Alcatel DRIE Operation Manual - University of...
Transcript of Alcatel DRIE Operation Manual - University of...
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Alcatel601EDRIE(DeepReactiveIonEtcher)OperationManual
Description:
TheAlcatel601EutilizestheBoschprocesstoprovidedeepetchesintosiliconsubstrates.Withpropersubstratepreparationandhandlingthesystemcancompletelyetchthroughthesilicon.Currentconfigurationisfor100mmsiliconwaferswithasingleflat.AfterasubstratehasbeenmanuallyloadedintotheLoadlockalltransferandprocessingiscompletedunderautomaticcomputercontrol.
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Safety:1. Beforeoperatingthistool,usersmustbetrainedandcertifiedbyLabstaff.2. MakesurethatasubstrateisloadedandtheVacuumLoadlocklidisdownbefore
startinganyprocess3. ARedAlarmstatuslightindicatesthesystemhas/hadaconditionthatmaynot
allowprocessing.Theusershouldusecautionuntilthecauseofthealarmisdetermined
4. IftheAlarmwillnotremainoffafteracknowledgingcontactthestaffatthephonenumberlistedbelow.
5. IfGreenOnstatusindicatorisoffandRedstopstatusindicatorisondonotattempttostart.DiscontinueusingthesystemandcontacttheNCNCstaff
EmergencyMachineOff(EMO)
UsetheEMOButtononlyifthereisasafetyhazardorserioussystemfailure.Ifthereiswateronthefloorbetweenyouandthesystemleaveandcontactthelabstaff.
1. PushRedEMO(EmergencyMachineOff)button2. CallNCNCstaff
a. LabPhone 2‐9831
EMOBUTTON
(GUI)Graphical
UserInterfacecandisplay
detailedSystem
Status
ControlButtonsandStatus
Indicators
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SystemOperation
InitialSystemChecks:
1. Checkthelogbooktoverifysystemcondition.IfsystemisdownandwasnotnotedintheNCNCmailpleasesendanE‐Mailupdatingthestaffandusergroup.
2. Notethealarmstatus.3. Verifythatsystemchambervacuumisinthex.x‐6mBarrange.4. Loadlockshouldbevented.5. OpenLoadlockandcheckforsubstrate.
GUI(GraphicalUserInterface)
1. ProvidesVideodisplayofControlComputerSensorandStatusinformation,functionwindowsanddatainputfields.
OpenLoadlock
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PrepareforEtching
1. SelectUserButtonusingTrackballandleftclickkey.(seeAppendix)
2. UsingTrackballandleftclickkeySelectLogintoopenLoginWindow.
UserButton
LoginButton
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3. UsingTrackballandKeyboardEnteryourusernameandpasswordthenclickOK.
4. UseTrackballtoopenAlarmscreenifactive.5. RecordanyalarmothertheHeaterstandbymessageintheLogbook.6. PleasenotifyDanHaskell4‐6587ofallalarmsotherthanHeaterstandby.7. AcknowledgetheAlarm(s).8. WaitoneminuteifAlarmremainsoff,systemcanbeusedforprocess.9. IfAlarmreturns,Logoffandplaceamachinedownnotificationonthesystem.
RecordthealarmmessagetextinthelogbookandE‐mailNCNCthatthesystemisdown.
10. IfnoactivealarmsarepresentopentheLoadlockandplacesubstratewithoneflatorientedtothelocatorscrews.
SubstrateLoaded
UserName
Password
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11. CloseLoadlockLidandproceed.
SelectRecipe
1. UsingTrackballselectGO!Process.
ClosedLoadlock
ProcessSelectionWindowButton
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2. UsingTrackballSelectthedropdownlist.3. ScrollthroughthelistandclickondesiredProcess.
4. EnableDatalogging“recommended”.
EtchSubstrate
1. SelectGO!RunbuttontostarttheProcess.2. ThescreenwillchangetotheProcessControldisplay.
BlueIndicatesSelectedProcess
Dataloggingshowndisabled
Run/StartButton
RecipeStepsofSelectedProcess
DropDownList
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3. SystemwillpumpdowntheLoadlockthentransportthewaferintotheProcessChamber.
