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agent has a higher specific gravity than that of the solvating agent.

Vapor Degreasing Method US. Patenf 5,716,458. Feb. 10, 1998 K. Machino, assignor to Nikon Corp., Tokyo

A method for washing and drying an article comprising providing an azeotropic liquid in a tank, said azeotropic liquid con- taining water and an alcohol having one to six carbon atoms: providing an article in the tank disposed above a surface level of the azeotropic liquid; heating the azeotro- pit liquid for producing a vapor to wash the article; maintaining the vapor to have a temperature of not more than 100°C during the heating step; and drying the article.

Sputtering Apparatus U.S. Patent 5,716,505. Feb. 10, 1996 M. Scherer, assignor to Balzers Prozess-Systems GmbH, Hanau, Germany

An apparatus for coating substrates by cathode sputtering with a hollow target.

Device for Electrolytic Surface Coating U.S. Patent 5,716,509. Feb. 10. 1996 R. Kamm, assignor to Ecograph AG, Weesen, Switzerland

A process for electrolytic surface coat- ing of an electrically conductive workpiece by means of a fluid electrolyte conveying the electrolyte in a controlled circuit into an

electrolysis tank and into and around an electrolysis region in the electrolysis tank, the electrolysis region being defined by an anode and a cathodically connected work- piece, the electrolysis tank having an over- flow region through which electrolyte can flow from the electrolysis region and into an overflow tank, the anode having a first side closest to the workpiece and a second side farthest from the workpiece, a greater portion of the electrolyte being conveyed in a first stream from a first inlet at a higher flow rate into a space between the cathodi- caliy connected workpiece and the anode, the first stream flowing adjacent to and generally parallel to the first side of the anode and flowing toward and into the overflow region, a lesser proportion of the electrolyte being conveyed in a second stream from a second inlet at a lower flow rate, the second stream flowing adjacent to and generally parallel to the second side of the anode and tlowing toward and into the overflow region; removing the electrolyte into the overflow tank once the electrolyte has passed through the electrolysis region and the overflow region; separating anode sludge from the electrolyte in the overtlow tank; and feeding the electrolyte back from the overflow tank into and around the elec- trolysis region.

Anodizing Electrolyte U.S. Patent 5,716,511. Feb. IO, 1998 B.J. Melody et a/., assignors to Kemet Electronics Corp., Greenville, S. C.

A process for anodizing a valve metal comprising conducting the anodization at a temperature below 50°C in an aqueous electrolyte containing a polyethylene gly- co1 dimethyl ether having from 4 to IO repeating ethylene oxide units and phos- phoric acid or an electrolyte-soluble salt thereof, said electrolyte having a resistivity below about 5,000 ohm cm at 30°C.

Paint Spraying with Compressed Fluids U.S. Patent 5,716,558. Feb. IO, 1998 K.A. Nielsen ef a/., assignors to Union Carbide Chemicals & Plastics Technology Corp., Danbow Corm.

A method for producing coating pow- ders, catalysts, and drier waterborne coat- ings by spraying compositions with com- pressed fluids.

Protective Coatings for Polyimide Composites U.S. Patenf 5,716,677. Feb. 10, 1996 A.M. lwazany and SG. Prybya, assignors to Ohio Aerospace Institute, Brook Park, Ohio

A method of protecting a polyimide ma- trix article against oxidation comprising synthesizing a coating solution by reacting an aromatic dianhydride with an aromatic

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