based Devices - evgenii.rudnyi.ru

31
ALBERT-LUDWIGS- UNIVERSITÄT FREIBURG Automatic Model Reduction for Transient Simulation of MEMS- based Devices Evgenii B. Rudnyi and Jan G. Korvink IMTEK–Institute for Microsystem Technology Albert Ludwig University Freiburg

Transcript of based Devices - evgenii.rudnyi.ru

Page 1: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

Au uction for Tra of MEMS-

es

orvinkTechnologyeiburg

tomatic Model Rednsient Simulation

based DevicEvgenii B. Rudnyi and Jan G. K

IMTEK–Institute for Microsystem Albert Ludwig University Fr

Page 2: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

E.B. Rud Page 2

Introduction

Re

E

ATb

2

Tu

JSM

ints

.im de/simulation/

c

i@ k.de

tek.

timte

nyi – AISEM tutorial, Trento 2003

view. B. Rudnyi, J. G. Korvink, utomatic Model Reduction for ransient Simulation of MEMS-ased Devices, Sensors Update, 002, 11, 3-33.

torial. G. Korvink, IEEE Sensors hort Course on Compact odelling, 2002.

Prepr♦ www

Conta♦ rudny

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

E.B. Rud Page 3

Introduction

Co

I

S

S

Is

L

N round picture © Ponderosa Forge

Forging a smaller System

Backg

nyi – AISEM tutorial, Trento 2003

ntentsntroduction to the idea

tatement of the problem

mall linear systems

ntroduction to Krylov ubspaces

arge linear systems

onlinear systems

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

E.B. Rud Page 4

Introduction

Ge

Reduced Order System of ODEs

4 5

Discrete System of ODEs

3

nyi – AISEM tutorial, Trento 2003

neration Paths

Device Description

Direct Translation Lumped Model

Discretization MeshPDEs & Geometry

1

2

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

E.B. Rud Page 5

Introduction

W

Cs

diagram:

ca

uced

FEM +model red.

stem levelulation to

velop inteligentcuit

el

se

tion

Red

Sysimdecir

mod

nyi – AISEM tutorial, Trento 2003

hy is it useful ?ompact model for system level

imulation:Reduced model fits naturally in system level simulators.The generatation of the reduced model can be almost automatic.

♦ Block

Devicespecifi

Changein devic

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

E.B. Rud Page 6

Small Pause

Su

Mtt

Ibp

s

M

ue

’s Next?

u to the idea

e the problem

li systems

u to Krylov ac

li systems

ne stems

ction

nt of

near

ctiones

near

ar sy

nyi – AISEM tutorial, Trento 2003

mmaryany computational nodes in a

ypical FEM (...) model appear o be “redundant”.

t appears that much of the ehaviour of a system takes lace in a low dimensional ubspace.

OR can greatly improve the se of simulation tools during ngineering design.

What♦ Introd

♦ Statem

♦ Small

♦ Introdsubsp

♦ Large

♦ Nonli

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG

E.B. Rud Page 7

ent of Problem

De

D

I

S

it Form:

F such that

for

s “small”:

E

E

M

z

A b

– A ℜ n ℜ n×∈1– b ℜ n∈

z k k n«

∈t( min x t( ) X z t( )⋅–

ind

i

x⋅ +

1 F⋅

f⋅

Xz εεεε+

ℜ∈

ℜ n

) =

nyi – AISEM tutorial, Trento 2003

Statem

livered ODEsiscussion Limited to 1st Order

mplicit Form (MNA, T-psi):

econd Order (mechanics):

:

♦ Explic

♦ Goal:

where

and

dxdt------⋅ F x⋅ f+=

F, ℜ n ℜ n×∈ f x t( ), ℜ n∈

d2y

dt2---------⋅ D dy

dt------⋅ K y⋅+ + f=

dydt------= M 0

0 I

ddt----- z

y⋅ D K

I– 0zy

⋅– f0

+=

dxdt------ =

A E=

b E=

x X=

εεεεmin εεεε

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 8

ent of Problem

Sy♦ O

o

♦♦

-scale dynamic system

e tem

en

B u⋅+=

y x⋅

A B u⋅+

y z

in y t( ) y t( )–

d sys

ce

A x⋅

C=

ˆ z⋅

C ⋅=

m

nyi – AISEM tutorial, Trento 2003

Statem

stem Theory Versionften solution is not needed ver entire domain, i.e., with:

