemicaland Quick Dump Tanks(shown left) can be ordered customfor your application.

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PLASTICPLASTIC

FABRICATION

OUTSOURCING

MACHINING

PLASTICPLASTICPLASTICPLASTIC

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High Temperature Filter Housings

Programmable Process Controller

Teflon®Spray Guns

Nitrogen Purge Plate

Pro-E, SolidWorks, andAutoCad platforms

Engineering Services

BECO MANUFACTURING CO., INC.

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PRODUCTS AND CAPABILITIES

Outsourcing Testing and Quality

Fabrication

CNCRouting

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wwwwww.becom.becomfg.comfg.com

1.800.926.BECO1.800.926.BECO

23361 PERALTA DRIVE

LAGUNA HILLS, CA 92653PH: 949.458.3731

F: [email protected]

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specific request

Thank you for your interest. Welook forward to hearing from you!

FFaaxx 994499..445588..22778877

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Beco Catalog

Documents

Transcript of Beco Catalog