“A Low Profile 2.5 SIP Package Technology using Thin ETS...

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1 © Copyright 2019 Dialog Semiconductor. All Rights Reserved. Confidential Restricted – subject to Non-Disclosure Agreement restrictions. NOV. 1ST 2019 IEEE/ IPSOC POWER SOC PACKAGING CONFERENCE , SCOTTSDALE ,ARIZONA J. Mennen Belonio Senior Group Manager - IC Packaging Eng‘g - R& D Advance Packaging “A Low Profile 2.5 SIP Package Technology using Thin ETS Substrate, for Wearable Applications”

Transcript of “A Low Profile 2.5 SIP Package Technology using Thin ETS...

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NOV. 1ST 2019

IEEE/ IPSOC POWER SOC PACKAGING CONFERENCE , SCOTTSDALE ,ARIZONA

J. Mennen Belonio Senior Group Manager - IC Packaging Eng‘g - R& D Advance Packaging

“A Low Profile 2.5 SIP Package Technology using Thin ETS Substrate, for Wearable Applications”

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Outline

▪ Introduction of SIP Package Technology Dialog

▪ Technology Market Driver

▪ Evolution of SIP Technology

▪ Advantages & Differentiator of DLG 2.5D SIP vs other SIP Technology in the market

▪ SiP Package Technology Achievement

▪ Summary

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Introduction

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“A Low Profile 2.5 SIP Package Technology using 85um Thin , “ETS” Embedded Trace Substrate

Introduction :

✓ A 2.5 D System In Package is provided and structured using a Very Thin ( ETS) Embedded

Trace Substrate in 3 or 4 layer structure having interconnect traces therein.

✓ One or more passive component mounted on one side connected to substrate trace pads and

encapsulated by molding process on one side , and an ASIC die mounted on an opposite side

of the embedded trace pads and embedded in a second molding encapsulation steps .

✓ Electrical connections were made between silicon die metal pads layer with Cu Pillar Structure

,and solder balls mounted through Mold Via openings connected to the Substrate trace pads

that serves as Package I/O‘s.

✓ A 2.5D Ultra Thin SIP Package that have a Total Stack -up of 850um .

DIALOG

SIP Package

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“ A Low Profile “2.5D SIP Package Technology using Thin ETS Substrate

Ultra Thin Substrate:

85um

Top Side

Molding EMC

Bottom Side

Molding EMC

Solder Ball

I/O

ASIC Device

Passive Components

(From 80 to 110pcs)

❖ DLG Double Side Molded Thin ETS-SiP Package with Patent Pending ;

▪ US Patent Application 15718080

▪ German Patent Application 102018207060.1

Total Package Height :

850um max

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DIALOG Market Driver

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Driving Force In The Market

DIALOG Technology Market Driver

Source : Yole

Source : IDC

1) Lower cost, increase performance and functionality through advanced packaging

2) Multi-die packaging and System in Packaging (SiP) for functional integration

3) Form factor requirement (Smaller body size/ Thinner package thickness)

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8© 2019 Dialog Semiconductor

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Dialog #1 Pure Play PMIC Supplier

Power Management Market Share

Qualcomm

33%

Dialog Semiconductor

18%MediaTek

7%

Maxim Integrated

7%

Samsung

6%

TI

4%

NXP

3%

Others

22%

2018 PMIC MARKET SHARE

Source : IHS Markit, Q2 2019

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SIP Technology Evolution

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Source : Yole

Advanced Packaging Market Diversification needs

▪ OSATs are directing considerable effort to developing advanced wafer level & 3D IC packaging capability to support

requirements for scaling & density/ Development of 2.5D/3D assembly capability as market grows

▪ With a variety of SiP architectures and technologies available, assembly and packaging houses will be distinguished by SiP

customization offers/capabilities and turn around time

SiPs will take over the market,

single die packages remain only

where necessary/convenient

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DLG SIP Packaging Evolution & Differentiator vs the Market

