CLEANROOM/CLEANZONE PROTOCOL

Sid Calayag

PRESENTED BY:

1. Understand the requirements and prohibitions of production areas

2. Apply the proper discipline

TRAINING OBJECTIVES

Item 1

• Cleanroom Basics

Item 2

• Cleanroom at Construction Stage

Item 3

• Cleanroom at Operational Stage

AGENDA

Item 1

•Cleanroom Basics

CLEANROOM BASICS

What is a Clean room?A clean environment designed to

reduce the contamination of processes and materials.

This is accomplished by removing or reducing contamination sources.

CLEANROOM BASICS

A cleanroom is a controlled environment that regulates the following:

particulate matters in the air( i.e. dust and other particles)

temperature humidity pressure contaminants from people, machines, etc.

DEFINITION OF TERMS

An enclosed space employing control over theparticulate matter in the air, temperature, humidity,pressure and human contributed contaminants.

A defined space in which the concentration of airborne particulate matter, including human contaminants is controlled to specified limits.

CLEANZONE

CLEANROOM

CLEANROOM BASICS

CEILING GRID

GLASS WINDOWS

WALL PANELS

CONDUCTIVE FLOORS OR RAISED FLOOR

BASIC COMPONENTS OF CLEANROOM

AIR SHOWERS

FULL GLASS WINDOWS

PASS BOX

ANTE ROOM

BASIC COMPONENTS OF CLEANROOM

Item 2

•Cleanroom at Construction Stage

BUILDING/CONSTRUCTION

CIVIL WORKS

ELECTROMECH WORKS

CLEANROOM AT CONSTRUCTION STAGE

CIVIL WORKS• INTERIOR WORKSColumnsSlabsWallsSanding and

PaintingSecondary Ceiling

and InstallationPainting Works

ELECTRO-MECH’L WORKS

• INTERIOR WORKSPiping WorksEquipment

InstallationSupport System

InstallationLightingsFire Protection

ENCLOSURE

• Enclosure of area and issuance of access route

• To remove the generated dust before it spread

• OTHERSMain Feeder lineOther Electromechanical Works and etc.

CLEANROOM STAGES OF CONSTRUCTION

Wear Shoes for indoor use

Helmet

helmet

Shoes for Indoor use

CONSTRUCTION STAGE APPARELS & PPE

BASIC CLEANLINESS REQUIREMENT

Materials To be stored in a clean & orderly

manner Others

Dirty Work to be isolated Sweep daily Wet with sawdust

5S AND HOUSEKEEPING

Every user is responsible for keeping the cleanroom clean

Always clean your workspace before leaving

Don’t leave or store items on or in equipment

Do not set liquids on any equipment Properly store all materials before

leaving the cleanroom Last one out should make sure the

room is in a safe idle mode

Item 3

•Cleanroom at Operational Stage

LAUNDRY: Garments shall be changed and washed at least

once a week.

4. static dissipative smocks

3. Facemask

1. head cap / headgear

5. In-plant shoes/ safety shoes

2. Safety Glasses

CLEANROOM APPARELS & PPE

Cleanroom:

REQUIRED COMPLETE APPAREL

LAUNDRY: Garments shall be changed and washed at least

once a week.

2. facemask3. bunny suit 4. booties over in-plant shoes

1. hair net (before hood)

ULTRA CLEAN SUIT & APPARELS

Entrance Control Air lock room Sticky/Tacky mats

Materials & Tools clean materials to be brought into the building

clean materials before entering

BASIC CLEANROOM PROTOCOL

CLEANROOM PRACTICES

1. All workers must attend an orientation,

2. Chemicals must be approved3. Equipment and materials must be

cleaned4. Moving must be done with care5. Eating, smoking and the chewing

gums is prohibited6. Housekeeping

CLEANROOM REQUIREMENT

No visible dust No rust, no peeling paint No sand/pebbles No fiber/hair, wood chips No plastic debris, carbon/paper No styro foam chips No presence of food

Implementing Clean Production Environment

Based on 4 principles 　　　Prevent entry of dust Prevent dust generation Remove dust Do not accumulate

Air shower operationalRoom pressure control Proper RH control, etcCleaning implemented

