Apelio Eco User Manual
description
Transcript of Apelio Eco User Manual
-
APELIOUI20EcoNT
MADA?
?????? ??? ????
??????
?? ??
??
-
@
J~!
|0
.ll!
.|
/~ 1993 11 1 i(SI!!{ }||
!
A
A
A
II
!
3
-
1 21.1 21.2 221.3 31.4 31.5 31.6 32 53 74 115 136 156.1 !156.2 166.3 () 20
1 1-11 1-21.1 1-21.2 1-31.2.11-31.2.21-41.2.3 1-41.2.41-51.3 1-81.3.11-91.3.21-101.3.31-111.3.41-111.3.51-121.3.61 121.4 NC1-131.5 1-132 1 142.1 1-142.2 1-153 1-17
(l)?? ? ?
-
3.1 .....1-173.2 1-183.3 1-193.4 1-203.5 NC1-213.6 1-223.7 ..........c1 23
2 2-11 2-31.1 2-31.2 2-31.3 2-41.4 2-42 2-52.1 2-52.1.1?2-52.1.2() 2-5??
?????????
????
2.1.42-72.1.52-82.1.6 2-8
2.2 2-92.2.12-92.2.22-9
3 2-103.1 2-103.1.12-103.1.22-123.1.32-12
3.2 2 133.2.12-133.2.22-13
3.3 2-143.4 ?2-143.5 2-143.6 2-153.7 2-163.8 2-173.9 2-173.10 2-18
IV
-
3 3-11 3-22 3-33 NC3-53.1 3-53.2 NC3-63.3 3-133.4 CD-ROM3-143.5 3-153.6 3-153.7 363.8 ) 3-164 3-185 ?()3-206 3-217 3-228 3-249 3-259.1 3-259.2 3 259.3 3-26
4 ..........4-11 4-31.1 4-31.2 !4-31.3 1'-14-51.4 14-51.5 !4-52 4-62.1 4-62.2 4-72.2.11jA4-72.2.21B4-102.2.3C-4-142.2.41JlD4-142.3 4-172.3.14-182.3.2MOl4-192.3.34-202.3.44-21
( |)
v
-
vi
2.3.54-222.3.64-242.3.74-26
3 4-283.1 4-284 FILE......4-294.1 4-295 4-305.1 4-305.2 |4-305.3 M4-315.3.14-325.3.2 4-365.3.3 4-405.3.4-4-445.3.5 4-485.3.64-525.3.74-57
5.4 4-585.5 4-615.6 4-645.7 PHNC 4-665.7.1 PHNC4-665.7.2PHNC 4-67
5.8 4-685.8.1-4-685.8.24-69
6 4-706.1 4-706.2 |4-706.3 4-726.3.14-75
6.4 4 806.4.14-83
6.5 4-846.5.14-86
6.6 4-876.6.14-886.6.24-886.6.3) 4-906.6.4( 4-916.6.54-926.6.64-92
-
6.7 4-936.7.1 4-95
7 4-967.1 4-968 4-988.1 ....4-98
5 11 5-31.1 5-31.2 FILE5-41.2.15-51.2.25-61.3 ()5-71.3.15-81.3.25-81.3.35-81.3.4 5-91.3.55-111.3.65-111.3.7 5-111.3.8 5-121.3.95-12
2 5-132.1 5-132.2 5 142.3 5-142.4 5-152.5 5-152.5.15-152.5.25-15
2.6 5-162.7 5-162.8 5-172.9 5-172.10 5-182.11 5-182.12 5-202.13 JUMP ()5-202.14 5-212.15 5-212.16 5-22
( |)
vii
-
VIII
2.17 5-262.18 ()
)5-272.19 5-282.20 5-29
66-11 6-31.1 6-31.2 6-41.2.1 6-41.2.26-7
2 6-82.1 6-82.2 6-92.3 26-92.4 YZ6-102.5 6-112.5.16-112.6 6-122.6.1 6-122.6.2 r6-12
3 6 133.1 6-133.1.16-133.1.26-133.1.36-163.1.46-183.1.56-193.1.66-203.1.76-223.1.86-293.1.96-303.1.10 6-313.1.116-333.1.126-343.1.136-343.1.14 Z( IJ ~- 6-343.1.156-353.1.166-353.1.176-353.1.186-363.1.19Z6-36
-
3.1.20 6-363.1.216-373.1.226-37
3.2 6-383.2.16-383.2.26-39
3.3 6-403.3.1!6-403.3.2i6-413.3.36-41
4 MOl6 424.1 MOI6-424.2 MDI..............f'6-434.3 MOI| 6-444.4 MOI6-455 6-465.1 6-465.2 |6-466 JI6-486.1 JI6-486.1.1 6-486.1.26 506.1.3JI6-52
7 71 7-22 J(7-43 7-74 7-84.1 7-84.1.1NC7-84.1.2NC7-104.2 7-125 Z(7-136 7-15
8 8-11 8-41.1 8-41.2 8-51.3 Z 8-6
( |
Ix
-
x1.4 8-61.5 )78-71.6 8-81.7 ( 8-91.8 8-101.9 8-111.10 8-121.11 8-122 18-132.1 8-132.2 8-133 18-143.1 8-143.2 NC?8-153.3 8-163.4 8-163.5 Y 8-173.5.18-173.5.28-183.5.3Y 8-183.5.4 8-19
3.6 8-213.7 8-213.8 8-214 3(let5008-234.1 ( (1)8-235 38-245.1 8-245.2 8-245.2.1 8-255.2.2 8-265.2.3 8-27
6 6(1000)8-286.1 ( (2)8-286.2 8-296.3 71
-
9.1 8-379.2 8 379.3 8-389.4 8-399.5 8-4010 ()8-4210.1 8-4310.2 8-4510.3 8-46
11 8-4712 8-5113 8-5114 8-5215 8-5316 8-61
9 11 9-22 9-42.1 9-42.2 9-52.3 9-73 .......................9-84 |.............................91O5 ......................9-125.1 .5.1.13...............9-125.1.2)79-125.1.39-135.1.49-135.1.59-155.1.69-15
10 10-11 10-21.1 "710-21.2 )710-21.3 )710-31.4 10-32 10-42.1 NC10-4
(l
XI
-
710-7910-84
2.22.3
11~1 11-22 ..11-42.1 11-42.2 11-52.3 711-63 11-73.1 11-73.2 11-93.3 11-9
11-1.................................
12 12-212-212-2NC?12-3NC12-412-5() 12-5Z(HS-98) 12-6OVSill12-7
12-1?????
xii
-
1 21.1 21.2 221.3 31.4 31.5 31.6 32 53 74 115 136 156.1 156.2 166.3 ( 20
-
1 ()I123A3841
!4CO2
3AHe-Ne
1.1 iE!!l
CO2!|!fbCO2l
He-Ne!!
CO2!!!
-
1.3- 211!()|!)!
1.4 -()0
.let!
1.5 -1aaaa|l
1.6 (14)ZnSe()!
3
-
4-|l
-!
-
-
2 -(r6 J
(r6 J
!l(r6 J)
!|!
|!(r6 )
|!0
|!()|
|i(r5)
NC
J
rJ
-J
5
-
6
rLASERALIGNMENT()JrSYNCHRO CONTROL()J
r/!Jlet!
-l()(r6 )
-
3
()()I!()
(1)
|(8885
(2)
(131)
(3)
(1416)(134)
1.
2.lJ
3.
4.
(4)
(35)
l|(363)
(5)
(136)
!
7
-
(6)
1(135)
-!
- -
-
10 MADA
-
4 |
l!i
1&1 lm tl'~~\anti'
sEEctk
????????????
??? ????????
? ? ? ?
?
? ? ?
???
???
?
??
??
? ???????
???
??
? ?
?
? ? ???
11fV9ufrt.at??EF1iit7.Ji}II2IHrheatsii:liiA'}h:?hm .
11
-
AI
? ? ? ? ? ? ? ? F ! - f . ? ~ : ~ ~ -if;;. ~~
@.
K....H....................................~:fllU-~.1: ! 'tt!'H. i t'-b.uui .R. t~I)! . i........ nj
;a .t-7ii . j
i t? . ;
_l
A
HS-98
. .Z.8t T:'.
?? ?
_ S . . I .. D . . ~
~
~[]-7 iLlt
fO
nOI.?"~~ J.ht.'
12
-
5
/-- .-~--Jfj;
5ii :=~ F:Jjj;;::\~::.t: t'::.0:.1:II iji 7II I( I:~\Xi42j :L1:ji......_.._llI:::""it......!IiI I I1'l#~-{ ;!i F.........:f L?~;;; jL +\to ..;i
X ;ir-jk
??
()
???
Cen
rcJ
????
??
? ? ?
APE10111 255Eco
!
1)|!!|
5
5131ilEoF
????
???
?
??
2)|7!i(1270mmx1270mm)
3)l
? ? ??????
?
? ??
???
??
????
?
??????
13
??
?? ?
? ? ?
????
? ? ? ?
? ? ? ? ? ??
800? ? ? ? ?
510
~???? ???
?? ?
???????
??? ?
L-R~JI/!AA
800
....
jUlH
-
6
6.1 39|!
1
3A384l||
2
(1)
!|!|
l
(
!!
!
(2)
i1JI
15
-
6.2 39!|J1
I4
1
(1)i!
(2)!l|
(3)|l!
2
(1) E
l
!!
(2)|
(3)!!
!|
|
!!
16
-
(4)
! I~!!
(5)!
3
(1)
(2)
!|
(3)
!|l
(
-
(5)
!!591r!!
|
@
(6)
I~i()
4
(1)!
1
(2)!!l!
(3) l I~ 51
(4)|
(5)||!
18
-
()
4 38 3A
( O O
O O O
O O
O
O O O
O O
O O O
O O
O O
O O
O
{ O O O
O O O
O O
O O O O
O O Ot+ 8 O O O
O
O O O
O O O
O
O O O
!! O O O
OEfJlc
19
-
6.3 ( ZnSe:(
ZnSe
i
l
ZnSe
1 ()
) 500!
1525
:5mg/m3:O.2mg/m3
LD50
ADI
20
-
1~E ;
1 1-21.1 11.2 1-31.2.11-31.2.2r.J-1-41.2.3 1-41.2.411.3 11.3.11-91.3.21-101.3.31-111.3.41-111.3.5-1-121.3.61 121.4 NC1-131.5 1-132 1-142.11-142.2 1-153 1-173.11-173.2 1-183.3 1-193.4 1-203.5 NC1-213.6 1-223.7 1-23
-1
-
?
NC
'
'
??????
?????
_..~;/S::~?\-l.........~ ;
l vii nviii Ul ... )" I"1 "_._..~\ / i .I
:!:::;lliii ii1111 ?.-':::-.:-.-:-.:-.:C~~-:l J i ):i1JJj1;iii:iLLiJY 11i/J
1L--__V
1-2
-
1.2 1.2.1
ACY!!!!!!
|ACX!|!l|
!!X!Yx|()!
43
-
1.2.2
500mmx500mmNC! ""tv100!NCJ!
!J NC
A !!l
!
-
1.2.4APEIOID-252
7letrJ!12mm
|
165mm
~
|
45
-
J ()
A
c
/:
:
A B 359mm 72.5mm
359mm 32.5mm
C D1/2" 141mm 28mm
1-1/4" 165mm 40mm
2"* 189mm 52mm3-1/2" 230mm 72.5mm
1-6
-
()
/??
g
7
-
1.3
(CO2) (N2) (He)!CO2 (!)
AC|!CO2(He-Ne)|CO2ll
;
48
-
1.3.11!|
1ACZ()I
!
Z
(1)
-
70
.
Z!
49
-
-
4!
!()l()
! I~(O.lmm
(2)
!
(3)
Zl!
1.3.23
123
410
-
1.3.3!!E
!
1.3.4!!!!
? 7
-11
-
1.3.5ilCO2|!l
?????
1.3.6!
() CO2
lNC
(He-Ne)!CO2!!
-12
-
1.4 NCNCNCl
1.5 AMNC
AMNCCJ)4!iet
!AC 1!Ie(J')342!!!|let!
li!!
13
-
2 {
2.1
NC|!!
!
!!( )
1!
1-14
-
2.2
|!!|
|let
!|!
!l()llet
!!!let
????????? ????????
??????????
?
???
??
????????????????
?
?
??
?
???? ?
?
?
7|!
1-15
-
!!
7!!
|!
l|
16
-
3 3.1 NC!
APEIOill-255E
OLC-212Hll OLC-320HII IOLC-420HII OLC-430Hll ()HYW6017 RKL 11000V
RKL-7500V-DA ( -A15A CA
(CKD) ( ()!)
N C AMNC/PC FX-5PB C
1-17
-
3.2 !
