www.ulvac.co.jp/en

TEL: +81-467-89-2033 FAX: +81-467-89-2250

0107E2018021500JBA

2500 Hagisono, Chigasaki, Kanagawa

253-8543, Japan

ULVAC, Inc.

2018

Basic Corporate Philosophy

ince its foundation in 1952, ULVAC has operated under the corporate philosophy of “aiming at contributing to the evolution of industries and

sciences by using vacuum technologies” and has been blessed with wonderful support from customers in electronics and many other industries, particularly the vacuum industry.

ULVAC wishes to continue to be an organization that constantly produces advanced technologies by making the most of its advantages as a comprehensive vacuum manufacturer and that is sought after by customers in all related industries.

We are looking forward to your continued support in the future.

History of the ULVAC Group

oday, vacuum technologies have become an

integral part of virtually all industries. ULVAC

supplies products to industries and academia as we

are the world’s only comprehensive manufacturer of

vacuum-related products.

The DNA of those young researchers who came

together with the aspiration of “contributing to

Japanese industries by using vacuum technologies”

has been passed down to this day. ULVAC has been

providing the latest technologies to the world for over

60 years.

•JAPAN VACUUM ENGINEERING CO.,LTD. was established.

•Received the first order of vacuum evaporation equipment for coating automobile parts form HAKKOSHA.

•Established the Omori Plant and started manufacturing of equipment domestically.

1952

1955

1964

19681972

1975

1986

1988

1990

1992

1995

2001

2004

2005

2006

2007

20 1 1

2 01 2

20152016

19591960

•Established ULVACs first overseas local corporation in Hong Kong.

•The Chigasaki Head Office / Plant was completed.•Established the Institute for Super Materials as

ULVAC’s first full-scale research institute.•Delivered“ SYSTEM 731,” the world’s first computer

controlled, fully automatic vacuum evaporation equipment to IBM.

•The“ MCH Series,”the world’s first multi-chamber sputtering system, has been acclaimed by many semiconductor manufacturers.

•The“ SHD Series,” a sputtering system for manufacturing hard discs, became a hit globally.

•Established the Fuji Susono Plant as a dedicated plant for semiconductor production equipment.

•Launched the dedicated LCD production“ SMD Series” deposition system, which became a cornerstone of the FPD business.

•Established a production basis in China and a sales / service base in South Korea.•Established The Institute for Semiconductor and

Electronics Technologies.•The company name is changed from ULVAC JAPAN, Ltd. to ULVAC, Inc.•New buildings of Chigasaki Head office / Plant were

Completed for development prototype production of large LCD equipment.

•Listed its stock on the First Section of the Tokyo Stock Exchange.

•Established a production base for full-scale vacuum equipment in Suzhou, China.

•Established a large-scale production base for large LCD production equipment in South Korea.

•Established a production subsidiary for large LCD production equipment in Taiwan.

•Established the Chiba Tomisato Plant for the development and manufacturing of materials.

•Received an order for an integrated production line for thin-film solar cells (TFSCs).

•Established the Institute for Super Materials in South Korea.

•The company celebrated the 60th anniversary of its founding.

•Established Future Technology Research Laboratory.•ULVAC (SUZHOU) CO., LTD. began manufacturing

production equipment for large displays.

•Established the Yokohama Plant.•Developed large vacuum equipment for heavy

industries such as vacuum melting furnaces and vacuum distilling equipment.

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ULVAC Group aims to contribute to the development of industries and science by comprehensively utilizing its vacuum and peripheral technologies through the mutual cooperation and collaboration of the Group companies.

Origin of Company Name

‘ULVAC’ is a combination of ‘UL’ from ‘ultimate’ and

‘VAC’ from ‘vacuum,’ signifying that we pursue the

‘Ultimate in Vacuum Technology.’

Seeking to achieve a dramatic advance, we will further

develop the ULVAC brand by pursuing the development of

new technologies that complement vacuum technologies.

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Identity & Top Message

Setsuo IwashitaPresident and CEO

01 02ULVAC, Inc. Corporate Profile 2018

nfinite possibilities were opened up to humans when they gained access to a “microcosm” called “vacuum.”

Since its inception, ULVAC has always been pursuing the infinite possibilities of vacuum, exploring technologies to

manipulate vacuum at will, and rising up to the challenge of creating new value in response to the needs of the times.

The Vacuum Technologies that we have created over the past 60 years have been applied to a wide range of areas, including

semiconductors, electronic devices, flat-screen TVs, solar cells, automobiles, pharmaceuticals, and food products.

And they have become basic technologies essential for the evolution of a significant number of industries and scientific

disciplines.

