Agilent Cary Universal Measurement

Spectrophotometer(UMS)

Date: 13th May 2013

TRAVIS BURTUV-VIS-NIR PRODUCT MANAGER

AGILENT TECHNOLOGIES

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Agenda

Introducing the Cary 7000 Universal Measurement Spectrophotometer

Solutions for:

– Standard Reference Materials– Substrates, Coatings and Thin Films– Bulk Optics, Components and Finished Assemblies– Advanced Photonics Research

Wrap Up and Question Time.

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UV-Vis-NIR Spectrophotometry

%T and %R Angular Control

Flexibility

Cost per analysisAutomation

Productivity

Consistency(%T and %R)

Accuracy Performance

Easy of Use AccessibleReliability

Research QA/QC Testing Trouble Shooting

Overview

Advance Your Materials

Measure the opticalproperties of materials in the UV-Vis-NIR.

Examples: coatings, thin films, optical components, solar cells, glass etc.

Measure reflectance ANDTransmission in a single device

Reduce your cost per-analysis, while saving time and money.

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Cary UMS

Analyze virtually any sample.

Measure transmittance at any angle, and measure absolute reflectance without moving the sample - at any polarization.

Perform reflection, and transmission measurement at variable angles on the Cary UMS – unattended.

Agilent Cary –Universal Measurement Spectrophotometer

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Chemical Analysis Group Agilent Confidential

Cary UMS Schematic Performance

Absolute reflection and transmission by definition –the only difference between baseline and measurement is the sample itself.

Incident light is fixed in shape, and position, at the sample ensuring %T and %R are collected from the same point on the sample.

The detector has a pure line of sight of the sample. This unique Direct View provides the highest signal-to-noise improving accuracy, reproducibility and productivity

Productivity

Automated independentcontrol of polarization (s or p) detector (D) position and sample rotation.

One baseline is needed for all %R and %T measurements, at all angles for a given polarization –dramatically reducing total collect time.

Perform all %R, %T measurements on a single system eliminating accessory change over, or reconfiguration time.

D

Chemical Analysis Group Agilent Confidential

Cary UMS Measurement Modes

Chemical Analysis Group Agilent Confidential

Cary UMS Measurement Modes

6Modes

1System

Perform all these measurements

on the Cary 7000 UMS

Chemical Analysis Group Agilent Confidential

Agilent Molecular Spectroscopy Evolution

1970 Cary 17 UV-Vis-NIR 2002 Cary 5000 UV-Vis-NIR1954 Cary 14 UV-Vis-NIR

What does in mean to own a Cary?

• Over 60 years of excellence in optical design

• Technology leadership

• Award winning innovations

Howard Cary - the man behind the early Cary instruments.

The Cary philosophy:

“For investigators who on occasion must pusha spectrophotometer to the very limits of itsperformance capability to obtain the information they need, and yet have to have an instrument which is adaptable to many different applications”

~ Howard Cary

Absolute Specular ReflectionCertified Standard Reference Material (SRM)

NIST Traceable

Absolute Specular Reflection

ApplicationMeasure absolute specular reflectance of a standard reference material (SRM) – a first surface aluminum mirror approx 50 mm diameter

ChallengeControl of angle of incidence and polarization to match certified measurement conditions. Good photometric accuracy and linearity over full wavelength range.

Mirror (SRM), Reflectance (%R)S and P Polarized Measurements from 7 deg – 85 deg

Mirror (SRM), Reflectance (%R)S and P Polarized Measurements from 7 deg – 85 deg

820 nm

Mirror (SRM), Reflectance (%R)S and P Polarized Measurements from 7 deg – 85 deg

Absolute Specular Reflection

SummaryMeasurement of absolute specular reflectance of a SRM traceable to a NIST standard.

ResultsIn this figure the measured and certified spectra have been are overlaid

Comparisons between measured value and certified value can be seen to correspond very closely across the wavelength range 250 nm – 2500 nm. Data collect was collected in ~2 min scan.

Reflection and Transmissionof fused silica (SiO2) without moving the

sample at angle and s/p polarization

ApplicationMeasure transmission, reflection and internal transmittance of fused silica glass at angle and under s and p polarized light.

