Afternoon BSAC Research Overview

1

BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.

AfternoonBSAC Research Overview

Recent Research Results and New DirectionsSeptember 2003

Dorian Liepmann, Ph.D.Director, Berkeley Sensor and Actuator CenterLloyd Distinguished Professor of BioEngineering

[email protected]


AFTERNOON POSTER SESSION

Micro Power (12)

Micro Photonics & Adaptive Optics (5)

CAD (3)

BioMEMS and Microfluidics (32)

2



Micro Power (12)


Project DescriptionIntegrated Electrical Power from Liquid Hydrocarbon Fueled Micro-Rotary EngineFinal devices will be lab bench and field tested for reliability.

Recent ResultsFuel delivery system fabricated500um thick NiFe structures plated900um Rotor/Housing fabrication process improved

Next Six MonthsFuel / air mixture manifoldThermal PackagingEngine health monitoring

David C. WaltherProf. Al Pisano

MEMS ROTARY ENGINE POWER SYSTEM(MEMS REPS)

APP43

900 µm900 µm

3


Project DescriptionLiquid Hydrocarbon Fueled Rotary Engine that utilizes MEMS subsystems to monitor and control fuel delivery, engine health, and efficiency.

Recent ResultsNaturally aspirated engine operation on gaseous fuelsLubrication delivery identified as issue to be resolvedTight fuel/air mixture control required for operation

Next Six MonthsLiquid fuel / air mixture manifoldLubricant deliveryEngine health monitoring

Dr. David C. Walther, Sang-won Park, Bennett Sprague, Israel Figueroa, Mitchell SwangerProfs. Carlos Fernandez-Pello, Al Pisano

Liquid Fueled MEMS Enabled 12.9mm Rotary Engine Power System

CFP1


Project Descriptionlow temperature LPCVD for SiC thin filmssingle precursor 1,3-disilabutane

Recent Resultslow stress and crystalline film at 800 ºCuniform, pin-hole free, and dense filmshigh wear resistance and low frictionresilient to combustion environment

Next Six Monthsfurther wear and friction testingcoating of fully-released Si micro-Wankelengine component

M. B. J. Wijesundara, J. Zhang, and C. CarraroProfs. Roya Maboudian, Al Pisano

Silicon Carbide-coated Microcomponents for the Rotary Engine-Based Power System

APP51/RM

Uncoated

SiC coated

Wear

No wear

4


Project DescriptionMillimeter-scale electric generatorRotor poles integrated into rotary engineStator assembled from discrete parts

Recent ResultsPowdered iron stator components produced with EDM and conventional machiningSome sub-assemblies constructed

Next Six MonthsComplete assembly of prototypeAssemble test standTesting and characterization

Matthew SeneskyProf. Seth Sanders

MEMS Rotary Engine Power System / Integrated Generator

APP44


Project OverviewElectroplate soft magnetic poles into silicon moldRequirements

Deposit 900 µm High saturation magnetization

Recent ResultsAttained deposits with ~1.5 Tesla saturation magnetizationElectroformed through ~500 µm silicon mold

Future WorkInvestigate the effect of proximity of the wafer features on the topography of the NiFe deposit across the wafer

Debbie G. JonesProf. Al Pisano

MEMS REPS / Soft Magnetic Pole Integration

APP48

600µm

Wankel RotorD=2.4mm H=900µm

Electric Power Generator

Soft Magnetic Pole

Si

SEM photograph of 500 µm thick silicon mold fabricated with

DRIE

Magnified photograph of electroformed NiFe

in silicon mold.

5


Project DescriptionCharacterize combustion to aid in design of miniature IC engines

Recent ResultsContinued testing indicates three distinct regions of combustionIgnition energy directly controlled and measured during experimentsNew combustion chamber constructed which more closely duplicates engine design

Next Six MonthsTest new combustion chamberImprove data acquisition and control of experiments

Bennett SpragueProfs. Al Pisano, Carlos Fernandez-Pello

Ignition at the Microscale for Miniaturized Internal Combustion Engines

APP67/CFP

0.0

1.0

2.0

3.0

4.0

20 40 60 80 100 120 140 160Temperature (°C)

Pres

sure

(atm

)

Further testing needed

No Ignition

Inconsistent Ignition

Reliable Ignition

Premixed Butane and Air at Φ = 1.0 in 1.6 mm deep channel

Combustion Chamber


Project DescriptionPart 1: To model the sealing around the apex seals and rotor facesPart 2: Creation of a fuel delivery system with focus on thermofluidsaspects

Recent ResultsExperiment Designed, Manufactured and Nearly CompletePreliminary design of fuel delivery system experiment

Next Six MonthsComplete Sealing ExperimentComplete design of fuel delivery system experimentBegin proof of concept experiments