Inputs

Outputs

Scatter Matrix

Gather Matrix Multiple input–multiple output MIMOSingle input–single output SISO

♦ Large

♦ Reduc

♦ Differ

u ℜ m∈

y ℜ p∈

B ℜ n ℜ m×∈

C ℜ p ℜ n×∈

dxdt------

dzdt------ =

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 9

of the Problem

PiRe

. .

.

Befo

Afte

S Output

Σ =

Σ =

C

C

=

=

ystem

nyi – AISEM tutorial, Trento 2003

Statement

ctorial presentation

.

. .

re:

r:

User Input

A BC

A B

C

A

A

B

B

=

=

+

+

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 10

Small Pause

Su♦ S

npr

♦ Mms

’s Next?u to the idea

e the problem

li systems

u to Krylov ac

li systems

ne stems

ction

nt of

near

ctiones

near

ar sy

nyi – AISEM tutorial, Trento 2003

mmaryystem theory provides a atural language to describe a roblem of model order eduction.

ost results comes from athematicians working for the

ystem theory.

What♦ Introd

♦ Statem

♦ Small

♦ Introdsubsp

♦ Large

♦ Nonli

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 11

Linear Systems

HaVa

♦ S

♦ I

♦ I

♦ S

mians:

n uations:

B BT eATt⋅ ⋅ ) td0

CT C eAt⋅ ⋅ ⋅ ) td0

T B BT⋅+ + 0=

A CT C⋅+ + 0=

σ λ i P Q⋅( )

ov eq

eAt ⋅(

eATt(

P A⋅

Q ⋅

i =

nyi – AISEM tutorial, Trento 2003

Small

nkel Singular lues (HSV)

ystem:

mpulse response:

nput-to-state:

tate-to-output:

♦ Gram

♦ Lyapu

♦ HSV:

Σ A BC

=

h t( ) C eAt B⋅ ⋅=

ξ t( ) eAt B⋅=

η t( ) C eAt⋅=

P ∫=

Q ∫=

A P⋅

AT Q⋅

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 12

Linear Systems

De lues

Antoulos♦

2(

nyi – AISEM tutorial, Trento 2003

Small

cay of Hankel Singular VaTheory

Error bound: If the system is reduced to one with k largest HSV then

G G– ∞<

σk 1+ … σn+ + )

Page 13: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 13

Linear Systems

Tr♦ I

Di♦ S

♦ H♦

♦ B♦

ter than HNA. not preserve the tio state.la turbation Appr.se he stationary state.en eighted model tio

G

G( W ∞

naryr Perrve tcy-wn

G– )

nyi – AISEM tutorial, Trento 2003

Small

ansfer Functionn Laplace Domain:

fferent methodstable systems

In unstable systems something should be done with unstable poles.

ankel Norm Appr.Produces an optimal solution

alanced Truncation Appr.Most often used.

♦ Fas♦ Do

sta♦ Singu

♦ Pre♦ Frequ

reduc

Σ s( ) C sI A–( ) 1– B⋅ ⋅=

V

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 14

Linear Systems

SL♦ F

fw♦

♦ I♦♦♦♦

♦ H♦ M

e computational lexity is .i “small” systems:

me SerialTime Parallel (4 processor)

25

3 130

46 666

2668

O N3( )

ted to

Ti

60

70

43

nyi – AISEM tutorial, Trento 2003

Small

ICOT LibraryORTRAN Code + Examples ound at:ww.win.tue.nl/niconet

European Community BRITE-EURAM III Thematic Networks Programme.

mplements all methods:Balanced Truncation Appr.Singular Perturbation Appr.Hankel Norm Appr.Frequency-weighted MOR.

as a parallel version.atlab has licensed SLICOT.