Recent years have seen rapid technological innovations, resulting in an accelerated expansion of fields to which ULVAC products

and technologies can contribute. We are continuing to create new value in response to the needs of the times and support the

evolution and growth of industries and sciences in the future.

Business Domain

VacuumTechnologies

Continuing to contribute to the evolution of industries and sciences by using Vacuum Technologies

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Research & Development

Global Network

Innovative and advanced vacuum technologies to blaze a trail for the future

LVAC has been providing all kinds of industries with vacuum

technology-based products and materials essential for them under the

basic managerial philosophy of “aiming at contributing to the evolution of

industries and sciences by using vacuum technologies and all peripheral

technologies.” Besides supplying such materials and products, ULVAC has also

been contributing to developing technologies through analysis, evaluation,

basic research & development and other activities, by making the most of all

available resources of the group.

We are continuing to contribute to the further evolution of society by exploring

the development of innovative and advanced technologies that can meet

actual and potential needs by using vacuum technologies, as well as creating

products and technologies with high added value.

U

Solution networks to support the industrial development of the world

e have established region-specific sales and service networks

through our group companies around the world, numbering about

50 not only in Japan but also in many other countries, particularly the United

States, European and Asian countries, to operate in the way that is best suited

to each region. Vacuum technologies, which are regarded as one of today’s key

advanced technologies, are expected to increase in demand in a broad range of

industries and growth areas around the world and into the future.

Being the world’s largest comprehensive vacuum manufacturer that carries out

all processes, from research & development, to manufacturing, to sales and

customer support, and all in an integrated manner, ULVAC is continuing to

support the evolution of the world’s industries by taking advantage of vacuum

technologies.

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Customer Support

ULVAC Customer Support Solutions, bringing together the wisdom of the group

e provide a full spectrum of customer support, ranging from

introduction and operation of equipment, field support, evaluation

and analysis, supply of materials and parts, to maintenance of vacuum pumps

and other products, on a global basis as part of our e�orts to ensure customer

satisfaction after they purchase equipment. In order to make sure that we can

meet increasingly diverse and sophisticated demands in the future, we are

further exploring invaluable services by bringing together the wisdom of our

group companies, including the original technologies and service knowhow

that they have developed through their own e�orts, so as to support

customers to enable them to achieve satisfaction in their production activities.

Another aim is to create even more sophisticated vacuum technologies and

services by taking customer needs into consideration in the development of

new equipment.

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FPD and PV production equipment

Semiconductor and Electric device production equipment

Materials

Industrial equipment

Analyzers,controllers,

mask blanks,etc.

Components

04ULVAC, Inc. Corporate Profile 201803

iquid crystal display TVs, smartphones, PCs, tablet terminals and

other products using displays have become a familiar and

indispensable part of our everyday life. ULVAC is a comprehensive

manufacturer of deposition process equipment that undertakes all

aspects, from manufacture and sales of equipment to provision of

support services, in an integrated manner.

In particular, ULVAC holds the world’s top share in sputtering system

for the manufacture of liquid crystal displays, while boasting the

world’s leading technologies in the development of next-generation

displays, like organic LED production equipment and fulfill requests

of customers.

In addition, ULVAC has also been deeply involved in the development

of solar cells, which have been attracting growing attention as a

clean energy source and have been increasingly introduced across

the world to create a low carbon society, for more than 40 years

now, and has provided equipment compatible with a broad range of

solar cells, including crystalline silicon and compound solar cells.

Vacuum Equipm

ent Business

ULVAC is involved in a wide variety of FPD* 1 and PV * 2 manufacturing technologies, not only developing production equipment, but also providing solutions on a global basis through the development of materials.

FPD and PV production equipment

*1: FPD stands for  at panel display. *2: PV is the acronym of PhotoVoltaic (solar cells).

FPD production equipment# Liquid crystal display production equipment# Organic LED production equipment# Roll coater

PV production equipment# Crystalline silicom solar cell production equipment# Compound solar cell production equipment

L

05 06ULVAC, Inc. Corporate Profile 2018

Vacuum Equipm

ent Business

Even higher integration and functionality and lower cost are required for next-generation semiconductors and high-function devices.ULVAC develops super miniaturization technologies for such semiconductors and electronic devices and releases one new technology or product after another to support the evolution of society.

Semiconductor and Electronic device production equipment

# Semiconductor (memory, logic, power or other devices) production equipment# Electronic device (MEMS, communication devices, etc.) production equipment# Advanced packaging (WL-CSP, FoPLP, etc.) production equipment# High brightness LED production equipment

e are at the entrance of a super smart society. The realization of

social and industrial structure that had been thought impossible is

happening through; the “Internet of Things (IoT)”, big data, and

Artificial Intelligence (AI) made possible by advanced/high-speed

information processing technology, and let’s not forget about

autonomous vehicle and EV, changing the automobile industry.