Josh HeppnerProf. Al Pisano

MEMS Rotary Engine Power System: Engine Seal Modeling/MEMS Fuel Vapor Delivery by Flow Rectification

APP47

Apex

Housing Top

Housing Bottom

Leakage Paths

6


Project DescriptionImplement a robust apex sealing system capable of high compression and able to withstand manual assembly

Recent ResultsRedesigned mask to reduce effects of aspect ratio dependent etchingFabricated 900µm Si rotors with in-plane cantilever apex seals

Next Six MonthsFurther develop DRIE recipes to acquire smoother and straighter apex profilesTesting of physical models

Fabian C. MartinezProf. Al Pisano

MEMS REPS / Apex Seal Design

APP 46

900 µm rotor

500 µm rotor


Brenda HaendlerProf. Al Pisano

Project DescriptionStudy phase change of pure hydrocarbon fuels and binary mixtures of fuels in microchannelsDetermine how to hold the flow eruption front steady in one part of the evaporator channel

Recent ResultsDesigned and built a matrix of sudden expansion microchannelsPreliminary phase eruption stabilization results obtained using an external heat source

Next Six MonthsDesigning and building a new set of constant cross-section and sudden expansion microchannels with integrated heatersPreliminary testing of the channels with both pure fluids and binary mixtures

MEMS Rotary Engine Power System/ Engine Fluid Management System

APP45

Your artwork here, delete line around artwork after inserting. One or two pictures work just fine.

D2D1

Sudden expansion geometry

Preliminary phase eruption stabilization results

7


Project DescriptionThis research aims to develop disposable microbatteries and microvehicles for MEMS/BioMEMS

Recent ResultsDemonstration of Surface Tension Propelled MicroboatsSize: 6 x 11 mm2

Maximum speed: 7.5cm/s

Next Six MonthsImprovement of microboat performance.

Ki Bang Lee and Firas SammouraProf. Liwei Lin

Disposable Microbatteries and Microvehicles for MEMS

LWL12

MicroboatMicroboat

Cellulose filmwith fuel

Velocity Profile of Various Solute Liquids

0

1

2

3

4

5

6

7

8

0 20 40 60 80 100 120 140 160

time [sec]

vel [

cm/s

ec]

Isopropanolchloroform75% acetic acid50% acetic acid25% acetic acid


A Micromachined Photosynthetic Fuel CellKien. B. Lam, Prof. Liwei Lin

Project DescriptionHarness algae & plant photosynthetic biosystems to convert light energy into electricityAnode/PEM/cathode fuel cell design

Recent ResultsImplemented flow-through designExtracted spinach sub-cellular thylakoids/photosystems for photo-electrical conversionPreliminary: 200 mV, 3 µA/cm2

Next Six MonthsCharacterizationIncrease open circuit voltageIncrease current density

LWL17

020406080100120140160180200

0 20 40 60

Time (min)

Voltage (mV)

Ambient Light

Direct Illumination

Dark

8


Project DescriptionMulti-unit project at Berkeley to identify technology to enable domestic electricity users to make more efficient use of electric power. BSAC’s roles involve wireless revenue monitoring, with passive proximity sensing of AC voltage and current (sponsor: CA Energy Comm.)

Recent ResultsPassive proximity sensing of V and I identified; AC operation of Smart Dust motes for sensing and control

Next Six MonthsSensor design, fab, and testAnalyze A/D conversion at RF

Jonathan Foster, Justin BlackProf. Richard White

Proximity Electric Power Sensing for Demand Response Mote

RMW29

SmartDus tMEMS

BS ACS ensors

P icoRa dioLow P owe r

FBAR-MEMS

Tiny-OSFle xibility

S e ns or ne ts

De ma ndRe spons eP la tforms

Thermos ta tsMete rs

e ne rgysca ve nging

SmartDus tMEMS

BS ACS ensors

P icoRa dioLow P owe r

FBAR-MEMS

Tiny-OSFle xibility

S e ns or ne ts

De ma ndRe spons eP la tforms

Thermos ta tsMete rs

e ne rgysca ve nging

magnetic material at end of cantilever

MEMS cantilever with piezo film

Iout Iin

60 Hz AC current

120 Hz output signal

conventional appliance “zip” cord

magnetic material at end of cantilever

MEMS cantilever with piezo film

Iout Iin

60 Hz AC current

120 Hz output signal

conventional appliance “zip” cord



Micro Photonics & Adaptive Optics (5)

9


Project DescriptionAdd flexibility to PLC devices with MEMS.MEMS switch fabric + AWG.Change of WDM input signal’s physical location → output wavelength reconfiguration.

Central component of Optical add/drop MUX.