APELIOill-255E
xy: XYZTcp(3)
X 1270mm EE Y 1270mm
Z 300mm
X 1270mm Y 1270mm
X 75m/min Y 75m/min
Z 60m/min
Fl:50kgF4B:100kg O.Olmm 5 ..... O.OOlmm
no 930mm 500mmex)x500mmCY) 13t{ton}
AC3 200/220V10% 50/60Hz
1-18
-
3.3 {
E 200kN{20ton} 50mm
(8mm) X310/Y290min-1{hpm} (8mm)
(25mm) X270/Y250min-1{hpm} (8mm)
7
34 312AI 3AI
1/2" 20(8) 19(8)
( 1-1/4" 8(8) 6(6)) 2" 2(2) 11(1)I
)3-1/2" 2(2) 2(2){
AI(1-1/4") 2(2) 2(2) A1(2") 1
1-19
-
3.4 i
I OLC-212Hll OLC-320Hll 0C-420HII OLC-430Hll 3
) 1200W 2000W 3000W .....""' 1.0%()
If. 1500W 2600W 3600W j ; 1........2000Hz 7J ........100% 10.6JJITl |
f 21mm(1.5mI) 1.5mrad 45
CO2:N2:He=5:34:61 2%
0H4 2I) K JI/h
10/h 20( /h85---95
fkd.T 55........65/min() /min()
2070mmX600mmX900mm 1150mmX600mmX900mm
AC3 200/220V10% 50/60Hz
25kVA 35kVA 40kVA 3(1) (|)
120
-
3.5 NCiNC
I N C AMNC/PCN C
.XYZTCP
.3-()
-Z(HS-98).NC7...JOG277
- 2
. 1f
. 250
- 10. 10
- 4
.3.5FD.!(MANUADATAINPUT)
O.001mm(X Y Z) O.001mm(X Y Z)
2MB (5km) //MDI//
---
.-
.-7eNC
.()eNC
--
42
-
3.6 {
HYW6017-A15A RKL-7500V-DA RKL-11000V-CA
()(CKD) ()
OLC-320HII t OLC 212HII OLC-430HII
OLC-420HIIf14.12
3 17.4/18.8kW 29/30kW 36.OkW
J142 LAE'- {15000/16200kcal/h} {25000/27000kcal/h}(50/60Hz) (50/60Hz)
EZ~ 70/min 80L/min 150/min
~T 80 150 160
(j4C)
(X) 1500X700X1990mm 1015X850X1800mm 1360X855X1790rnm
( ) 430(510)kg 410(560)kg 550(710)kg
AC3 200/220V 10% 50/60Hz
11/14kVA(50/60Hz) 20/22kVA(50/60Hz) 26/30kVA(50/60Hz)
t22
-
3.7 {
FX-5PB
3m3/min 1.8kPa/2.5kPa(180mmAq/250mmAq) (50/60Hz)
7m2
3
10/min 6L O.75kWX2P j AC3 200/220V(50/60Hz)2 C Z 240kg
23
-
1-24 MACA
-
2
1 2-31.1 2-31.2 2-31.3 -2-41.4 2-42 2-52.1 22.1.12-52.1.2() 2-52.1.3}2-62.1.42-72.1.52-82.1.6 2-82.2 ..2-92.2.12-92.2.22-9
|
A !i
2t
-
22
3 ..................................e2-103.1 .......2-103.1.12-103.1.22-123.1.32-123.2 2-133.2.12-133.2.22-133.3 2-143.4 ?2-143.5 2-143.6 2-153.7 2-163.8 2-173.9 2-173.10 2-18
-
1
1.1
!
Cf)
1.2 I
5'""4GoCC)
j 75% ()
G.49m/s2{G.05G}
-
-
.
.
23
-
1.3 -|!
.
|
.
.
A----..B
..... ...
(:m)
= A B C D HYW6017-A15A O 0.6 o.6 0.6 1.0RK-7500V-DA O 1.5 1.5 1.5 2.0
RKL-l 1aaOV-CA O 1.5 1.5 1.5 2.0
1.4
-
2
2.1
2.1.1
{}
)77 O.5MPa 250/min 2.2kW
{5.0kgf/cm2} {250NL/min}
7 0.95MPa 1000L/min 7.5kW
{9.5kgf/cm {1000N/min}
7 0.95MPa 1500/min 15kW()
{9.5kgf/cm2} {1500N/min}
ll7()l
2.1.2(!
OLC-HIl3l!
||
.
2-5
-
E~ tU CO2 :N2 :He=5:34:61 [%]fjE= !+2%
CO2 UHP >99.99%
N2 ZERO-A >99.995%
He ZERO-A >99.995%
2.1.3(1)
045-4743966
0427-72-7151
0462-38-2021
0427 56-4610
06-311-1373
03-3581-8216
132m3(21)
CAV-20ES [] ' 20m3/h
200/min2lMPa{10kgf/cm2}
(2)()
107m3(21)
CAV-20ES []Id:
;6a 20m3/h
200/min2lMPa{10kgf/cm
26
-
(3)77
CAV-20ES [] 20m3/h
200/min21MPa{1Okgf/cm2}
.
2.1.4!7j
G-10[letllet
l()
1
30mg/
10mg/
10mg/
(KMn04) 10ppm
(Fe) 0.3ppm
eMn) O.3ppm
(pH) 5.8"'-'8.6
5
2
;(G-10)!!;
; 044(877)0461
2-7
-
2.1.5G-10O.35MPa{3.5kgf/cmj
RD 25S RD-25SR ()[]
2.1.6 E
() 500m
() 500m
28
-
2.2 2.2.1
|
(!)
.1!NC
2.2.2|
.(NC)!!(NC)!
29
-
3 !
.!l
3.1
A .
-
2-11
-
3.1.2
HYW6017-A15A 430kg
RKL-750QV-DA 410kg
RK-11QQQV-CA 550kg
|!
let60
3.1.3110kg
4!|
!
60
2-12
? ? ?E
- 3.2 |
-
3.3 (NC)-I
!
3.4 !
l?
3.5 O.5MPa{5.0kgf/cm2}1|
214
-
3.6
A
-!
?
!
(02)(N2)(AIR)!!
@
2-15
????
???
????
???
?????????
?
?????????
?
-
3.7
.!
|
!()
JET-S105()
3(C02N2He)
1:25MPa{250kgffern
2:O.5MPa{5.Okgffern?}
:O.3MPa{3.Okgf
:12fh
!(1/4117m)
1 12~15MPa{120~150kgffern2}()
22O.3tvPa{3kgffern!
2O.5MPa{5kgffern?}ll2O.15~a {1.5kgffem|!
!!
2-16
-
3.8 !
3.9
!Id:
l(G-100.35MPa{3.5kgf/cm2}!)
-5
217
-
3.10
2-18
-
3
1 3-22 3-33 NC3-53.1 3-53.2 NC}/j3-63.3 3-133.4 CD-ROM3-143.5 3-153.6 -3-153.7 3-163.8 () 3-164 3-185 7()3-206 3-217 3-228 3-249 3-259.1 -3-259.2 3-259.3 3-26
31
-
1
NC
? ?
??
???
32
-
2
NC(
[1]NC()ON"!NCON"! NC
OFF"|
letTRIP"|
JlAJ!letTRIP"OFF"|ON".I
eNCfNC3J! OFF"I
-
3-4
[2]
fNCON" OFF"!
-
3 NCNC NC CD-ROMc
3.1 llet 4 56
-
3.2 NC
???????????
????
??
?
??
?? ? ? ? ? ?
??
????
?
? ?
?? ? ? ? ? ? ? ? ?
iJfi (1)tLJJlLU
!
[1]ONNCNC|rNCON"!ONJ
3-6
-
[2]OFF
NC"!3JNC
CD-ROM NC
[3]NCNC
:NC
:roNJ NC!
:NC
[4]
:!
:
:!
[5]
3-7
-
38
[6]
.!? J!
[7]
!!
! f+XJ f+YJ f+ZJ|
+X +()I X
-x ! |
-
[8]0TXYoT ()|(j)i
[9]()
"|! "
!"!5!()
"!(l)
[10]()"!!
"!He-Ne"
[11] NCl
[12JMDI
?|
39
-
3-10
[13]
MOl
[14]
||
A J
[15]+B()NC((8)! B+!!
[16]-B()
NC()(8)+i Bl
[17](-
NC
()
!
|
-
[18](1)
" "
1
rJ'(
.() rJJ~l!|!
[19](
"IXY! "IXY
[20]MDI" "!
3-11
-
312
[21]!TC
[22]-/~'!i!
-ld:1!
l
-
3.3
!
-
3.4 CD-ROMCD-ROM ??
????????????
??????????
() CD-ROM
.CD-ROMiCD-ROM
[1]
CD-ROMlCD-ROM! CD-ROM!l
[2]
CD-ROM()
[3]
[4]
3-14
-
3.5 !|
3.6 NCl
[1J!
[2]
[3]
|
[4]
[5]
3-15
-
3.i? NC|
f/J
3.8 ()[1]
AJ!
@????
@
II III I
[2]
!f/
[000]
??????????? ? ? ?
[3]
lf/J
X 1 :1lO.OOlmm
X1a :1lO.OlmmoX100:1!O.lmm
3-16
-
[4]I +
+:+l
:i
3-17
-
4
NCJ7|
:l
:
:
:
:
:
:
-)
()
()
.
7
"l
-
3-18
-
!
-
5
7!
NC?7
??
NITROGENHIGH PRESSURE
NC"
320
-
6
-D!
'MDI"
-1--/'-||
|
! 1!
|
NC
32
-
7 @
&-(JZ A9 9118.
00A @
G ~A H911
O@ @
3-22
NC0
NC
"MOl"
-
/"(2)"I|"!!Id:!
."Id:/"J"
"!
(()! o01()|
l
l
t ['x)
Ua
O@ @
|
3-23
-
8 -|J rM3J
l
Oi
????????????????
72
M3!JI
il!
324
-
9 1
i
9.2
.
LASER ALIGNMENTOFF ON
STRIKEROUTER
@INNER
LASERALIGNMENT(OFFitI
STRIKER
l
325
-
TOOL
let
STRIPMISSON"I
-
4
1 4-31.1 4-31.2 |4-31.3 !4-51.4 |4-51.5 !4-52 4-62.1 4-62.2 4-72.2.1J'A4-72.2.2B4-10
????
?
?
??
???????????????
? ?
? ?
??? ? ???? ?
????
??
? ?
? ?
? ? ? ?
2.3 4-172.3.14-182.3.2MDI4-192.3.34 202.3.44-212.3.54-222.3.64-242.3.74-26
3 4-283.1 4-284 FILE4-294.1 4-29
( !)
4-1
-
4-2
5 4-305.1 4-305.2 |4-305.3 M4-315.3.14-325.3.24-3653.3 4-405.3.44-445.3.5 -4-485.3.6-4-525.3.74-57
5.4 4 585.5 4-615.6 645.7 PHNC4-665.7.1 PHNC4 665.7.2PHNC 4-67
5.8 4-685.8.14-685.8.24-69
6 4-706.1 4-706.2 ?|4-706.3 4-726.3.1............e4-75
6.4 4-806.4.14-83
6.5 4-845.14-866.6 4-876.6.14-886.6.24-886.6.3() 4-906.6.4( 4-916.6.54-926.6.64-92
6.7 4-936.7.1 4-95
7 4-967.1 4-968 4-988.1 4-98
-
1 l JrJrFILEJrJrJr6!JrJrFILEJrJrJrJ
F ILE
1.1 i|()
1.2 ||rFILE!!!
|
!|
4-3
-
4-4
!
|
1
rFILE J! r!
rFILE
!
MOl!
rFIEJ l
-
1.3 X rFILE!/'-
1.4 !let
1.5 ! !
4-5
-
2 2.1
MDI
l iLzE|/
NC
?
?????????????
:
: :|
- :7:MPM()i :?|
100%:|:|:
{i :(: 1 :(M30G50
)
4-6
-
2.2 !A S C OJ!
2.2.1A
l"MOl"!
!MOl"
"OFF
7
-
4-8
'
CRTM
i
FAI
.FA"F3"
/UL!!l
lIiNC
!c J1l
-
!NC/"/";)|/"
ZZ!
XY T C!
(MOl)
Y T CF1 75m/min 75m/min 30min1 {rpm} 60min-1 {rpm}
F2 56.25m/min 56.25m/min 30min-1 {rpm} 60min-1 {rpm}
F3 37.5m/min 37.5m/min 15min-1 {rpm} 30min-1 {rpm}
F4 18.75m/min 18.75m/min 15min1 {rpm} 30min-1 {rpm}
FA 37.5m/min 37.5m/min 15min-1 {rpm} 30min-1 {rpm}
|
:1
:
:!
4-9
-
2.2.2B!
l
4-10
-
!
"I!1"Il
1 :rJ"1|0
2 :r"2|0
:r'!
.""3 :r" NC" " MOl"12|
4-11
-
4-12
7
()()()((! "MDI"i"I!""I
-
360|NCD
(!i
" ()Ili /'""l" ()l 1
/'
" () " ()
1 2 1 2
r/' /'
r/'
r/
l" ()!
4-13
-
2.2.3C
2.2.4D
MPM!
NC!
14
-
!
()"Id:MDI"|
-Fl'"'-'F3: F1()"F3 ()"
:lAMNC
"Il "I()
!!|"
4-15
-
4-16
'|
ovs()OVSill!OVSIII
-
5
2.3
:2!
MD1 :
I/O
:
:
:
:7
:!
4-17
-
2.3.1!
:!)I
:!2|
6
4-18
-
2.3.2MD Itj!!
1.5X1000 Y500
1) rXJ
2) rlJ raj raj raj
3) ryJ4) r5J raj rOJ
5) rJ2. rJ|1!1ljj3MOllet
3.!!
:M100 ABS:G90 G50:G50
NCT :Ml0l INC:G91
4-19
-
2.3.3I/O
L! LE.111II1 BU
E 11;
r2.3.6
4-20
-
2.3.4
JJ|
:
:
:|(e)
:!
:
:J :
X :xy :Y
Z :zT :T
C :C
B :B
e :
-
2.3.5
.Jll..I.'Ul!Wl_
-E'
..
Erara
ji
i-~>...~"".--~""""""".."""""""""."""""-----~>----~~--~---
()!()2
!JrJrJrJrJI
4-22
-
I~L..{
:jfJj--J
(;
::;JrJrJr JrJ
l. :10%
o
V .10%
1/10 : f"YJ1%
:100%1
:
0----254
0----200
0----200
0----15a 0----200
23
-
2.3.6!J
:!
