Assembly and Testing of a MEMS Mirror for Endoscopic OCT
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Assembly and Testing of a MEAssembly and Testing of a MEMS Mirror for Endoscopic OCMS Mirror for Endoscopic OC
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IMSURE Fellow: Dolly CregerIMSURE Fellow: Dolly Creger
Mentor: William TangMentor: William TangGraduate Student: Jessica AyersGraduate Student: Jessica Ayers
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Definitions
Microelectromechanical Systems (MEMS)- micron-scale devices linking mechanical parts to electrical components.
Optical Coherence Tomography (OCT)- Imaging technology which uses infrared light to image cross-sections of biological tissue with micron scale resolution.
Chemical Vapor Deposition (CVD)- A process in which a controlled chemical reaction produces a thin surface film.
Photoresist- A light sensitive coating that is used to transfer the image of a mask onto the surface of a wafer, followed by a reactive ion etch (RIE).
Stiction- The surface tension of liquid on MEMS components.
Shear Mode Quartz- A piezoelectric effect in a lateral plane.
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Realm of BiomedicineRealm of Biomedicine
Coronary RestenosisCoronary Restenosis Laryngeal Laryngeal cancer, Barrett’s Esophagus.cancer, Barrett’s Esophagus.
OCT for noninvasive techniques OCT for noninvasive techniques for cancer screening.for cancer screening.
Majority of research lies in lineaMajority of research lies in linear OCT.r OCT.
Trachea, GI Tract, or blood vesTrachea, GI Tract, or blood vessels require a rotary laser beam.sels require a rotary laser beam.
360º rotating devices are curren360º rotating devices are currently limited by the size of the mottly limited by the size of the motor. or. Fig 2. coronary artery restenosis
www.lightlabimaging.com Fig 3. Mouse Trachea www.lightimaging.com
Fig 1. coronary artery comparison www.lightimagin.com
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We are working on a different kind of miWe are working on a different kind of micromachine…cromachine…
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Simple Micro MachineSimple Micro Machine
Fig 4. SEM Image: Dolly Creger
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Our ProjectOur Project
Develop a smaller 360º rotating mirror that Develop a smaller 360º rotating mirror that can fit inside a 1 mm diameter probe.can fit inside a 1 mm diameter probe.
This will cut the size of the current rotating This will cut the size of the current rotating devices in half.devices in half.
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Endoscopic ProbeEndoscopic Probe
Fig 5. Conceptual drawing of endoscopic probe. Jessica Ayers UCI
1 mm
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Fabrication Fabrication
Commercial PolyMUMPs ProcessCommercial PolyMUMPs Process
Silicon
Silicon NitridePoly 0
1st Oxide
Poly 1
2nd OxidePoly 2
Metal
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L-EditL-Edit
592 µm x 527 µm 990 µm x 941 µm
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Stiction
Fig 4 and 5. Mirror Assembly Jessica Ayers UCI
Mirror
Assembly
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Scratch DriveScratch Drive
Fig 6 and 7. Scratch Drive Array Jessica Ayers UCI
Electrothermal ActuatorsMicrovibromotors, Electrostatic Micro Conveyer, Dipole Surface Drive MicroengineElectrostatic Linear Inchworm Motors Ultrasonic/Magnetic Actuators
520 µm diameter
876 µmdiameter
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Stepping motion of the SDA:
Electrostatic load deflects the plate.
Bushing is scratched forward.
Voltage is reduced and the plate is pulled forward.
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ResultsResultsScratch Drive: ~200V .5-1.5 HzScratch Drive: ~200V .5-1.5 Hz
StictionStictiona. Evaporationa. Evaporationb. Instantaneous vaporizationb. Instantaneous vaporizationc. Leave submergedc. Leave submerged
AssemblyAssemblya. Probe Stationa. Probe Stationb. Microspatulab. Microspatulac. Magnetismc. Magnetism
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Future WorkFuture Work
StictionStictionContinuous laser to vaporize alContinuous laser to vaporize all the liquid instantaneouslyl the liquid instantaneouslyBackside EtchingBackside EtchingShear Mode QuartzShear Mode Quartz
AssemblyAssemblyThicker Ni CoatingThicker Ni CoatingPhotoresist HingesPhotoresist Hinges
Fig 8. Absorption of silicon and water, Jessica Ayers UCI
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Special Thanks!Special Thanks!National Science FoundationNational Science Foundation
UROP-IMSUREUROP-IMSURE Said Shokair Said Shokair Jerry McMillan Jerry McMillan
UCIUCI INRFINRF Goran Matejasevic Goran Matejasevic
Professor Willliam TangProfessor Willliam Tang
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Jessica AyersJessica Ayers
Charlie WenCharlie Wen
Gloria YangGloria Yang
Le "Yanni" YanLe "Yanni" Yan