Recent ResultsMEMS switches fabricated and testedEarly stage optical testing of system

Next Six MonthsMonolithic integration processingExtension to Photonic Bandgap Xtals

J Provine, Prof. Norman Tien

Integration of PLC with MEMS for Telecommunications

NT20


Optical Switch Using 2-D Photonic Crystal Waveguides

Project Description:

Photonic Crystal Waveguide (PCW)

MEMS actuated 1xN switch

Aligning central waveguide array completes output pathways

Specific Results Since Last IAB:

Patterning & TransferE-beam Lithography

Single point exposure

Etch TestsSurface bulk-etch method

Direction for the Next 6 Months:

Waveguide fabrication & testing

Air gap coupling

Fabian StrongProf. Norman Tien

Actuated for Output on Ch #1

Not Actuated No Output

Actuated for Output on Ch #2

NT22

2 um

200 nm

10


Ki Bang Lee Prof. Liwei Lin

Vertically Supported Microactuators

LWL23

Mirror

Hinge

Spring

Vd Va sinωt Substrate

Angle 1: θ Angle 2: φ

Incident light

Reflectedlight

Locking spring

Combsfor torsional motion

xyz

Stationarycomb

Stationarycomb

Scanned Laser

Project DescriptionThis research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications

Recent ResultsDemonstration of a vertically-supported, two-axial torsional micromirror Fabricated by surface-micromachining process Maximum optical angle: 1.68o at 2kHz

Next Six MonthsVertically-supported lens experiment


Project DescriptionUsing hydrophobic effects and polymer-jet printing technology, we are developing simple yet reliable methods to fabricate in- and out-of-plane refractive microlenses for micro-optical systems

Recent ResultsFocal Length Range: 0.34 – 7.86 mmFocal Length Repeatability: 1% within chip, 5% from chip-to-chiprms Wavefront Error: /6- /80 ( =635nm) (Measured with Shack-Hartmann Sensor) All the pictures on this slide are taken through our microlens (w/o AR coating).

Next Six MonthsDevelop more optical characterization tools for microlenses.Demonstrate microlenses in an optical MEMS sensor.

Hyuck ChooProf. Richard S. Muller

3-D Refractive Microlenses and Lenslets

RSM33

11


Project Descriptionmaximizing the tunability of focal length or field of view (FOV) for stereoendoscopyminimizing optical aberrations

Recent ResultsDesign, fabrication and characterization of the microlensSeveral hundreds microns to infinity in positive and negative focal lengthLow operation pressure

Next Six MonthsCharacterization for optical aberrationCharacterization of various filling mediaIntegration at system level.

Ki-Hun JeongLuke P. Lee

Tunable Microdoublet Lens Array

LPL25



Photo of main

researcher

Elastomer microcavity for microdoublet lens

Variable curvature

Fixed curvature

10µm

-4

-3

-2

-1

0

1

2

3

4

-10 -5 0 5 10

Applied pressure (kPa)

Foca

l len

gth

(mm

)

DI water(n=1.33)Oil (n=1.52)

-4

-3

-2

-1

0

1

2

3

4

-10 -5 0 5 10

Applied pressure (kPa)

Foca

l len

gth

(mm

)

DI water(n=1.33)Oil (n=1.52)

ConvergingDiverging



CAD (3)

12


David Bindel, Jason Clark, David Garmire, Shyam Lakshmin, Jiawang NieProfs. Alice Agogino, Zhaojun Bai, James Demmel, Sanjay Govindjee, Kris Pister

Sugar

KSJP15

Project DescriptionGoal: SPICE for MEMSFast system-level simulationComparison to measurement

Recent ResultsNew circuits elements display with mechanicsVisual comparison to simulationInterface to FEA code (FEAP)

Next Six MonthsAutomate comparisonsFinish SUGAR 3.5Simple GUI

Circuits and structure now display together.

Mode1 of a 10,000 degree-of-freedom mirror.


Raffi KamalianProfs. Alice Agogino, Jim Demmel, Kris Pister

Project DescriptionCreate useful design synthesis tools for MEMS.Develop rapid, optimal configurations for a given set of performance and constraint guidelines.

Recent ResultsAdded interactive human-evaluated evolution extension

Improves manufacturabilityAvoids non-simulatable design concerns

Fabbed Poly-MUMPS test devicesNext Six Months

Evaluate human evolution extension performanceApply synthesis tools to area minimization applicationsFab and characterize test devices

MEMS Synthesis Using Stochastic Optimization

KSJP27/JD

13


Jason Vaughn ClarkProfs. James Demmel, Sanjay Govindjee, Kris Pister

Measuring Fundamental Properties of MEMS - ωAC

KSJP30/JD

Project DescriptionMeasure MEMS properties electronicallyUse minimal chip areaObtain many properties Characterize fabrication vs layoutCharacterize measurement vs simulation

Recent ResultsFabricated test structures (TS)Developed analysis techniquesLearned the Computer MicroVision System

Next Six MonthsTest with electronic probingVerify with Computer MicroVision SystemUse results in models to predict other TS

Measure frequencies and amplitudes. Obtain…

Young’s modulus Over/under etchBeam width DensityMass Quality factorStiffness LengthDamping Damped frequencyGap spacing Exponential constant

Excitation by viscosity/rarefaction.