:I/O
4-24
-
LED()
:
:
NC :NC
NC :NC
I) :
25
-
2.3.7!
/
:I)"
:
/:1
!llJ
4-26
-
MOlMOl
M
4-27
-
3 3.1
J5
4-28
-
4 FILE4.1
rFILEJrFIEJrFILEJ(FD) NC5
4-29
-
5 5.1
JiJrJrJrMJrPHNCJrJ6iletrM
5.2 NCl!|
-!M!
4-30
-
5.3 MrMJrMrM
4-31
-
5.3.1J
M12"I
M12"16
-M12" :()
1. 1(mm)
2. (M12"2.) (mm)
3. |(M12"3.) |(mm)
4-32
-
(M12){
???
'
J'
M:M12
()
5 mm 2'"'-'99
2.5 mm 0'"'-'99
G06"()
.
-!
33
-
4-34
1.!!(
2. )!7.5
f7J f.J 15J I
!()
1.J
2. IJ
-
.MfMJ
l?J J!
4-35
-
5.3.2rJ'1
J'M500tv1501"!
M500M501"
.M500" :1')()
.M501" :1'()()!M500"l2.5mm"
1. 1(mm)
2. /let!(mm)
3. /(mm)
4. |(mm)
4-36
-
M501)(M500
UlUIlQ_~j(~.~I rr ~I (r.~1 I I
lUJ
???
J'
M: M500 M501
()
5 7.5 mm 2...99
2 4.5 mm o...99 40 42.5 mm 5...99
2.5 2.5 mm o...99806")
.75kN{7.5ton}.rJ"|21:
4-37
:1|2
-
4-38
.~RfFI)I)~ II|: E~ Ei~
1.i!()
2.)l7.5r7Jr.Jr5Jr
!()
1.
2. r
-
M!fM
ld:i?J |
39
-
5.3.3!!
|!
!MM502'"'-'505" M570'"'-'575" 10
1. 1 5'"'-'8mm[0'"'-'35mmJ
(mm) ! (J
)l2. J'Id:! Omm[0'"'-'35mmJ
(mm)
3. (277-2 [15'"'-'45mmJ ! 3)mm
(mrn)
4. 1 Omm[0'"'-'15mmJ (mm) lJ
7!
.1.rr5.9
.2.0
.3.
4-40
-
LL_
_..+--4
I L_ I....- I I I I ~ + I '
|lij
-L--L-
???????
lI
-
4-42
M
1.!l()
2.)|7.5
r7Jr.J r5J rJ
!()
1.
2. rJ
-
.M!fMJJ
!!?J J!
4-43
-
5 3.4Ji
!!
!MM560......569" 10
1. 1 5......8mm[0"""'35mrn] Id:
(mm) ! (
)
2. ! Omm[0"""'35mm]
(mm)
3. (277-2[15'"'-'45mrn] ! 3)mm
! (mm)
4. ; iOmm[0'"'-'5mm] (mm) 'J
.1.rr5.9J0.2.0.3.
4-44
-
J? ??
L-- I ~ (
-..?-i
h
.4-
'
!
???
???
l
????????
M:M560'"'JM569
()
10
5'"'J8 mm o'"'J35 O mm o'"'J35
277-
15'"'J45
mm
0.0() mm o'"'J15
4-45
G06"(?)
-
4-46
1.!l()
2.)!7.5r7Jr.Jr5Jr
(
1.
2. r
-
@MrM
l!?J J|
4-47
- 5.3.51()
-
t)L ;
l LL-
-.:::....- I
???????
M:M506'""""'M509
()
5 mm 0'""""'35
277-
15'""""'45
mm
4 mm 0'""""'15
9'""""'9.5 mm 0'""""'15
4-49
G06"()
-
4-50
1.!!(
2.i7.5r7Jr.Jr5Jr
!()
1.
2. r
-
@M|fMJJ
!l?J J!
4-51
-
5.3.6
!4-54 !
!MM510-..559M800-..M999"250
1. 1 ()+(5-..[O-..35mm] 8mm)
(mm) !
2. () Omm[O-..35mm] !
(mm)
3. (277-2[15-..45mm] ! 3)mm
!- (mm)
4. /' Omm[O-..30mm] (mm) 'J
!
5. l 200kN{20ton}[O-..390kN {O'-""39ton}]
4-52
-
6. H ()I[H/0] |
H/0"
7. J' lOOms[al""--g9gms] (ms)8. |! 200kN{20ton}[a1""-'390kN kN{ton}{a1""-'39ton}]
.1.rJr5.9J0.2.0.3.
.
:J" .
A
A
/B| :AJ :8
53
-
J TfJ--41--;-:I
:H-LO
???
??
?????
i
~I
??
??
ill
M:M510"-"M559M800r-.;M999
()
+5.......8 mm 0'"'-'35
O mm 0'"'-'35
277- 15r-.;45
mm
0.0() mm or-.;30 200{20} kN{ton} 0'"'-'390{39}
H: () H/O 100 ms 0'"'-'999
200{20} kN{ton} 0'"'-'390{39}
G06"(7
4-54
-
1.!|()
2. )!7.5f7Jf.Jf5Jf
!()
1.
2. r
4-55
-
4-56
@MlrMJJ
i|?J ricJl
-
5.3.7 )Q. J' D M12 M500 M501 M502""'505 M560'"'-'563 M506""'509 M510""'559
(mm) [5.OJ [5.OJ [7.5J 2.0'"'-'35.0 2.0""'35.0 2.0""'35.0 2.0'"'-'35.02.035.0 2.0"'35.0 2.0"'35.0
(mm) [2.OJ [4.5J 0.0'"'-'35.0 0.0""'35.0 0.0'"'-'35.00.0'"'-'35.0 0.0'"'-'35.0
(mm) [2.5J [2.5J [2.5J O.0""'15.0 0.0.......15.0 0.0.......15.0 0.0'"'-'30.00.0'"'-'10.0 0.0'"'-'10.0 0.0.......10.0
0.0'"'-'15.0 rmm3
(mm) [40.OJ [40.OJ [42.5J 15.0'"'-'45.15.0""'45.15.0.......45.15.0""'45.15.0'"'-'45.15.0'"'-'45.15.0.......45.
{O.0.......390}(kN{ton})
(ms) 0.......999
H/O
{D.0.......390}(kN{ton})
.letNCIi4-33"'-'4-54()J!!
. H () o()"20
! ()J [ J
4-57
-
5.4 J
-
JI
JIi
:! :!!|
rAJ rTJ
!!
4-58
-
T
T!T !
[]
CSTJRBI2T(1) fSTJITOO
:t fTJ
(2) fT
(3) fTOOT?J!JTT!
(//)YaT(j
eT~! J
STJITT STJIT fT
-
T|
[]
(1) NCJ"I
(2)NC"I(3)T
JI fT
(4) rJT!
;
T
:
:
T
T
T
|
-Jl
4-60
fTJ J rJ i
-
3
|I
5.5 J!
!
[]
(1)T
(2) r(3)
: (4)
4-81
-
??????
(
|
Y
:
:
:
-
l~ ' a c -. Z
ID; 1uzA4tlYRZ1:.Y3n?-?TRE' .I~~ A:"" dfzAz:kSE -I~ a)1&Jl. =lAvaa-.YA2aFE!Ial1(t 9 III.. AEV YFhnail!112 AZ.ZE
-0.rt7.
I~ ZEsr~.~v- 121 ...Jl0
tVAJETtBY'RE.'1.gz1iKEzMat- z -~A:..?/oila AYZ2rzmvaEmaza15 S C IAxVZVEa'E'MtI -.....-.-----:::::--4hwJe-wba-..UF
.Ictx
62
-
(1)T
(2) rJ(3) rTOO?J|
ric
T|
J
463
-
:
:
:
5.6 J
JI|
: |
: !
T
T
.l~
4-64
-
J :l!
J :|!
J:!
J :!
J :
.!J
-
5.7 PHNC5.7.1 PHNC
PHNCl ( 6!
fPHNCJTT!
()
1'
4-66
r'l0
A:1/2" B:1-1/4" C:2" 0:3-1/2"
3
!
l()I
(X")7
LCD"
o:-1:
2:?
J/~ | NY I)")? |')1 IJ. |||.')7') IM502"" IM560" IM506" IM510""iIM12M500I505 I569 I509 I559|IM5010: I0 101 0 I X I01 I0 0 01 0 I02: I X I0 I0 I X 1_0*1:"
()
|
-
(
leti
!
(
0"
1"0"2"
let0"
1/2" 1-1/4" 2" 3-1/2"( A B C D
J 207.5 207.5 208.0 209.0 39.0 99.5 159.5 279.1
O O O O
a() a() o() o()
5.7.2PHNC1.T!!()
2. !
3.
. r.Jr.J
4-67
-
5.8 5.8.1
)!l
letl
1:19:00
2:23:00
3:3..8:00 19:00
4-68
-
5.8.21.|l
()
2.
3.
4. ior " ()I!"
4-69
-
6 6.1
JJ!JrJrJrJr5
6.2 IctNC!o!
.|!0
.1!1a 3 5
.200
l!
4-70
-
!!!:
o100M102 (C-SUS1. 0);
G90 G92 X1000 Y1000;
G20 X20 Y20;
E001
GOl Y10;
C-SUS1.03 1.2
M 102 ()C-sus1. 0C-SUS1. 0
EOO'No.1
C-sus1. 0?No.0110
No.201201
CSUS1.0 7:lNO 101 ...1':/..1 * 2012
3
4
5
7 CSUSl.O?:If' ~ fJ f~ 101
102
103
CSUSl.OI ~ fJf{201
202
203
204
205
4-7
-
6.3
Id:i
:
:Jl:8:".
:ll:o.00'""'999.99:mm
4-72
-
: :(9.Omm
:9.Omm: :)7) :Z!
!
:ONOFF
?No :r101.--....103
:No.1:7.52:5.0"3:3.75"4: 5:10.0"
:[F]:0.......99999:mm/min
:[S]:0.......9999:W (CW:)
:1')[P]:0.......9999:Hz
:I')l [Q]:0.......100:%
:7:O~2.55{a~25. 5}:MPa {kgf/cm2}
4-73
-
:)71-...3: 4: 5:Air6:(
:?|i:0-----9.9:
4-74
::0-----9.9:mm
::0-----9.999:mm
:r201-----2050201'-""'205
:)7|J201'-""'205|O201'-""'205E097|7Id:0"
:NCNo.1 (E001)JINo.2-----No.10JINC
:;');:0-----99
-
j
:E010!
:!:W
:!7:MPa{kgf/cm2}
:(j)
(!)
6.3.1
1. r!
2. r|
3. r J
4-75
-
!JI
1. I!
2. rJ(No.10)
JI
1. I
2. rJIJIJrJrJ
JI Z!lZ!J!JrJrJ
4-76
-
No.NoJII
2. r1a1Jr1a2Jr1a3J
1. rJ
2. raNJId:raFFJ
4-77
-
1. rJ
2. r1Jr2Jr3Jr4Jr5J
J
-
!||M 1a2 ( )"l
JIJ 7JIJ JIf/'f/'JI
79
-
6.4 77J7
!l!
:
:|:8:"
:!:O.00---999.99:mm
: :(9.Omm) :9.0mrn: :)7 :Z|
4-80
-
7No
:ONOFF I~
:r?J 101"'103
:No.1:7.5"2:5.0"3:3.754: 5:10.0"
:[S]:0"'9999:W (CW:
:[PJ"|:0"'9999:Hz
: [Q]"i:0'"100:%
:"!Ie 01:0""9999:Hz
:"!{ 01:0""100:%
4-81
-
4-82
:"!
-
::0"-'99
:!:W
:!7:MPa{kgf/cm2}
:()
(l
6.4.1f6.3.1J7
4-83
-
6.5 J
l!i
:
:J|:8:" "
:J!:O.00'"'""999.99:mm
: :9.Omm) :9.Omm: :7 :Z!!
4-84
-
:ONOFF
No :r7101'""'1037
:No.1:7.5"2:5.0"3:3.75"4: 5:10.a"
:!!:0'""'180:
:[S] [S]:0".;9999:W (CW:)
:[P]:0'""'9999:Hz
:[Q]:0---100:%
:[]:O.1---99.9:
7:7:0'""'2.55{O---25.5}:MPa {kgf/em:?}
4-85
-
:71"-'3: 4: 5:Air 6:!:1r-.J7
:):0r-.J9.9:mm
::0r-.J9999:mm/min
:[PJ:0r-.J9999:Hz
:[Q]:0r-.J100:%
:!:W
:l:MPa{kgfIcm2}
:
(
6.5.1r6.3.1J
4-86
-
6.6 JJ
:
:
:
:{200
4-87
-
6.6.1HI
1. r!(
2. r!J
6.6.2JI
1. r
2. rJNo.Jr6.3 J
3. :168:"
4-88
-
4. raKJ
5. rJId:!
489
-
6.6.3JI
1. !
2. rl)
3. :16: PI
4. raKJ!Id:
4-90
-
6.6.4()
1. !
2. r
3. :16:" "
J
4. raKJ!J
91
-
6.6.5
1.!
2. r3. roKJ!
6.6.6JI
-
6.? JrJ'
e
1:ZeM103)IZ0.z
Z:Z()() :eM104)Z
MOO :(M104 MOO)Z
Mal :.
() :(M1a4 M 180)Z
--+Z+Z(G93Z)Z Zl
4-93
-
4-94
:)Z!0.