♦ Yet, thcomp♦ Lim

Order

600

1332

2450

3906

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 15

Small Pause

Su♦ H

g

♦ Stsl

♦ Sts

’s Next?u to the idea

e the problem

li systems

u to Krylov ac

li systems

ne stems

ction

nt of

near

ctiones

near

ar sy

nyi – AISEM tutorial, Trento 2003

mmaryankel singular value theorem

ives error bound.

ystem theory has mature heory for MOR of linear ystems. We can find optimal ow dimensional subspace.

LICOT library implements heory and is “easy to use” for mall linear systems.

What♦ Introd

♦ Statem

♦ Small

♦ Introdsubsp

♦ Large

♦ Nonli

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 16

ylov Subspaces

De♦ A

♦ Ts

o

♦ Ao

s the left Krylov subspace of and of order .

es ow-dimensional of paces of order .

c utation is ric unstable because of in ors.

e 0 top algorithms of th ury.

{

{

l, ) A l k

k

the l subs

ompally g err

d in 1 cent

nyi – AISEM tutorial, Trento 2003

Introduction to Kr

finitionction of matrix on vector :

his is the right Krylov ubspace of and

f order .

ction of transposed matrix n vector :

♦ This i

♦ Definbasis

♦ Directnumeround

♦ Includthe 20

A r

r A r⋅ … Ak 1– r⋅, , , }

KR A r,( ) A b

k

Al

l AT l⋅ … ATk 1–l⋅, , , }

KL A(

Page 17: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 17

ylov Subspaces

Ar♦ M♦ P

m

♦♦♦ A

op

os Algorithmos ors:

bi-orthogonal:

on :

tr onal matrix.n ast for large k.

V

V

H

s r A r … Ak 1– r⋅, ,⋅, }

sp AT l … AT k 1–( ) l⋅, ,⋅ }W

g δ1 δ2 … δk, , ,( )

⋅ HL

vect

are

to

i-diagcy: F

pan{

an l,{

dia=

A

W =

nyi – AISEM tutorial, Trento 2003

Introduction to Kr

noldi Processodified Gram-Schmidt.

roduces basis and small atrix

is orthonormal:

is upper-Hessenberg matrix new vector must be rthogonalized to all the revious vectors.

Lancz♦ Lancz

♦ and

♦ Relati

♦ is Efficie

VHA

VT V⋅ I=T A V⋅ ⋅ HA=

A

V =

W =V

VT W⋅

VT A⋅HL

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ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 18

Small Pause

Su♦ T

n♦

♦ T♦

♦ Tn♦

’s Next?u to the idea

e the problem

li systems

u to Krylov ac

li systems

ne stems

ction

nt of

near

ctiones

near

ar sy

nyi – AISEM tutorial, Trento 2003

mmarywo algorithms can form umerically stable basis:

Both are amenable to large, sparse systems due to matrix-vector product.

he Lanczos algorithm is faster.Basises are biorthogonal.

he Arnoldi algorithm is more umerically stable.

Basis is orthogonal.

What♦ Introd

♦ Statem

♦ Small

♦ Introdsubsp

♦ Large

♦ Nonli

Page 19: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 19

Linear Systems

Pa♦ C

f

♦♦ P

♦ M

ed func. is small rational.

no :é oximant: match

oments.é approximant: li match less

mit hing is numerically

blE mptotic wavefrom lu does not work.