BioMEMS and Micro Fluidics (32)

14


New fabrication technologyBased on biomineralization processDiatoms create SiO2 nano-structures at ambient conditionsCreated engineered 3-D structures with small features by controlling these processes

Recent ResultsExtracted protein from diatomsDesigned device for emulsion investigations

Next Six MonthsPurify proteinInvestigate behavior of the relevant protein in emulsions

William J. HoltzProfs. Roger Howe and Jay Keasling

Biomimetic Nanofabrication of Silica Structures Based on Diatoms

RTH/JDK2

Examples of diatom features

~50um


Project DescriptionStorage/Accumulation of working fluid via surface energy using hydrophobic microcapillaries.Working to increase device lifetime

Recent ResultsFabricated with SAMs long-term stability not achievedFabricated with Vapor SAMs long-term stability not achievedHydrophobic surfaces are heavily dependent on underlying surface roughness & Plasma Polymerized Fluorocarbons have rotating bonds

Next Six MonthsFab. device with SAMs on smooth surfaces to mitigate contact angle Hysteresis

Eric HobbsProfs. Al Pisano, Liwei Lin

Capillary Action Accumulation Device

APP41

Photo of main researcher

15


Project DescriptionDesign a low-power, low-leak microvalve suitable for wearable microfluidic devices.

Recent Results“Hole-in-the-wall” process solidifiedThird-generation gate valves fabricated

Next Six MonthsTesting

Jeremy FrankProfs. Al Pisano and Liwei Lin

Low-Power, Low-Leakage Microvalve

APP42


Project DescriptionCharacterization of Small Scale Flow in NanochannelsChannel Height: 100nm, Width: 29µm

Recent ResultsChannels Fabricated (Sandia National Laboratories, New Mexico)Interfacing Manifold Designed

Next Six MonthsFabricate Pyrex ManifoldMeasure Streaming Current Under Constant Pressure, Varying Zeta Potential and Ionic StrengthUse Measurements to Deduce Flow Characteristics

Troy Lionberger, Boris StoeberProfs. Dorian Liepmann, Luke Lee

Fluid Dynamics in Nanoscale Environments

DL12

Troy Lionberger

Inlet

Outlet

?Velocity

PressureSensor

q

Hydrostatic Column (Large Reservoir)

Fg

NanochannelWaste

Microscope

Streaming Potential(Current Feedback

Measured)

Height

WidthLength

Relative Channel Axes

16


Project DescriptionCharacterize λ-DNA flow through a variety of microfluidic geometries

Recent ResultsQuantified pressure drops through abrupt planar contraction geometry for water and dilute DNA solutions

Next Six MonthsExplore pressure drop behavior for high concentration DNA solutionsUse DPIV to quantify velocity profiles for contraction flows of varying DNA concentrations

Shelly GulatiProf. Dorian Liepmann

Biological Fluid Flow in MEMS

DL5

Channel centerline elongational force

Channel wall shear force

50µm

A

G

FEB

CD Flow

5µm

DNA stretching and relaxing through a micro-checkvalve


Project DescriptionVascular Occlusion Detection using data obtained from the study of Sickle Cell Rheologyin Microchannels.

Recent ResultsFabricated masks and obtained qualification on relevant Microlab processing machinery.Finalized fabrication process flow.Began fabrication of the MicroarterioleBifurcation in Silicon and Pyrex.Located an appropriate pressure transducer, as well as, inlet and outlet fluidic connectors.Acquired Sickle Cell Blood for the microchannelflow experiments.

Next Six MonthsCalibrate device using microsphere seeded water.Perform experiments using Sickle Cell BloodModify the device or experiment where needed

Jennifer Simone WadeProfs. Al Pisano , Liwei Lin, Dorian Liepmann

Sickle-Cell Anemia Event Detection Sensor

APP63

Arteriole Bifurcation

Outlets

Inlets

Circular Channels of Varying Diameter

17


300

305

310

315

320

325

330

335

340

0.0E

+00

1.0E

-04

2.0E

-04

3.0E

-04

4.0E

-04

5.0E

-04

6.0E

-04

7.0E

-04

8.0E

-04

9.0E

-04

1.0E

-03

Time (sec)

Tem

pera

ture

(K)

Project DescriptionTo develop a 2-D micro-fluidic laser heat model with a square cross-section using CFDRCVerify numerically, analytically, and experimentally

Recent ResultsWorkable laser heat modelVerification of simulation data

Next Six MonthsExtend to 3-D modelComplete verification of 2-D model resultsComplete research

Simulation of Micro-Fluidic Laser HeatingUtilizing CFDRC

DL14

Temp. vs. Time at 10 um

(■) analytical calculations

(●) CFDRC simulation data.