Cost

Footprint

Complexity

Footprint

2000‘s 2010‘s 2018 ‘s ~ 2022‘S

Flip Chip eWLP

SIP Stack Die

PoP/PiP2,5D Interposer

2,5D/Extended eWLP

3D eWLP with

Interposer

3D eWLP SIP

3D Face to

Face

DLG 2.5D SIP

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DLG SiP Snapshot vs other 2.5 D (ex . eWLP SIP ) in the Market )

• 3 or 4 Layer Cu Trace

• High Integration of

Passive (50 ~100pcs)

• Double Sided Package

• Ultra Thin Interconnect

carrier

• Low Stand-of Z Package

• PMIC Application

Dialog 2.5D SIP Technology

❖ What Dialog ETS SIP 2.5D Pakages can offer ;

✓ Lower Complexity vs the 3 Layer eWLP & TSV Technology

✓ Lower Cost vs FO eWLP & TSV SIP Technology

✓ Lower Manufacturing Cycle time vs the 2,5 0r 3D Package technology (FO

or TSV Package Intterconnect Type)

✓ Can Offer Higher Integration of Passive Components from 50 to 100 +

Components in a SIP Package Structure

✓ Can Offer Smaller Footprint of Package SIP similar to eWLP or 2.5D SIP

Package Alternatives ..

Ex. Other Market References

Source : Yole

Source : STATS

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DIALOG SIP Development Concept

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Dialog Concept Flow for Double Side Thin ETS-SiP Package

Top Side

SMT

Top Molding &

PMCTop Mold

GrindingDie Attach &

Flux Clean

Bottom Molding

& PMCBottom Side

Mold GrindingLaser Marking

Laser

Ablation

Ball

PlacementSingulation

FT , Packing &

Shipping

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Challenges - SIP Development

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✓ Laser Ablation performance (pad damage/ surface cleanliness)

✓ Via hole profile control

✓ Solder ball protrusion control

✓ ASIC Die thickness control

✓ Strip form grinding for composite materials (Si Die/EMC)

✓ Mold UF Control (Delam/ Void performance)

✓ Strip form grinding for thickness control

Challenges - DLG Double Side Molding ETS-SiP Technology

✓ Stand off height control for Passive Components

✓ Mold Flow ability underneath the components

✓ Ultra thin substrate handling

✓ Assembly & Process Manufacturability

✓ Yield

✓ Ultra thin package height control

✓ Warpage behavior & control

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SIP Alternative Technology

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DLG SiP Alternative Technology explored

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300mm wafer fan-out reconstitutedSMT – Top Side Ball Footprint – Bottom Side

Top moldComponents

RDL/PSV

Asic Die

Bottom mold

TMV/BP

Passive

Components RDL + Passivation

Interface

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Dialog Concept Flow for Double Side Thin eWLP SIP Concept

SMT

2nd Mold (SMT Side)

MUF Lapping &

Mark (SMT Side)

MUF Lapping

(Exposed Die)

TMV - Laser Drill

DS Tape

Ball Place

Singulation

PSV1

Recon – Die Attach

1st Mold (Die Side)

Mold Lapping

De-Carrier

Taping

carrier

carrier

carrier

carrier

RDL1

PSV2

RDL2

RDL3

PSV3

PSV4

UBM

Fa

n o

ut

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DLG SIP Technology Differentiator

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SIP Concept Flow Differentiator

ETS SIP Technology

Top moldComponents

RDL/PSV

Asic Die

Bottom mold

TMV/BP

Passive

Components RDL + Passivation

Interface

FO – eWLP SIP Technology

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FT

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SiP Type Package Technology assessment

Short Notes :

❖ Package Technology

Comparison by Dialog

emphasized on 2.5 D

addressing the needs to

use and meets the needs

of Wearable application

requirements ;

✓ Package Foot Print

✓ Performance

✓ Complexity

✓ Cost

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SIP Packaging Technology Differentiator (Cost & Industrialization)

Complexity

▪ Using typical Prepreg Substrate material as Interconnect Carier/ interposer as Standard BGA Flow Concept

Industrialization

▪ Lower Cost of Equipment Investment

▪ Shorter Manufacturing Cycle time due to traditional substrate

Package Cost

▪ No RDL Interconnect processes

▪ No use of additional BOM (ex. Liquid Compression Molding Material)

Pros Cons

Complexity

▪ Compression Molding & 3 Layer RDL processes and structure .