ULVAC is the global leader supporting such innovative technology

through vacuum application technology and manufacturing

equipments for semiconductors and electronic devices.

We value challenge and our passion toward developing innovative

technology for our customers meeting the global market speed in

application areas such as flash memory, 3D-IC, communication

devices, sensors, and opto-devices.W

07 08ULVAC, Inc. Corporate Profile 2018

Vacuum Equipm

ent Business

Vacuum Equipm

ent Business

One of the key areas of focus of ULVAC as a comprehensive vacuum manufacturer is the development of components. We are working to supply a wide range and variety of components, ranging from vacuum pumps, measurement instruments, and analyzers to components that form various power generators for deposition equipment and vacuum valves, while at the same time pursuing the latest vacuum technologies.

ComponentsULVAC has a long history of providing vacuum equipment for general industries; in fact, this is one of its traditional areas of business which it has been working on since the 1950s when vacuum technologies were still in their infancy. Today, ULVAC is providing a colorful spectrum of solutions to a wide range of industries and �elds, such as automobiles, pharmaceuticals and food products, by taking advantage of the basic technologies it has developed over the years.

Industrial equipment

# Vacuum pumps# Vacuum gauges# Helium leak detectors# Process gas monitor# Spectroscopic ellipsometers# EB, RF and DC power generators# Vacuum valves# Deposition controller# Vacuum transfer robot

# Vacuum heat-treating furnaces / # Vacuum brazing furnaces / # Vacuum melting furnaces / # Rare-earth magnet production equipment# Vacuum freeze-drying equipment / # High-vacuum distillation equipment /# Automatic Leak Tester

ur everyday life is

surrounded by products

using vacuum technologies,

for example, Smartphones,

LED lighting and eco-cars; these products could

not be produced without vacuum technologies.

ULVAC develops and supplies a wide range of

vacuum technology-based components, including

vacuum pumps that create vacuums, vacuum

gauges that measure vacuums (pressure), process

gas monitor that measure the type of gas in a

vacuum and helium leak detectors that detect

leakage and measure the volume of the leak.

e have always been in synchronization with the

times by supplying equipment and technologies in

a timely manner; for example, we proactively

provided the steel and metal industries with the

equipment and technologies that they required during the age of heavy

industry, followed by the automobile industry, home electric appliance

industry and other industries, thereby contributing to the growth of many

di�erent industries. At present, our rare-earth magnet production equipment

for compact ultrahigh-performance motors, vacuum freeze-drying equipment

for pharmaceuticals and health food products and other equipment are

playing important roles in industries. Particularly in the automobile-related

industry, ULVAC brand vacuum melting furnaces, vacuum sintering furnaces

and vacuum heat treatment furnaces are used in the manufacture of rare earth

magnets for drive motors indispensable for EV, and electric and electronic

parts that continue to increase due to the demand for automotive electronics,

especially for manufacturing multilayer ceramic capacitors excellent in

compactness, high temperature and advanced packaging.

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09 10ULVAC, Inc. Corporate Profile 2018

Vacuum Application Business

Vacuum Application Business

ULVAC supplies electronic materials, such as sputtering targets, to a wide variety of industries. It also provides technologies for the integrated manufacturing and precision machining of materials such as tantalum and niobium in the �eld of high-performance materials.

MaterialsULVAC provides technologies to many di�erent industries by taking advantage of related technologies derived from vacuum-based manufacturing equipment.

Analyzers, controllers, mask blanks, etc.

# Sputtering target materials# High-melting-point metal materials and production of components# Nano-metal Inks

# Surface analyzers# Controllers# Mask blanks, etc.

n the field of electronic materials,

ULVAC supplies various types of

high-quality sputtering target

materials for semiconductors, FPDs,

LEDs, and so on, and contributes to thin-film

materials, which are used in the latest devices.

In the field of high-performance materials, the

group develops high-melting-point metal

materials for electronic component, chemical

engineering, healthcare and other industries, as

well as melts, processes and manufactures

high-melting-point metal components, which are

known to be di­cult to handle, according to

customer needs.

aking advantage of its vacuum-based

technologies, ULVAC provides surface

analyzers, physical property

measurement equipment and other

analyzers to research institutes. ULVAC control systems are

employed mainly by the automobile industry in industrial

mechanical drive equipment. Its technologies also play

important roles in the manufacture of mask blanks*, which are

indispensable in the production of semiconductor integrated

circuits which make up the heart of computers and electronic

products.