:
O.3Z1(HS-98)
:()NCM 1aal|No.1NC
ON :|
2 :r2YZ2!l|
X :()
y :()Y
-
6.7.11.
2. J
.0""
3. roKJ
4-95
-
7 7.1
|
!J
NC!!!
|
.!JlT!
4-96
-
J:J
J:(4)
J:!
J:rJrJI
4-97
-
8 8.1
f?HELPJ
JI
-
5
1 5-31.1 5-31.2 F IE5-41.2.15-51.2.25-61.3 ()5-71.3.15-81.3.25-81.3.35-81.3.4 5-91.3.55-111.3.65-111.3.7 5 111.3.8 5-121.3.9-5-12
2 5-132.1 5-132.2 .........~ 5 142.3 5-142.4 5-152.5 5-152.5.15-152.5.25-152.6 5-16
(l
5-1
-
2
2.7 5-162.8 5-172.9 5-172.10 582.11 5 182.12 5-202.13 JUMP () 5-202.14 5-212.15 5-212.16 5-222.17 5-262.18 ()
()5-272.19 5282.20 5-29
-
1
1.1J
r!NC(3.5"FD)|()NCFD!Ji
rFILEld:
NC 3.5"F0 ~ '
IFIE| J ' '-~..... .
-- .
||
53
-
1.2FIEJ IFILEJ(8)
IFILE
IF0J
I:J
INCJ NC
IFOJ(3.5"FD)
5-4
-
1.2.1!
1 rFILEJrFIE
rFILEiId:rJ
rFILEJJI
.rFILE J!|
2. (NC) J
.a) rFOJ|
b) NC rNCJNCl
3. !(l)
4. !
!
5. !
6. JI
5-5
-
1.2.2JI|
1. rF1LEJrFILEJ
JI rrFILE
2. r
3. rJI(NC)
4.
!
-~';)t!E
i )( if{ j
5. 3
.!|
56
-
1.3 rFILEJJ!
||
I U -- II
: : :I) : : :7 :( ::
5-7
-
1.3.1!
2!
1.3.2
JrNCJ ric()Jr()J
1.3.3
1JI|JI!
5-8
-
1.3.4!JI|!
1.J
r1.3.2
2.
3.
4. (
-
6. ?
-..E
7. ?J
5-10
O
-
1.3.5NC IC()I1I!
1.
2.
1.3.6{JIi
1. r2. ()
r*J
3. r~J
1.3.7NC IC)I11|
1. ( J
2.
3. r
5-11
-
1.3.8J
|()
1.3.9!IC|RS-232C
1. r1J'"'-'r1OJ 10Ie|
2. r1J~ r1OJ!
3. g3 J
5-12
-
2
2.11!J
J|
5-13
-
2.2 !
!J!
A 8 C D E
F G J
K L M N O
p Q R s T
U V W Y
Z /
..
7 8 9
4 6
2 3 17
+
??
s % & G
f
#
4 ~
7 8 9 l
4 5 6 E
2 3 E +
2.3 | ()c
83a() Jil
5-14
-
2.4 J!!rNCJrFOJ!
lrFILEJ
2.5 2.5.1
!J rJ rJr!!
l|
2.5.2j
I[Y~.I i !
J !
5-15
-
2.6 ! !1
Id:
2.7
|
.
-
-
2.8 1
1
2.9
3
5-17
-
2.10
()J
;i
[]
!
l
2.11 (I)()I !
j
i j
5-18
-
[
[]
[]
[]
[]
[3J
:!!
:
:I:
:
-EEF"....
1r j{j
5-19
-
2.12 ()!! I_~~
rCOPYJ
COpy Il
rCOPYJlIe
-!
2. !! J I r|j a
2.13 JUMP ()!() I j rJUMPJ;JUMPI -:JJr;7JJ
20
F
r
r-
i
-
[
:!
:!
:!
2.14
JI
!J(11.2FILE)
.
2.15 JI(r1.2FILE)
21
-
2.16 GJJ|G!!G
-
slq
522
3J
-
J
3J
i?J (
-JI
:8
:((J
:
:
:
:G
:3G
:GJ|
1. r
23
-
2.
24
3.
G73G75G76!
-
4.
J :G
J :J
-!
li(
|JI|
1.XYWQ
25
-
2. r
3.
4. rJG|
2. 17 G
J3!let 3J
5-26
-
2. 18 (()
|()
1. r
2.
3. Gl0
4. fJ
5.
?J?!
|(8)
1J
527
-
JI
? JJ :lJ:!
2.19
1. r
2.
|j
J :J :J :!
528
-
2.20 GG
1. rJ
2. G
3.
529
-
30 MADA
-
6
1 JI6-31.1 6-31.2 6-41.2.1 6-41.2.26-7
2 6-82.1 6-82.2 -6-92.3 26-92.4 YZ6-102.5 6-112.5.16-112.6 --6-122.6.1 6-122.6.2r6-12
3 6-133.1 6-133.1.16-133.1.26-133.1.36-163.1.46-183.1.56-193.1.66-203.1.7-6-22
(i
6-1
-
62
3.1.86-293.1.9?6-303.1.10 6-313.1.116-333.1.126-343.1.136-343.1.14Z() 6-343.1.156-353.1.166-353.1.176-353.1.186-363.1.19Z6-363.1.20 6363.1.21?6-373.1.226-373.2 6-383.2.16-383.2.26-393.3 6-403.3.1i6-403.3.2l6-413.3.36-41
4 MOl6-424.1 MDI6-424.2 MOI|6-434.3 MOI! 6-444.4MOI6-455 6-465.16-465.2 |6-466 JI4486.1 6-486.1.1 6-486.1.26-506.1.3116-52
-
1 1.1
|!8 r1
-
1.2 .2.1
1.(!)fNCl " (0N)I
J16" " (0N)|
2.
1o.3~0.5MPa{3~5 kgf/cm~ 2 0.30+0.05MPa{3.0+0.5kgf/cm2}
2 1 ()
:2
3.
4. O.5MPa{5.0kgf/cm2}7
6-4
-
5. NCJ!"I
~r-~-~_l~ H___~ 10co) r~ C100 too
II[ IX+ I IZ+ I)
Ix|Iz-I
I
II IIII_II
6. r OFF ON"
7. rNCOFF"|ON"I
6-5
-
66
8. NCONJoNJ2iJ|
JNC rNC3JrNC3J3 rNCrNC3J J
9. NC"I
|NCJl3
-
1.2.21.(!fNC"
(0N)I
J " (0N)!
2. |o.5MPa{5.Okgf/cm~
3. ffNCOFF"! ON"
4. NCoNJONJ2|J|
JNC fNC3JfNC3J fNC]JrNC3J
6-7
-
2 !|
2.1 1. AB
2.JZY C
3. YZ CP3JI
6-8
-
2.2 1!
1. J
2.J+J C|(rJrNClJ1!!Z r+ZJ!2
2.3 22!
1.J
2. JZ2XY2
NCJ!
.2 J
6-9
-
2.4 YZ! X"YZiNC)
NCexYZ)+!
~ Flr-:JL:JN~U~
.Arl00%Jr50%Jr25%Jl
E-
()
Ar;
Jr;
r;1
6-10
-
2.5
2.5.1!
(1)(A-07004)G243300080%1!
(2)JI
(3) r"10
A i!
-
2.6 let
2.6.1t
|
1. rJ2. - 3J
fJl
3. l r3J 1
2.6.2 rJ
j!
-
33.1
3.1.1
3.1.2
li
!
( f3.1.8
JI
j1~.
FILE
2. rFiLEJ
6-13
-
3. 1
IF0J-
6-14
4. !|
5. r JI
6.1i
f
-
7.
JI
i
j
-|) r
-
3.1.316
!JIll
1. rJ 2. r J3. r()I()
4. rJ5.
-
()
!"JI6 ()")J! f3.1.11 Jl
6-17
-
3.1.4!|
.
1. NC"I
2. Z j
3. Z
--..g
4. 900
5. !
1.!l
2. 90
3. Z!
4. rJ
6-18
-
3.1.5!!
1. r3.1.4JI
2.
1. !
2. r3.1.4JI
6-19
-
3.1.6!!let2"10"I!71.5"
2"(OLC-430HII)
7.5" 5" 3.75"
K
1.5"(OLe212HIIOLC-320HIIOLC-420HII)
620
10" 7.5" 5- 3.75"
9
-
1. f3.1.4JI
2. 7| 10"
3. 7
??
!|
4. 1.5"~l
|2
-
1. !1.5"?!7l 10"!
7!
2. !!
3. r3.1.4JI
3.1.7
A J"!
!i0.!!
!|
.|!
JI
1. rJI
6-22
-
2. rJ"I3. rrF4J
???
??
?
????
???? ?????????
???????????
R R
5.
6. rJi
!
t
~v iUJJ
O@ @
|
7.
8.lNo.
6-23
-
24
1/2"1-1/4"2"3-1/2"
-
1.
2.
3.
4.
1/2"
1.!
2. l
3. !
I
4. 5 ~IlLI..J I
5. !
6-25
-
B626
1.
2.
A ()
1.
2. eM8)
3. ()
4. !
!Ie !902(A B)|A90 B|1
5. !
6. !
-
7. i!-
()
.
~'8. 1o
A ()!
-
627
-
6-28
1.
2.
3. eM8)
4.
5. ?!!
6. !2
.30
"
-
3.1.81. rJ
2. !
3. |
4.
5. |
X
6. |
Y
!
7. rJ
&
6-29
-
3.1.9
.NC7l
}}J[)iAs-
NITROGENHIGH PRESSURE
/ OO
1.J
2. ?
6-30
-
3. 3 "
? NC"IJ3 J"
3.1.10|]I
()Il J (r4r2.3.6)r1/10J
| |
|J
63
-
6-32
@100%1
-
3.1.11JI
1.
2. ()o.3mm|1.5mm
.~
O.3mm:
L5mm:
lIi:!
ez
6-SS
-
3.1.12(7 J2 ()J()
.|
3.1.131.
-
3.1.15i AJ
-
-
-
3.1.16 BJ
" "MDI"i
Id:"MDI"3|
3.1.17BJ
3?!!
r6.1.3)IJ
6-35
-
3.1.18AJ
AJ
3.1.19ZZ Z
Zl
3.1.20 1))7J
6-36
- 3.1.214 J r5.I
-
3.2
3e2.11.
.
2. D
3. r"I4. r"I5. B r/'" ()I
.!B r/'-1 J"I
6. r"7. r"I9.
638
-
3.2.2
1.
2. rJt I3. AJON"I
:1
:
:!
4. D
5. rJ"6. r"7. B r/'" ()I
8. r"9.
.|
---
~ I[I:I:[lj
x
-!G98UVG75G76(7)
6-39
-
3.3 !!2!
3.3.1eM00)
MO0" MO0" J
eM01)h100"cNC
eM02) MO2" NCId:l
eM30)MO2" M30"NC!l
(G50)MO2" G50"NC!|
6-40
-
3.3.2
NC!
iNC
.!J NC
-
4 MDIfMDI /J11
A !M02()M30()
4.1 MDINC
.1
-
.MDI 1(1)868G69"G26G28"f4.4 MOl|
5. rJ
()MOl JIT
4.2 MD II1(1 3 13! r/'868869" J f/'13!
6-43
-
4.3MDIMOlG26G28" !AfONe)"
ON" i 1|
A rOFF ()"
: G90 X500. Y500. T201 (J
G28 I50. J0 K2"'X|50mm22MOl
1. G90 X500. Y500. T201"
2. r X500.Y500."I
r/ 1X500. Y500. . I/'
3. G28 150. J0 K2"
4. ArON()"
5. rX550. Y500..'
r/' {X550. Y500."I
6. rX600. Y500."Ir/' X600. Y500. . I
6-44
-
4.4 MDI
:;1'JOlv1fJ'J
J " " ()
1
ON" 1 1
OFF"
6-45
-
5 J NC||
5.1 1. NC"
2. |
ld:
IJ': 3-11
NC I+XJ I-XJ X3-8
I+YJI-YJ Y
// 3-23
/ " J
3-23
/ 3-25
5.2 ""
1. IJ"I
2. I/"J""
3.AIJIF4J
4. I()
6-46
-
5. r/..Jto I"
6. NC"""
7. rJ
."!!!
6-47
-
6 6.1
6.1.11. NC"I
2. NC"
NCJ3J|
3. 3J!
4. (r2.2 I
5. |
6.
7. AOFFJNC
. NC
6-48
-
8. fOFF?JJ
NCONJ fNCJ!TRIP"|
NClfNCOFF"
9.
1O.
11.fNC" (0FF) I
. Jlet ON"!
12.
16-49
-
6.1.21.(r2.2)
2. !
3.
4. AOFFJNC
. NC
650
-
5. IOFF?JJ
NCoNJ INC!TRIP"!
NC!INCJOFF"I
6.
7. INC" (OFF)I
J ON"!
8.
6-5
-
6.1.3 1.
2. r3. J
J!!NC!OFFIfNCJTRIpIti
4. NC"I
5. NC..j
6.OFFI]1l
2 1 (:)
2
JJ
/
7.
8.
6-52
-
9. rNCOFF"I
1O.
Jlet ON"!
6-53
-
654 MADA
-
7 ~
A
1 7-22 (7-43 7-74 7-84.1 7-84.1.1 NC7-84.1.2NC7-104.2 7-125 Z()7-136 7-15
!J!J"i
7-
-
1 !NCJ7l)1
1.J
2.
3. J"I
??
1Mi
???
NITROGENHIGH PRESSURE
72
-
7l NCJ"" "
73
-
2 i()
|!!
JCMild
A .!
