Atomic Layer Deposition for Microchannel Plate Fabrication at Argonne
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Transcript of Atomic Layer Deposition for Microchannel Plate Fabrication at Argonne
Atomic Layer Deposition for Microchannel Plate Fabrication at
Argonne
Jeffrey Elam, Qing Peng, Anil Mane, Thomas Prolier, Joe Libera
Large Area Photodetector Collaboration Meeting Argonne National
Laboratory October 15, 2009 Atomic Layer Deposition (ALD) Thin Film
Coating Technology
Atomic level thickness control Deposit nearly any material Precise
coatings on 3-D objects For the technologies that Ill be describing
today, ALD has attributes that uniquely suit it Can ALD Make Better
Microchannel Plates? 2 ALD for Fabrication of MCPs
Start with porous, insulating substrate Glass capillary plate
Anodic aluminum oxide (AAO) membrane ALD of resistive film on all
surfaces (inside of pores, on faces, etc.) ALD of secondary
electron emissive film Deposit metal electrodes on outer surfaces
33 mm Photo of AAO 3 3 MCP Structure (not to scale)
pore 1 KV Very schematic not correct open area ratio Might need to
do Au before Al2O3 for better contact Add HV leads resistive
coating (ALD) emissive coating (ALD) conductive coating (thermal
evaporation or sputtering) 4 4 ALD Program Goals: ALD for Emissive
Coating
Alternative ALD Coatings: Conventional MCPs: SiO2 Al2O3 MgO ZnO
(ALD SiO2 also) Ask for better slide from Zeke Many material
possibilities Tune SEE along pore 6 6 ALD for Resistive
Coating
Target: M through MCP ZnO: conductor Al2O3: insulator ZnO/ Al2O3
alloy tunable resistivity Tune composition and thickness of film to
adjust MCP resistance Many other material combinations: Reduce
conditioning time Reduce thermal runaway Reduce (R/%) Improve
part-to-part uniformity 7 7 ALD Laboratories at Argonne current
setup
Materials development In Situ measurements - Multiple 33mm
substrates - Single 8 substrates ALD Laboratories at Argonne,
coming soon
Beneq TFS500 Multiple 8 square substrates Ordered, ~3 month
delivery Cambridge Nanotechnology Fiji - Plasma-ALD Photocathodes
Finalizing quote Progress Before Start of LAPD Program
Glass Capillary Plate with 100 nm ALD ZnO/Al2O3 and 50 nm Sputtered
Gold 10 10 Progress Before Start of LAPD Program
SEM Si Zn Al Au Describe how pores are not all aligned (artifact
from fracture angle) ALD ZnO and Al2O3 extend into pores Evaporated
Au only on edge of pores 11 11 Progress: Cross-Sectional Image of
ALD Film in MCP
Glass ALD Film 100 nm ALD film visible in middle of MCP 12 12