▪ Warpage Behavior of Structure uncontrollable due to multi Layer RDL

Industrialization

▪ High Cost of Equipment Invest

▪ Longer Manufacturing Cycle time

Package Cost

▪ Multi Layer of RDL Bumping methodology

▪ Compression Molding using LCM Material

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SIP Technology Achievement

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Reliability Performance (PLR + BLR)PLR Test Items JEDEC Method + Customer Conditions Result

Pre-conditioning

MSL3JESD22-A113 Passed

Temperature Cycling (TC) 1000Hrs, JESD22-A104 Passed

Unbiased HAST JESD22-A118 Passed

High Temperature Storage Life (HTSL) 1000Hrs, JESD22-B115 Passed

Solder Ball Pull JESD22-B115 Passed

Solderability J-STD-002D Passed

Reflow Sensitivity Customer Conditions Passed

BLR Test Items JEDEC Method + Customer Conditions

Drop JESD22-B110 Passed

Random Vibration JESD22-B103 Passed

Mechanical Shock JESD22-B110 Passed

Altitude ASTM D6653 (IEC60068-2-13) Passed

Thermal Cycling 1000 cycles, JEDEC JESD22-A104A Passed

Temperature and Humidity Dwell 1000 hours, JEDEC JESD22-A101C Passed

Random Vibration Customrt Passed

Mechanical shockJESD 22-B104 C

Passed

Monotonic

BendingIPC/JEDEC - 9702 Passed

▪ ETS-SiP Structure passed all the PLR & BLR criteria

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Additional Technology Achievement

✓ Customer Awarded the technology of Choice vs other SIP Options.

✓ The invention is an innovative technical solution enabling

unprecedented functionality in applications with challenging Form

Factor ,Performance & Cost requirements, targeted initially for

space constrained in wearable or smartwatch applications.

“Best Invention Award for 2017”with in DLG

DIALOG Double Side Molding

“ETS SiP Package

Double Side Mold SiP

✓ Ultra-thin 3D package

✓ Highly integration SiP

✓ High Performance

✓ Low Cost Approach

PMIC

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▪ Advanced semiconductor packaging 2.5D SIP type, is seen as a way to increase the value of a

semiconductor product functionality, maintaining/ increasing performance while lowering cost &

package Size Footprint.

▪ More multi-die heterogeneous integration (SiP) and higher levels of package customization in the

future. A variety of multi-die packaging (System-in-packages) is developing in both high and low end,

for consumer, in specific applications like wearables . And Heterogeneous integration has created

opportunities for both the substrate Type , WLP etc based SiP.

▪ So given the needs of COST , Area , Performance , Complexity and Cost for SIP Technology in

Wearable and other applications with in needs of limited space , DLG SIP have the competitive edge vs

other 2.5/3D technology in market today .

✓ DLG Low Profile ETS SIP Technology ;

✓ Offer less complexity in terms of assembly processes & manufacturing.

✓ Technically flexible in integrating 3 to 4 layers of trace interconnect, dependent to

application & electrical requirements.

✓ Very Cost Effective Solutions & Technology vs eWLP SIP,TSV or other 3 to 4 layer

interconnect structure.

✓ Reliability robust & competitive vs 3or 4 RDL Layer Type vs eWLP Fan Out structure or other

type .

✓ DLG SIP technology showed Highly Integration of Passives (ex .82 ~110 pcs ..) vs other

technology in the Market and this technology running in HVM since mid of 2018.

Summary & Takeaways for DLG ETS SIP -2.5D

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Slides Contributor Acknowledgement :

▪ Dialog IC Packaging Team : Ian Kent (Snr. Director IC Packaging)

▪ Advance Package Development : Jerry LI ( Snr. Packaging Development Engineer)

▪ Package Simulation : Baltazar Canete ( Manager Package Simulation)

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