3!!i
1.
(07000NOZZLECENTER)Ml00Ml02(POWER)NlGOOZ25.EOOlEl03Ml03Ml04GOOZ100.MOOGOTOlM30
7-4
-
4.
3. !
2. rj"IJ
6. NC"I
7. r J"I8. rJ73
9. r" 10. |
(I[).)I!
11. !(a)(b)(c)Cd)
/
//~ak
-J J
fUr:hI~ ':'J'"
75
-
7-6
12. 3"""11
-
3 ()JI
1.
2. ()O.3mm!1.5mm
O.3mm:-
1.5mm:
l
Z
77
-
4 l!!
4.1 l
J
|((SUS)t1.0)
JI
4.1.1NC1.!
(-y!60mm+Y|60mmY=O"+X8mmJ+X!8mm!|i
2.
(07002MANUALFOCUSCHECK)#551=50.M102(SUS1.0)G92X2500.Y1775.
7-8
-
G93X100.Y400.Ml00NlE3GOOX#551YO.GOOZ20.Ml03G01Y-50.Ml04551=#551+8.GOOZ100.Yl000.MOOGOTOlMl0lG50
3. r|3mm
4. r NC"!J"
5. rJ6. 3
" !O.5mm
7. r J"J
8. )167 "I O.5mm
9. r "I
10.69
79
-
11. rJ"!
0"
|!
4
???
???
4.1.2NC1.|
2.
(NCFOCUSCHECK);#551=50. ;#552=7.G92X2000.Y1520.
7..10
-
G93X10.Y150.M102(SPC1.0)M100E3;N1;GOOS552;GOOX551.YO.GOOZ20.M103GOlY-50.M104551=#551+8.552=#552+0.5IF[552GT14]GOT02;GOTOl;N2;M101G50
3. NC"
4. rJ"5.r21 B=5mmB=15mmlO.5mm60mm8rnm
6. flJ!
74
-
4.2 !
(|||)!
NCll
7-12
-
5 Z
iJ0
.(+0.2mm)
.Z=25mmZ=25mm
JlJ
-
7-14
5. 10
6. i 50103 I30'"'-'40
7. IJ
8. ZXy"!
-
6 !()
1) at bCd
C:
:(20
E2)XY!
[x)
"a>b "a
-
3)
X
x=
Y
y=
()
"!
-a>b
-a b
c>d-c d
(X)+(X)(X) (X)
(Y)+(Y)(Y) (Y)
((1 4 16.7J)
.1 1E31
.
ez()
7-16
x=0.32mmY=251.64mm
e::::15.65mJllb::::1435mJllc=13.93mJlld=16D7mJll
-
|
x=Ia;b15.6514.35 =O.65rmn2y=17I=13.93-:6.07 =1.07nun X16 a>b YC dl
!
X= (X)+ (X)=0.32+0.365=0.97
y = (Y)(Y)=251.64-1.07=250.57
|
X=0.97mm
Y=250.57mm
-
718 MADA
-
8 ?
1 8-41.1 8-41.2 8-51.3 Z 8-61.4 8-61.5 )78-71.6 .e8-81.7 ( )8-91.8 8-101.9 8-111.10 8-121.11 8-122 18-132.1 8-132.2 8-13
( |)
A -lJiJ"{!!
81
-
3 18-143.1 8-143.2 NC8-153.3 78-163.4 8-163.5 Y 8-173.5.18-173.5.2883.5.3Y 8-183.5.4 8-193.6 8-213.7 8-213.8 8-214 3(500|8-234.1 ( (1)8-23
??
??
?????? ????? ?
5.1 8-245.2 8-245.2.1 8-255.2.2 8-265.2.3 8-27
6 6(1000)8-286.1 ( (2)8-286.2 8-296.3 8-296.4 8-297 1(2000)8-307.1 8-307.2 ()
8-318 8-329 8 369.1 8-379.2 8-379.3 8 389.4 8-399.5 8-4010 () 8-4210.1 8-4310.2 8-4510.3 8-46
82
-
11 8-4712 8-5113 ..............8-5114 8-5215 8-5316 8-61
83
-
1
1.1
!'" ")1
A i
.I~ l
.!0
!
1.r"I2.
3. |(7)
0
8-4
-
4. (KodakLensCleaningPaper)
j:;477 ~
E EZ5.
-
1.3 ZZ|!
.!
1.4
1!0.3""'-'0.5MPa{3'"'-'5kgf/cm2}!
A i
2 1 ()
2
IJ
1. !
86
-
2. 2!
3. l
.I~ l !()
4.
5.
6.1 (12"'-'15tvPa{120"'-'150kgf/cm2} ) I1
7. 22O.3MPa{3.Okgf/cm2} I
8.
3
1.5
O.3"'-'0.5MPa{3"'-'5kgf/cm2}!1
.l|
.HvPa{10kgf/cm2} |1MPa {1Okgf/cm2} ||l
?l!
87
-
1.6
!
!
|!!|
!!
|!!iblJ'\~
-
1.7 (
@"
.5
.
.
|MAXMINiMIN5
f6 '6(1000)J f6.1 ()
89
-
1.8 !
:O.5MPa{5.Okgf/cm2}
||!
()
-
1.9 !
8 J
!1
.J"!!
l
;j1
811
-
1.10
1.11
i
-
2 11!1
2.1r8J
c()
2.2 )
8-13
- 3 11!1
-
3.2 NC1|1
NC!
-
3.3 1!1
!7
1. r-OFF"2.
3. l
4. !
-
3.5 Y1!1Y
3.5.11. r"t OFF"I
2.
3. INOUT!
4. YY
5.
!|0
.7J|
6. !
7.
Yi
8-17
-
3.5.2
|!!
1. rJOFF"1
2.
3. c
4.
5.
3.5.3Y1. Yl
2. Y1
3. Y!
???????
?? ??
???????
???
818
-
3.5.41.
2. Y1
3. 7
4.
(1)34|l
(2)F (ADJ)I(ADJ.VOL)!
!!
(3)(MEAS)I
.
-
@let
-
3.6 |
I) f9
3.? 1
let rl0 ()J
3.8
1. r"2. 3
3. Jtl
821
-
822
4. G2483000cw!
(NAIBU-HODEN)G92X2500.Y1775.Ml00M758G24S2000Pl000l00R600.M759Ml0lM30
5.r
6.rJ1
7.rJcw-50W!3 rll
-
4 3500
4.1 ( )(1)500( 16 6(1000)J 16.1 (-)
823
-
5 33!1
5.1 l(| 18 l
()
() c? xLM
yM
5.2 3!1)1
!!llet|!!3|1
8-24
-
5.2.11. rJ JOFF"I
2.
3. M4
4. 4i
? ?
.!!
-
5.2.21. |!!|
2. l(
.I)ll7l!
. 2|l
!||
8-26
-
5.2.31.|O!
2. |! 42|
3. jll!M4
4.
11 -7j
827
-
6 61000)6(1000)I10
6.1( )(2)6 l~ 1000
:SO-M()C-SOM()
:2
eOLC1000P1500PC250(LC200)
1. rpI2. rOFF"3. |
4. 5O|
5. |!
6.
7. MAXMIN
8.
9. rJON"
828
-
10. i "I 1J"[
11. 5 )1 2~8
6.2 6|1
""I
6!1
!
6!110
6.3 '6!1
!
6.4 6!1
Id:l
8-29
-
7 120001(2000)I1
7.1 1!1Id:
NCNCJ'
eNC|I)
830
-
7.2()12000H!i!
1. r"I OFF"
2.
3. 0
4.
5. JI O I~1. l2. 0 I 33.
4. -5. 6.
.
-
8 ~6 ;|l
!
NO
( B 3i1
2 ( B 3!1
3 B 1!1
4 X7 C 1|1
5 XLM C 3|1
6 X C 1|1
7 Y(T) C 1|1
8 Y7(C) C 1!1
9 Y LM C 3!1
10 Y C 1!1
11 A 1|1
12 A 1|1
13 A
14 A 31
15 C() D 1|1
!3
16 I) |!
()1500 2
17 ( ) F 6 1000)I 1
832
-
A ~? 32 DTE~ 1jC32 B 7 No.2 f-.2 7JIf72
C EP-O f-EP-O 71If7EP RO
D 7 SRL E-j22 71~/\ ? RA F LC-SOM SO-M
let
I) MY-2
F SO-M
8-33
-
834
!!Ml
|M
1.|!()
2. LM!
-
8-35
-
9 !lll
JI|
A -J J"!
eHe-Ne!!
1He-Ne|
M3
1
836
-
9.1
01
()
A
Ja
lx"
:
-
9.3 |
11.|
2.
3. 1
21.
2. 2
31.
2. 3
| r9.4
8-38
-
9.4
.
-
3. |!
9.5 1. He-Ne!I)He-Ne1
He-Ne ! Id:~
2. 2.5mmHe-Ne|He-Ne!lHe-Ne
1!
|()(
-
He-Ne
3
Y
fO X
2
~ X X
fO Y
1 ~ YO
~ X O
.x.
f9.1
8-41
-
10 CO2CO!!CO2"
!!1"1!l!
CO2!
2!
(1)
l()I|
(rll )
(2)
!CO2llHe-Ne()CO2
8-42
-
A .7!!! 1 1!
.C02letl
!!!eHe-Ne!!
10.1 !lCO2
A NCj "I
rLASERALIGNMENT()JOFF"
1. fLASERALIGNMENT()JON"i
2. "!
3.
843
-
4. !()!! Y!!
y ..J'
8-44
.7.5"7!!5"7|
5. C/'flO.2 J
lld:
1' ( f9 f5.2 )
-
10.2 A 5
CO2
1. r2. 'M102 (POWER) E103!
.J~r1"'7"
500W 1000Hz 50 O.02MPa 5.Air 0.3{O.2kgfIcm2}
1.5mm
(NAIBU-HODEN)G92X2500.Y1775.Ml00M758G24S2000Pl00Ql00R600.M759Ml01M30
3. He-Ne5mmJco!I)!CO2|!
845
-
4. 20'"'-'30cml!
? ? ? ?
??
|!|l
!5'"'-'1070
5.r"6.r
7.r"
10.3
CO')3( r9J
8-46
-
11 r3.8 JIrcw-50WJ)I!()
A -!l 1 1!
i"!
1. |(
7!(2)I+100awI1V
LC~=cH
(2)
2. NCJ"I
3. r/'3
8-47
-
4.
l
i b-q
5. JI
6.
7.
824S3000cw80%!!G24RR360O.(60min)I
(NAIBU-HODEN)G92X2500.Y1775.M100M758G24S2000Pl000l00R600.M759M101M30
60
8-48
cw80%15
-
8.
!ii!
OOC(H)
FM(V)
OC(V)
FM(H)
9. !l
110m()I||0
.!2'"'-'3|i!lOW
1
-
850
13. J
!
14. rj'3
15.
-
12 !28C!!
13
1!1ON/OFFl"!0
.( r14 l)
85
-
14 ()
"
1.
-
15
(SHINDASHI)
(FOCUS)
(MANUALFOCUS)
(GAS-FLOW)
(NAIBU-HODEN)
(TESTCUT)
801a(APL-H98-A-1)
(7)
NC
NC
50
HS-98
r(SHINDASHI)J!
20mm
(07000NOZZLECENTER)M100M102(POWER)N1GOOZ25.EOOlE103M103M104GOOZ100.MOOGOT01M30
8-53
-
f NC(FOCUS)J NC|!
iJ B7mm0.5mm50mm8mmB14mmI (200mmX200mm)15BfJJ
-
r (MANUALFOCUS)J!
50mm1!O.5mml8mm!! 6rOJ!rOJIraJI
HeNe8nm
1
E
I
-
rNC(GAS-OW)JNC!
1. l
2.?'POWER"
3. E010!
1 a a
O.a
.Ilt a 0.000
-9 ? a 0
??
?
?IfJltO
I~t 1 01! 1!JlO
-
(GASFLOW);G92X2500.Y1775.Ml02(POWER)Ml00GOOZ20.E010Ml03AOG04Xl000.Ml04Ml0lG50
r(NAIBU-HODEN)Jl
E(EOl-----E10)G24S() p()Q(R()-OFF"J600
(NAIBU-HODEN)G92X2500.Y1775.Ml00M758G24S2000Pl000100R600.M759Ml01M30
857
-
8-58
r50(TESTCUT)J5050OJ
(TESTCUT)Ml02(SPC1.0)G92G90X2500.Y1775.G93X10.Y500.Ml00EOOlGl11X10.Yl0.15.E002Gl11X40.Yl0.112.5E003Gl11X25.Y35.135.J15.E004Gl11X25.Y25.150.Q-5.HO.5Ml01G50
r801a(AP~98-A-l) J Z(HS-98)
25mm10 J!73
(HS98REGULATION)Ml02(SPC1.2)M100G53Z300.G90G92Z300.G90GOOZ15.M722M727G555H98.Z0.1G91Z1.G04XO.1G555H98.ZO.02G04XO.1G90G92Z0.GOOZ2.8G04XO.5M727
-
GOOZ1.5G04XO.5M727GOOZO.2G04XO.5M727G53Z300.G90G92Z300.M727M723M101
859
-
860 MADA
-
16
2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31. .
8-4 8-5 8-6 Z8-6 8-7 ?
8-8 8-9 8-10 8-11 8-12 8-12
1 8-13 8-13
861
-
2 3 4 5 6 7 8 9 10 11 12
! i' i! ! ! ! j!/1/ /1/ / / /1/ /1/ / / /1/ / / /1/ /1/ /1/ /j/
8-14 O OJ O 01 01 O Oi O OJ O O! 018 15 NC O 01 O 01 OJ O O! O Oi O 01 018-16 O OJ O 01 01 01 O! O Oi O Of O!
