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Handbook

Oxford Instruments NanoScienceMercury iTC cryogenic environment controllerIssue 01 / November 2011 / Original Instructions

www.oxford-instruments.com

2011. Oxford Instruments Nanotechnology Tools Limited. All rights reserved.

Handbook Mercury iTC

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November 2011 / 59-UMC0071 / Issue 01

Page 2

Original Instructions

Handbook Mercury iTCPREFACE.............................................................................................................................................. 9 Use of this manual ............................................................................................................................... 9 Customer support................................................................................................................................ 9 Health and safety information .......................................................................................................... 10 Intended users ................................................................................................................................... 10 Statement of intended use of the Mercury iTC ............................................................................... 10 Typographical conventions .............................................................................................................. 11 Disclaimers......................................................................................................................................... 11 Copyright notice ................................................................................................................................ 11 Acknowledgements ........................................................................................................................... 12 Acronyms, abbreviations and special terms................................................................................... 12 Revision history ................................................................................................................................. 12 Certification compliance statements ............................................................................................... 13 1 1.1 1.1.1 1.1.2 1.1.3 1.1.4 1.2 1.2.1 1.2.2 1.3 2 2.1 2.1.1 2.1.2 2.1.3 2.1.4 2.1.5 2.1.6 3 3.1 3.2 3.2.1 3.2.1.1 3.2.1.2 3.2.1.3 3.2.1.4 3.2.1.5 3.2.1.6 3.2.2 3.2.2.1 3.2.3 3.2.3.1 3.2.4 3.2.5 3.2.6 3.2.6.1 HEALTH AND SAFETY ..................................................................................................... 15 Warnings ........................................................................................................................... 15 Protective ground ........................................................................................................... 15 High voltage hazard ....................................................................................................... 15 Maintenance and adjustment ......................................................................................... 16 Restrictions on use ........................................................................................................ 16 Cautions ............................................................................................................................ 16 Electrostatic caution ....................................................................................................... 16 Cooling caution .............................................................................................................. 17 Solid waste ........................................................................................................................ 17 OVERVIEW OF THE ITC ................................................................................................... 19 System description ........................................................................................................... 20 Temperature sensor circuits .......................................................................................... 21 Heater circuits ................................................................................................................ 21 Optional cooling circuit ................................................................................................... 21 Remote interfaces .......................................................................................................... 21 Display and touch-screen .............................................................................................. 21 Electrical power supply .................................................................................................. 22 USER INTERFACE ............................................................................................................ 23 Front and rear panel controls .......................................................................................... 23 LCD display and GUI ........................................................................................................ 23 Using the touch screen .................................................................................................. 23 Initiating actions.......................................................................................................... 23 Drop-down menus ...................................................................................................... 23 Scrolling...................................................................................................................... 24 Soft keypads .............................................................................................................. 25 Using arrows to adjust integer values ....................................................................... 27 Button labels............................................................................................................... 27 Common screen features ............................................................................................... 28 Home and Apply buttons ............................................................................................ 28 Home page .................................................................................................................... 28 Channel summary panel ........................................................................................... 29 Channel display configuration page ............................................................................... 30 Device pair configuration page ...................................................................................... 31 Sensor details pages ..................................................................................................... 32 Temperature Sensor Details page ............................................................................. 32

Original Instructions

Page 3

November 2011 / 59-UMC0071 / Issue 01

Handbook Mercury iTC3.2.6.2 3.2.6.3 3.2.7 3.2.8 3.2.8.1 3.2.9 3.2.10 3.2.11 3.2.12 3.2.12.1 3.2.12.2 3.2.12.3 3.2.12.4 3.2.12.5 3.2.12.6 3.2.12.7 3.2.12.8 3.2.12.9 3.2.12.10 3.2.12.11 3.2.13 3.2.14 3.2.15 3.2.16 3.2.17 4 4.1 4.1.1 4.1.2 4.2 4.2.1 4.2.2 4.2.3 4.2.4 4.2.4.1 4.2.5 4.2.5.1 4.2.5.2 4.2.5.3 4.2.5.4 4.3 4.3.1 4.3.2 4.3.2.1 4.4 4.4.1 4.5 4.5.1 4.5.2 4.5.3 4.6 Generic Sensor Adjustment page............................................................................... 33 Level Meter Sensor Details page................................................................................ 34 Plot Configuration page .................................................................................................. 36 Plot page ........................................................................................................................ 37 Adjusting the plot scaling ............................................................................................ 37 Control Loop Configuration page ................................................................................... 38 Gas Flow Configuration page ......................................................................................... 40 PID Table Editor page .................................................................................................... 41 General Settings tab ....................................................................................................... 43 Display Settings tab .................................................................................................... 44 Card settings tab ........................................................................................................ 45 RS232 Settings tab .................................................................................................... 46 Ethernet Settings tab ................................................................................................. 47 ISOBus Settings tab ................................................................................................... 48 GPIB Settings tab ....................................................................................................... 48 Clock Settings tab....................................................................................................... 49 Cal Update settings tab ............................................................................................. 50 F/W Update settings tab ............................................................................................ 51 EngMode tab ............................................................................................................. 52 Factory Settings tab ................................................................................................... 53 Alarm Logs pa