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* Mask blanks are the substrates that hold the master patterns in the manufacture of semiconductor integrated circuits.

11 12ULVAC, Inc. Corporate Profile 2018

ULVAC group companies

Corporate Data

Corporate Data

• ULVAC TECHNO, Ltd.

• ULVAC KYUSHU CORPORATION

• ULVAC TOHOKU, Inc.

• ULVAC KIKO, Inc.

• ULVAC EQUIPMENT SALES, Inc.

• ULVAC CRYOGENICS INCORPORATED

• ULVAC-PHI, Inc.

• TIGOLD CORPORATION

• ULVAC COATING CORPORATION

• NISSIN SEIGYO Co., LTD.

• ULVAC Human Relations, Ltd.

• SHINKU CERAMICS CO., LTD.

• FINE SURFACE TECHNOLOGY CO., LTD.

• Reliance Electric Limited

• SHOWA SHINKU CO., LTD.

As of June 30th, 2017

• ULVAC Technologies, Inc.

• Physical Electronics USA, Inc.

Taiwan

China

Japan

Korea

North America

North America

EuropeJapan

Asia

Southeast Asia

• ULVAC GmbH

•Name: ULVAC,Inc. •Head O�ce: 2500 Hagisono, Chigasaki, Kanagawa, Japan•Established: August 23, 1952 •Capital: 20,873,042,500 yen •Net sales: Non-consolidated 137.889 Billion yen Consolidated 231.831 Billion yen•Number of Employees: Non-consolidated 1,225 Consolidated 6,072•Business Areas:

Domestic group companies

Worldwide group companies

Europe

Development, manufacturing, sale, and customer support for vacuum equipment, peripheral devices, vacuum components, and materials for the display, solar cell, semiconductor, electronic, electric, metal, machinery, automobile, chemical, food product, and medical product industries, as well as universities and research labs, and import and export of various equipment. Additionally, research guidance and technical advising on vacuum technologies in general.

ULVAC, Inc. SiteDomestic group companies

Worldwide group companiesSales site and CS Center

CS Center (ULVAC TECHNO)

• ULVAC TAIWAN INC.

• ULTRA CLEAN PRECISION TECHNOLOGIES CORP.

• ULCOAT TAIWAN, Inc.

• ULVAC AUTOMATION TAIWAN Inc.

• ULVAC SOFTWARE CREATIVE TECHNOLOGY, CO., LTD.

• ULVAC Materials Taiwan, Inc.

• ULVAC (China) Holding CO., LTD.

• ULVAC NINGBO CO., LTD.

• ULVAC（SUZHOU) CO., LTD.

• ULVAC Orient (Chengdu) Co., Ltd.

• ULVAC Automation Technology (Shanghai) Corporation

• ULVAC Tianma Electric (Jingjiang) Co., Ltd.

• ULVAC (Shenyang) Co., Ltd

• ULVAC（Shanghai）Trading Co., Ltd.

• ULVAC Materials (Suzhou) Co., Ltd

• ULVAC Opto-electronics Thin Film Technology （Shenzhen） Co., Ltd.

• ULVAC CRYOGENICS (NINGBO) INCORPORATED

• ULVAC NONFERROUS METALS (NINGBO) CO., LTD.

• ULVAC Research Center SUZHOU Co., Ltd.

• Hong Kong ULVAC Co., Ltd.

• ULVAC VACUUM EQUIPMENT(SHANGHAI)CO., LTD.

• ULVAC KOREA, Ltd.

• Ulvac Korea Precision, Ltd.　

• Pure Surface Technology, Ltd.　

• ULVAC CRYOGENICS KOREA INCORPORATED

• ULVAC Materials Korea, Ltd.

• UF TECH, Ltd.

• ULVAC SINGAPORE PTE LTD

• ULVAC MALAYSIA SDN. BHD.

• ULVAC （THAILAND） LTD.

India

• ULVAC, Inc. India Branch

Net sales by region(Millions of yen)

Net sales by business segment(Millions of yen)

13 14ULVAC, Inc. Corporate Profile 2018

151,400 (65%)

Total

231,800

Overseas80,400 (35%)

Japan

South Korea37,800 (16%)

Taiwan21,100 (9%)

Other Asia4,800 (2%)

Europe, others12,100 (5%)

China75,700 (33%)

Vacuum Equipment Business

200,600 (87%)

Components31,800 (14%)

FPD•PV production equipment

110,900 (48%)

Industrial equipment21,500 (9%)

Material14,600 (6%)

31,200 (13%)Vacuum Application Business

Others16,700 (7%)

Semiconductor and Electronic device

production equipment36,400(16%)

Total

231,800