David MunProf. Dorian Liepmann


Project DescriptionHigh speed valve actuation based on heat-induced gel formation of triblockcopolymers (Poloxamers)

Recent ResultsCharacterization of PoloxamersIntegration of heaters and pressure sensors in microchannelsFast valve actuation (33 ms) using integrated heaters

Next Six MonthsInvestigate valve dynamics with DPIV and with integrated pressure sensorsDemonstrate micromixing

Boris StoeberProfs. Dorian Liepmann, Susan J. Muller

Microflow Control using Thermally Responsive Triblock Copolymers

DL11

18


Project DescriptionPlanar micropumputilizing two in-plane flap valves and thermopneumaticactuation

Recent ResultsFluidic-resistance ratio of the valves is greater than 1300.Maximum pressure of 6.5 kPa and maximum flow rate of 5 uL/min at 132 mW.

Next Six MonthsIntegration of the micropump into a micromixer

Jeremy Frank and Stefan ZimmermannProfs. Dorian Liepmann and Al Pisano

A Planar Micropump Utilizing ThermopneumaticActuation and In-Plane Flap Valves

DL15/APP


Stefan Zimmermann, Boris Stoeber and Doerte FienborkProfs. Dorian Liepmann

Microneedle-based Minimally Invasive Continuous Glucose Monitor

DL/LWL 1

SEM image of 270 µm long out-of-plane

microneedles

Project DescriptionSystem components:- Out-of-plane microneedles- Integrated enzyme-based

glucose sensor- Dialysis membrane

Recent ResultsSensor integrationSampling of interstitial fluid and capillary blood through out-of-plane microneedles

Next Six MonthsDesign of sharper microneedles

19


Project DescriptionEnzymatic glucose sensor based on redox-induced conductivity change of PPy-MWNT nanocomposite.

Recent ResultsConductivity increases proportationally with glucose concentration.PPy-MWNT has larger detection range than than PPy alone.

Next Six MonthsCharacterization of nanocompositewith respect to: 1. MWNT concentration2. GOx concentrationCorrelate sensor performance with amperometric method

Kwok-Siong TehProf. Liwei Lin

An Integrated Polypyrrole-Carbon Nanotube (PPy-MWNT) Nanocomposite Glucose Sensor

LWL10

Pt Electrode

GOx

PPy-MWNT

1

1.02

1.04

1.06

1.08

1.1

0 5 10 15 20

PPy PPy-MWNT

Glucose Concentration [mM]


Project DescriptionHuman in vitro and in vivo testing of microneedle arrays that have been mounted to a traditional plastic syringe

Recent ResultsInjection of dye suspension into human cadaver skinTen-fold increase in response time for microneedle vs. topical drug application in human volunteer

Next Six MonthsExpansion of testing to include more human subjectsConfocal microscopy of injections in cadaver skin

Raja Sivamani and Boris StoeberProfs. Dorian Liepmann and Howard Maibach

Human Testing of MEMS Syringes

DL10

Microneedles Syringe

20


Poorya SabounchiProf. Luke P. Lee

Project DescriptionUltra-sensitive micro-calorimeter for applications of high throughput drug screening and metabolite sensing

Recent ResultsLiterature Survey Mask layout

Next Six MonthsMicrofabrication of thermopile array on the nitride membraneInitial Test for Sensor response and sensor characterization

Ultra-sensitive Micro-Calorimeter for High Throughput Drug screening

LPL31

Figure 1: Schematics of the layout of the micro-calorimeter

Si

CVD oxide Silicon nitride

n-doped poly-Sip-doped poly-Si

Photo resist Hydrophobic layer

Figure 2: Schematics of the cross-section view of the micro-calorimeter

Hot Junction

Heater

Reference Junction


Project DescriptionDevelop osmotic, fluidic driving sources with various flow rates and high pressure for integrated bioassay systems

Recent ResultsPerformance characterizationDesign optimizationProcess optimization

Next Six MonthsSystem integrationSystem characterizationSystem optimization

Yu-Chuan SuProf. Liwei Lin

Water-Powered Microfluidic Devices for Diagnostic and Drug Delivery Systems

LWL7

PDMS substrate

Semipermeable membrane

Actuation membrane

Liquid channel

Intermediate layer

Cellulose acetate structure

Compartment for osmotic salt

Drug reservoir

Drug flow

Water flow

Membrane expansion

Delivery channel

Drug reservoir

Impermeable membrane

Osmotic driving agent

Semipermeable membrane

Structural layer

Delivery port

PDMS microfluidic components

Osmotic microactuator

21


Project DescriptionDevelopment of a polymer-based actuators that can operate inside microfluidic systems