G

s

m

a s z1–( )… s zk 1––( )p1– )… s pk–( )

--------------------------------------------=

2

logy appr

m-typecitlyents. matce: - asyation

s(--------

k

nyi – AISEM tutorial, Trento 2003

Large

dé Approximantsan always express transfer

unction matrix elements using:

are the zeroes, poles.

adé matches moments about

:

oment matching

for

♦ Reduc

♦ Termi♦ Pad

♦ Padimpmo

♦ Explicunsta♦ AW

eva

ij s( )a s z1–( )… s zn 1––( )

s p1–( )… s pn–( )-----------------------------------------------------=

zi pi,k

0 Gij s( ) mi s s0–( )p

p 0=

k n<

∑=

i miˆ= i 0 … q, ,=

Gij s( )

q =

Page 20: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 20

Linear Systems

ImM♦ A

p

os: Also left subspace

ce , and such

di licitly matches nos licitly matches n

K

N

T, MT CT⋅=

X Y

I s0HL+( )⋅=

YT M⋅

k

2k

,

s

impts. impts

L) L

HL

HL1–

HL1– ⋅

C X⋅

nyi – AISEM tutorial, Trento 2003

Large

plicit Moment atchingrnoldi: Right subspace

, and

roduces and such that:

♦ Lancz

produthat:

♦♦ Arnol

mome♦ Lancz

mome

kr M N,( ) M A s0I–( ) 1–

=

M B⋅=HA X

A HA1– I s0HA+( )⋅=

B HA1– XT M⋅ ⋅=

C C X⋅=

Kkl M(

A

B =

C =

Page 21: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 21

Linear Systems

Pr

1k

v

vO1

⊥ 2

liq rojectionOrt

Arn Lanczos

SimMore natural:

ControllabilityObservability

v

ue P

nyi – AISEM tutorial, Trento 2003

Large

ojection Idea

1k

ℜ 2k

v

v⊥ 1

Obhogonal Projection

oldi

pler

Page 22: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 22

Linear Systems

Co♦ T

♦♦

♦ B

QR Decomposition

h ality e riangle solvee atrix multiply

ve ers:co ioner from Appl.

pl t fast matrix lt Again, application h ere

F

Q 1– QT=

ogon

fast tfast m

Solvndit

emeniply: elp h

Q R⋅

nyi – AISEM tutorial, Trento 2003

Large

mputing Inverses ypical case:

Do not compute : Bad ideaFind such that

y LU Decomposition:

Two fast triangle solves

♦ By

♦ Ort♦ On♦ On

♦ Iterati♦ Pre♦ Im

mucan

F 1– w⋅

F 1–

x F x⋅ w=

L U⋅=

L U x⋅( )⋅ w= L y⋅ w=⇔U x⋅ y=

F =

Page 23: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 23

Linear Systems

Ex♦ 6

♦ C

EM Circuit: PVL

: Z. Bai, R. Freund, A Partial Padé-via-LanzcosMethod for Reduced-Order Modelling

Source

nyi – AISEM tutorial, Trento 2003

Large

amples from EE4 Pin RF IC: Padé via Lanczos:

D Player: Comparison

♦ PEEC

Pin 1 Error

Source: Z. Bai, R. Freund, A Partial Padé-via-LanzcosMethod for Reduced-Order Modelling

Source: Antoulas, Sorenson, Gugercin, A Survey ofModel Reduction Methods for Large Systems

Page 24: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 24

Linear Systems

Ra♦ E

a

♦ T♦♦

♦ CEQ

Kry n

PartialRealization

Padé

ShiftedPadé

RationalInterpolation

True

True

Red Thesis

lov Projectiouction, PhD

nyi – AISEM tutorial, Trento 2003

Large

tional Krylovxpansion usually accurate bout .

his suggests:Multiple expansion points Matching transfer function moments at all points

hallenge: Where to place xpensive solves (Many LU or R decompositions)

s0

si

si

Source: E. Grimme:Methods for Model

Page 25: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 25

Linear Systems

SoEq♦ P

gK

♦ S♦

♦ V

al remedy: Low rank ximation of grammians.

ns trix rs trix o ov-based, also for an .