4. MonitorHeliumflowandtemperatureforatleast2minutesbeforeleaving.Heliummayriseto10sccmatthebeginningofthestepbutshouldsettletobelow3sccminthefirstminuteofflow.HeliumFlowsover3sccmcancauseprocessshifts.ThesystemshouldgenerateaWarningandanAlarmthatshouldhaltprocessiftheHeliumflowsexceed10sccm.
5. ObservetheProcessControlscreenforatleast2minutesbeforeleavingthesystem.6. VerifythatsensordisplaysarereachingrecipeSetpointsandnoAlarmshave
occurred.
Processelapsedtime
HeliumFlowSensorValue
CurrentStepField
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AfterEtchisComplete
1. WhenallprocessstepsarecompletethesystemwillplacethesubstrateintheLoadlock.TheLoadlockisventedtoAtmospherethenanEndofprocesswindowwillbedisplayed.
2. OpenLoadlockandremovesubstrate.3. Inspectthesubstratefordamage.Ifanybreakageorpiecesaremissingdiscontinue
usingthesystem.Logoffandplaceasystemdownnotificationonthesystem.SendE‐mailnotificationtoNCNCgivingthesystemstatus.
4. CloseEndofProcessWindow.5. IflastwaferLogoff.6. CloseLoadlocklidbeforeleavingsystem.7. UpdateLogbook.
CloseEndofprocessbutton
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APPENDIX:
Trackball:
1. M1isequivalenttoLeftMouseButton.2. M3isequivalenttoRightMouseButton.3. RollingTrackballshouldmoveindicatorarrowonscreen.
FrontControlPanel:
1. StopButton(RedIndicator)lampshouldbeoff.Donotpressbutton,unusedduringnormaloperation.
2. StartButton(greenindicator)shouldbeonduringnormaloperation.IfGreenindicatorisoffdonotattempttorestartsystem.
3. EmergencyStopPushbutton.OnlyusedinEmergenciesremovesElectricalpowerfromthesystem.
4. AlarmIndicator(Red)activewhensystemisnotreadytorunaprocess.
M1
M3
Trackball
EmergencyStop
Pushbutton
StartButton(GreenIndicator)
StopButton(RedIndicator)
AlarmIndicator
(red)
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UserInterfaceSystemScreen:
1. RedindicatesInactiveorClosed.GreenindicatesActiveorOpen.2. TimeandDatefieldsareactiveonallpages.3. LoadlockPressuredisplay.OnlyattempttoopenwhendisplayreadsAtm.4. SourceRFStatusfielddisplayspowerdeliveredvs.powerreflected.5. ProcessChamberHighVacuumSensordisplayssystembasepressure.During
processtheassociatedIsolationValvewillcloseandthesensordisplaygoestooff.
LoadlockPressure
TimeandDateDisplay
SourceRF
StatusDisplay
ProcessChamberHigh
VacuumSensorDisplay
ProcessChamberHighVacuum
SensorIsolationValve
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6. LoadlockhasnoLidclosedorwaferpresentsensors.7. ManometerSensorFielddisplaysChamberpressureduringProcesssteps.8. VATValvecanisolatethechamberormovetocomputercontrolledpositionto
varychamberpressure.9. LoadlockTurboPumpStatusDisplayGreenindicatesonandatoperatingspeed.
ThistypicallywillgoRedbrieflyduringLoadlockpumpdown.10. LoadlockRoughingPumpGreenindicatesonandproperpressurelevelto
supporttheTurboPump.11. SubstrateHolderRFStatusfielddisplayspowerdeliveredvs.powerreflected
andBiasvoltagedeveloped.
VATValve
LoadlockRoughing
PumpStatusDisplay
LoadlockTurboPumpStatusDisplay
SubstrateHolderRF
PowerStatusField
LoadlockManometerSensor
Field
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12. WaferIcondisplayslastexpectedplacementposition.WhensystemisinidlemodeWaferIconisshowninLoadlock.
13. ProcessTurboPumpstatusDisplayshouldremainGreen.DuringnormaloperationRedisanAlarmcondition.
14. TurboNitrogenValveisonlyopenedusedduringmaintenance.15. ProcessTurboPumpIsolationvalveshouldremainopen(Green)duringnormal
operation.16. Processchamberroughingpumpprovidesroughvacuumpumpingduring
systemstartup.TypicallythechamberroughpumpprovidesexhaustvacuumfortheProcessTurbopump.