18-16 O oj Ol 01 O! 01 O! 01 Oi O 01 018-17 Y O Oi 01 01 01 01 01 01 Oi O 01 OJ8-21 O 01 01 01 01 O! O! 01 01 O 01 018-21 O 01 O O 01 Oi 01 01 O 0 O! 018 21 01 01 01 O O 01 Oi 01 0; 01 01 Oi
3(500 8-23 (1))
38-24 I
8-24 8-28 (2) '
6 8-29 (1000
8-29 )8-29
1 8-30 11 !(2000 8-31 )
63
-
9
1 9-22 9-42.1 9-42.2 9-52.3 9-73 9-84 !9-105 ? 9-125.1 ? |9-125.1.1...............9-125.1.2.....................9125.1.35.1.45.1.5JI9-155.1.69-15
9
- 1 .
-
Ea9!
I~ 0" 1
@!!
-
2 NCI?
|10 (9 1)735(()
90 4 Jr6 J
.|9 No.l0
2.1NC)1
7
9-4
-
2.'2 (JIS)()! '
SPC
E-SPC
SPH
SS400
SUS
A-SUS
C-SUS
E-SUS
Al050
A2017
A5052
SECC
E-SECC
SPG
E-SPG
SPCC
SPCC
SPHC
SS400
SUS304-2B()
SUS304-2B
SUS304-2B
SUS304-2B
Al050
A2017
A5052
SECC
SECC
SPG
SPG
l
S:7.5"
T:10"
:
W:HS-WACS
95
-
.
: ~ 3. 2mm=SPCC4. 5mm~ 6. Omm=SPHC9. Omm~16. Omm=SS400
9-6
SUS
SECC
SPG
SUS304-2B
:1m10g
:!1m149g
JIS A5052JIS A2017)7)JIS Al050
-
2.3 !|!
:0100
M102CC-SUS1. 0)
G90 G92 X1270 Y1270
GOO X20 Y20;
M100
E01
G01 Y 10
H
!201 No.2a1
7No. I101 No.101?
M102CC-SUS1.0)"c-SUS1. 0
j.?-......C-$1.0 NllllQI]"
- 8-2 ........3 ...........4 .........5 -.....
E$U$!.O
.lij2(1lIA4
101 ... . .102 ......103 - -
C-SU$1.0O III
201 . If .. ..202 ......203 .......204 ......20S ......
E01"No.1
97
-
3 -!
|l!
-
.1.5mm!
-
:
] SPCl. 6[J SPC1.6 INO.1 .101
[) :spc /1900[ba // 1 1/2/3/4/5[A;.JON/ i ~- n: h 7E 1'..~:-.10 IF) I[S~ ~.7'[mm: ? ;]
220013600 100i 10 0.3i 3 1.5 O.180 q_.Q1000'3600 500 20 0.2 2 0.0
1.50.111654000Li1222009244201
3I3000 700 100 0.1 1.55 0. 202 0.0 4I4000 800 o 100 O.I 0.0 1.5 0 202 a6
|9 .
92.140300oh800 0.011000 50 O.I 1.51 0.000 l
t'n i l ~.No [5l.~11U!{ !j"~-'f~ |~-'f~ It | 110021 33600 6:100 20
i 01 0.0EUU 00..0011..55600 2'20000l1- 20 i 01 0.0 o08a.55103 3600 20 l 01 0.0 0.01 J.5
t'n No [j
111000231 nnunuauOo0-+4'l11
:.i lit'n. t'n t'i"A t'n l:'n il:'T: I tNo JJ E 1::7 |E ::h
201 1201 3600 10
za o0ooao0eoe 0aoooz
100 10 20202 120I 3600 10 2200 10500 100 10 20
IZO 3600 10 0.500 100 10 15120 3600 10 100 10 15205 120 3600 10 20I O.0 O.I 1IO.500 100 10 15
[
512
E
=
4Z(lIPagf/c2})O.IIIPa{1.Oi
23 0.6a{G.O}4 5 O.I"PaI1.O}
67
99
-
4 7|7||!!
1:!
7 7 .J fNo. [S]
101 360070 15 10 O.5 4 5 0.0511 !.
3.0sec
O.5sec 100Hz19
O.5sec 100Hz18
O.5sec 90Hz17
O.5sec 80Hz16
70Hz15
7
9-10
-
2:!3
7 7 ' rNo. [S]
101 360070 15 5 o.7 10 4 0.0511 !
O.5sec 95Hz20
90Hz19%85Hz18
80Hz17O7sec|75Hz16
70Hz15
'9-11
-
5
5.1 .NC|12..i
5.1.1|73l
ss()?|
5.1.21.1!!7!7
-
5.1.3|
!ll()
-
5.1.4
l
?l|7|
NC
NCI
NCl16:eNC)l
!NC
9-13
-
A
::::
A: ()
|
I (
-1-
2.3!NC!
2.3 u
~."'~"Jiii::aDJ'~
::
: : .......:y
()
NC
NC|2.4
2.4
iNC
|NCll!Id:l
! 1500 !
9-14
-
00
1800 !
1790 )
-
9-16 MADA
-
10
1 10-21.1 -;10-21.2 )710-21.3 )710-31.4 10-32 )710-42.1 NC-;10-42.2 10-792.3 10-84
0-1
-
?
1.1 | J 3
JiJ
||
J!!
1.2
---9999 NC
10000---10999 7
12000
13000---13999
14000
15000
16000 7
20000--- NC
102
-
1.3
!JJlJI3 (10000)f2.2 7Jf2.3
1.4 !!!!
-
2 2.1 NC
150
701 1 702 2 7031 3 704 4 705 5 706 6 707 7 708 8 709 9 710 10 711 11 712 12 713 13 714 14 715 15 716 16 717 17 718 18 719 19 720 20 721 21 722 22 723 23 724 24 725 25 726 26 727 27 728 28 729 29 730 30 731 31 732 32 733 33 734 34 735 35 736 136 737 37 738 38 739 39 740 40
10-4
- 741 41 742 42 743 43 744 44 745 45 746 46 747 47 748 48 749 49 750 50 751 51 752 52 753 53 754 54 755 55 7'756 56 757 57 758 58 759 59 760 60 761 61 762 62 7'763 63 764 64 i765 65 766 66 767 67 768 68 769 69 770 70 771 71 772 72 773 73 774 74 7
-
790 90 791 91 792 92 793 93 794 94 795 95 796 96 797 97 798 98 799 99 1000
T1001MOl MOl MOl
1002
1003MOl MOl
1004
1005 9 1006EM
2000J
2001
2002
2003T
2004
2005 2006MOl MOl
2007Se o Ready or
[]
2008!Initial Ready or[]
2009lAlarm Rese ortReady[]
2010System orReady[[]
2011M123 or
2012M123 or
2013-IM123 or
106
-
2014 or
2015 or
2016M123 or
2017 or
2018 or
2019 or
2020 T
2021NCM123 orT
2022 or
2023 or
20241 or
2025 p
2026 I)or
2027
2028
4000RAMDiskFormat
4001RAMDiskOpen
4002RAMDiskClose .
4003RAMDiskRead
4004RAMDiskWrite
4005RAMDiskDelete
4006RAMDiskRename lit
4007RAMDiskFull 77lltFul .1
4010e (Openerr)RAM Diskmemoryerror
4011i(Writeerr)RAM Diskmemoryerror
4012 (Sumerr)DPR memoryerror
7
-
4013 (readerr)RAM Diskmemoryerror
4014'. (Fullerr) .128K .IJ
4020c(Openerr)RAM' Diskmemoryerror
4021 (Writeerr)RAM Diskmemoryerror
4022 (Sumerr) DPR emoryerror
4023 (readerr)RAM Diskmemoryerror
4024. (Fullerr) .128K .
40257"7" 1(Closeerr)
1(Closeerr)
40267". io 2(Closeerr)2(Closeerr)
4030 (Openerr)RAM Diskmemoryerror
4031 (readerr)RAM Diskmemoryerror
4032(Writeerr)RAM Diskmemoryerror T
4033(Fullerr) .71 .
40357.(Closeerr)(Closeerr)
5001 0011 -91
5002 0012 =;1--92
5003 0013 3
5004 0014 -94
5005 0015 -95
5006 0016 -96
5007 0017 -97
5008 0018 @-98
5009 0019 -99
5010 00110 10
10-8
-
5011 00111 -~11
5012 00112 e-~12
5013 00113 13
5014 00114 -~14
5015 00115 -~15
5016 00116 -~16
5021 0021 1\0-~1
5022 0022 -~2
5023 0023 -~3
5024 0024 4
5025 0025 -~5
5026 0026 -~6
5027 0027 e 7
5028 0028 -~8
5029 0029 9
5030 00210 -~10
5031 00211 -~11
5032 00212 12
5033 00213 -~13
5034 00214 -~14
5035 00215 15
5036 00216 l16 y
5041 0031 1
5042 0032 -~2
5043 0033 .-~3
5044 0034 -~4
5045 0035 5
5046 0036 -~6
09
-
5047 0037 -97
5048 0038 71-Ij8
5049 0039 -Ij9
5050 00310 -910
5051 00311 -Ij11
5052 00312 12
5053 00313 -Ij13
5054 00314 14
5055 00315 -915
5056 00316 16
6001 001 or1 1
6002 2 or1 2
6003 3 or1 3
6004 4 or1 4
6005 5 or1 5
6006 6 or1 6
6007 7 or1 7
6008 8 or1 8
6009 009 or1 9
6010 0010 or1 10
6011 11 or1 11
6012 12 or1 12
6013 0013 or1 13
6014 {14 or1 14
6015 15 or1 15
6016 16 or1 16
6021 -/1 or2 1
6022 -/2 or2 2
0-10
-
6023 -/3 or2 3
6024 4 or2 4
60251 -/5 or2 5
6026 -/6 or2 6
6027 -/7 or2 7
6028 -/8 or2 8
6029 -1' 9 or2 9
6030 -/10 or2 10
6031 t 11 or2 11
6032 /12 or2 12
6033 /13 or2 13
6034 -/14 or2 14
6035 -/15 or2 15
6036 -/16 or2 16
6041 ASS -~ 1 or3 1
6042 ASS -~ ? 2 or3 2
6043 ASS -~ ? 3 or3 3
6044 ASS -~ ~ 4 or3 4
6045 ASS -~ ? 5 or3 5
6046 ASS -~ ~ 6 or3 6
6047 ASS -~ ? 7 or3 7
6048 ASS -~ ? 8 or3 8
6049 ASS 9 or3 9
6050 ASS -~ ? 10 or3 10
6051 ASS -~ ? 11 or3 11
6052 ASS -~ ? 12 or3 12
6053 ASS -~ ~ 13 or3 13
6054 ASS-? 14 or3 14
011
-
6055 ASS 15 or3 15
6056 ASS-99 16 or3 16
6061 ASS-91 or4 1
6062 ASS2 or4 2
6063 ASS-93 or4 3
6064 ASS-;4 or4 4
6065 ASS-95 or4 5
6066 00ASS-96 or4 6
6067 00ASS-97 or4 7
6068 ASS-98 or4 8
6069 ASS-99 or4 9
6070 ASS-910 or4 10
6071 ASS11 or4 11
6072 ASS12 or4 12
6073 ASS-913 or4 13
6074 ASS14 or4 14
6075 ASS -~ 15 or4 15
6076 ASS -~ 16 or4 16
6081 ASSSID 1 or5 1
6082 ASS SIO 2 or5 2
6083 ASS SIO 3 or5 3
6084 ASSSIO 4 or5 4
6085 ASS -~ SIO -~ 5 or5 5
6086 ASS SIO 6 or5 6
6087 ASS -~ SIO -~ 7 ori 5 7
6088 ASS -~ SIO -~ 8 or5 8
6089 ASS SIO -~ 9 or5 9
6090 ASSSIO10 or5 10
1012
-
6091 ASS '-~ SIO 11 or5 11
6092 ASS '-~ SIO 12 or5 12
6093 ASST'-~ SIO13 or5 13
6094 ASS -~ S1014 or5 14
6095 ASS '-~ SIO -~ 15 or5 15
6096 ASS -~ S1016 or5 16
6101 ASS1 or6 1
6102 ASS -~ 2 or6 2
6103 ASS3 or6 3
6104 ASS -~ 4 or6 4
6105 00ASS5 or6 5
6106 ASS6 or6 6
6107 ASS -~ 7 or6 7
6108 ASS -~ 8 or6 8
6109 00ASS-~ 9 or6 9
6110 00ASS10 or6 10
6111 00ASS-~ 11 or6 11
6112 00ASS-~ 12 or6 12
6113 ASS -~ 13 or6 13
6114 00ASS-~ 14 or6 14
6115 00ASS-~ 15 or6 15
6116 ASS -~ 16 or6 16
7001-1 -+1 +IJOT1 OTI)')
7002-1 +2 +IJOT2 OT
7003-1 +3 +IJOT3 -OT
7004-1 +4 +IJOT4 OT
7005-1 +5 +OT5 OT
7006-1 +6 +IJOT6 OT
7007-1 +7 +IJOT7 OT