Recent ResultsDevelopment of a polymer-based microgripper

Next Six MonthsDevelopment of 3 DOF polymer-based microrobotic system for single cell manipulation

Nikolas ChronisProf. Luke Lee

Integrated Polymer Actuators in MicrofluidicSystems

LPL11

Cold armHot arm

Cell holder

Cr/Au

650

100

SU-8

c. Cell holder

Two ‘hot and cold arm’ actuators

8 µm

a. Cr/Au layer

Cold arm (Cr/Au)

b. SU-8 layer

Hot arm (SU-8)

Cold arm (SU-8)

Hot arm (Cr/Au) Gripper Arms


Project DescriptionHigh throughput patch clampingHigh quality patch clamping Low-cost device fabrication

Recent ResultsPDMS device fabricationWell-controllable fluidic connection Cell trapping

Next Six MonthsSetting experimental set-upsGetting high sealing resistanceReducing noise levels

Jeonggi SeoProf. Luke P. Lee

Disposable Multi Patch Clamps Using Planar Fluidic Channels

LPL32

Planar Patch clamp

Cell loading reservoir

Cell flow

Cell trapping

Planar Patch clamp

Planar Patch clamp

Cell loading reservoir

Cell flow

Cell trapping

Planar Patch clamp

Cell trapping for patch clamping

22


Project DescriptionDevelopment of MEMS laser scanning confocalmicroscope for micro TAS

Recent ResultsCompleted MEMS lens scanning confocalmicroscope

Next Six MonthsWrite up and graduate

Sunghoon KwonProf. Luke Lee

Vertically-Integrated Micro Confocal Imaging Array

LPL13

MEMS lens scanning confocal microscope

Objective lensScannersPinholePupil

2 mm

15 um

Reconstructed image of BSAC logo


Project DescriptionMEMS Biomimetic Vision SystemCompact polymeric non-planar imagerTunable omni-directional imaging

Recent ResultsSystem modelingOptical simulationMacro-scale prototyping

Next Six MonthsBatch integration of photosensors on polymer membranePolymeric imager interfacing electronicsOptical characterization

Gang L. Liu, J. Paul Hung, and Ki-Hun JeongProf. Luke P. Lee

Bio-inspired Optical Imaging and Sensing System

LPL21

Photo of main

researcher

i R m

Ro

Lr

i R m

Ro

i R m

Ro

Lr

23


Project DescriptionBiomimetic Compound EyeOmnidirectional Optical Sensor

Recent ResultsPolymer membrane fabricationThin silicon membrane on polymer

Next Six MonthsPhotodetector array on polymer membraneRaw image acquired by BIOS

Paul Hung, Gang L. LiuProf. Luke P. Lee

Biomimetic Imager as Omnidirectional Sensor (BIOS)

LPL27

Photodetector with microlens

Pneumatic pumping to inflate the polymer

Contact pad for column-row


Project DescriptionEndoscopic MEMS-based OCT system for “optical biopsy”

Recent Results500µm x 500µm scanning mirrors optimized for OCT with fr between 1kHz and 10kHz

Next Six MonthsEndoscope packagingEndoscope system characterization at the Beckman Laser Institute

Daniel T. McCormickProf. Norman Tien

Minimally Invasive MEMS Based Optical Coherence Tomography for in-vivo Imaging

NT12

24


Kurt Kramer, Luis SisonProf. Luke Lee

Project DescriptionCharacterize electrical properties of nanogap junctions Detect biomolecular interactions in situ using capacitor as a sensor

Recent ResultsStudies of electrolytes, 2 nm gold nano-particles in solutionSingle stranded DNA detection

Next Six MonthsFinish electrical characterizationDemonstrate DNA hybridization detectionStudy other biomolecular phenomena (e.g., protein digestion)

Dielectric Spectroscopy of Biomaterials Using Nanogap Junction Capacitors

LPL20

Quartz substrateQuartz substrate

n+ Poly-Si(II)(II)

LTO

n+ Poly-Si (I)

100 101 102 103 104 1050

1

2

3

4

5

6x 10-9

Freq (Hz)

ssDNA in Nanogap

Cap

acita

nce

(F)

DI0.01 mg/ml0.02 mg/ml0.04 mg/ml0.08 mg/ml0.1 mg/ml0.2 mg/ml

BSAC ©2003. Confidential Information. Not to be made public without permission from UC Regents.LPL22

Yang-Kyu ChoiProf. Luke Lee

Electronic Properties of DNA for Bioelectronics

Project Description

Recent Results

Next 6 Months

• Investigation of electronic properties ofstraight DNA chain and demonstration ofDNA device.