WaferIconshownasYellowRectangle
ProcessChamberTurboPumpStatusDisplay
ProcessChamberTurboPumpIsolationValve
ProcessChamberRoughingPumpStatus
Display
TurboNitrogenValve
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17. LowerSubstrateHolderVacuumValvecontrolsVacuumsupplytoLowerSubstrateHolderAssembly
18. HeVacuumValveactivatestopumpHeliumfrombacksideoftheSubstratebeforeclampisreleased.
19. ProcessChamberTurboBypassValveonlyusedduringmaintenance.20. SubstrateHolderTemperatureSensorDisplay21. HeSupplyValvedeliverstheMassFlowControlleroutputtotheBacksideofthe
substrate
HeSupply
Valve
LowerSubstrateHolder
VacuumValve
HeVacuumValve
ProcessChamber
TurboBypassValve
SubstrateHolder
TemperatureDisplay
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22. LoadlockN2valve.SuppliesN2duringLoadlockventtoAtmosphere.23. LoadlockVacuumValveusedtopumpLoadlockforsubstrateVacuumtransport.
Valveisclosed(red)whenLoadingorUnloadingLoadlockatatmosphericpressure.
24. HeMFC(MassFlowController)displaysHeflow.IfHeflowreadingsexceed3sccmexpectprocessshifts.Flowsabove10sccmshouldgenerateawarningoralarm
25. HePressuresensor.NormalpressureshouldmatchrecipeSetpointof1.0E‐1mBar.
LoadlockN2Valve
LoadlockVacuumValve
HeMFC(MassFlowController)Flowdisplay
HePressureSensorDisplay
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26. MachineOperatingMode,shouldalwaysbeinLocal.27. ProcessLibraryisassignedtouserlistedhere.28. UserLogDisplayliststheUserthatispresentlyloggedin.29. CommunicationstatusdisplaysstatusofthelinkbetweentheUserinterfaceand
the(PLC)SystemControlComputer
Machine
OperatingMode
ProcessLibrary
UserLog
Display
Communication
Status
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ProcessStatusScreen:
1. PumpingStatusField.TrianglesshouldremainGreenindicatingpumpsareonduringprocesssteps.
2. Elementarymoves.RedindicatestheRobothascompletedthesubstratemovementindicatedbythetext
3. ProcessStatusField.YellowTriangleindicatesactivesystemcontroltomatchRecipestepvalues
4. ThermalizationStatusField.YellowTriangleindicatesactivesystemcontroltomatchRecipeSetpoints.ThermalizationSetpointsremainactiveafterstepiscompleteuntilfinishofprocessrecipe.
5. TemporizationStatusField.RedTriangleindicatesthestepDuration(timerhascompleted).
PumpingStatusElementaryMovesStatus
ProcessStatusField
TemporizationStatusField
ThermalizationStatusField
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6. ProcessPressure.TurquoiseFieldindicatessensorvalue.ThispressureisaresultoftheVATvalvepositionandtheamountofgasflowingintotheprocesschamber.ExpecttoseevaryingvaluesduringtheBoschEtchProcess.
7. RecipeGasFlowSetpointsaredisplayedinYellowfields.8. GasFlowSensorDisplaysareTurquoise.9. RFreflectedpowerdisplay.Boschprocesschangesvariablesfasterthansystem
canrespond.Varyinglevelsarenormal.10. SubstrateVoltage.ThisvoltagevarieswithSubstrate,RFpower,Chamber
pressureandGas
ProcessPressure
RecipeGasFlowSetpoints
GasFlowSensorDisplay
SubstrateVoltage
RFreflectedpowers
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11. StopProcessbutton.Abortsallprocessstepsthenremoveswaferimmediatelyfromthechamber
12. Step.HaltsstepinprogressandstartsnextstepintheRecipe.13. Step(resume).ResumesastopduetoanAlarm.Resumesastepthatwasbeing
held.14. Step(hold).TherecipeprocesstimeorDurationSetpointisignored.Thesystem
willcontinueruntheactivestepwithnoregardtotimeelapsed.Becarefulifthisbuttonispushedduringaprocessstepdon’tleavesystemunattended,itwillcontinuetoetch.
Step
(hold)
Step
(resume)
StepStop
Process