10-13
-
7008-. J+8 +IJOT8 OT
7009-/' +9 +IJOT9 OT
7010-/:+10 +IJOT10 OT
7011-/+11 +IJOT11 -OT
7012-/+12 +IJOT12 OT
7013-/ +13 +IJOT13 OT
7014-/+14 +IJOT14 OT
7015-/ J+15 +OT15 OT
7016-1' +16 +IJOT16 OT
7021-/ -1 OT1 +OT
7022-/' J 2 OT2 +OT
7023-/ 3 OT3 +OT
7024-/"-4 OT4 +OTI)
7025-/ J 5 OT5 +OT
7026-/ J 6 IJOT6 +OT
7027-/:-7 IJOT7 +OT
7028-/J 8 OT8 +OT
7029-/ 9 IJOT9 +OT
7030-/ J 10 OT10 +OT
7031-/J 11 OT11 +OTI)
7032-/" 12 IJOT12 +OT
7033-/ 13 OT13 +OT
7034-1' 14 IJOT14 +OT
7035-/ J 15 IJOT15 +OTI)
7036-/ 16 OT16 +OT
7041-/+1 +11
7042 J +2 +IJ12
7043/+3 +13
7044 J +4 +IJ14
7045 -/+5 +~1 5
10..14
-
7046-/ J6 +1116
7047-/ j+7 +1117
7048-/+8 +18
7049-1 +9 +19
7050-/ j+10 +Ij110
7051-/+11 +117111
7052-/+12 +IJ112
7053-/+13 +113
7054-1' +14 +11114
7055-/ J+15 +115
7056-/ +16 +116
7061-/ 1 11
7062-/ J 2 12
7063-/:-3 13
7064-1' J-4 14
7065/ 5 15
7066-/ 6 16
7067-/ J 7 1117
7068-/ 8 18
7069-/ J 9 19
7070-/ J 10 110
7071-/ J-11 IJ111
7072-/ J 12 112
7073-/ l-13 113
7074-/ J 14 114
1075-/ l 15 IJ115
7076-/ J 16 116
1081-/ l+1 +IJ11
7082-1' J:+2 +IJ12
7083-/ l+3 +13
10-15
-
7084 1' +4 +14
7085-1' +5 +15
7086-1' J+6 +IJ16
7087-/+7 +17 "f
7088-/j:+8 +18
7089-/:+9 +IJ19
7090-/+10 +.IJ110
7091-/+11 +111
7092-/+12 +112
7093-/:+13 +IJ113
7094-/'+14 +114|
7095-/'+15 +IJ115
7096-/+16 +IJ116
7101-/ 1 11
7102-1' 2 IJ12
7103-1' 3 IJ13
7104-/-4 14
7105-/ 5 15
7106-/ 6 IJ16
7107-1' 7 IJ17
7108-1' 8 18
7109-1' 9 19 c
7110-/ 10 110
7111-/ 11 111
7112-/ 12 112
7113-/ 13 113
7114-/ 14 114
7115-/ 15 IJ115
10-16
-
7116-. J-16 I)116
71211 1
71222 2
71233 3
71244 4
71255 5
71266 6
71277 7
71288 8
71299 9
713010 10
713111 11
713212 12
713313 13
713414 14
713515 15
713616 16
8000DSP DSPc-9 8001 1 J8021 1 .-9 1 J80222 .e-92 8023I~ 3 .-93 8024I~ 4 .-94 J802515 .-~5 J80261~ 6 .6 80277 .7
802818 .-98 80299 .@ 9 J8030110 . 10 J8031111 . 11 J
803212 . 12 8033113 . 13 J
8034114 14 1'803515 . 15 J8036116 .-916 J9000
107
-
9001
9002
9003LS LS LS9004S S LS9005S LS S9006S LS S9007
9008SLS S
9009 9020S-ONLS LS
9021SONS LS
9022LS ONS S
9023S-OLS SN
9030LS OFFLS LS
9031S-OFF LS S
9032SOFF S S
9033S0S SFF
9200PHNC
9201PHNCM123PHNC
9202PHNCTPHNCT
9203PHNC/~ M123PHNC
9204PHNC
9205 T
9206PHNCRAM
9207PHNCI~
9208PHNC 1)
(1mm)
1018
-
9209PHNC1) 2)
3)
9210PHNCI~I~ (PUNCH)
9211PHNCI~I~ ()
9212PHNCI~I~ ()
9213PHNCI~I~ ()
9214PHNCI~()
9215PHNCI~I~ ()
9216PHNCI~I~ (PUNCH)
9217PHNC (PUNCH) (PUNCH)
9218PHNC( () )
9219PHNC() ()
9220PHNC( () )
9221PHNC(() )
9222PHNC( () )
9223PHNC (PUNCH) (PUNCH)
9224PHNC+OTMflI'o"
9225PHNC OTM"0"
10-19
-
9226PHNC
9227PHNC 1'-
9251PHNCAIAI l
9252PHNCAI
9254PHNCAIAI
9255
9256(())
9260PHNCPHNC
9261PHNCIJPHNC
9270HLS 1 HLS HLS
9271HLS 2 HLS HS
9272HLSHLSM1SH3() T
9273HLSHSM1SH3() T
9274PHNCNC(NC)
9275PHNCNC2(NC)
9276PHNC( )
9277PHNC
10000
10001'.. 23kg/cm2
100027 LS
10003-9 .
10008'. DCfj l.
10021AC . 10022DC .
1020
-
10030 OLC-212H:50min OLC-320H:55minOLC-420H:55minOLC-420H2:55minOLC-430H:55Umin
10052
10053 (50)
10060 .106hPa(80Torr)
10061. . OLC-H
10062 .
100631 IJ()
100642 ()
100717 ._~ ._~
10077 '
10078
100799
10081._~
10085
10087 50uS
10105 . .
10108
10110.
10111
10112
10113AID
10114
101151
101162
10-21
-
101173
101181
101192
101203
101214
101225
101236
10201DC1
10202DC2
10203DC3
10204DC4
10205DC5
10210DCl I
10211DCl AC
10212DC1
10213DCl
10214DCl 77
10215DC1
10216DCl
10217DCl 1
10218DCl 2
10219DCl 3
10220DC2
10221DC2 AC
10222DC2
10223DC2
10224DC2 77
10225iDC2
10226DC2
10227DC21
O22
-
10228DC22
10229DC23
10230DC3
10231DC3 AC
10232DC3
10233DC3
10234DC3
10235DC3
10236DC3
10237DC31
10238DC32
10239DC33
10240DC4
10241DC4 AC
10242DC4
10243DC4
10244DC4
10245DC4
10246DC4
10247DC41
10248DC42
10249DC43
10250DC5
10251DC5 AC
10252DC5
10253DC5
10254DC5 77
10255DC5
10256DC5
10257DC51
1023
-
10258De52
10259DC53
10260DC6
10261DC6 AC
10262DC6
10263DC6
10264DC6 77
10265DC6
10266DC6
10267DC61
10268DC62
10269DC63
10300RF
10301RF1
10302RF2
10303RF3
10304RF4
10305RF5
10310RF1
10311RF1
10312RF1
10313RF1 1
10314RF1 2
10315RF1 3
10320RF2
10321RF2
10322RF2
10323RF21
10324RF2 2
10325RF23
10-24
-
10330RF3
10331RF3
10332RF3
10333RF31
10334RF32
10335RF33
10340RF4
10341RF4
10342RF4
10343RF41
10344RF42
10345RF43
10350RF5
10351RF5
10352RF5
10353RF51
10354RF52
10355RF53
10360RF6
10361RF6
10362RF6
10363RF61
10364RF62
10365RF63
12100l' J'9
12101 rLASERAUGNMENTJrLASERf AUGNMENTJ71
12102 J{j'9 l
0-25
-
12103. I).
~- J "~ j"~
12104 rj-9JI:: -9J
12105 OLC .J 71NCNC
12106 -~!9-~ J "~ fJ
12107~-(;) )19JI~
121087 JI~-() 9 -9JIr~-
12109y NC.NC
12110
12111 13100 fJ"9
13101() S LSfOT j" "LS
13102() "9~ "~
13103 IlJ"~
13104. fJ"9
14100 " ""IY+ J"9
14102 14103
1410419" J "~
1026
-
14105.I). f J.~
14106 & Jl .~
14107 & fJ .~
14108}ItV (. ) J.~7
14109 . () 7. j.~7
14112-~ jltC1 -~jltC1 ry .~
14113-~ jltC2 -~jltC2f
.~
14116() !
ryj.~ .
'14117(I)) -~ -~-l
ryj "~ J.
14118 .XYJ"~Z.
14119 -11 -~ f J.~ -11 9
14120-9 (-9 J)
14121-9 (f) "11
14122-~ () J "11
14123-~ (7) ? j "11
1027
-
14124-~ (-9J) "9
14125-~ (J) "9
14126 -9J() "9
14127-9 I)-~ J() .
141281y. I)-;J._tO j"9
14129ovs ovsJ'9
ovs
14130ovsJ"~
14131ovs f
J.~
14132ovs
"~
14133ovs j"9ovs
14134ovs ovsfJ"9T ovs
14135 ZjJ~J~J "9
14136 ZJ~J "~3
14137 Z30mm J.T
14140 rl j
141417/"NC
14142
10-28
-
14143. . .
14145. .
14146 J.~
. j
14147 9J JT
14148 J.~ . -~ FA
141499 9 J .~
14150 '9
14151 .. J.~
14152 .-~ J9
14153 . ' J.~
14155 . . . .~
7
14156. .9 .~
14169 14170
14171
14173 9 9 r77 J.~
1417477 7 .-7'J~SO LS .~
14175I) 7 71) SOL:
LS.~
1029
-
14177Z' Z J11
14179. 9LS J
7 LS11
14180 y C.
14181 14182-11 j11
14183 NC
14184 NC
14185 fJ9
14186
14187 I)e -11 NC7 9
14188 14189 14190 . J11
14191 14192 14193 71)-;1 NC7
.
14194 J"11
14195 14196 14197 14198Z Z fj11
Z
10-30
-
14199Z XYZf'9
14200 . .
142029+Z Z+ " 1r-ZJZ
14203Z ZH"1r+ZJ'9Z+
142049+B B+H "rOTJ'9r-BJ'9B
142059B B-""1rOTI)'9r+BJ'9B+
14206.9' J'JI. l
14207. . .
14208.1 . .
14209.2 . .
14210.3 .
14214 14222. .J
14223 77J'9
14225() G ()J'9
14226() f ()j.
14227() .()J'9
031
-
14228( ()J.
14229 IJr () J.
14230 r
() J.;
14231 '11=r () j.;
14232(A) r'7
(A) J.;
14233yJ(8) r'7(8) J.
14234(A) (A) .;
14235e(8) I)(8) J.;
14236 (A) yr'7(A) j.;
14237 (8) yI)(8) j
14238 (A) J"I)(A) J.
14239 (8)J.I)(8) .7
14240 I) j .~
14241 .f J.~ C
14245UL9- 11.(.)ULf J .~
142467 J.~
14248
1032
-
14249. . . .
14250X
14251 """"
14252 J :7"J";
14253MP -9-;
14254
14255 14256 14257.+OT . +OT.
14258.e OT . OT.
14259e. .. OT. OT 71
142601"'1". 1(M90)
142612"'1". 2(M91)
14262.1"'1". 1(M92)
142632.e. 2(M93)
14264(M94) .
14265(M95) a.
14266X/V XYXY
14267 XYH ""1Y+ J";
14273HS-98 HS-98DC24VDC24V J";
. fJ7HS-98I)
033
-
14274HS-98-9 HS-98-$I }ItJ'9 HS-98
14275HS-98.'-$1 HS-98J'9T HS-98
14276HS-98 HS-98I)fJ'$1 HS-981)7'
14277HS-98I) J.$I . HS-98.
14278.
142799to. 9()
1428077
142817'7 9770
14282 99.$I i
14283 9LSI
142847 LSfJ '$1
14285 S I)swr
14286+P P+IJH 'j'$1P
142879P PH "J'$1P+
14288 fJ'$1 sw
14289 (M758)9J'$1
10-34
-
14290 -9NC
14291 . -9 . -9NC et--
14292L-UL-; L-UL-$I -;NC
14293-9 .1'-;NC
142944 -$I4 .-;.'-~ NC
14295MPe-; MPe-;. NC
14296.-$I.-$INC
14297-;-;(-$I -~ NC ) i
14298 -;(NC)
15800 404hPa(3Torr)
15801
15802 I)..
15803
15804 66-..")1')"80hPa(50-60To)
15840
15841
15842
15843
15844.. ... ..
16000 T
16001MOlMOlMOl
16002
19994 or
19995 or
19996 or
19997 or
1035
-
19998 or
19999 or
200019I) 9
20005
20006 Ready
20007 . .