A K (Matlab based)e .org/lyapack

O n2( )∼ O n( )∼

e mae maKrylcing

PACtlib

nyi – AISEM tutorial, Trento 2003

Large

lving Lyapunov uationsadé approximants do not have lobal error estimates ... SVD-rylov.

teps:Solve Lyapunov equations for Grammians and .Eigen-decompose .

ery expensive:

♦ Generappro

♦ De♦ Spa♦ Als

bal

♦ See LYwww.n

P QPQ

O n3( )∼

Page 26: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 26

Small Pause

Su♦ P

♦ Aga

♦ Ru

♦ F♦♦

’s Next?u to the idea

e the problem

li systems

u to Krylov ac

li systems

n stems

ction

nt of

near

ctiones

near

ear sy

nyi – AISEM tutorial, Trento 2003

mmaryadé and Krylov are related.

rnoldi and Lanczos can enerate implicitly Padé pproximants (PVL).

ational Krylov improves sing many expansions.

uture holds promise for:Large Lyapunov solvers.Large matrix exponential approximants.

What♦ Introd

♦ Statem

♦ Small

♦ Introdsubsp

♦ Large

♦ Nonli

Page 27: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 27

linear Systems

Sp♦ B

♦ Sp

♦ R

nonlinear by Taylor sion:

xA' x⋅+

Tx …+

Li f NLi ∂xj⁄

jk NLi ∂xj∂xk⁄

) x) x⋅ C u⋅+

f NL0

A''⋅ ⋅

j ∂=

∂ f=

A(=

nyi – AISEM tutorial, Trento 2003

Non

ecial Casesasic Problem:

plitting linear and nonlinear arts:

educe linear part as usual

♦ Treat expan

f x u,( )= y g x( )=

f f L f NL+=

ALij f L0 ∂ f Li ∂xj⁄+=

f NL =

12---x+

A'N

A''NLi

f x u,(

Page 28: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 28

linear Systems

PO♦ S

♦ Ass

♦ P

the truncated snapshots pping the smallest

lar es:

du system, form:

va es:l n near solve

w mpute ?e ition

x

S

S

Sk UΣkVT

=

T ˆ x⋅ u, )

x⋅ )=

UTA x( )U

valu

ced

ntagonli

to co intu

f U(⋅

g U(

nyi – AISEM tutorial, Trento 2003

Non

D Ideaolve the full nonlinear system

t appropriate times, take napshots , and collect the napshots in a matrix:

, m is many!

erform SVD of :

♦ Form by dro

singu

♦ For re

♦ Disad♦ Ful

♦ Ho♦ Som

f x u,( )= y g x( )=

si

s1 s2 … sm, , ,{ }=

S

UΣVT σiui vi⊗i 1=m∑= =

x U=

y

Page 29: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 29

linear Systems

PO

e: J. Chen, S. Kangiaues for Coupled Circuit and MEMS Simulation

R itch:FD nonlinear beamin ing squeeze film& rodynamic forceK en-Loève + Galerkin

20

SourcTechn

F Sw for

clud electarhun

kHz

nyi – AISEM tutorial, Trento 2003

Non

D Example: MEMS

15 V,

7.4 V, Step input

Page 30: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 30

Small Pause

Su♦ A

s♦

♦ P♦♦

♦ N

nyi – AISEM tutorial, Trento 2003

mmarypplication-oriented

implifications exist, but:May need symbolic manipulations.May need expensive evaluations.

OD is general, and works, but:Computationally expensive.Requires user interaction.

onlinear MOR is tough.

Page 31: based Devices - evgenii.rudnyi.ru

ALBERT-LUDWIGS-UNIVERSITÄT FREIBURGE.B. Rud Page 31

Conclusions

Sm♦ E

k♦ F

g

La♦ R♦ A♦ L

m♦ W♦ P

r

e may yield:punov for large systems.

pr ation of matrix o al for large te

n s l application-d chniques.e tion or Splitting.

O tw y snapshots?

oximnentims.

earpeciaent tearizaD, bu man

nyi – AISEM tutorial, Trento 2003

all Linearxcellent state: complete nowledge.or accuracy goal, automatic uaranteed reduced model.

rge Lineareasonably good choices.rnoldi more stable.anczos matches more oments.hen to stop reducing?

adé local, nonoptimal for wide ange. Remedy: rational Krylov.

♦ Futur♦ Lya♦ Ap

expsys

Nonli♦ Either

depen♦ Or Lin♦ Else P

♦ Ho