Operational Stage

Implementation and Maintenance of Clean Production EnvironmentImplementation and Maintenance of Clean Production Environment

Improving workers level of consciousness is very importantImproving workers level of consciousness is very important

Based on 4 principles 　　　Prevent entry of dust Prevent dust generation Remove dust Do not accumulate

Positive pressure/barricade

Clean suit/eqpt layout Apply appropriate filter Choose anti-static materials

Planning Stage

Apply energy saving systemsApply energy saving systems

CLEANROOM REQUIREMENT & PRACTICES

１． airtight ducting system ２． install HEPA filters at all supply side３． positive pressure beyond HEPA

① Do not allow dusts to flow into the ducting system

１． installation of air shower at anteroon

① Do the cleaning(people and things) at the

anteroom before bringing inside the cleanroom

１． wearing of clean suits２． workflow/layout to reduce unnecessary movements ３． use of finishing materials that generate few particles４． No bringing of useless things inside

② Minimize dust generation in the room

１． eliminate unnecessary horizontal surfaces２． Use round ends instead of angles３． do not install unnecessary equipment that vibrates

④ Do not pile-up dusts or scatter these particles

１． provide localized exhaust near sources of contaminants２． make indoor air distribution as laminar as possible

③ Remove immediately generated particles

APPLICATION OF 4 PRINCIPLES

・ install air shower/pass box

- prevent dust from entering during opening/closing of doors

-dusting off before entry

・　 pressurize the room(cleanroom indoor) to prevent entry of dust from outside

air shower pass box

+pressure against outside

・ provide sticky mat

　 place mat near entry points to prevent dust under the shoes from entering

Prevent entry of dust basic control measures(1)

ＪＡＣＡ > １０Ｐａ ( １ . ０２

mmAq ） ＦＤＡ

> ０ . ０５ inAq （１ . ２７

mmAq ） ISO13408-1

１０～ 15 Ｐａ

① 　 no surface breakup/detachment

② 　 smooth surface with few gaps

③ 　 durable/wear resistant

④ 　 static electricity is hard to generate

⑤ 　 difficult to be stained but easy to clean

⑥ 　 acid/alkali resistant

⑦ 　 low outgassing properties

cleanroom interior finish

bunny suit smack gown

＜ Effects of Cosmetic Products ＞

10

100

1,000

10,000

100,000

［ p

art

icle

s/c

ft/m

in ］

female （ 20’s ） male, thick beard （ 30’s ） male, slight beard （ 40’s) male, slight beard(40’s ）

bare after washingface

lotion/facialfoundation

eye shadow/cheek blush on

source ～実践 ＬＳＩ工場清浄化技術 (1985)

Prevent entry of dust basic control measures(2)

wear cleanroom suits/gownban use of cosmeticsuse of low/non-particle

generating finishing materials

people manufacturing equipment tools processes/utilities(CDA, N2, DI water) office equipment and supplies(computers,

papers) molds, fungi, bacteria structural materials(paint peels, outgassing)

CLEANROOM CONTAMINANT

外気

Dust from room and outdoor air (OA) can mix

filter selection and recirculating air volume

calculation

Ensure particle concentration within room specification

particle sources

Exhaust

Recirculating

airFilter

Return air

Room

RoomExhaustOA

Direct supply of clean air into the machine

Ensure particle concentration within room specification

Dust removal by supplying clean air into the equipmentDust removal by room air

recirculation

Dust Removal by Filtration

Daily Cleaning Regular Cleaning

・ once per week/per month or semiannually

・ done by service cleaners

・ cleaning including moving the equipment

・ done during shutdown

・ once a day/after each shift

・ wet type cleaning(using water)

・ sticky mat changing

・ dry type cleaning by vacuum cleaner

・ cleaning done during operation

CLEANING THE CLEANROOM

1. Prevent entry of dust.

2. Minimize sources that generate dust.

3. Remove the dust generated in the room before they spread.

4. Do not accumulate and scatter the dust.

4 Principles of Maintaining Cleanliness

End of presentation

Prepared for TI Construction GroupBy: Sid Calayag

References: TI Cleanroom Basic Cleanroom Orientation

Basic Cleanroom Orientation