ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For...
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ASM(J) Eagle XP – CVD350 August 2014
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Transcript of ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For...
![Page 1: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER](https://reader031.fdocuments.net/reader031/viewer/2022022507/5acbc8d97f8b9a875a8bce78/html5/thumbnails/1.jpg)
ASM(J) Eagle XP – CVD350August 2014
![Page 2: ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For RC3 and RC4 4 Canisters GAS BOX (Dry Gas) Reactor 3 Reactor 4 RC controller RC WATER](https://reader031.fdocuments.net/reader031/viewer/2022022507/5acbc8d97f8b9a875a8bce78/html5/thumbnails/2.jpg)
ASM(J) Eagle XP - 3D model top/ right side view
GLOBALFOUNDRIES 2
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ASM(J) Eagle XP - Top view
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ASM(J) Eagle XP - Split unit view
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ASM(J) Eagle XP - precursor vessels drawing
Here: VOL.=1.3 LITERS
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ASM(J) Eagle XP – gas schematic drawing reactor 3
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ASM(J) Eagle XP – gas schematic drawing reactor 4
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ASM(J) Eagle XP – clean room front view picture
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ASM(J) Eagle XP – clean room left side view picture
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