Auger Electron Spectroscopy (AES) 1. Brief History Auger Effect discovered in 1920’s Meitner...
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Transcript of Auger Electron Spectroscopy (AES) 1. Brief History Auger Effect discovered in 1920’s Meitner...
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Auger Electron Spectroscopy
(AES)
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Brief History
• Auger Effect discovered in 1920’s
• Meitner published first journal
• Auger transitions considered noise at first
• 1953-JJ Lander• Characterization of solids
today
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Three Steps of Auger Electron Spectroscopy
• Note: Solid Samples• 1) Atomic ionization• 2) Electron emission• 3) Analysis
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Atomic Ionization
• “Core Hole”• Electron Beam• Core hole probability:σ=Constant x C(Ei/EA)/EA^2
http://pages.jh.edu/~chem/fairbr/surfacelab/aes.html
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The Auger Process
http://pages.jh.edu/~chem/fairbr/surfacelab/aes.html
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Important Nomenclatures• Electron orbitals and principle quantum number (n)
• Given subscripts based off spins
http://pages.jh.edu/~chem/fairbr/surfacelab/aes.html
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Auger Transissions
• KE of Auger Electron=E(A)=EK-(EL1+EL2)Ex: Silicon K1=1600L1=60, L2=30E(A)=?• Rough Estimate of KE
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Auger Electron Spectra
Direct Spectra• 1x zoom (bottom)• 10x zoom (top)
newton.phys.uaic.ro/data/ppt/L5(AES).ppt
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Auger Electron Spectra
dN(E)/dE Plot d[E*N(E)]/dE plot
Density of States= N(E)=(4π/h3)(2mh*)3/2(Ev-E)1/2
newton.phys.uaic.ro/data/ppt/L5(AES).ppt
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Qualitative Analysis
Elemental Identification Procedure
• Main Auger Peaks ID’d• Values compared to table• ID’d elements labeled on
spec• Repeat procedure until
peaks found
Auger Sample
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Qualitative Analysis
http://www.eag.com/cmss_files/imagelibrary/auger-electron-energies.gif
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Electron Beam/Sample Interaction
• Penetrates 1-3µm• Mean-free path 5-50
angstroms• Backscattered electrons• Secondary electrons• X-Rays from sample• Auger Electron
http://en.wikipedia.org/wiki/Scanning_electron_microscope#Detection_of_backscattered_electrons
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Sample Prep
• Sample 1mm thickness, 1 cm diameter
• Mounted in Ultra-High Vacuum
• Sputtering• Annealing
http://wwwold.ece.utep.edu/research/webedl/cdte/Fabrication/sputtering.gif
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Electron Beam
• Monochromatic electrons• Beam 0.1mm-0.5mm wide• Scans surface
http://www.bing.com/images/search?q=Electron+Beam+Tube&view=detailv2&&&id=4CF43715C2DE021317F945D9A8206DE75B473527&selectedIndex=9&ccid=k%2fBps2H4&simid=608029209144657635&thid=JN.jnUWfUaASQqjpf3KGWNidQ&ajaxhist=0
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Analyzers
• Grid Purposes• Low Energy Electron
Diffraction (LEED)
Retarding Field Analyzer (RFA)
http://www.udel.edu/pchem/C874/LEED_lecture.pdf
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Non-Retarding Mode
• Applied Voltage without suppressor
• Broader energy absorbed• More imaging per run• Less luminescence• Less angular contact
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RFA LEED optics
• Low-energy electrons strike screen (30-300eV)
• De Broglie relationship λ A = (150/E eV)1/2 • Spacing between atoms• Fluoresce when strike
screen
http://www.udel.edu/pchem/C874/LEED_lecture.pdf
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Data Analysis
• XY-Recorder-intensities• Video Camera• Collects all energies• Single points collected• Produces spectra• Compared to Calculated
http://www.matscieng.sunysb.edu/leed/dataacquire.html
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Cylindrical Mirror Analyzer
• Two concentric metal cylinders
• Different V on each cylinder• e- fired from gun to sample• e- of certain energies
analyzed
Double Pass Design
http://uksaf.org/tech/cma.html
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Hemispherical Analyzer• Concave and Convex Hemisphere• Centers of curvature are coincident
so electrons come to a point at detector
• Electric Field-varying voltages• Pass electrons to analyzer• Series of lenses before detector• Constant Retard Ration (CRR)• Constant Analysis Energy (CAE)
http://uksaf.org/tech/cha.html
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Advantages and Disadvantages
• Advantages• Surface Sensitive• Elemental and Chemical composition and
analysis by comparing sample to known samples
• Quantitative composition information as a function of depth below the surface
• Good for spatial distribution of elements in sample (structure).
• I will fix this slide tomorrow just haven’t found out what to do yet about it.
• Disadvantages• Samples must be able to compatible with
ultra high vacuum• Samples must be conductive• Possibility of beam damage for organic
molecules• Cannot detect hydrogen or helium• Quantitative detection is dependent on
the element, but accurate to high sensitivity
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