ChallengePrecise internal transmittance measurements require accurate %T and %R measurements – ideally made at exactly the same angle and with identical incident beam geometry.

Transmission, Reflection, Internal Transmission

Calculating Theoretical %R and %TFresnel Equations

𝑛𝑛1𝑛𝑛2

𝜃𝜃𝑡𝑡

𝜃𝜃𝑖𝑖

Sellmeier Equation

n1 = refractive index of incident mediumn2 = refractive index of sampleθi = angle of incidenceθt = angle of transmission

n1cosθi – n2cosθt

n1cosθi + n2cosθt

2

Rs =n1cosθt + n2cosθi

n1cosθt – n2cosθi2

Rp =Tp = 1 - Rp

Ts = 1 - Rs

Fresnel Equations: Reflection (R) and Transmission (T) Coefficients for s and p polarized light

Sellmeier Equation

n2(λ) = 1 + Σ Biλ2

λ2 - Cii

λ = wavelengthBi and Ci = Sellmeier coefficients

Empirical relationship between refractive index and wavelength. Used to determine refractive index of a transparent medium at specific wavelengths

Used to calculate Reflection (R) and Transmission (T) at an interface, eg. air and fused silica.

Requires knowledge of refractive index of the incident medium. Usually air, n1 = 1 and sample.

Agilent Confidential

Transmission, Reflection, Internal Transmission

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Reflection (%R), Transmission (%T) and Internal Transmission (%Ti) of fused silica. Ti is sometimes expressed as absorptance where A = 1 – Ti and R+T+A=1. Graphs show predicted and measured R, T and Ti of fused silica at 7 deg AOI for S and P polarized light. Small expected differences in S and P are observed, even at near nommal 7 deg AOI, and there are expected deviations from theory where SiO2 is not completely water free (ie. 1400 nm and 2200 nm)

%T and %R of Optical Components

Cube Beam Splitters

Cube Beam Splitter – Reflection and Transmission

ApplicationOptical performance of assembled optical components. Cube Beam splitter coating characterization for use in nano positioning systems which rely on polarized interferometry

ChallengeCube beam splitter coating properties are dependent their opto-mechanical environment. Hence it is important to be able to measure the assembled optic and not the unassembled components.

Cube Beam Splitter - %T and %R

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Results

Rs and Ts visible spectra data through a cube beam splitter designed for 632.8 nm. Direct Transmission (0 deg) and reflection at 90 deg to the incident beam was measured in s and p polarized light. S-Polarized data shown. High contrast (<0.1%T) is shown for the transmitted beam

Zoomed in region around 632.8 nm shown for Ts shows %T < 0.1% was achieved with this coating.

Transmission of High Optical Density (OD) Filters

Blocking Filters

Transmission – Blocking Filter with high OD

ApplicationBlocking filters will high optical density are used in a wide variety of applications from bio-photonics and safety eyewear to optical instrumentation.

ChallengeDirect transmission measurements. The spectrophotometer requires extreme dynamic range performance, linearity and accuracy

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Transmission – Blocking Filters with high OD

Results

In this example the industry standard “addition of filters” test is used to demonstrate high absorbance measurements beyond 10 absorbance units (Abs). In addition to photometric range, the test requires the spectrophotometer to have strong foundations in linearity and accuracy. Using the addition of filters technique, photometric range, accuracy and linearity are demonstrated up to10 Abs.

The predicted result is the summation of the two individual filters (A +B). The measured result is the direct measurement of the two filters together.

Thin Films/CoatingsSpectral Visualization Tools

Absolute Specular Reflection

ApplicationCoating characterization and design validation. Comprehensive angular, and wavelength range, analysis of a coated silicon substrate, 200 mm diameter, 800 µm thickness.

ChallengeEfficient and accurate thin film design measurement by multi-angle, UV-Vis-NR spectroscopy and 2D contour plot visualization tools.

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Thin Film/Coatings, Specular Reflectance

Absolute specular reflectance measured of a coated silicon substrate in the UV-Vis-NIR from near normal angles of incidence (AOI) to high grazing angles. Spectra with AOI from 6 deg to 86 deg in 1 deg increments are shown for p-polarized light. The entire spectral collect was executed in a single unattended operation.