• Straightening DNA by nanogap structures.• Sub-8nm nanogap fabrication by spacer

lithography. • Metal nanogap field effect transistors • Biomolecule detection

• Demonstration of DNA devices by using semiconductor behavior.

• Detection of protein adsorption.• Metal nanogap device fabrication by

electromigration.• New proposal for metal nanogap field effect

transistor

103 104 105 1060

100

200

300

400

500

600

Nor

mai

lized

Cap

acita

nce

[pF/

Sq.]

Frequency [Hz]

Lyz_low Lyz_high Fib_low Fib_high BSA_low BSA_high

Mo Mo Mo Mo

300nm

Mo Mo Mo Mo

300nm

i-line resist

i-line resistE-beam resist

20nm Feature

i-line resist

i-line resistE-beam resist

20nm Feature

Si Si

SiNSi

100nm

Au

N+ Si

Au

N+ Si (Gate)SiO2 SiO2

Ge Source Drain

(FET)Au

N+ Si

Au

N+ Si (Gate)SiO2 SiO2

Ge Source Drain

(FET)

Detection of protein detection

Mo electrodes by electromigration

DNA FET

Dual resist process

25


Mingqiang YiProf. Luke P. Lee

Theoretical Study of Nanogap Junction Measurement: Electrode Polarization and Dielectrophoretic Motion of DNA

LPL23

Project DescriptionStudy the ion distribution and electrical field within a nanogap filled with electrolytes

Recent ResultsObtained the electrical field and effective permittivity within the nanogap by solving Poisson-Boltamann equationCompared the analytical solution with measurements in a 22nm gap

Next Six MonthsDetection of target molecules in electrolytes by nanogap sensor

LL

Electrode I

κ-1κ-1

5 nm - 100 nm Electrode II

Diffuse layerElectrodes

0

0.5

1

1.5

2

2.5

3

3.5

0

1

2

3

4

5

6

0.0 2.0 4.0

κ L

εε e

Φ

κ L=0.1, 0.5, 1, 2, 5


Project DescriptionBatch fabrication nanopillarGeometry controlSERS detection of biomolecules

Recent ResultsConformal silver depositionHigher enhancement factorDetection of Rhodamine6G

Next Six MonthsMultiplexed biomolecule recognitionIntegration with microfluidics

Gang L. Liu, Yang-Kyu Choi, and Sunghoon KwonProf. Luke P. Lee

Nanopillar Substrate for Surface-Enhanced Raman Spectroscopy

LPL18



Photo of main

researcher

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2 00

4 00

6 00

8 00

1 0 00

1 2 00

Inte

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[a.u

.]

R am a n sh i ft [c m -1 ]

A g o n si li co n 3 s cc m O 2 , 5 0 n m A g 4 s cc m O 2 , 5 0 n m A g 6 s cc m O 2 , 5 0 n m A g 8 s cc m O 2 , 5 0 n m A g 1 0 s cc m O 2, 5 0 n m A g

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10 00 11 0 0 1 20 0 1 3 00 14 00 15 0 0 1 6 00 17 00

2 00

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Project DescriptionImmuno-activity detection Real-time on-site diagnosisParallel assay

Recent ResultsFlip-chip mount for easy handlingWireless chip feeding/controlImprovement of mod/demod scheme

Next Six MonthsTotal wireless link with chipMobile test bed systemEnhancement of the accuracy

Tugut-Sefket Aytur, Tomohiro IshikawaProfs. P. Robert Beatty, Bernhard Boser

Immuno-sensor

BEB17

Photo of main

researcher

A DA

Hall sensor

C

antibody

beadBB

antigenHXY

BZ


Project DescriptionDesign and Fabrication of nanoscale probe for organelles in biological cell.Fabrication of nanowire tip by nano imprinting technologyInvestigation of the effect of RF magnetic field on biological cells.

Recent ResultsDevelopment of protocol for culturing biological cells on SiO2, Si3N4, Si, poly-Si, Al, and parylene surfaces.Designing of static magnetic field source.Cell membrane electric potential measurement.

Next Six MonthsFabrication of static magnetic field source.Designing MEMS microneedlesLearning nanoimprinting technology for nanowire fabrication.