20008 20034JOB !JOB
20035JOB0 JOB0
20036JOB250 JOB250
20134Win. or
20135PC PC 20136PC 20137PC 21001P. P I)or
21002P. P or21010DSP!DSPl I)or
*21011M1DSP.M1DSPl or
21020Mailpenderror Mailpenderror I)or
21021Mailinitialerror Mailinitialerror I}or
21022 I}or
21023INTtimeout
21031ITP-INT (ORG)
21032ITP-INT (MNL)
21033ITP-INT (PTP)
21034ITP-INT (UNE)
21035ITP-INT (CIR)
21036ITP-INT (PUNE)
21037ITP-INT (PRESS)
21038ITP-INT (FLSRC)
21039ITP-INT (FLON)
21040ITP-INT (FLOFF)
1036
-
21041ITP-INT (BEAM)
21042ITP INT (PIER)
21043ITP-INT (PROC)
21047ITP-INT (TF)
21048ITP-INT (HS)
21049ITP-INT (TRON)
21050ITP-INT (TROFF)
21054ITP-INT (POS)
mlITP-INT (ECODE)
21057ITP-INT (CYL)
21062ITP-INT (IN)
21067ITP-INT (PRESET)
21068ITP-INT (MODE)
21075ITP-INT (RESET)
21076ITP-INT (CLEAR)
21077ITP INT (REBOOT)
21084ITP INTmode (UNE)
21085ITP-INTmode (CIR)
21086ITP-INTmode (PUNE)
21087ITP-INTmode (PRESS)
21088ITP-INTmode (FLSRC)
21089ITP INTmode (FLON)
21090ITP-INTmode (FLOFF)
21091ITP-INTmode (BEAM)
21092ITP-INTmode (PIER)
21101ITP-INT1 1
21102ITP-INT2 2
21110syncsync or
037
-
21111ITP-INT(1) 1
21112ITP-INT(2) 2
21113ITP-INT(3) 3
21114ITP-INT(4) 4
21115ITP-INT(5) 5
21116ITP-INT(6) 6
21117ITP-INT(7) 7
21118ITP-INT(8) 8
21119ITP-INT(9) 9
21120ITP INT(10) 10
21121ITP-INT(11) 11
21122ITP-INT(12) 12
21123ITP-INT(13) 13
21124ITP-INT(14) 14
21125ITP-INT(15) 15
21126ITP-INT(16) 16
21131ITP-INT(1) 1
21132ITP-INT(2) 2
21133ITP-INT(3) 3
21134ITP-INT(4) 4
21135ITP-INT(5) l5
21136ITP-INT(6) 6
10-38
-
21137ITP-INT(7) 7
21138ITP-INT(8) 8
21139ITP-INT(9) 9
21140ITP-INT(10) 10
21141ITP-INT(11) 11
21142ITP-INT(12) 12
21143ITP-INT(13) 13
21144ITP-INT(14) 14
21145ITP-INT(15) 15
21146ITP-INT(16) 16
21170ITP-INTstatusbiterror (ECODEBIT)
21200 j
212010 0 or
21202C AIC
21220
21221AI AIf
21230
21300
21301
21302TONTON
21303TOFFTOFF
21304T
21305C C 21306CONCON
21307COFFCOFF
21308C0 CO
21309CC
21310TTl T
21311CC Lt
21312
1039
-
21401T1 -9(T1)
21402T2 -9(T2)
21403T3 9(T3)1
21404T4 970(T4)
21405T5 90-9(T5)
21406T6 -~(T6)
21407T7 )~ 9 -~(T7) '-~
21408T8 )~ (T8) "'7
21410VON V'ON
21411
21412
21413
21420UONUON
21421y
21422U lU
21430V !UT
21431V
21432
21440
21441
22001 -~9 1 or1
22002 -~~ 7 2 or2
22003 -~~ 3 or3
22004] -'~9 4 or4
22005 5 or5
220067 -~~ 7 6 or6
10-40
-
22007 009 7 or1 7
22008 009-99 8 or1 8
22009 00-9 8 or1 9
22010 9c -9 10 or1 10
220117 00-99 11 or1 11
22012 009-9 12 or1 12
220137 009 -99 13 or1 13
22014 009 14 or1 14
22015 009 -9 15 or1 15
22016 00 16 or1 16
22021 00 . 1 or2 1
22022 00 . 2 or2 2
22023 00 . 3 or2 3
22024 00"$I7 4 or2 4
22025 "$I7 5 or2 5
22026 "$I7 6 or2 6
22027 "$I7 7 or2 7
22028 00"$I7 8 or2 8
22029 "$I7 9 or2 9
22030 00 . 10 or2 10
22031 00 . 11 I)or2 11
22032 00"$I7 12 or2 12
22033 00 "9 13 or2 13
22034 00"$I7 14 or2 14
220357 00"$I 15 or2 15
22036 "$I 16 or2 16
22041 -$I 1 3 1
22042 -$I 2 3 2
041
-
22043 -$I 3 -$I3 3
22044 -$I 4 -$I3 4
22045 -f-$1 5 -$I3 5
22046 00-$I 6 c-$I3 6
22047 00T"-$1 7 3 7
22048! -$I 8 -$I3 8
22049 9 -$I3 9
22050 -$I 10 3 10
22051 00 -$I 11 -$I3 11
22052 00 12 -$I3 12
22053 -$I 13 -$I3 13
22054 14 -$I3 14
22055 -$I 15 -$II)3 15
22056 00JL-9-$I 16 -$I3 16
22061 4 1
22062 4 2
22063 4 3
22064 00 4 4
22065 4 5
22066 4 6
22067 4 7
22068 4 8
22069 00 4 9
220707 4 10
22071 4 11
22072 4 12
22073 4 13
22074 00 4 14
10-42
-
22075 4 15
22076 4 16
22081 5 1
22082 00 5 2
22083 5 3
22084 5 4
22085 5 5
22086 00 5 6
22087 v 7
22088 5 8
22089 5 9
22090 5 10
22091 5 11
22092 00 5 12
22093 00 5 13
22094 00 5 14
22095 5 15
22096 00 5 16
22101 00 6 1
22102 00 16 2
22103 6 3
22104 6 4
22105 00 6 5
22106 00 6 6
22107 6 7
22108 6 8
22109 6 9
22110 6 10
10-43
-
22111 6 11
22112 00 6 12
22113 00 6 13
22114 6 14
22115 6 15
22116 6 16
22121 00 7 1
22122 00 7 2
22123 7 3
22124 00 7 4
22125 00 7 5
22126 7 6
221277 7 7
22128 7 8
22129 7 9
22130 00 7 10
221317 7 11
22132 7 12
22133 7 13
22134 7 14
22135 00 7 15
22136 7 16
22141 00 IS 1
22142 00 IllS 2
22143 8 3
22144 00 8 4
22145 8 5
22146 8 6
10-44
-
22147 00 8 7
22148 00 8 8
22149 00 8 9
22150 00 8 10
22151 00 8 11
22152 8 12
22153 8 13
22154 8 14
22155 8 15
22156 8 16
22161 9 1
22162 9 2
22163 9 3
22164 9 4
22165 9 5
221667 9 6
22167 9 7
22168 9 8
22169 9 9
22170 9 10
22171 9 11
22172 9 12
22173 9 13
22174 9 14
22175 9 15
22176 9 16
22181 01 O 1
22182 01 O 2
10-45
-
22183 01 0 3
22184 01 O 4
221857- 01 O 5
22186 01 O 6
22187 01 O 7
22188 01 O 8
22189 01 O 9
22190 01 O 10
22191 01 O 11
22192 01 O 12
22193 01 O 13
22194 01 O 14
22195 01 O 15
22196 01 0 16
22201 01 1
22202 01 2
22203 01 1 3
22204 01 1 4
22205 01 5
22206 01 6
22207 01 7
22208 01 1 8
222097- 01 9
22210 01 10
22211 01 11
22212 01 12
22213 01 13
22214 01 14
10-46
-
22215 01 1 15
22216 01 1 16
22221 01 2 1
22222 01 2 2
22223 01 2 3
22224 01 2 4
22225j 01 2 5
22226 01 2 6
222277 01 2 7
22228 01 2 8
22229 01 2 9
22230 01 2 10
22231 01 2 11
22232 01 2 12
22233 01 2 13
22234 01 2 14
22235 01 2 15
22236 01 2 16
22241 01 3 1
22242 01 3 2
22243 01 3 3
22244 01 3 4
22245 01 3 5
22246 01 3 6
22247 01 3 7
22248 01 3 8
22249 01 3 9
22250 01 3 10
10-47
-
22251 01 3 11
22252 01 3 12
22253 01 3 13
22254 01 3 14
22255 01 3 15
22256 01 3 16
22261 01 4 1
22262 01 4 2
22263 01 4 3
22264 01 4 4
22265 01 4 5
22266 01 4 6
22267 01 4 7
22268 01 4 8
22269 01 4 9
22270 01 4 10
22271 01 4 11
22272 01 4 12
22273 01 4 13
22274 01 4 14
22275 01 4 15
22276 01 4 16
22281 01 5 1
22282 01 5 2
22283 01 5 3
22284 01 5 4
22285 01 5 5
22286 01 5 6
10-48
-
22287 01 5 7
22288 01 5 8
22289 01 5 9
22290 01 5 10
22291 01 5 11
22292 01 5 12
22293 01 5 13
22294 01 5 14
22295 01 5 15
22296 01 5 16
223017 01 6 1
22302 01 6 2
22303 01 6 3
22304 01 6 4
22305 01 6 5
22306 01 6 6
22307 01 6 7
22308 01 6 8
22309 01 6 9
223107 01 6 10
22311 01 6 11
22312 01 6 12
22313 01 6 13
22314 01 6 14
223157 01 6 15
22316 01 6 16
22321 01 7 1
22322 01 7 2
10-49
-
22323 01 7 3
22324 01 7 4
22325 01i 7 5
22326}v. 01 7 6
22327 01 7 7
22328 01 7 8
22329 01 7 9
22330 01 7 10
22331 01 7 11
223327 01 7 12
22333 01 7 13
22334 01 7 14
22335 01 7 15
2233677 01 7 16
223417 01 8 1
22342 01 8 2
22343 01 8 3
22344 01 8 4
22345 01 8 5
22346 01 8 6
22347 01 8 7
22348 01 8 8
22349 01 8 9
22350 01 8 10
22351 01 8 11
22352 01 8 12
22353 01 8 13
22354 01 8 14
1050
-
22355 01 8 15
22356 01 8 16
22361 01 19 1
22362 01 9 2
22363 01 9 3
22364 01 9 4
22365 01 9 5
22366 01 9 6
22367 01 9 7
22368 01 9 8
22369 01 9 9
22370 01 9 10
22371 01 9 11
22372 01 9 12
22373 01 9 13
22374 01 9 14
22375 01 9 15
22376 01 9 16
22381 02 0 1
22382 02 0 2
22383 02 O 3
22384 02 O 4
22385 02 O 5
22386 02 O 6
22387 02 O 7
22388 02 O 8
22389 02 O 9
22390 02 O 10
105
-
22391 02 O 11
22392 02 O 12
22393 02 O 13
22394 02 O 14
22395 02 O 15
22396 02 O 16
22401 029 1 #1
22402 027" #2
22403 02 1 #3
22404 02. #4
22405 029 1 #5
22406 02 1 #6
22407 02 1 #7
22408 02 1 #8
22409 02 1 #9
22410 02 1 #10
22411 02 1 #11
22412 02 1 #12
22413 02 1 #13
22414 02 1 #14
22415 02 1 #15
22416 02 1 #16
23000 23001 7
23002 T
23003 T
23004 J
23005 J-IJ
23006 23007
1052
-
23008
23009
23010
23011J;JJy
23012f';JI':J
23013
23014MDI MDI
23015MDI MDI
23051
2305211
2305300
230540 0 2305507 0 23056N7 N c
23057N N 23058A A
23059A A
23060 B 23061B B
23062Ai.A7.
23063BBl
23064M7Ml7
23065F7.F
23066G G 23067072 02
23068G G
23069M12-M13M12-M13
23070BABA t
23071..-
23072M10-M11M10-M1l
23073
23074GOO-GOlGOO-G01
23076 p NCTM101 7
-
23079 NCTM758
23080 NCTM759
23100.GOOI 23101GOl i23102G02
L231037G031 231047G041
231057G05
23106G061
23107G07
231087G081
23109G091 231107G10
23111G11
L231127G12
L23113.7G131
L23114.7G14
L23115G15
L231167G16
L23117G17 i
L23118G18
23119G191
L23120.G20
231217G21
L23122.G221
L23123G23
L23124G241
23125G251
23126.G26
1054
-
23127lG271=
23128lG281
23129G291
23130.G301
23131G31
23132G321
23133.G331
23134G341
23135G351
23136G361
23137G37
23138G381
23139G39
23140G401
23141G41
23142G42
23143G431
23144G441
23145G451
23146G46
23147lG47
23148G48
23149.G491
23150.G501
23151G51
23152!G521
23153G53
231541G541
1055
-
231557G55 l
23156G56
23157G57
23158G581
23159.G59
23160G60
23161G61
23162.G62
23163!G63
231647G641
23165.7G65
23166.G66
23167G67 -i
23168G681
231697G691
23170.7G701
23171G71
23172.G721
23173.G73
23174G74
23175G75
23176lG76
23177G77
23178G781 L
23179G79 -ll
23180|G801 L
23181.G81 L
23182.G821 L
1056
-
23183G831
23184'G84
23185G851
23186.G861
23187G87
23188G88
23189G891
23190G901
23191G91
23192G921
23193G931
23194!G941
23195lG95
23196G961
23197lG971
23198G981
23199G991
23200Gl00
232013.Gl01
232023.Gl02
23203{G103
23204Gl04 L
23205!Gl05 L
23206.Gl06
23207.Gl07 L
23208GlOB 7
23209.Gl09
23210Gl10 L
1057
-
232117G111 "]'23212.G112 23213or7G113 23214G114
L23215G115 "]'
L23216Gl16 P
L23217Gl17 23218Gl18 "]'
l
23219G119 23220.G120
L23221G121
L23222G122
L23223G123 23224.G124 23225G125 232267G126 23227G127 "]'
L232287G128r
L23229!7G129 23230G130 23231..G131 23232G132 7
l
23233G133 7L
23234orG1341 23235G135
23236G136
L23237G137
l
23238G138 l
1058
-
23239.G139 l
23240'G140 l
23241'G141 L
23242.G142 L
23243'G143 {
23244G144 L
23245!G145 {
232461G146 {
23247.G147 L
23248.G148 7'L
23249!G149 L
23250!7G150 L
232517G151 L
23252G152 L
23253!7G153 {
23254G1541 L
23255!G155 L
23256G156
23257G15