Results

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Thin Film/Coatings, Specular Reflectance

A 2D contour plot of the previous slide helps visualize the coating dependence with AOI and wavelength and aids with locating reflection minima and maxima, e.g., minimum reflection can easily identified at 1500 nm with 70 deg AOI.

Results

Highly Angular Dependent Reflection

Diffuse Scattering from a Compact Disk

ApplicationOptical interference coatings typically show a high level angular dependence. In this example diffuse scattering from a compact disk is used to demonstrate the superior angular control of the Cary UMS for measuring coated material.

ChallengePrecise and independent angular control of detector and sample for measurement of non-specular scattered reflection from a compact disk. Angular control of sample and detector at sub 0.1 deg increments is demonstrated.

Reflection – with high angular dependence

Reflection – with high angular dependence

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ResultsAngular dependent reflection is shown over a 15 deg arc of sample rotation from 48 deg – 63 deg (AOI) at 0.04 deg intervals (375 spectra). Scattered light was detected at 25 deg to the incident light using a 2 deg aperture.

Zoomed in view of the diffuse scattering peak of the figure at left. Angular dependent scattering is clearly resolved at 0.04 deg intervals (2 arcmin 24 arcsec) dependence.

Scattered Reflection and Transmission

Photo Voltaic - Solar Silicon

Solar Silicon

ApplicationSolar silicon cell development and quality control. Wafer characterization was conducted at the primary stage of development using the unpolished, uncoated wafer 125 x 125 mm x 400 µm

ChallengePrecise and independent angular control of detector and sample for measurement of non-specular scattered reflection and transmisssion from unpolished, uncoated silicon.

Solar Silicon – Scattered %T and %RResultsThe radial plot shows angular, and wavelength dependent, scattering from an unpolished, uncoated, silicon wafer. Diffusely scattered reflection is displayed at three wavelengths (924 nm, 1148 nm and 1200 nm) and diffuse transmission at only two due to the strong absorptance of silicon at 924 nm.

Radial Scattering Plot: the sample is shown located at the centre (r = 0). Light was incident at

θ = 0 deg (normal to the sample). Typical spectral transmission at θ = 180 deg. The sharp

absorption edge from 1200 – 950 nm can be seen.

Incident Light Io

WaferSample

Wrap up

FLEXIBILITY

Multi-modal – perform %T/%R measurement capability – without moving the sample

PRODUCTIVITY

PERFORMANCEGiving new insights into samples…(eg. cube beam splitters, interference coatings, and reflections off back surface optics

Measure samples in minutes-hours compared to hours-days - unattended!

RESEARCH

Need high performance with the flexibility to measure a wide range of sample types

QA/QC

Good performance in an automated ‘turn-key’ solution that is fast, versatile and robust.

Value Drivers

Agilent Cary Universal Measurement Spectrophotometer (UMS) “Improve productivity and gain deeper insights into thin films, coatings and functional glass”

38 Agilent Confidential

UV-VisLeadership through “Cary” innovation• Routine to Research solutions• Cary 60 innovates with room-light immunity Xe flashlamp• Simplifying workflow through Fiber Optics• 8453 diode array leads the way in Pharma and Biotech• Unparalleled performance for all your solid sampling needs

FluorescenceMeasure fluorescence under room light!• Leveraging our patented Xenon Flash lamp• Maximum flexibility – lowest cost of ownership

The Agilent Molecular Spectroscopy Today

FTIR Imaging and Microscopy

FT-IROver 400% more energy than any other FTIR!• Award winning, worlds smallest Cary 630 FTIR• Technology leader in FTIR Imaging microscopy• Mobile innovation giving you answers When and

Where you need them

Cary research UV-Vis-NIR Cary 60 Fiber Optics

Cary Eclipse Fluorescence 4100 Exoscan hand-held FTIR

Cary 630 – worlds smallest FTIR

8453 Diode Array

More information…

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Come and see us live over summer….

Optical Interference Coatings (OIC)16 - 21 June 2013, Whistler, Canada

International Conference on Materials for Advanced Technologies (ICMAT)30 June - 5 July 2013, Suntec, Singapore

23rd International Congress on Glass1 – 5 July, 2013, Prague, Czech Republic

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