Seung-Jae MoonProf. Al Pisano

Nanoscale RF Probing of Cells

APP65

Resonator Array

Magnetically Tagged Cell

200 nm

Macro probe station

Mitochondria

Magnetic Fields Columns

MEMS micro needleSilicon nanowire or carbon nanotube

Probe fork

Insulator material(SiO2 or Si3N4)

Metal conductor

Center MEMS microneedle

Silicon nanowireor carbon nanotube

Phospholipidcell membrane

27


Project DescriptionApplication of nanoprobes for detection of cell-substrate interactions

Recent ResultsGold nanopatterns capable of being generatedSAM of biomolecules on gold substrateExperience in confocal microscopy of biological samples

Next Six MonthsObtain functional gold nanopatterneddeviceObserve living cells on device with confocal or TIR microscopyView effect of manipulation on cell response and molecular signalling

Philip J. LeeProf. Luke P. Lee

Nanoprobes for Monitoring Sub-cellular Response to Localized Surface Interactions

LPL29

Fluorescent emission Gold nanopattern

TIR Beam

Schematic diagram of local analysis of a single cell.

Use of total internal reflection (TIR) spectroscopy to analyze a nanopatterned array.

Gold nanopatternGrowing actin or

microtubuleFibroblast

cell

Adhesion site

Intracellular signaling moleculeHeat generation

by laser


Project DescriptionMiniaturized reagentless sample preparation for bio-warfare detection / laboratory automation.

Recent ResultsMeasured greater than 2X increased lysis with nanostructured filters as compared with smooth-walled filters at 300 µL/min flow rate.

Next Six MonthsProject on hold (more funding and another student required for future work).

Dino Di CarloProf. Luke P. Lee

Microfluidic Cellular Manipulation for Sample Preparation Microsystems

LPL5

Flow Rate / µL min-1

Frac

tion

Free

Hem

oglo

bin

-0.01

0

0.01

0.02

0.03

0.04

0.05

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0.07

0.08

0.09

0.1

0 50 100 150 200 250 300 350

lysis with nano-knives

lysis with smooth walls

-0.01

0

0.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0 50 100 150 200 250 300 350

lysis with nano-knives

lysis with smooth walls

Flow Rate / µL min-1

Frac

tion

Free

Pro

tein

(a)

(b)

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Project Description:Understanding Kinematics in Insect FlightSimultaneous Measurement of Multidirectional Forces using Doped Poly Strain Gauges

Recent ResultsFirst Generation Sensor Fabricated and TestedSecond Generation Sensor Fabrication in ProgressSensor Holder / Connector Designed

Next Six MonthsComplete Fabrication of Second Generation SensorInitial Test for Sensor Response and Sensor CharacterizationUse Sensors with Live Flies inside the Fly Arena

Mansoor Nasir, Kenneth Pettigrew, Boris Stoeber Prof. Dorian Liepmann

Multidirectional Force and Torque Sensor for Study of Small Scale Biomechanics

Sensor Design

Device Cross-section DL13


Project DescriptionMicrofluidic device for 2D protein separationSeparate proteins by charge and size

Recent ResultsPDMS 1D separation chip fabricationIsoelectric focusing characterization

Next Six MonthsElectrokinetic focusing proof of conceptProtocol developmentIncorporate polymer monolith

Paul HungLuke P. Lee

Microfluidic-Based Two-Dimensional Protein Chip

LPL28

GND

+10V

Electric Field Lines

IEF Channel

LC Channel

GND

+10V


IEF Channel

LC Channel

+10V


IEF Channel

LC Channel

5mm

Sample inlet (protein standards or cell lysates)

Inert electrodes to control electrokinetic

29


Project DescriptionMicro Air Particulate Sizer and Counter.Uses Corona Charging.For PM2.5 and below

Recent ResultsSuccessfully tested microfabricated corona ionizer.150mW or less and current > 40uA for single cathode .Operate with single or dual cathodes.

Next Six MonthsMore extensive study on the particulate charging and separation mechanisms.

Beelee Chua, Zhihong LiProf Norman Tien

Corona MEMS for Wide Study Area Air Particulate Monitoring

NT21

Figure 1: Top view photoprint of ionizer in operation.

Cathode Anode Grid

Corona Plasma Region

Drift Region

1mm

Figure 2: Measured corona current-voltage (I-V) curves for ionizer devices with different electrode gaps.


Project DescriptionResearch on portable, compact moni-tor for airborne particles employing MEMS sensors and LBNL monitor principles (thermophoretic deposition, acoustic mass measurement)Sponsor: Calif. Air Resources Bd.BSAC (prime), LBNL (subcontractor)

Recent ResultsLBNL has demonstrated concept with deposition means and quartz crystal microbalance. Can quantitate mass and discriminate particles optically.

Next Six MonthsComplete design and fab of thin-film resonators/oscillator

Justin P. BlackProf. Richard White

Portable Monitor for Airborne Particulates

RMW28

piezoelectric film

Substrate

λ/4 reflector

30


We will now recess to begin the


Return at 4:15 P.M.

Afternoon BSAC Research Overview

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